CN111128827A - Rotatable positioning device for semiconductor processing - Google Patents
Rotatable positioning device for semiconductor processing Download PDFInfo
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- CN111128827A CN111128827A CN201811296224.6A CN201811296224A CN111128827A CN 111128827 A CN111128827 A CN 111128827A CN 201811296224 A CN201811296224 A CN 201811296224A CN 111128827 A CN111128827 A CN 111128827A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
The invention discloses a rotatable positioning device for semiconductor processing, which comprises a clamp seat, a motor seat, a positioning table and a control box, wherein the control box and supporting legs are arranged below the positioning table, the supporting legs and the positioning table are welded through electric welding, the control box and the positioning table are connected through bolts, a partition plate is arranged in the control box, a controller and a processor are arranged above the partition plate, and the controller and the processor are respectively fixed on the partition plate through screws. Has the advantages that: the multi-freedom-degree positioning and fixing device for semiconductor processing is reasonable in structure, simple to operate and convenient to use, can realize multi-freedom-degree positioning and fixing of semiconductor processing, enables the semiconductor processing to be more convenient, improves the working efficiency of the semiconductor processing, is more intelligent in control, and can realize more accurate positioning in the semiconductor processing process, so that the processing precision of the semiconductor processing is improved.
Description
Technical Field
The invention relates to the field of semiconductor processing, in particular to a rotatable positioning device for semiconductor processing.
Background
The semiconductor refers to a material having a conductivity between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement. Such as diodes, are devices fabricated using semiconductors. Semiconductor refers to a material whose conductivity can be controlled, ranging from an insulator to a conductor. The importance of semiconductors is enormous, both from a technological and economic point of view. Most of today's electronic products, such as computers, mobile phones or digital audio recorders, have a core unit closely related to semiconductors. The semiconductor processing positioning device has the advantages that the semiconductor needs to be accurately positioned in the processing production process, the semiconductor processing positioning devices provided on the market at present are many, but the devices are low in intelligent degree, unreasonable in structural design and inconvenient to use and operate, so that the semiconductor progress multi-degree-of-freedom positioning cannot be realized, the positioning precision is low, and the working efficiency and the processing quality of semiconductor processing are influenced.
Disclosure of Invention
The invention aims to solve the problems and provides a rotatable positioning device for semiconductor processing.
The invention realizes the purpose through the following technical scheme:
the utility model provides a rotatable positioner for semiconductor processing, includes anchor clamps seat, motor cabinet, location platform, control box, the location platform below is provided with control box and landing leg, the landing leg with through the electric welding between the location platform, the control box with through bolted connection between the location platform, be provided with the baffle in the control box, the baffle top is provided with controller and treater, the model of controller is SPC-STW-26A1, the model of treater is MT6995, the controller with the treater passes through the fix with screw respectively on the baffle, the baffle below is provided with the converter, the model of converter is 6SL3982-5CX10-0AA1, the converter passes through the fix with screw in the control box, location platform top one end is provided with the control cabinet, the control cabinet passes through the fix with screw on the location platform, the other end above the positioning table is provided with a fixed seat, the fixed seat is fixed on the positioning table through a bolt, a first supporting seat and a second supporting seat are arranged above the fixed seat, the first supporting seat and the second supporting seat are respectively connected with the fixed seat through bolts, a connecting seat is arranged between the first supporting seat and the second supporting seat, the connecting seat is respectively connected with the first supporting seat and the second supporting seat through bearings, the first supporting seat is provided with an angle motor, the angle motor is connected with the first supporting seat through bolts, the second supporting seat is provided with a first encoder, the first encoder is fixed on the second supporting seat through screws, the motor seat is arranged above the connecting seat, and the motor seat is connected with the connecting seat through bolts, a rotary motor is arranged in the motor base, the rotary motor is connected with the motor base through a bolt, a second encoder is arranged below the rotary motor, the types of the first encoder and the second encoder are E50S8, the second encoder is connected with the motor base through a screw, a supporting guide structure is arranged above the motor base, the clamp base is arranged above the supporting guide structure, a clamping block is arranged on the clamp base, the clamping block is in sliding connection with the clamp base, a clamping motor is arranged on the side face of the clamp base, the clamping motor is connected with the clamp base through a bolt, a torsion sensor is arranged at the other end of the clamping motor, the type of the torsion sensor is CD1050, the torsion sensor is connected with the clamping motor through a screw, and a clamping disc and a bevel gear are arranged in the clamp base, the angle motor, the clamping motor and the rotating motor are respectively connected to the frequency converter through leads.
