CN111167283A - Washing formula exhaust-gas treatment equipment - Google Patents
Washing formula exhaust-gas treatment equipment Download PDFInfo
- Publication number
- CN111167283A CN111167283A CN201811345238.2A CN201811345238A CN111167283A CN 111167283 A CN111167283 A CN 111167283A CN 201811345238 A CN201811345238 A CN 201811345238A CN 111167283 A CN111167283 A CN 111167283A
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- Prior art keywords
- waste gas
- thermal
- gas
- enters
- water washing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005406 washing Methods 0.000 title claims abstract description 52
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 99
- 239000007789 gas Substances 0.000 claims abstract description 78
- 239000002912 waste gas Substances 0.000 claims abstract description 67
- 238000006555 catalytic reaction Methods 0.000 claims abstract description 43
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 35
- 230000003647 oxidation Effects 0.000 claims abstract description 24
- 239000007800 oxidant agent Substances 0.000 claims abstract description 11
- 238000006243 chemical reaction Methods 0.000 claims description 28
- 239000002245 particle Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 9
- 238000005070 sampling Methods 0.000 claims description 6
- 238000005201 scrubbing Methods 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- 239000008236 heating water Substances 0.000 description 4
- 239000000779 smoke Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000003197 gene knockdown Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/12—Washers with plural different washing sections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention relates to a water washing type waste gas treatment device, which comprises a thermal oxidation treatment unit and a thermal catalytic reaction unit, wherein waste gas is discharged after being treated by the thermal oxidation treatment unit and the thermal catalytic reaction unit in sequence, the thermal oxidation treatment unit comprises an air inlet pipeline, a thermal oxidizer, a water storage tank A and a counter-flow water washing tower, the thermal catalytic reaction unit comprises a thermal catalytic reaction chamber, a water storage tank B and an exhaust pipeline, the waste gas enters the thermal oxidizer through the air inlet pipeline to carry out thermal oxidation reaction, the waste gas after the thermal oxidation reaction enters the counter-flow water washing tower through the water storage tank A at the lower part to carry out water washing to remove water-soluble gas, the waste gas after the water washing enters the thermal catalytic reaction chamber to carry out the thermal catalytic reaction, and the waste gas after the thermal catalytic reaction enters the exhaust pipeline through the water storage. The invention adopts a waste gas treatment scheme combining thermal oxidation and thermal catalysis to improve the waste gas treatment effect and has the characteristics of multiple types of treated gas and good treatment effect.
Description
Technical Field
The invention relates to water washing type waste gas treatment equipment, in particular to water washing type waste gas treatment equipment with an improved treatment effect, and belongs to the field of water washing type waste gas treatment.
Background
The heating water washing type waste gas treatment equipment is mainly applied to industries such as semiconductors, solar photovoltaics and the like, and is used for treating incompletely consumed special gases discharged from various process main equipment in the industries, the gases are usually stable in chemical properties at normal temperature and normal pressure and can be effectively decomposed only by heating, and the heater is a key part in the heating water washing type waste gas treatment equipment and is also a main part in the equipment which needs frequent maintenance. Most of the existing heating water washing type waste gas treatment equipment only has one heater for working reaction and does not have catalytic combustion reaction, so that the function of oxidizing inflammable gas can be achieved, the types of the treated gas are few, and the treatment effect cannot meet the requirement of continuous improvement.
Disclosure of Invention
The invention discloses a novel scheme for water washing type waste gas treatment equipment, which adopts a waste gas treatment scheme combining thermal oxidation and thermal catalysis to improve the treatment effect and solves the problems that the treatment gas types are less and the treatment effect cannot meet the requirement due to the adoption of single thermal oxidation treatment in the conventional scheme.
