CN111175956A - Wide-spectrum and large-numerical-aperture microscope objective - Google Patents
Wide-spectrum and large-numerical-aperture microscope objective Download PDFInfo
- Publication number
- CN111175956A CN111175956A CN201911335716.6A CN201911335716A CN111175956A CN 111175956 A CN111175956 A CN 111175956A CN 201911335716 A CN201911335716 A CN 201911335716A CN 111175956 A CN111175956 A CN 111175956A
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- lens group
- lens
- convex
- microscope objective
- object plane
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/04—Objectives involving mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
- G02B13/0045—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having five or more lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/0065—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element having a beam-folding prism or mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/06—Panoramic objectives; So-called "sky lenses" including panoramic objectives having reflecting surfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
Abstract
The invention is suitable for the technical field of high-precision optical imaging of a microobjective and provides a microobjective with wide spectral band and large numerical aperture, which is characterized in that the microobjective sequentially comprises a first lens group, a second lens group and a third lens group along the direction of a light path from an object plane to an image plane; the first lens group is a catadioptric lens group, images light rays emitted by the object plane to a primary image surface, is used for increasing numerical aperture and correcting chromatic aberration, and has a positive angle; the second lens group and the third lens group emit light of the primary image surface in parallel, and both the second lens group and the third lens group have negative light angles. The microscope objective utilizes 2-time folded light paths, reasonably utilizes aspheric surfaces to effectively correct the advanced spherical aberration of the system, the whole optical system adopts the same optical material, the imaging spectrum can reach 300-800 nm, the numerical aperture of the system can reach 1.0 by combining rear-end immersion liquid, the field of view of an imaging line can reach 4.0mm, and the microscope objective effectively realizes large field of view and high resolution.
Description
Technical Field
The invention belongs to the technical field of high-precision optical imaging of a microscope objective, and particularly relates to a microscope objective with a wide spectrum band and a large numerical aperture.
Background
The gene sequencing equipment is used as an intersection of three technologies of nano technology, biology technology and information technology, intensively embodies that people adopt the most advanced scientific technology to explore life information, and becomes an important guarantee for the continuous development of economy and national safety and stability at present. Gene sequencing is a new industry and is in a rapid development stage, wherein a key technology ultra-high-flux microscope objective becomes a bottleneck technology for limiting localization of a gene sequencer (sequencing flux refers to data output quantity obtained by gene sequencing equipment within a certain time and is one of important indexes for evaluating the advancement of the sequencing technology, and higher sequencing flux also means reduction of sequencing cost). In the design of an optical system, the length of a wide field and high resolution are reduced, the width is not precise, and the precision is not wide, which is the biggest difficulty encountered by the current ultrahigh-flux microscope objective.
The objective lens is used as a core optical element of the high-throughput gene sequencer, is a key for realizing high-throughput and even ultrahigh-throughput gene sequencing, and meanwhile, the current popular research directions of high-throughput gene sequencing, cerebral neuron detection, cancer cell development monitoring and the like in the biomedical field all have urgent needs for wide-field-of-view and high-resolution optical systems.
At present, a plurality of immersion type large numerical aperture gene sequencing lenses similar to the structure form of the patent can be inquired internationally:
patent US9304407B2, see in particular fig. 1, is an optical lens in the form of a total reflection optical system that can image a spectral band in the full spectral band and the field of view can be made 1mm, but the system numerical aperture is generally less than 0.9 due to the inability to be limited by immersion liquid.
Disclosure of Invention
The invention aims to provide a wide-spectrum and large-numerical-aperture microscope objective, and aims to solve the technical problem that the prior art cannot simultaneously give consideration to both large field of view and high resolution.
The invention provides a wide-spectrum and large-numerical-aperture microobjective, which sequentially comprises a first lens group, a second lens group and a third lens group from an object plane to an image plane along a light path direction;
the first lens group is a catadioptric lens group, images light rays emitted by an object plane to a primary image surface, is used for increasing numerical aperture and correcting chromatic aberration, and has a positive angle;
the second lens group and the third lens group emit light of the primary image surface in a parallel manner, and both the second lens group and the third lens group have negative light angles.
