TWM631009U - Treatment equipment using vortex tube to improve exhaust gas filtration efficiency - Google Patents

Abstract

A processing device for improving the filtering efficiency of exhaust gas by using a vortex tube, comprising: a rear-stage water washing part, which receives the waste gas from the upstream that has undergone a chemical reaction to separate components, and uses water to wash the waste gas; and a vortex tube, It is connected to the water washing part of the rear section, and is used to separate a compressed air into a cold air and a hot air. Wherein, the cold air is input into the water washing part of the latter stage, so that the water vapor content in the exhaust gas is reduced due to condensation, so that by-products and solid particles in the exhaust gas are increased to be intercepted in the washing part of the latter stage. efficiency to improve the exhaust gas filtration efficiency.

Description

Treatment equipment that uses vortex tube to improve exhaust gas filtration efficiency

This new model relates to a kind of exhaust gas treatment equipment, especially a kind of treatment equipment that utilizes a vortex tube to improve the filtering efficiency of exhaust gas.

Gases such as Nitrous Oxide (N ₂ O) and Nitrogen Trifluoride (NF ₃ ) are widely used in the semiconductor industry and are both greenhouse gases. Taking nitrogen trifluoride as an example, in addition to being a greenhouse gas, when nitrogen trifluoride is burned in the exhaust gas treatment process, harmful by-products such as nitric acid (HNO3) and hydrogen fluoride (HF) are also produced. Therefore, based on the concept of environmental protection and sustainable development of the earth, it is necessary to try to reduce the concentration of greenhouse gases such as nitrous oxide or nitrogen trifluoride emitted in the industrial manufacturing process.

Furthermore, the related processes at the upstream end are becoming more and more advanced, and the generated exhaust gas may also contain more complex components, especially solid particles (especially PM2.5) that have harmful effects on the human body. Washing and reaction removal, so if it needs to be dealt with in the upstream process, it is necessary to further improve its PM2.5 filtration efficiency for solid particles.

Therefore, the purpose of the present invention is to provide a treatment device that utilizes a vortex tube to improve the filtering efficiency of exhaust gas.

Therefore, the novel treatment equipment using vortex tubes to improve the efficiency of exhaust gas filtration includes: a rear-stage water washing part, which receives the exhaust gas from the upstream that has undergone a chemical reaction to separate components, and uses water to wash the exhaust gas; and a The vortex tube is connected to the water washing part of the rear section, and is used to separate a compressed air into a cold air and a hot air, wherein the cold air is input into the washing part of the rear section, so that the water in the exhaust gas is The gas content is reduced due to condensation, thereby enhancing the effectiveness of by-products and solid particles in the exhaust gas being intercepted in the back-end water washing section.

The effect of the new type is: by inputting the cold air from the vortex tube into the water washing part of the rear section, the water vapor content in the exhaust gas can be reduced due to condensation, so that the auxiliary substances such as nitric acid and hydrogen fluoride in the exhaust gas can be increased. The products and solid particles (especially PM2.5) are intercepted in the back-end washing part, so the filtering efficiency of the exhaust gas can be improved.

1: Vortex tube

10: Compressed air

11: cold air

12: Hot Air

2: Front washing part

3: Heating part

31: Reactor

32: Preheating tube

33: heating rod

4: The rear washing part

41: Demisting unit

410: Demisting space

411: Condensation Plate

42: Dust removal unit

420: Separation Space

421: Sprinkler

422: Centrifuge

43: Washing unit

430: Flush Space

431: Two-fluid nozzle

4311: Cleaning fluid inlet

4312: Cold Air Inlet

4313: Droplet exit

5: Exhaust gas pipe

7: Entrance

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: FIG. 1 is a device configuration diagram illustrating that the new model utilizes a vortex tube to improve the exhaust gas filtration efficiency Figure 2 is a device configuration diagram illustrating a second embodiment of a treatment device for improving exhaust gas filtration efficiency by using a vortex tube; Figure 3 is a device configuration diagram illustrating the present invention. A third embodiment of a treatment device for improving exhaust gas filtration efficiency by utilizing a vortex tube; and FIG. 4 is a side view illustrating a two-fluid nozzle in the third embodiment.

Referring to FIG. 1, the first embodiment of the novel treatment equipment for improving the filtering efficiency of exhaust gas by using vortex tube is suitable for improving the filtering efficiency of exhaust gas, wherein the special gas used in the process is nitrogen trifluoride ( In the case of NF ₃ ), in addition to the nitrogen trifluoride, the exhaust gas also includes by-products such as nitric acid (HNO3) and hydrogen fluoride (HF). In addition, in the first embodiment, the novel treatment equipment utilizing the vortex tube to improve the filtering efficiency of exhaust gas can also improve the filtering efficiency of solid particles (especially PM2.5) in the exhaust gas that may have harmful effects on the human body.

In the first embodiment, the processing equipment for improving exhaust gas filtration efficiency by using a vortex tube includes a vortex tube 1, an inlet part 7, an exhaust gas pipe 5, a front-stage water washing part 2, a heating part 3, and a rear-stage water washing part part 4 , and a water tank (not shown) located under the front-stage water-washing part 2 , the heating part 3 and the rear-stage water-washing part 4 .

