CN111157562A - Method for eliminating interference signal in narrow-side-wall sample photoelectron spectroscopy test and sample clamp - Google Patents
Method for eliminating interference signal in narrow-side-wall sample photoelectron spectroscopy test and sample clamp Download PDFInfo
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- CN111157562A CN111157562A CN202010054951.2A CN202010054951A CN111157562A CN 111157562 A CN111157562 A CN 111157562A CN 202010054951 A CN202010054951 A CN 202010054951A CN 111157562 A CN111157562 A CN 111157562A
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- 238000012360 testing method Methods 0.000 title claims abstract description 76
- 238000001420 photoelectron spectroscopy Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 51
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 35
- 239000011733 molybdenum Substances 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 abstract description 14
- 238000002186 photoelectron spectrum Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
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- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
- G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
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Abstract
The invention relates to the technical field of narrow-section photoelectron spectroscopy testing, in particular to a method for eliminating interference signals in narrow-side-wall sample photoelectron spectroscopy testing and a sample clamp. A sample clamp for eliminating interference signals in narrow-side-wall sample photoelectron spectroscopy test comprises a substrate and a fixing plate; the top of the base plate is provided with at least one collimation plate, and the collimation plate extends outwards along the top of the base plate; a connecting structure is arranged between the fixing plate and the substrate; the surfaces of the substrate, the fixing plate and the collimation plate are at least provided with molybdenum layers with the thickness not less than 100 nm. The sample clamp for eliminating the interference signals in the narrow-side-wall sample photoelectron spectrum test is used for eliminating the signal interference from the surface of a test sample, is particularly suitable for the sample test of which the material of the adjacent test surface of the sample is different from that of the cross section, can successfully shield the interference signals from the adjacent test surface of the test sample, and realizes the accurate test of the photoelectron spectrum of the cross section of the sample.
Description
Technical Field
The invention relates to the technical field of narrow-section photoelectron spectroscopy testing, in particular to a method for eliminating interference signals in narrow-side-wall sample photoelectron spectroscopy testing and a sample clamp.
Background
In cross-sectional XPS testing, especially when the test area is close to other surfaces, such as 50 to 100 microns apart, photoexcited electrons from other adjacent surfaces of the sample are also detected and form interference. Signals from adjacent faces of the sample will affect the cross-sectional test results.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art or the related art.
Therefore, a first object of the present invention is to provide a sample holder for eliminating interference signals in a narrow-sidewall sample photoelectron spectroscopy test, which is used for blocking the interference signals to ensure that only signals from a test section are received as much as possible, and significantly reducing the influence of the interference signals of other adjacent surfaces of the sample on the test result of the test section.
The second objective of the present invention is to provide a method for eliminating interference signals in a narrow-sidewall sample photoelectron spectroscopy test, wherein a molybdenum material is used to cover all surfaces of the sample holder, so as to remove a large amount of interference signals, and a small amount of known molybdenum interference signals on the surface of the sample holder can be subtracted in the photoelectron spectroscopy, thereby effectively shielding interference signals from non-sample test cross sections.
In order to achieve the above object, a technical solution of a first aspect of the present invention provides a method for eliminating interference signals in a narrow-sidewall sample photoelectron spectroscopy test, wherein a substrate and a fixing plate are respectively attached to the front and back sides of a sample;
the top of the base plate is provided with a collimation plate, and the collimation plate extends outwards along the top of the base plate;
the section of the sample and the top surface of the fixing plate are attached to the lower surface of the collimation plate;
fixing the sample, exposing the part to be tested on the section of the sample, and then placing the sample on a sample table for testing;
wherein, the surfaces of the substrate, the fixed plate and the collimation plate are at least provided with a molybdenum layer with the thickness not less than 100 nm.
In some possible embodiments, the number of the collimating plates is two, and the two collimating plates are respectively disposed at two ends of the substrate.
In some possible embodiments, the number of the alignment plates is two, and the alignment plates are slidably connected with the top of the base plate along the direction perpendicular to the extending direction of the alignment plates.