The water washing type waste gas treatment equipment comprises a thermal oxidation treatment unit and a thermal catalysis reaction unit, waste gas is treated by the thermal oxidation treatment unit and the thermal catalysis reaction unit in sequence and then discharged, the thermal oxidation treatment unit comprises an air inlet pipeline, a thermal oxidizer, a water storage tank A and a counter-flow type water washing tower, the thermal catalysis reaction unit comprises a thermal catalysis reaction chamber, a water storage tank B and an exhaust pipeline, the waste gas enters the thermal oxidizer through the air inlet pipeline to carry out thermal oxidation reaction, the waste gas after the thermal oxidation reaction enters the counter-flow type water washing tower through the water storage tank A at the lower part to carry out water washing to remove water-soluble gas, the waste gas after the water washing enters the thermal catalysis reaction chamber to carry out the thermal catalysis reaction, and the waste gas after the thermal catalysis reaction enters the exhaust pipeline through the water storage tank.
Furthermore, the thermal oxidation processing unit of this scheme still includes vortex gas washer A, is equipped with the water smoke shower nozzle in the vortex gas washer A, and the waste gas through the thermal oxidation reaction gets into vortex gas washer A and gets into the catch basin A of below after getting rid of particle impurity, and the thermocatalytic reaction unit still includes vortex gas washer B, is equipped with the water smoke shower nozzle in the vortex gas washer B, and the waste gas through the thermocatalytic reaction gets into vortex gas washer B and gets into the catch basin B of below after getting rid of particle impurity.
Furthermore, the thermal catalytic reaction unit of the scheme also comprises a counter-flow filling water washing tower, wherein the counter-flow filling water washing tower is filled with gas filtering substances, and the waste gas with the particle impurities removed by the vortex gas washer B enters the counter-flow filling water washing tower through the water storage tank B below to further remove the water-soluble acidic gas and then enters the exhaust pipeline to be discharged out of the water washing type waste gas treatment equipment.
Furthermore, the air inlet pipeline of the thermal oxidation treatment unit is provided with a bypass valve, and the bypass valve is used for adjusting air inlet pressure in the air inlet pipeline.
Furthermore, the exhaust pipeline of the thermal catalytic reaction unit is provided with a butterfly valve and a vacuum booster pump, and the vacuum booster pump is used for pumping and discharging gas in the exhaust pipeline.
Further, be equipped with exhaust sample test pipeline on the exhaust duct of the thermal catalytic reaction unit of this scheme, be equipped with the solenoid valve on the exhaust sample test pipeline, the sample is discharged and is got into outside sample test equipment through exhaust sample test pipeline.
The water washing type waste gas treatment equipment adopts a waste gas treatment scheme combining thermal oxidation and thermal catalysis to improve the waste gas treatment effect, and has the characteristics of multiple types of treated gas and good treatment effect.
Drawings
Fig. 1 is a schematic view of a water scrubbing exhaust gas treatment apparatus.
Wherein, 110 is an air inlet pipeline, 111 is a bypass valve, 120 is a thermal oxidizer, 130 is a vortex gas scrubber A, 140 is a water storage tank A, 150 is a counter-flow water scrubber, 210 is a thermal catalytic reaction chamber, 220 is a vortex gas scrubber B, 230 is a water storage tank B, 240 is a counter-flow filling water scrubber, 250 is an exhaust pipeline, 251 is an exhaust sampling detection pipeline.