Further setting: a supporting beam is arranged between the supporting legs, and the supporting legs and the supporting beam are welded through electric welding.
So set up, the supporting beam is used for strengthening the landing leg, makes through the electric welding the connection between landing leg and the supporting beam more firm.
Further setting: and a support leg is arranged below the support leg, and the support leg is connected with the support leg through threads.
With the arrangement, the support leg has the functions of skid resistance and buffering, and the connection effect between the support leg and the support leg is better through threaded connection.
Further setting: the control console is provided with a touch display screen, and the touch display screen is fixed on the control console through screws.
So set up, touch display screen is used for carrying out parameter setting to the device, makes through the screw connection touch display screen with the connection effect between the control cabinet is better.
Further setting: the touch display screen the place ahead is provided with speaker and swift keyboard, the treater the converter with the speaker is connected to through the wire respectively the controller, swift keyboard the touch display screen first encoder torque sensor with the second encoder is connected to through the wire respectively the treater.
So set up, the speaker is used for sending the sound suggestion, swift keyboard is used for carrying out quick operation.
Further setting: the loudspeaker and the shortcut keyboard are fixed on the console through screws respectively.
So set up, make through screwed connection the speaker with swift keyboard respectively with the connected effect between the control cabinet is better.
Further setting: the support guide structure comprises an upper support guide ring, a ball and a lower support guide ring, wherein the ball is positioned between the upper support guide ring and the lower support guide ring, and the upper support guide ring is positioned above the lower support guide ring.
So set up, upper support guide ring and lower support guide ring are used for supporting and direction.
Further setting: the upper support guide ring is connected with the clamp seat through a bolt.
So set up, make through bolted connection go up support guide ring with the connection effect between the anchor clamps seat is better.
Further setting: the lower support guide ring is connected with the motor base through a bolt.
So set up, make through bolted connection the under bracing guide ring with the connection effect between the motor cabinet is better.
Further setting: the ball with go up support guide ring with clearance fit between the lower support guide ring.
So set up, clearance fit makes the lower support guide ring with can rotate relatively between the upper support guide ring.
Compared with the prior art, the invention has the following beneficial effects:
1. the structure is reasonable, the operation is simple, and the use is convenient;
2. the multi-degree-of-freedom positioning and fixing of semiconductor processing can be realized, so that the semiconductor processing is more convenient, and the working efficiency of the semiconductor processing is improved;
3. the control aspect is more intelligent, and more accurate positioning can be realized in the semiconductor processing process, so that the processing precision of semiconductor processing is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic perspective view of a rotatable positioning apparatus for semiconductor processing according to the present invention;
FIG. 2 is a schematic rear perspective view of a rotatable positioning apparatus for semiconductor processing according to the present invention;
FIG. 3 is an exploded view of a support guide structure of a rotatable positioning apparatus for semiconductor processing according to the present invention;
FIG. 4 is a view showing the internal structure of a motor base of a rotatable positioning apparatus for semiconductor processing according to the present invention;
FIG. 5 is a view showing an internal structure of a jig base of a rotatable positioning apparatus for semiconductor processing according to the present invention;
FIG. 6 is a view showing the internal structure of a control box of a rotatable positioning apparatus for semiconductor processing according to the present invention;
fig. 7 is a block diagram of a circuit configuration of a rotatable positioning apparatus for semiconductor processing according to the present invention.