The technical scheme of the second aspect of the invention provides a sample clamp for eliminating interference signals in a narrow-side-wall sample photoelectron spectroscopy test, which comprises a substrate and a fixing plate;
the top of the base plate is provided with at least one collimation plate, and the collimation plate extends outwards along the top of the base plate;
a connecting structure is arranged between the fixing plate and the substrate;
the surfaces of the substrate, the fixing plate and the collimation plate are at least provided with molybdenum layers with the thickness not less than 100 nm.
In some possible embodiments, the number of the collimating plates is two.
In some possible embodiments, the alignment plates are respectively fixedly disposed at both ends of the top of the base plate in the direction perpendicular to the extending direction of the alignment plates.
In some possible embodiments, the alignment plate is slidably connected to the top of the base plate along the direction perpendicular to the extending direction of the alignment plate.
In some possible embodiments, more than one through hole is formed on each of the base plate and the fixing plate, and the through holes are used for connecting the base plate and the fixing plate through a connecting piece so as to fix a sample.
In some possible embodiments, two rows and three columns of the through holes are correspondingly arranged on the substrate and the fixing plate, and the through holes are uniformly distributed on the substrate and the fixing plate.
In some possible embodiments, the connecting member is a bolt and a nut.
Compared with the prior art, the invention has the following beneficial effects:
(1) the method for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test and the sample clamp for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test are used for eliminating the signal interference from the surface of the test sample, and are particularly suitable for the sample test of which the material of the adjacent test surface of the sample is different from that of the section.
(2) The invention successfully shields the interference signals from the adjacent test surfaces of the test sample and realizes the accurate test of the photoelectron spectrum of the sample section.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic overall view of a sample holder for eliminating interference signals in a narrow-sidewall sample photoelectron spectroscopy test according to an embodiment of the present invention;
FIG. 2 is a schematic diagram showing the front view dimensions of a sample holder for eliminating interference signals in a narrow-sidewall sample photoelectron spectroscopy test according to an embodiment of the present invention;
FIG. 3 shows a schematic side view of a substrate and a collimating plate according to an embodiment of the present invention;
FIG. 4 shows a schematic top view of a substrate and a collimating plate according to an embodiment of the present invention;
in the figure, 1-substrate; 2, fixing a plate; 3-collimation plate; 4-sample; 5-through hole.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited to the specific embodiments disclosed below.
Based on the above, the method for eliminating the interference signal in the photoelectron spectroscopy test of the narrow-side-wall sample and the sample holder for eliminating the interference signal in the photoelectron spectroscopy test of the narrow-side-wall sample according to some embodiments of the present invention are described below with reference to the drawings.
The embodiment of the invention provides a method for eliminating interference signals in a narrow-side-wall sample photoelectron spectroscopy test, which can be carried out by using a clamp shown in figure 1, wherein a substrate 1 and a fixing plate 2 are respectively attached to the front side and the back side of a sample 4;
wherein the top of the base plate 1 is provided with a collimation plate 3, and the collimation plate 3 extends outwards along the top of the base plate 1;
the cross section of the sample 4 and the top surface of the fixing plate 2 are both attached to the lower surface of the collimation plate 3;
fixing the sample 4, exposing a part to be tested on the section of the sample 4, and then placing the whole sample clamp on a photoelectron spectroscopy machine for testing;
wherein, the surfaces of the substrate 1, the fixed plate 2 and the collimation plate 3 are at least provided with a molybdenum layer with the thickness not less than 100 nm.
In the invention, the areas of the front surface and the back surface of the narrow-side-wall sample are both less than 20mm multiplied by 20mm, which is the height limit of a sample table based on a photoelectron spectrometer, and the height of the sample table can not be higher than 26.5mm at most.
In the invention, the ideal applicable condition is that the section of the sample 4 is subjected to photoelectron spectroscopy test, and the material of the adjacent test surface of the sample 4 is different from that of the section.