Detailed Description
As shown in figure 1, the water washing type waste gas treatment equipment comprises a thermal oxidation treatment unit and a thermal catalysis reaction unit, waste gas is treated by the thermal oxidation treatment unit and the thermal catalysis reaction unit in sequence and then discharged, the thermal oxidation treatment unit comprises an air inlet pipeline, a thermal oxidizer, a water storage tank A and a counter-flow water washing tower, the thermal catalysis reaction unit comprises a thermal catalysis reaction chamber, a water storage tank B and an exhaust pipeline, the waste gas enters the thermal oxidizer through the air inlet pipeline to carry out thermal oxidation reaction, the waste gas after the thermal oxidation reaction enters the counter-flow water washing tower through the water storage tank A at the lower part to carry out water washing to remove water-soluble gas, the waste gas after the water washing enters the thermal catalysis reaction chamber to carry out the thermal catalysis reaction, and the waste gas after the thermal catalysis reaction enters the exhaust pipeline through the water storage tank B. Based on the above scheme, in order to adjust inlet pressure, be equipped with the bypass valve on the inlet line of the thermal oxidation processing unit of this scheme, the bypass valve is used for adjusting the inlet pressure in the inlet line, in order to control, promote the gaseous emission after handling, be equipped with the butterfly valve on the exhaust duct of the thermal catalytic reaction unit of this scheme, the vacuum booster pump is used for the gas in the suction emission exhaust duct, in order to satisfy the detection requirement of exhaust quality, be equipped with exhaust sample detection pipeline on the exhaust duct of the thermal catalytic reaction unit of this scheme, be equipped with the solenoid valve on the exhaust sample detection pipeline, sample exhaust gets into outside sample check out test set through exhaust sample detection. As shown in figure 1, the water storage tank A and the water storage tank B are of an integral structure, the upper part between the water storage tank A and the water storage tank B is separated by a partition plate, the lower part is communicated, water storage is balanced, and waste gas treated by a previous process flows into the ascending channel from bottom to top through the water storage tank. The scheme adopts the waste gas treatment scheme combining thermal oxidation and thermal catalysis to improve the waste gas treatment effect, can treat more harmful waste gases, and greatly improves the waste gas treatment efficiency.
Based on above scheme, in order to further improve exhaust-gas treatment's effect, get rid of the harmful granule that produces because of the reaction in the waste gas, the thermal oxidation processing unit of this scheme still includes vortex gas washer A, be equipped with the water smoke shower nozzle in the vortex gas washer A, the waste gas through thermal oxidation reaction gets into vortex gas washer A and gets into the catch basin A of below after getting rid of particle impurity, the thermocatalytic reaction unit still includes vortex gas washer B, be equipped with the water smoke shower nozzle in the vortex gas washer B, get into the catch basin B of below after the waste gas through thermocatalytic reaction gets into vortex gas washer B and gets rid of particle impurity. Furthermore, in order to further remove the water-soluble acid gas in the waste gas, the thermocatalytic reaction unit further comprises a counter-flow type filling water washing tower, wherein a gas filtering substance is filled in the counter-flow type filling water washing tower, and the waste gas from which the particle impurities are removed by the vortex gas washer B enters the counter-flow type filling water washing tower through the water storage tank B at the lower part to further remove the water-soluble acid gas and then enters the exhaust pipeline to be discharged out of the water washing type waste gas treatment equipment. The scheme further effectively improves the overall waste gas treatment effect of the equipment as a whole.
In addition to the above descriptions, the various devices disclosed above may be any devices or known schemes that are commonly used in the art, or may be specially designed according to actual needs.
The scheme discloses a device for heating water washing type waste gas treatment equipment, which converts toxic and harmful waste gas heating and catalytic treatment into nontoxic and harmless gas, and collects water washing, heating and catalytic reaction in the integrated treatment equipment, so that the treatment gas is more in variety and the treatment effect is stronger. The scheme mainly comprises a primary heater (a thermal oxidation treatment unit) and a secondary heater (a thermal catalytic reaction unit). The gas to be treated enters a first-stage heater (a thermal oxidizer) through a gas inlet to perform a first-step reaction of oxidizing the inflammable gas, the treated gas enters a first-stage vortex generator (a vortex scrubber A), and four nozzles in the vortex generator generate water flow spray to knock down particles in the oxidized gas flow. The air flow enters from one side of the water tank (the water storage tank A) and exits from the other side, and the air flow enters a first-stage counter-flow type water washing tower (a counter-flow type water washing tower) to remove all water-soluble gas in the air flow. The gas flow enters the thermal catalytic reaction chamber, enters the second-stage vortex generator (vortex gas scrubber B), enters from one side of the water tank (water storage tank B), exits from the other side of the water tank, enters the second-stage counter-flow filling water scrubber, the water-soluble acid gas is further removed, and the treated gas passes through the gas booster pump and is discharged out of the system.