The reference numerals are explained below:
1. a clamping block; 2. a clamp seat; 3. supporting the guide structure; 4. a motor base; 5. an angle motor; 6. a first support base; 7. a positioning table; 8. a support leg; 9. a support beam; 10. a support leg; 11. a control box; 12. a shortcut keyboard; 13. a touch display screen; 14. a console; 15. a speaker; 16. a fixed seat; 17. a second support seat; 18. a connecting seat; 19. clamping the motor; 20. a torque sensor; 21. a first encoder; 22. an upper support guide ring; 23. a ball bearing; 24. a lower support guide ring; 25. a rotating electric machine; 26. a second encoder; 27. clamping the disc; 28. a bevel gear; 29. a controller; 30. a partition plate; 31. a frequency converter; 32. a processor.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The invention will be further described with reference to the accompanying drawings in which:
as shown in fig. 1-7, a rotatable positioning device for semiconductor processing comprises a clamp base 2, a motor base 4, a positioning table 7 and a control box 11, wherein the control box 11 and a leg 8 are arranged below the positioning table 7, the leg 8 is used for supporting a device, the leg 8 and the positioning table 7 are welded by electric welding, the control box 11 and the positioning table 7 are connected by bolts, a partition plate 30 is arranged in the control box 11, a controller 29 and a processor 32 are arranged above the partition plate 30, the controller 29 is used for controlling, the processor 32 is used for processing signals and data, the controller 29 and the processor 32 are respectively fixed on the partition plate 30 by screws, a frequency converter 31 is arranged below the partition plate 30, the frequency converter 31 is used for controlling the motor, the frequency converter 31 is fixed in the control box 11 by screws, the control table 14 is arranged at one end above the positioning table 7, the control table 14 is fixed on the positioning table 7 by screws, the other end above the positioning table 7 is provided with a fixed seat 16, the fixed seat 16 is used for fixing a first supporting seat 6 and a second supporting seat 17, the fixed seat 16 is fixed on the positioning table 7 through bolts, the fixed seat 16 is provided with the first supporting seat 6 and the second supporting seat 17, the first supporting seat 6 and the second supporting seat 17 are respectively connected with the fixed seat 16 through bolts, a connecting seat 18 is arranged between the first supporting seat 6 and the second supporting seat 17, the connecting seat 18 is used for driving the motor seat 4, the connecting seat 18 is respectively connected with the first supporting seat 6 and the second supporting seat 17 through bearings, the first supporting seat 6 is provided with an angle motor 5, the angle motor 5 is used for driving the connecting seat 18, the angle motor 5 is connected with the first supporting seat 6 through bolts, the second supporting seat 17 is provided with a first encoder 21, the first encoder 21 is used for detecting and feeding back the rotation angle of the connecting seat 18, the first encoder 21 is fixed on the second supporting seat 17 through screws, a motor seat 4 is arranged above the connecting seat 18, the motor seat 4 is used for fixing a rotating motor 25, the motor seat 4 is connected with the connecting seat 18 through bolts, the rotating motor 25 is arranged in the motor seat 4, the rotating motor 25 is used for driving the clamp seat 2, the rotating motor 25 is connected with the motor seat 4 through bolts, a second encoder 26 is arranged below the rotating motor 25, the second encoder 26 is used for detecting and feeding back the rotating angle of the clamp seat 2, the second encoder 26 is connected with the motor seat 4 through screws, a supporting and guiding structure 3 is arranged above the motor seat 4, the supporting and guiding structure 3 is used for supporting and guiding, a clamp seat 2 is arranged above the supporting and guiding structure 3, a clamping block 1 is arranged above the clamp seat 2, the clamping block 1 is used for clamping a workpiece, and the clamping block 1 is in sliding connection with the clamp seat 2, the side of the clamp seat 2 is provided with a clamping motor 19, the clamping motor 19 is used for driving a bevel gear 28, the clamping motor 19 is connected with the clamp seat 2 through a bolt, the other end of the clamping motor 19 is provided with a torque sensor 20, the torque sensor 20 is used for detecting and feeding back the torque of the clamping motor 19, the torque sensor 20 is connected with the clamping motor 19 through a screw, a clamping disc 27 and the bevel gear 28 are arranged in the clamp seat 2, the bevel gear 28 is used for driving the clamping disc 27, the clamping disc 27 is used for driving the clamping block 1, the clamping disc 27 is connected with the clamp seat 2 through a bearing, the bevel gear 28 is connected with the clamping motor 19 through a spline, the bevel gear 28 is meshed with the clamping disc 27, the clamping disc 27 is meshed with the clamping block 1, and the angle motor 5, the clamping motor 19 and the rotating motor 25 are respectively.
Be provided with a supporting beam 9 between the landing leg 8, through electric welding between landing leg 8 and the supporting beam 9, supporting beam 9 is used for strengthening landing leg 8, and it is more firm to make the connection between landing leg 8 and the supporting beam 9 through electric welding.