The cross section of the sample 4 is flat, and the cross section of the sample 4 and the top surface of the fixing plate 2 are both attached to the lower surface of the collimating plate 3, so that the cross section of the sample 4 and the top surface of the fixing plate 2 are flush with the lower surface of the collimating plate 3, and interference signals from adjacent test surfaces of the test sample 4 can be better shielded. The adjustment of the cross section of the sample 4 and the height of the top surface of the fixing plate 2 is suitable for the usual XPS (photoelectron spectroscopy) Z-direction height calibration.
In the invention, the surfaces of the substrate 1, the fixing plate 2 and the collimation plate 3 are at least molybdenum layers with the thickness of not less than 100nm, wherein the surfaces can refer to all surfaces or at least the surfaces adjacent to the surface to be measured. Regarding the molybdenum layer, if the thickness of the molybdenum layer is small, it can be prepared by coating, and in case of the molybdenum layer is thick, it can be prepared by melting. In the invention, the surfaces of the substrate 1, the fixed plate 2 and the collimation plate 3 are limited to have at least molybdenum layers with the thickness not less than 100nm, and the molybdenum layers with different thicknesses are included, and the molybdenum layers are completely made of molybdenum materials.
In the present invention, the molybdenum material is chosen, which is rarely used in the semiconductor industry, and whose photoelectron spectroscopy is simple, does not affect the measurement of the main elements of most samples 4, and whose price is not too high. Therefore, the periphery of the surface to be measured of the sample 4 is surrounded by the substrate 1, the fixing plate 2 and the collimation plate 3 made of the molybdenum material, other surfaces except the narrow section to be measured are completely covered by the molybdenum fixture, the X-ray hardly reaches the molybdenum material, even a very small amount of interference signals brought by the molybdenum fixture can be deducted in a photoelectron spectrum, signal interference from other surfaces of the test sample 4 is effectively eliminated, signals from the section are received to the greatest extent, and the measurement accuracy is remarkably improved.
The collimation plate 3 has the function of calibrating the height of the section of the sample 4 and the top surface of the fixing plate 2, so that the section of the sample 4 and the top surface of the fixing plate 2 are tightly attached to the lower surface of the collimation plate 3, the signal interference of other adjacent surfaces can be prevented to the greatest extent, and the measurement accuracy is improved.
The collimation plate 3 extends outwards along the top of the base plate 1 due to the action of the collimation plate 3, and the length of the outward extension of the collimation plate 3 is longer than the width of the cross section of the sample 4. Generally, the outward extending length of the collimation plate 3 is greater than or equal to the sum of the section width of the measured sample 4 and the thickness of the fixing plate 2.
The number of the collimating plates 3 arranged on top of the base plate 1 may be one, or two or three. The collimation plates 3 are provided with a plurality of collimation plates, each collimation plate 3 is arranged in parallel, two collimation plates 3 are generally used in the using process, and the plurality of collimation plates 3 are arranged, so that samples 4 with different lengths can be conveniently dealt with.
In some embodiments, as shown in fig. 1, preferably, two collimation plates 3 are provided at two ends of the substrate 1.
As shown in fig. 1, both ends of the substrate 1 are measured in a direction perpendicular to the extending direction of the collimating plate 3.
The two collimation plates 3 are arranged in parallel.
In some embodiments, there are two alignment plates 3, and the alignment plates 3 are slidably connected to the top of the base plate 1 along the direction perpendicular to the extending direction of the alignment plates 3.
The collimation plate 3 is arranged to be slidable, so that the requirements of samples 4 with different lengths can be met.
The invention also provides a sample clamp for eliminating interference signals in a narrow-side-wall sample photoelectron spectroscopy test, which has a structure as shown in figure 1 and comprises a substrate 1 and a fixing plate 2;
the top of the base plate 1 is provided with at least one collimation plate 3, and the collimation plate 3 extends outwards along the top of the base plate 1;
a connecting structure is arranged between the fixing plate 2 and the substrate 1;
the surfaces of the substrate 1, the fixed plate 2 and the collimation plate 3 are at least provided with molybdenum layers with the thickness not less than 100 nm.