As shown in fig. 1, the gas to be treated enters the primary heater (thermal oxidizer) through a process inlet of KF80, and the bypass valve is normally closed. The heater oxidizes inflammable gas, and the temperature varies from 850 ℃ to 1200 ℃, and the specific temperature varies according to different processes. The treated gas enters a primary vortex generator. Four nozzles in the vortex generator generate water flow spray to sink the particles in the oxidized air flow. All water soluble gases are completely removed in the first stage treatment tower. The temperature of the oxidized high-temperature gas is suddenly reduced to 35 ℃ on average, and the gas flow enters a first-stage counter-flow water washing tower from one side of the water tank to remove all water-soluble gas in the water flow. The gas flow enters a thermal catalytic reaction chamber (namely a secondary heater), the temperature is preset to be dependent on the process type, the temperature rises to 850 ℃, the gas flow enters a secondary vortex generator, the gas flow enters a secondary counter-flow filling water washing tower from one side of a water tank, water-soluble acid gas is further removed, and the gas flow is discharged out of the system through a butterfly valve or an additional vacuum booster pump. Compared with the prior art, the scheme has the advantages of more types of waste gas treatment, more perfect scheme and better waste gas treatment effect. Based on the characteristics, compared with the existing product, the water washing type waste gas treatment equipment has outstanding substantive characteristics and remarkable progress.
The water scrubbing exhaust gas treatment apparatus of the present invention is not limited to the disclosure of the specific embodiments, and the technical solutions presented in the examples can be extended based on the understanding of those skilled in the art, and the simple alternatives made by those skilled in the art in combination with the common general knowledge of the present invention also belong to the scope of the present invention.
Claims (6)
1. A water washing type waste gas treatment device is characterized by comprising a thermal oxidation treatment unit and a thermal catalysis reaction unit, wherein waste gas is discharged after being treated by the thermal oxidation treatment unit and the thermal catalysis reaction unit in sequence, the thermal oxidation treatment unit comprises an air inlet pipeline, a thermal oxidizer, a water storage tank A and a counter-flow type water washing tower, the thermal catalytic reaction unit comprises a thermal catalytic reaction chamber, a water storage tank B and an exhaust pipeline, waste gas enters the thermal oxidizer through the gas inlet pipeline to carry out thermal oxidation reaction, the waste gas after thermal oxidation reaction enters the counter-flow type water washing tower through the water storage tank A at the lower part to be washed to remove water-soluble gas, the waste gas after water washing enters the thermal catalytic reaction chamber to carry out thermal catalytic reaction, and the waste gas after thermal catalytic reaction enters the exhaust pipeline through the water storage tank B at the lower part to be discharged from the water washing type waste gas treatment equipment.
2. The water washing type waste gas treatment equipment as claimed in claim 1, wherein the thermal oxidation treatment unit further comprises a vortex gas scrubber A, a water mist spray nozzle is arranged in the vortex gas scrubber A, waste gas subjected to thermal oxidation reaction enters the vortex gas scrubber A to remove particle impurities and then enters the water storage tank A below the vortex gas scrubber A, the thermocatalytic reaction unit further comprises a vortex gas scrubber B, a water mist spray nozzle is arranged in the vortex gas scrubber B, and waste gas subjected to thermocatalytic reaction enters the vortex gas scrubber B to remove particle impurities and then enters the water storage tank B below the vortex gas scrubber B.
3. The water washing type waste gas treatment equipment as claimed in claim 2, wherein the thermocatalytic reaction unit further comprises a counter-flow type filling water washing tower, a gas filtering substance is filled in the counter-flow type filling water washing tower, and waste gas from which particle impurities are removed by the vortex gas scrubber B enters the counter-flow type filling water washing tower through the water storage tank B below to further remove water-soluble acidic gas and then enters the exhaust pipeline to be discharged out of the water washing type waste gas treatment equipment.
4. The water scrubbing exhaust gas treatment apparatus according to claim 1, wherein a bypass valve is provided in an intake pipe of said thermal oxidation treatment unit, said bypass valve being configured to adjust an intake pressure in said intake pipe.
5. The water scrubbing type waste gas treatment apparatus according to claim 1, wherein a butterfly valve and a vacuum booster pump are provided on an exhaust pipe of the thermal catalytic reaction unit, and the vacuum booster pump is used for sucking and discharging gas in the exhaust pipe.