Preferably, the first lens group comprises 3 lenses, namely a plano-convex positive lens (1), a meniscus negative lens (2) and a flat lens (3) which are convex to the image plane in sequence from the object plane to the image plane along the optical path direction.
Preferably, the second lens group comprises 4 lenses, and the convex lens (4), the plano-convex positive lens (5) convex to the image plane, the plano-convex positive lens (6) convex to the object plane and the meniscus negative lens (7) are arranged in sequence from the object plane to the image plane along the optical path direction.
Preferably, the third lens group comprises 4 lenses, and the convex lens (8), the biconcave negative lens (9), the plano-convex positive lens (10) convex to the image plane, the meniscus negative lens (11), the meniscus negative lens (12) and the plano-convex positive lens (13) convex to the object plane are arranged in sequence from the object plane to the image plane along the optical path direction.
Preferably, the object plane position of the microscope objective is in an immersion manner.
Preferably, an aperture stop (15) is disposed between the second lens group and the third lens group.
Preferably, the numerical aperture of the microscope objective is greater than or equal to 1.0.
Preferably, the length of the microscope objective is less than 173 mm.
Preferably, the microscope objective adopts a non-fluorescent optical material.
The microscope objective provided by the invention adopts a catadioptric optical system form, utilizes 2-time folded light paths to embed a system diaphragm, effectively reduces the whole optical size of the objective, has the total length of less than 173mm, reasonably utilizes an aspheric surface to effectively correct the high-level spherical aberration of the system, controls the astigmatism, the field curvature and the initial high-level coma aberration related to a view field, ensures that the total length of the optical system is less than 173mm, adopts the same optical material for the whole optical system, has an imaging spectrum section of 300nm-800nm, is combined with rear-end immersion liquid, has the numerical aperture of 1.0, has the imaging line view field of 4.0mm, and effectively realizes large view field and high resolution.
Drawings
Fig. 1 is a schematic structural diagram of an optical lens shown in patent US9304407B 2;
fig. 2 is a schematic structural diagram of a wide-band and large-numerical-aperture microscope objective lens according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The following detailed description of specific implementations of the present invention is provided in conjunction with specific embodiments:
the first embodiment is as follows:
fig. 2 shows a wide-band and large-numerical-aperture microscope objective provided by the present embodiment. As shown in fig. 2, the wide-band and large-numerical-aperture microscope objective lens provided in this embodiment sequentially includes a first lens group, a second lens group, and a third lens group along the optical path direction from the object plane to the image plane.
The first lens group is a catadioptric lens group, images light rays emitted by an object plane to a primary image surface, is used for increasing numerical aperture and correcting chromatic aberration, and has a positive angle;
the second lens group and the third lens group emit light of the primary image surface in a parallel manner, and both the second lens group and the third lens group have negative light angles.
Specifically, the first lens group comprises 3 lenses, namely a plano-convex positive lens (1), a meniscus negative lens (2) and a flat lens (3) which are convex to an image plane in sequence from an object plane to the image plane along the direction of an optical path.
The second lens group comprises 4 lenses, and a convex lens (4), a plano-convex positive lens (5) convex to the image plane, a plano-convex positive lens (6) convex to the object plane and a meniscus negative lens (7) are sequentially arranged along the light path direction from the object plane to the image plane.
The third lens group comprises 4 lenses, and a convex lens (8), a double concave negative lens (9), a plano-convex positive lens (10) convex to the image plane, a meniscus negative lens (11), a meniscus negative lens (12) and a plano-convex positive lens (13) convex to the object plane are sequentially arranged along the light path direction from the object plane to the image plane.
The position of the object plane of the micro-objective is in the manner of an immersion liquid, for example, a liquid with a refractive index of 1.3652 is filled between the lens (1) and the object plane.
An aperture diaphragm (15) is arranged between the second lens group and the third lens group.
The numerical aperture of the micro objective is more than or equal to 1.0.
The length of the microscope objective is less than 173 mm.
The microscope objective adopts a non-fluorescent optical material.