In the invention, the ideal applicable condition is that the section of the sample 4 is subjected to photoelectron spectroscopy test, and the material of the adjacent test surface of the sample 4 is different from that of the section.
In the invention, the surfaces of the substrate 1, the fixing plate 2 and the collimation plate 3 are at least molybdenum layers with the thickness of not less than 100nm, wherein the surfaces can refer to all surfaces or at least the surfaces adjacent to the surface to be measured. Regarding the molybdenum layer, if the thickness of the molybdenum layer is small, it can be prepared by coating, and in case of the molybdenum layer is thick, it can be prepared by melting. In the invention, the surfaces of the substrate 1, the fixed plate 2 and the collimation plate 3 are limited to have at least molybdenum layers with the thickness not less than 100nm, and the molybdenum layers with different thicknesses are included, and the molybdenum layers are completely made of molybdenum materials.
In the present invention, molybdenum is chosen, which is rarely used in the semiconductor industry, but whose photoelectron spectroscopy is simple, does not affect the measurement of the major elements of most samples 4, and whose price is not too high. Therefore, the periphery of the surface to be measured of the sample 4 is surrounded by the substrate 1, the fixing plate 2 and the collimation plate 3 made of the molybdenum material, other surfaces except the narrow section to be measured are completely covered by the molybdenum fixture, the X-ray hardly reaches the molybdenum material, even a very small amount of interference signals brought by the molybdenum fixture can be deducted in a photoelectron spectrum, signal interference from other surfaces of the test sample 4 is effectively eliminated, signals from the section are received to the greatest extent, and the measurement accuracy is remarkably improved.
The sample clamp for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test is used for placing the sample 4 between the substrate 1 and the fixing plate 2, respectively clinging the front and back surfaces of the sample 4 to the substrate 1 and the fixing plate 2, and then adjusting the top surface of the fixing plate 2 and the section of the sample 4 to align to the lower surface of the collimation plate 3. The cross section of the sample 4 is flat, and the cross section of the sample 4 and the top surface of the fixing plate 2 are both attached to the lower surface of the collimating plate 3, so that the cross section of the sample 4 and the top surface of the fixing plate 2 are flush with the lower surface of the collimating plate 3, and interference signals from adjacent test surfaces of the test sample 4 can be better shielded. The adjustment of the cross-section of the sample 4 and the height of the top surface of the fixed plate 2 is suitable for the usual XPSZ-direction height calibration.
The sample clamp for eliminating the interference signals in the narrow-side-wall sample photoelectron spectroscopy test provided by the invention solves the problem that the interference signals from the adjacent surfaces have influence on the accuracy of the test result in the narrow-side-wall sample section photoelectron spectroscopy test, and is used for blocking the interference signals to ensure that only the signals from the section are received as far as possible, so that the precise test of the photoelectron spectroscopy of the section of the sample 4 is realized.
In addition, although fig. 1 shows that the height of the substrate 1 and the fixing plate 2 is greater than the height of the sample 4, the height relationship between the height of the substrate 1 and the fixing plate 2 and the height of the sample 4 is not limited to this, and the height of the substrate 1 and the fixing plate 2 may be less than or equal to the height of the sample 4. The heights of the substrate 1 and the fixing plate 2 may be equal or different. Because the interference signals which are mainly eliminated by the clamp are present in the adjacent surfaces next to the cross section. That is, the side surfaces of the substrate 1 and the fixing plate 2 are tightly attached to the front and back surfaces of the sample 4, and the top surface of the fixing plate 2 is aligned with the interface of the sample 4 through the aligning plate 3, so that the interference of the front and back surfaces of the sample 4 on the cross section measurement is well prevented; and the collimation plates 3 prevent the other two sides of the sample 4 from interfering with the cross-sectional measurement by covering both ends of the cross-section of the sample 4.
Generally, the height of the base plate 1 and the fixing plate 2 is not lower than 1/3 which is the height of the sample 4.
