CN111161999A - Three-tube type excimer lamp - Google Patents
Three-tube type excimer lamp Download PDFInfo
- Publication number
- CN111161999A CN111161999A CN202010167473.6A CN202010167473A CN111161999A CN 111161999 A CN111161999 A CN 111161999A CN 202010167473 A CN202010167473 A CN 202010167473A CN 111161999 A CN111161999 A CN 111161999A
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- Prior art keywords
- tube
- lamp
- luminous
- outer tube
- public electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
Abstract
The invention discloses a three-tube type excimer lamp which is characterized in that: comprises a lamp box, a sliding groove is arranged below the lamp box, a common electrode tube is arranged in the middle of the sliding groove, the two sides of the common electrode tube are respectively provided with a luminous lamp tube, the outer side of the common electrode tube is provided with a common outer tube, the inner wall of the public electrode outer tube is provided with a metal coating, the outer side of the luminotron is provided with a luminous outer tube, a semicircular coating is arranged on one side of the inner wall of the luminous outer tube, an air inflation space is arranged in the luminous outer tube, the gas-filled space is filled with luminous gas, the semicircular coating is semicircular, the public electrode outer tube and the luminous lamp outer tube are respectively made of transparent quartz materials, the sliding groove enables the distance between the public electrode tube and the luminous lamp tube to be adjusted at will, the problem that the discharge distance of the existing excimer discharge lamp can not be changed after being delivered from a factory because the discharge distance is fixed in the manufacturing process is solved, the discharge space and the discharge intensity of the lamp tube can be manually adjusted after leaving the factory.
Description
Technical Field
The invention relates to the technical field of excimer discharge lamps, in particular to a three-tube excimer lamp.
Background
Excimer (Excimer), also called excited dimer, refers to a molecule that is formed by inert gas, halogen gas, or a mixture of two components of these gases, but is evanescent when excited by external energy. Excimer light generally refers to ultraviolet light radiated from a gaseous dimer excited by an electric field, by electron transition occurring when the excited state returns to the ground state.
By adopting different excimer gas ratios, excimer ultraviolet light with different monochromatic wavelengths (172 nm, 193nm,207nm, 222nm, 248nm, 308nm and the like) can be obtained.
The excimer lamp is a new light source technology which is developed in the seventh and eighties of the last century, is praised as a milestone in the technical field of ultraviolet light generation internationally, and has been widely and uniquely applied in the fields of microelectronics/semiconductors, medical treatment, material science, printing, environmental protection and the like.
The existing excimer discharge lamp is in a single-tube integrated structure, a lamp tube is composed of an inner layer and an outer layer of transparent containers in a double-layer structure, proportioning gas is filled in an interlayer formed by the inner layer and the outer layer of containers, the discharge distance of the discharge lamp is fixed in the manufacturing process and cannot be changed after leaving a factory, so that the discharge distance and the discharge intensity of the lamp tube cannot be manually adjusted as required after leaving the factory, and secondly, an outer electrode of the lamp tube of the existing excimer discharge lamp is exposed outside, so that the risk of damage and scrapping exists after long-term use under the corrosive gas condition.
Disclosure of Invention
Technical problem to be solved
In order to overcome the defects of the prior art, a three-tube type excimer lamp is provided, which solves the following defects of the prior excimer discharge lamp: the discharge space of the discharge lamp is fixed in the manufacturing process and cannot be changed after leaving the factory, so that the discharge space and the discharge intensity of the lamp tube cannot be manually adjusted after leaving the factory; secondly, the outer electrode of the tube of the existing excimer discharge lamp is damaged and scrapped after being used for a long time under the condition of corrosive gas.
(II) technical scheme
The invention is realized by the following technical scheme: the invention provides a three-tube type excimer lamp which is characterized in that: the novel LED lamp comprises a lamp box, wherein a sliding groove is arranged below the lamp box, a public electrode tube is arranged in the middle of the sliding groove, two sides of the public electrode tube are respectively provided with a luminous lamp tube, a public electrode outer tube is arranged on the outer side of the public electrode tube, a metal coating is arranged on the inner wall of the public electrode outer tube, a luminous outer tube is arranged on the outer side of the luminous lamp tube, a semicircular coating is arranged on one side of the inner wall of the luminous outer tube, an inflation space is arranged in the luminous outer tube, and luminous gas is filled.
Furthermore, the semicircular plating layer is semicircular.
Further, the common electrode tube and the light-emitting outer tube are made of transparent quartz materials respectively.
(III) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
1. in order to solve the problems that the structure forms of the existing excimer discharge lamp are all single-tube integrated, the discharge space of the discharge lamp is fixed in the manufacturing process and cannot be changed after leaving the factory, and the discharge space and the discharge intensity of a lamp tube cannot be manually adjusted according to requirements after leaving the factory, the invention enables the distance between a common electrode tube and a luminous lamp tube to be randomly adjusted by arranging the sliding groove, solves the problems that the discharge space of the existing excimer discharge lamp is fixed in the manufacturing process and cannot be changed after leaving the factory, and enables the discharge space and the discharge intensity of the lamp tube to be manually adjusted according to requirements after leaving the factory to be possible;
2. in order to solve the problem that the lamp tube of the prior excimer discharge lamp has the risk of damage and scrap when being used for a long time under the condition of corrosive gas, the electrode is arranged on the inner wall of the container without an external electrode, so that the problem that the lamp tube is used for a long time under the condition of the corrosive gas is solved.