The micro objective provided by the embodiment adopts a catadioptric optical system form, utilizes 2-time folded light paths, embeds a system diaphragm, effectively reduces the whole optical size of the objective, and has a total length smaller than 173mm, reasonably utilizes an aspheric surface to effectively correct the high-level spherical aberration of the system, controls astigmatism, field curvature and initial high-level coma aberration related to a view field, ensures that the total length of the optical system is smaller than 173mm, adopts the same optical material for the whole optical system, has an imaging spectrum section reaching 300nm-800nm, combines with rear-end immersion liquid, has a system numerical aperture reaching 1.0, has a system imaging line view field reaching 4.0mm, and effectively realizes high resolution while having a large view field.
In a specific exemplary embodiment, the microscope objective adopts a catadioptric optical scheme, the total length of the system is 172.826mm, and the system integrates the functions of increasing the numerical aperture and correcting the chromatic aberration of the system into the first lens group (consisting of the lens group 1, the lens 2 and the lens 3); the second lens group (consisting of lens group 4, lens 5, lens 6 and lens 7) and the third lens group (consisting of lens group 8, lens 9, lens 10, lens 11, lens 12 and lens 13) mainly correct the first lens group for the residual off-axis monochromatic aberration; the system diaphragm is arranged in the device, so that the size of an objective lens system is effectively reduced; and the invention uses a non-fluorescent optical material.
According to the design of a forward optical path, an object plane can adopt an immersion method (for example, liquid with the refractive index of 1.3652 is filled between the lens 1 and the object plane), the numerical aperture of the system is increased, the numerical aperture of the system can reach more than 1.0, and the chromatic aberration of the system can be completely corrected by the first lens group after the field of view of an imaging line is increased to 4 mm; the image is formed on a primary image surface position through a first lens group (composed of a lens group 1, a lens 2 and a lens 3), the first lens group is a 2-time magnification system, the adoption of an aspheric surface can effectively correct the equiaxial aberration such as coma and astigmatism, the relative aperture of a subsequent system can be effectively reduced, and the central blocking of the lens 2 is effectively reduced; the first lens group adopts a catadioptric optical form and has positive focal power, and the chromatic aberration of the system is effectively corrected.
The external monochromatic aberration (coma, astigmatism, field curvature and the like) passing through the first axis lens group is increased along with the increase of the field of view, the geometric multiple is increased, after the aspheric surface is adopted, the residual aberration of the first lens group (consisting of the lens group 1, the lens 2 and the lens 3) is obviously reduced, so that the relative aperture of the second lens group (consisting of the lens group 4, the lens 5, the lens 6 and the lens 7) and the third lens group (consisting of the lens group 8, the lens 9, the lens 10, the lens 11, the lens 12 and the lens 13) is reduced, the external monochromatic aberration reaches an aperture stop through the second lens group (consisting of the lens group 4, the lens 5, the lens 6 and the lens 7), and the like can be effectively corrected through the field lens (the lens 4) and the lenses 5 to 7; the system aperture diaphragm is arranged between the second lens group and the third lens group, so that the size of the objective optical system is effectively reduced.
The relative aperture of the system is increased after the primary image surface is enlarged through the third lens group (consisting of the lens group 8, the lens 9, the lens 10, the lens 11, the lens 12 and the lens 13), the emergent angle of the system light is reduced, the coma aberration of the system is effectively shown, and the parallel light is emitted out of the system.
The first lens group is positive focal power, the second lens group and the third lens group have negative focal power, the spherical aberration of the system can be effectively corrected, and the specific optical lens basic parameters are shown in table 1.
TABLE 1 basic parameters of optical lenses
Coefficient of aspheric surface
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. A wide-spectrum and large-numerical-aperture microobjective is characterized by comprising a first lens group, a second lens group and a third lens group in sequence from an object plane to an image plane along a light path direction;
the first lens group is a catadioptric lens group, images light rays emitted by an object plane to a primary image surface, is used for increasing numerical aperture and correcting chromatic aberration, and has a positive angle;
the second lens group and the third lens group emit light of the primary image surface in a parallel manner, and both the second lens group and the third lens group have negative light angles.
2. The micro-objective according to claim 1, characterized in that the first lens group comprises 3 lenses, a plano-convex positive lens (1), a meniscus negative lens (2), a flat lens (3) being convex to the image plane in the optical path direction from the object plane to the image plane.