From the above, the collimating plate 3 not only has the function of calibrating the height of the cross section of the sample 4 and the top surface of the fixing plate 2, so that the cross section of the sample 4 and the top surface of the fixing plate 2 are tightly attached to the lower surface of the collimating plate 3, which can prevent the signal interference of other adjacent surfaces to the maximum extent, but also the collimating plate 3 itself prevents the interference of the other two side surfaces of the sample 4 to the cross section measurement by covering the two ends of the cross section of the sample 4, thus achieving the effect of improving the measurement accuracy through simple design as much as possible.
The number of the collimating plates 3 arranged on top of the base plate 1 may be one, or two or three. The collimation plates 3 are provided with a plurality of collimation plates, each collimation plate 3 is arranged in parallel, two collimation plates 3 are generally used in the using process, and the plurality of collimation plates 3 are arranged, so that samples 4 with different lengths can be conveniently dealt with.
In some possible embodiments, there are two collimation plates 3.
The two collimation plates 3 are arranged in parallel.
In some possible embodiments, the alignment plates 3 are respectively fixedly disposed at two ends of the top of the base plate 1 along the direction perpendicular to the extending direction of the alignment plates 3.
The collimating plates 3 are respectively arranged at two ends of the substrate 1, so that the testing requirements of photoelectron spectroscopy of different lengths of the sample 4 can be met to a greater extent, and if the length of the sample 4 is proper, the two ends of the sample 4 can be shielded by the collimating plates 3 at the two ends of the substrate 1; if the sample 4 is short, the sample 4 is only fixed on one side, i.e. one end of the sample 4 can be shielded by one of the collimating plates 3 at both ends of the substrate 1.
In some possible embodiments, the alignment plate 3 is slidably connected to the top of the base plate 1 along the direction perpendicular to the extending direction of the alignment plate 3.
The collimation plates 3 are arranged to be slidable to suit the needs of samples 4 of different lengths.
The slidable connection of the collimation plate 3 to the top of the base plate 1 can be achieved by providing a rail at the top of the base plate 1 in a direction perpendicular to the direction in which the collimation plate 3 extends, and providing a pulley, or a sliding groove, at the portion of the collimation plate 3 connected to the top of the base plate 1. Alternatively, the top of the base plate 1 is provided with a sliding groove along a direction perpendicular to the extending direction of the collimation plate 3, and the collimation plate 3 is provided with a track. Of course, the slidable connection is not limited to these ways, and any technical solution that can achieve the technical effect is within the scope of the present invention.
In the present invention, the sample 4 can be fixed by various methods, such as common snap-fit connection, hinge connection, screw connection, adhesion, etc., and corresponding components are disposed on the fixing plate 2 and the base plate 1 according to the corresponding connection method.
In some possible embodiments, more than one through hole 5 is provided on each of the base plate 1 and the fixing plate 2, and the through holes 5 are used for connecting the base plate 1 and the fixing plate 2 by placing a connecting piece to fix the sample 4.
In some possible embodiments, two rows and three columns of the through holes 5 are correspondingly arranged on the base plate 1 and the fixing plate 2, and the through holes 5 are uniformly distributed on the base plate 1 and the fixing plate 2.
Set up a plurality of through-holes 5 to reach the purpose of fixed not equidimension sample 4 through selecting different through-holes 5, it is more nimble. In addition, the user can install the clamp at any required position of the sample 4 table.
In some possible embodiments, the connecting member is a bolt and a nut. The connecting piece is a threaded connection which is formed by a bolt and a nut. The connection provided between the fixing plate 2 and the base plate 1 is not shown in fig. 1.
Screws were used to fix test specimens 4 of different sizes. And the whole clamp is fixed on the sample 4 table for photoelectron spectroscopy test.
The size of each part of the sample clamp for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test can refer to fig. 2-4, fig. 2 is a schematic front-view size diagram of the sample clamp for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test, wherein fig. 3 is a schematic side-view size diagram of the substrate 1 and the collimation plate 3; fig. 4 shows a schematic top view of the base plate 1 and the collimating plate 3. However, the size of the sample holder provided by the invention is not limited to this, and the corresponding size can be selected according to actual requirements.