In this first embodiment, the air inlet of the inlet portion 7 is communicated with a front end system Manufacturing equipment (not shown in the figure), and is used to make the exhaust gas from the front-end manufacturing equipment enter the new treatment equipment that uses the vortex tube to improve the exhaust gas filtration efficiency.

In the first embodiment, the air inlet of the front-stage water washing part 2 is communicated with the air outlet of the inlet part 7, and the wet cleaning method is used to wash the dust and water-soluble gas in the exhaust gas with clean water. and other ingredients. Next, the preliminarily washed exhaust gas leaves the front-stage water washing part 2 and enters the exhaust gas air pipe 5 .

The heating part 3 is in fluid communication with the exhaust gas pipe 5, and makes the exhaust gas undergo thermal cracking reaction to generate by-products such as nitric acid and hydrogen fluoride. In the first embodiment, the heating part 3 includes a reaction furnace 31 , a preheating pipe 32 penetrating the bottom wall of the reaction furnace 31 , and several preheating pipes 32 disposed in the reaction furnace 31 and surrounding the preheating pipe 32 . The vertical heating rod 33, wherein the clean dry air (Clean Dry Air, CDA, not shown) and the exhaust gas and other reactants flow into the preheating pipe 32 for preheating, and then enter the reaction furnace 31 for preheating A thermal cracking reaction is carried out to produce by-products such as nitric acid and hydrogen fluoride.

The latter-stage water washing part 4 is provided downstream of the heating part 3, and uses water to wash the waste gas whose components have been separated by chemical reaction again. In the first embodiment, the rear-stage water washing part 4 includes a water washing unit 43 , a dust removal unit 42 , and a mist removal unit 41 .

The main technical feature of the present invention is that the vortex tube 1 is used to improve the filtering efficiency of the exhaust gas. In the first embodiment, the vortex tube 1 is connected to the mist removal unit 41 and the reaction furnace 31 of the rear-stage water washing part 4, and is used for a compressed air 10 (eg Such as CDA) is separated into a cold air 11 and a hot air 12, for example, the compressed air 10 with a flow rate of 60 liters per minute (LPM) can be divided into the cold air 11 of 30 LPM, 5 ℃, and 30 LPM through the vortex tube 1 and the hot air 12 at 60°C.

In the first embodiment, the defogging unit 41 defines a defogging space 410 and has several condensation plates 411 arranged in the defogging space 410 at intervals. The condensing plates 411 are spaced apart from each other and dislocated, and together divide the defogging space 410 into a repeatedly bent path, thereby extending the path length of the gas flow, increasing the chance of contact with the condensing plates 411, so that the A part of the water vapor in the exhaust gas can be condensed on the condensing plates 411 for separation.

At the same time, since the cold air 11 from the vortex tube 1 is input into the demisting space 410, the moisture content in the exhaust gas can be reduced due to condensation, thereby increasing by-products such as nitric acid and hydrogen fluoride in the exhaust gas And solid particles (especially PM2.5) are intercepted in the defogging unit 41, so the filtering efficiency of the exhaust gas can be improved.

Furthermore, in the first embodiment, the hot air 12 generated by the vortex tube 1 can be input into the reaction furnace 31 to assist in the chemical reaction, so as to achieve the additional effect of energy saving.

Referring to FIG. 2 , the difference between the second embodiment of a new treatment device for improving exhaust gas filtration efficiency by using a vortex tube and the first embodiment is that in the second embodiment, the vortex tube 1 produces the The cold air 11 is communicated with the rear part of the washing part 4 The dust removal unit 42 is in a separation space 420 .

In the second embodiment, the dust removal unit 42 has a spray head 421 disposed in the separation space 420 and a centrifuge 422 , wherein the cold air 11 is input to the vicinity of the spray head 421 . By the centrifugal mechanism generated by the rotation of the centrifuge 422, fine particles with a certain weight and particle size can be separated, and at the same time, since the cleaning liquid sprayed down by the nozzle 421 is cooled by the cold air 11, the waste gas can be removed. The moisture content is reduced due to condensation, which can improve the efficiency of by-products such as nitric acid and hydrogen fluoride and solid particles (especially PM2.5) in the exhaust gas being intercepted in the dust removal unit 42, thus improving the filtration of the exhaust gas. net efficacy.

Referring to FIGS. 3 and 4 , the difference between the third embodiment of the new treatment device for improving exhaust gas filtration efficiency by using a vortex tube and the first embodiment is that in the third embodiment, the vortex tube 1 generates The cold air 11 is communicated with a flushing space 430 of a water-washing unit 43 of the rear-stage water-washing part 4 .