Drawings
FIG. 1 is a schematic structural view of a three-tube excimer lamp according to the present invention;
fig. 2 is a schematic diagram showing the relationship between the common electrode tube and the light-emitting tube in the new structure form of the present invention.
The reference numerals are explained below:
1. a lamp box; 2. a sliding groove; 3. a common electrode tube; 4. a light emitting lamp tube; 5. a common electrode outer tube; 6. a metal plating layer; 7. a light emitting outer tube; 8. semicircular plating; 9. an air-filled space; 10. a luminescent gas.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1-2, the present embodiment of a three-tube excimer lamp is characterized in that: the novel LED lamp box comprises a lamp box 1, a sliding groove 2 is arranged below the lamp box 1, a public electrode tube 3 is arranged in the middle of the sliding groove 2, light-emitting lamp tubes 4 are respectively arranged on two sides of the public electrode tube 3, a public electrode outer tube 5 is arranged on the outer side of the public electrode tube 3, a metal coating 6 is arranged on the inner wall of the public electrode outer tube 5, a light-emitting outer tube 7 is arranged on the outer side of each light-emitting lamp tube 4, a semicircular coating 8 is arranged on one side of the inner wall of the light-emitting outer tube 7, an inflation space 9 is arranged in the light-emitting outer tube 7.
Further, the semicircular plating layer 8 is semicircular.
Further, the common electrode outer tube 5 and the light emitting outer tube 7 are respectively made of transparent quartz materials.
The specific implementation process of this embodiment is as follows: the distance between the sliding public electrode tube 3 and the luminous tube 4 is adjusted, after the power is on, the metal coating 6 is used as a public electrode, the semicircular coatings 8 on the two sides are used as inner electrodes, the metal coating 6 and the semicircular coatings 8 on the two sides begin to form a high-frequency high-voltage alternating electric field, under the action of the high-frequency high-voltage alternating electric field, luminous gas 10 in respective containers is excited to emit excimer ultraviolet light, the problem that the discharge distance of the existing excimer discharge lamp is fixed in the manufacturing process and cannot be changed after leaving the factory is solved, the discharge distance and the discharge intensity of the lamp tube can be adjusted manually according to the requirement after leaving the factory is made possible, in addition, the metal coating 6 and the semicircular coatings 8 are arranged in the tube, no external electrode is provided, and the problem that the lamp tube can.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention and do not limit the spirit and scope of the present invention. Various modifications and improvements of the technical solutions of the present invention may be made by those skilled in the art without departing from the design concept of the present invention, and the technical contents of the present invention are all described in the claims.
Claims (3)
1. A three-tube excimer lamp characterized in that: the novel LED lamp is characterized by comprising a lamp box (1), a sliding groove (2) is arranged below the lamp box (1), a public electrode tube (3) is arranged in the middle of the sliding groove (2), two sides of the public electrode tube (3) are respectively provided with a luminous lamp tube (4), a public electrode outer tube (5) is arranged on the outer side of the public electrode tube (3), a metal coating (6) is arranged on the inner wall of the public electrode outer tube (5), a luminous outer tube (7) is arranged on the outer side of the luminous lamp tube (4), a semicircular coating (8) is arranged on one side of the inner wall of the luminous outer tube (7), an inflation space (9) is arranged in the luminous outer tube (7), and luminous gas (10) is filled.
2. A three-tube excimer lamp as defined in claim 1, wherein: the semicircular plating layer (9) is semicircular.
3. A three-tube excimer lamp as defined in claim 1, wherein: the public electrode outer tube (5) and the light-emitting outer tube (7) are respectively made of transparent quartz materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010167473.6A CN111161999A (en) | 2020-03-11 | 2020-03-11 | Three-tube type excimer lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010167473.6A CN111161999A (en) | 2020-03-11 | 2020-03-11 | Three-tube type excimer lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111161999A true CN111161999A (en) | 2020-05-15 |
Family
ID=70567332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010167473.6A Pending CN111161999A (en) | 2020-03-11 | 2020-03-11 | Three-tube type excimer lamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111161999A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022116366A1 (en) * | 2020-12-04 | 2022-06-09 | 广明源光科技股份有限公司 | Excimer lamp |
-
2020
- 2020-03-11 CN CN202010167473.6A patent/CN111161999A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022116366A1 (en) * | 2020-12-04 | 2022-06-09 | 广明源光科技股份有限公司 | Excimer lamp |
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Effective date of registration: 20220428 Address after: 313000 factory building a, phase I, Zhejiang Zhongde (Changxing) International Industrial Cooperation Park, No. 1228, ChenWang Road, Changxing Development Zone, Huzhou City, Zhejiang Province Applicant after: Youweisaisi photoelectric technology (Huzhou) Co.,Ltd. Address before: 215000 room 106, building 1, Room 215, building 2, Room 102, building 2, northwest Suzhou nano City, 99 Jinjihu Avenue, Suzhou Industrial Park, Suzhou City, Jiangsu Province Applicant before: EXCIMER PHOTOELECTRIC TECHNOLOGY (SUZHOU) CO.,LTD. |