6. The water washing type waste gas treatment equipment according to claim 1, wherein an exhaust sampling detection pipeline is arranged on an exhaust pipeline of the thermocatalytic reaction unit, an electromagnetic valve is arranged on the exhaust sampling detection pipeline, and sampling exhaust gas enters external sampling detection equipment through the exhaust sampling detection pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345238.2A CN111167283A (en) | 2018-11-12 | 2018-11-12 | Washing formula exhaust-gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345238.2A CN111167283A (en) | 2018-11-12 | 2018-11-12 | Washing formula exhaust-gas treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111167283A true CN111167283A (en) | 2020-05-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811345238.2A Pending CN111167283A (en) | 2018-11-12 | 2018-11-12 | Washing formula exhaust-gas treatment equipment |
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| Country | Link |
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| CN (1) | CN111167283A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101053769A (en) * | 2007-02-08 | 2007-10-17 | 上海交通大学 | Low-temperature catalytic treating method and device for chemical nitrile action technology waste gas |
| CN101247879A (en) * | 2005-06-13 | 2008-08-20 | 应用材料股份有限公司 | Methods and apparatus for process abatement |
| CN205965426U (en) * | 2016-07-22 | 2017-02-22 | 北京航天科恩实验室装备工程技术有限公司 | Waste gas treatment tower |
| CN106765220A (en) * | 2017-01-20 | 2017-05-31 | 山西亚乐士环保技术股份有限公司 | Five Room regenerative thermal oxidizers |
| CN107376592A (en) * | 2017-07-11 | 2017-11-24 | 石家庄印钞有限公司 | A kind of chromium plating fog recovery and treatment method |
| CN206810031U (en) * | 2017-05-18 | 2017-12-29 | 厦门市宇洲环保科技有限公司 | Horizontal organic exhaust gas filter bed and organic waste gas treatment system with NAP materials |
| KR101874338B1 (en) * | 2018-03-06 | 2018-07-04 | (주)이화에코시스템 | Complex type odor eliminator |
| KR101903046B1 (en) * | 2017-03-17 | 2018-10-01 | 삼성엔지니어링 주식회사 | Apparatus for removing VOC and reducing bad smell from waste gas |
| CN209333494U (en) * | 2018-11-12 | 2019-09-03 | 上海更日敦科技有限公司 | A kind of rinsing type waste gas treatment equipment |
-
2018
- 2018-11-12 CN CN201811345238.2A patent/CN111167283A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101247879A (en) * | 2005-06-13 | 2008-08-20 | 应用材料股份有限公司 | Methods and apparatus for process abatement |
| CN101053769A (en) * | 2007-02-08 | 2007-10-17 | 上海交通大学 | Low-temperature catalytic treating method and device for chemical nitrile action technology waste gas |
| CN205965426U (en) * | 2016-07-22 | 2017-02-22 | 北京航天科恩实验室装备工程技术有限公司 | Waste gas treatment tower |
| CN106765220A (en) * | 2017-01-20 | 2017-05-31 | 山西亚乐士环保技术股份有限公司 | Five Room regenerative thermal oxidizers |
| KR101903046B1 (en) * | 2017-03-17 | 2018-10-01 | 삼성엔지니어링 주식회사 | Apparatus for removing VOC and reducing bad smell from waste gas |
| CN206810031U (en) * | 2017-05-18 | 2017-12-29 | 厦门市宇洲环保科技有限公司 | Horizontal organic exhaust gas filter bed and organic waste gas treatment system with NAP materials |
| CN107376592A (en) * | 2017-07-11 | 2017-11-24 | 石家庄印钞有限公司 | A kind of chromium plating fog recovery and treatment method |
| KR101874338B1 (en) * | 2018-03-06 | 2018-07-04 | (주)이화에코시스템 | Complex type odor eliminator |
| CN209333494U (en) * | 2018-11-12 | 2019-09-03 | 上海更日敦科技有限公司 | A kind of rinsing type waste gas treatment equipment |
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