In the third embodiment, the water washing unit 43 has a two-fluid spray head 431 disposed in the washing space 430 , wherein the two-fluid spray head 431 has a cleaning liquid inlet 4311 , a cleaning fluid inlet 4311 , and the vortex tube 1 . A cold air inlet 4312 in fluid communication with the cold air 11 , and a droplet outlet 4313 for ejecting the mixed droplets of the cold air 11 and the cleaning liquid into the flushing space 430 . Therefore, since the cold air 11 from the vortex tube 1 is input into the flushing space 430 through the two-fluid nozzle 431, the water vapor content in the exhaust gas can be reduced due to condensation, thereby increasing the nitric acid in the exhaust gas and fluorine By-products such as hydrogen hydride and solid particles (especially PM2.5) are intercepted in the water washing unit 43, so the filtering efficiency of the exhaust gas can be improved.

In addition, it should be specially mentioned that, in other embodiments of the present invention, the cold air 11 of the vortex tube 1 can also be simultaneously input to at least two of the water washing unit 43 , the dust removal unit 42 and the mist removal unit 41 . and can also achieve the effect of improving the filtering efficiency of the exhaust gas.

To sum up, the present invention at least has the following advantages and effects: (1) By inputting the cold air 11 from the vortex tube 1 into the rear-stage water washing part 4, the water vapor content in the exhaust gas can be reduced due to condensation. Reduce, thus can improve the efficiency of by-products such as nitric acid and hydrogen fluoride and solid particles (especially PM2.5) in the waste gas being intercepted in the rear-stage water washing part 4, so the filtration efficiency of the waste gas can be improved; (2 ) The hot air 12 generated by the vortex tube 1 can be input into the reaction furnace 31 to assist in the chemical reaction, so as to achieve the additional effect of energy saving; therefore, the purpose of the present invention can be achieved.

However, the above are only examples of the present invention, which should not limit the scope of implementation of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application for this new model and the contents of the patent specification are still within the scope of the present invention. within the scope of this new patent.

1: Vortex tube

10: Compressed air

11: cold air

12: Hot Air

2: Front washing part

3: Heating part

31: Reactor

32: Preheating tube

33: heating rod

4: The rear washing part

41: Demisting unit

410: Demisting space

411: Condensation Plate

42: Dust removal unit

43: Washing unit

5: Exhaust gas pipe

7: Entrance

Claims (9)

A treatment device that utilizes a vortex tube to improve the filtering efficiency of exhaust gas, comprising: A post-stage water washing part, which receives the waste gas from the upstream that has undergone a chemical reaction to separate components, and uses water to wash the waste gas; and A vortex tube is connected to the rear-stage water washing part, and is used to separate a compressed air into a cold air and a hot air, wherein the cold air is input into the rear-stage water washing part, so that the exhaust gas in the The moisture content is reduced due to condensation, thereby enhancing the effectiveness of by-products and solid particles in the exhaust gas being trapped in the rear-stage water wash. The treatment equipment for improving exhaust gas filtration efficiency by using a vortex tube as claimed in claim 1, further comprising a heating part connected upstream of the rear-stage water washing part and comprising a reaction furnace, wherein the heat generated by the vortex tube Air is fed into the reactor to assist in the chemical reaction. The treatment equipment for improving the filtering efficiency of exhaust gas by using a vortex tube according to claim 1, wherein the rear-stage water washing part comprises a demisting unit, a dedusting unit arranged upstream of the demisting unit, and a dedusting unit arranged on the A water washing unit upstream of the dedusting unit. The treatment equipment for improving exhaust gas filtration efficiency by using a vortex tube according to claim 3, wherein the cold air generated by the vortex tube is input into a defogging space of the defogging unit of the rear-stage water washing part , so that the moisture content in the exhaust gas in the demisting unit is reduced due to condensation, thereby improving the efficiency of by-products and solid particles in the exhaust gas being intercepted in the demisting unit. The treatment equipment for improving exhaust gas filtration efficiency by using a vortex tube according to claim 3, wherein the cold air generated by the vortex tube is input into a separation space of the dust removal unit of the rear-stage water washing part, so that the The moisture content in the exhaust gas in the dust removal unit is reduced due to condensation, thereby improving the efficiency of by-products and solid particles in the exhaust gas being intercepted in the dust removal unit. The treatment equipment for improving exhaust gas filtration efficiency by using a vortex tube according to claim 5, wherein the dust removal unit has a spray head disposed in the separation space, and the cold air generated by the vortex tube is input to the near the nozzle. The treatment equipment for improving exhaust gas filtration efficiency by using a vortex tube according to claim 3, wherein the cold air generated by the vortex tube is input into one of the washing spaces of the washing unit of the rear-stage washing part, so that the The water vapor content in the waste gas in the water washing unit is reduced due to condensation, thereby improving the efficiency of by-products and solid particles in the waste gas being intercepted in the water washing unit. The treatment device for improving the filtering efficiency of exhaust gas by using a vortex tube according to claim 7, wherein the water washing unit has a two-fluid spray head disposed in the washing space, and the two-fluid spray head has a cleaning liquid inlet, A cold air inlet fluidly communicated with the cold air generated by the vortex tube, and a droplet outlet for spraying the mixed droplets of the cold air and cleaning liquid into the flushing space. The treatment equipment for improving the filtering efficiency of exhaust gas by using a vortex tube according to claim 1, wherein the compressed air is clean and dry air.

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