3. The micro-objective according to claim 1, characterized in that the second lens group comprises 4 lenses, in the light path direction from the object plane to the image plane, a convex lens (4), a plano-convex positive lens (5) convex to the image plane, a plano-convex positive lens (6) convex to the object plane, a negative meniscus lens (7) in that order.
4. The micro-objective according to claim 1, characterized in that the third lens group comprises 4 lenses, in order along the optical path direction from the object plane to the image plane, a convex lens (8), a biconcave negative lens (9), a plano-convex positive lens (10) convex to the image plane, a negative meniscus lens (11), a negative meniscus lens (12), and a plano-convex positive lens (13) convex to the object plane.
5. The microscope objective as claimed in claim 1, characterized in that the object plane position of the microscope objective is in immersion mode.
6. The microscope objective according to claim 1, characterized in that an aperture stop (15) is arranged between the second lens group and the third lens group.
7. The microscope objective according to claim 1, characterized in that the numerical aperture of the microscope objective is 1.0 or more.
8. The microscope objective of claim 1, wherein the microscope objective has a length of less than 173 mm.
9. The microscope objective of claim 1, wherein the microscope objective is made of a non-fluorescent optical material.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911335716.6A CN111175956A (en) | 2019-12-23 | 2019-12-23 | Wide-spectrum and large-numerical-aperture microscope objective |
| PCT/CN2020/118925 WO2021129026A1 (en) | 2019-12-23 | 2020-09-29 | Wide-spectral-segment and large-numerical-aperture microscopic objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911335716.6A CN111175956A (en) | 2019-12-23 | 2019-12-23 | Wide-spectrum and large-numerical-aperture microscope objective |
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| Publication Number | Publication Date |
|---|---|
| CN111175956A true CN111175956A (en) | 2020-05-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911335716.6A Pending CN111175956A (en) | 2019-12-23 | 2019-12-23 | Wide-spectrum and large-numerical-aperture microscope objective |
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| Country | Link |
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| CN (1) | CN111175956A (en) |
| WO (1) | WO2021129026A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021129026A1 (en) * | 2019-12-23 | 2021-07-01 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectral-segment and large-numerical-aperture microscopic objective lens |
| CN115598819A (en) * | 2022-10-17 | 2023-01-13 | 佛山迈奥光学科技有限公司（Cn） | High-resolution large-view-field immersion liquid microobjective |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200624B (en) * | 2010-03-23 | 2013-05-22 | 上海微电子装备有限公司 | Photo-etching projection lens |
| CN102707414B (en) * | 2010-03-23 | 2014-07-16 | 上海微电子装备有限公司 | Photoetching projection objective |
| CN105807410B (en) * | 2014-12-31 | 2018-11-09 | 上海微电子装备（集团）股份有限公司 | A kind of refraction-reflection projection objective based on high-NA |
| JP7134686B2 (en) * | 2018-04-19 | 2022-09-12 | 株式会社エビデント | microscope objective lens |
| CN110045492B (en) * | 2019-04-26 | 2024-03-15 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectrum large-numerical aperture ultrahigh-flux micro-objective optical system |
| CN211669436U (en) * | 2019-12-23 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectrum and large-numerical-aperture microscope objective |
| CN111175956A (en) * | 2019-12-23 | 2020-05-19 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectrum and large-numerical-aperture microscope objective |
-
2019
- 2019-12-23 CN CN201911335716.6A patent/CN111175956A/en active Pending
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2020
- 2020-09-29 WO PCT/CN2020/118925 patent/WO2021129026A1/en active Application Filing
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021129026A1 (en) * | 2019-12-23 | 2021-07-01 | 中国科学院长春光学精密机械与物理研究所 | Wide-spectral-segment and large-numerical-aperture microscopic objective lens |
| CN115598819A (en) * | 2022-10-17 | 2023-01-13 | 佛山迈奥光学科技有限公司（Cn） | High-resolution large-view-field immersion liquid microobjective |
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| Publication number | Publication date |
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| WO2021129026A1 (en) | 2021-07-01 |
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