The following illustrates the steps in the specific test:
the fixture shown in fig. 1 is custom made from molybdenum metal;
a silicon wafer with a gold-plated top surface is used as a test sample 4, so that the area of the top surface of the test sample 4 is ensured to be less than 20mm multiplied by 20mm, and the section is smooth;
placing the section of the test sample 4 right opposite to the front side of the clamp;
adjusting the position of the test sample 4 to make the section of the top surface of the test sample be equal to the top surface of the clamp;
screwing the screw to fix the position of the sample 4;
fixing the clamp on a sample 4 table by using a carbon double-sided adhesive tape;
and (6) testing.
The gold signal from the top surface of the test sample 4 can be shielded using this fixture.
In the present invention, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, an integral connection, or a virtual connection; "coupled" may be direct or indirect through an intermediary. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "front", "rear", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or unit must have a specific direction, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only exemplary of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for eliminating interference signals in a narrow-side-wall sample photoelectron spectroscopy test is characterized in that a substrate and a fixing plate are respectively attached to the front and back of a sample;
the top of the base plate is provided with a collimation plate, and the collimation plate extends outwards along the top of the base plate;
the section of the sample and the top surface of the fixing plate are attached to the lower surface of the collimation plate;
fixing the sample, exposing the part to be tested on the section of the sample, and then placing the sample on a sample table for testing;
wherein, the surfaces of the substrate, the fixed plate and the collimation plate are at least provided with a molybdenum layer with the thickness not less than 100 nm.
2. The method for eliminating interference signals in the photoelectron spectroscopy test of the narrow-side-wall sample according to claim 1, wherein the number of the collimating plates is two, and the two collimating plates are respectively arranged at two ends of the substrate.
3. The method for eliminating interference signals in the photoelectron spectroscopy test of the narrow-side-wall sample of claim 1, wherein the number of the alignment plates is two, and the alignment plates are slidably connected with the top of the substrate along a direction perpendicular to the extending direction of the alignment plates.
4. A sample clamp for eliminating interference signals in narrow-side-wall sample photoelectron spectroscopy is characterized by comprising a substrate and a fixing plate;
the top of the base plate is provided with at least one collimation plate, and the collimation plate extends outwards along the top of the base plate;
a connecting structure is arranged between the fixing plate and the substrate;
the surfaces of the substrate, the fixing plate and the collimation plate are at least provided with molybdenum layers with the thickness not less than 100 nm.
5. The sample holder for eliminating interference signals in the photoelectron spectroscopy of narrow-side-wall samples according to claim 4, wherein the number of the collimating plates is two.
6. The sample holder for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test of claim 5, wherein the collimating plates are respectively and fixedly arranged at two ends of the top of the substrate along the direction perpendicular to the extending direction of the collimating plates.
7. The sample holder for eliminating interference signals in the photoelectron spectroscopy of narrow-side-wall samples of claim 4, wherein the collimating plate is slidably connected to the top of the substrate along the direction perpendicular to the extending direction of the collimating plate.
8. The sample clamp for eliminating the interference signal in the narrow-side-wall sample photoelectron spectroscopy test of any one of claims 4 to 7, wherein more than one through hole is formed in each of the substrate and the fixing plate, and the through holes are used for connecting the substrate and the fixing plate through a connecting piece so as to fix the sample.
9. The sample holder for eliminating interference signals in the photoelectron spectroscopy of narrow-side-wall samples according to claim 8, wherein two rows and three columns of the through holes are correspondingly arranged on the substrate and the fixing plate, and the through holes are uniformly distributed on the substrate and the fixing plate.
10. The sample holder for eliminating interference signals in the narrow-side-wall sample photoelectron spectroscopy test of claim 8, wherein the connecting member is a bolt and a nut.
Priority Applications (1)
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113390948A (en) * | 2021-06-15 | 2021-09-14 | 胜科纳米（苏州）有限公司 | Preparation method of TOF-SIMS mass spectrum deep analysis semiconductor microchip multilayer film end face sample |
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