The landing leg 8 below is provided with the stabilizer blade 10, through threaded connection between stabilizer blade 10 and the landing leg 8, and the stabilizer blade 10 is used for the effect of antiskid and buffering, makes the connection effect between stabilizer blade 10 and the landing leg 8 better through threaded connection.
The control console 14 is provided with the touch display screen 13, the touch display screen 13 is fixed on the control console 14 through screws, the touch display screen 13 is used for setting parameters of the device, and the connection effect between the touch display screen 13 and the control console 14 is better through screw connection.
The front of the touch display screen 13 is provided with a loudspeaker 15 and a shortcut keyboard 12, the processor 32, the frequency converter 31 and the loudspeaker 15 are respectively connected to the controller 29 through conducting wires, the shortcut keyboard 12, the touch display screen 13, the first encoder 21, the torsion sensor 20 and the second encoder 26 are respectively connected to the processor 32 through conducting wires, the loudspeaker 15 is used for emitting sound prompt, and the shortcut keyboard 12 is used for performing quick operation.
The loudspeaker 15 and the shortcut keyboard 12 are respectively fixed on the console 14 through screws, and the connection effect between the loudspeaker 15 and the shortcut keyboard 12 and the console 14 is better through screw connection.
The support guide structure 3 includes an upper support guide ring 22, balls 23 and a lower support guide ring 24, the balls 23 are located between the upper support guide ring 22 and the lower support guide ring 24, the upper support guide ring 22 is located above the lower support guide ring 24, and the upper support guide ring 22 and the lower support guide ring 24 are used for supporting and guiding.
The upper supporting guide ring 22 is connected with the clamp seat 2 through bolts, and the connection effect between the upper supporting guide ring 22 and the clamp seat 2 is better through the bolt connection.
The lower support guide ring 24 is connected with the motor base 4 through bolts, and the connection effect between the lower support guide ring 24 and the motor base 4 is better through the bolt connection.
The balls 23 are in clearance fit with the upper support guide ring 22 and the lower support guide ring 24, and the clearance fit enables the lower support guide ring 24 and the upper support guide ring 22 to rotate relatively.
The working principle is as follows: the power is switched on, the parameter setting is carried out through the touch display screen 13, the torque sensor 20 can detect and feed back the clamping torque, the second encoder 26 can detect and feed back the horizontal rotation angle, the first encoder 21 can detect and feed back the vertical rotation angle, after the parameter setting is finished, the workpiece is placed between the clamping blocks 1, the clamping torsion can be quickly set through the quick keyboard 12, the clamping block 1 clamps the workpiece according to the set value under the action force of the clamping motor 19, the horizontal rotation angle can be rapidly set by the shortcut keyboard 12, the clamp holder 2 is rotated according to a set value under the acting force of the rotating motor 25, vertical rotation angle can be set rapidly through the shortcut keyboard 12, the connecting seat 18 swings under the acting force of the angle motor 5 according to a set value, and the speaker 15 gives a voice prompt after the positioning of the workpiece is completed according to the set value.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. A rotatable positioning apparatus for semiconductor processing, characterized by: comprises a clamp seat (2), a motor seat (4), a positioning table (7) and a control box (11), wherein the control box (11) and supporting legs (8) are arranged below the positioning table (7), the supporting legs (8) and the positioning table (7) are welded by electric welding, the control box (11) and the positioning table (7) are connected by bolts, a partition plate (30) is arranged in the control box (11), a controller (29) and a processor (32) are arranged above the partition plate (30), the controller (29) and the processor (32) are respectively fixed on the partition plate (30) by screws, a frequency converter (31) is arranged below the partition plate (30), the frequency converter (31) is fixed in the control box (11) by screws, one end above the positioning table (7) is provided with the control table (14), and the control table (14) is fixed on the positioning table (7) by screws, the other end above the positioning table (7) is provided with a fixing seat (16), the fixing seat (16) is fixed on the positioning table (7) through a bolt, a first supporting seat (6) and a second supporting seat (17) are arranged above the fixing seat (16), the first supporting seat (6) and the second supporting seat (17) are respectively connected with the fixing seat (16) through a bolt, a connecting seat (18) is arranged between the first supporting seat (6) and the second supporting seat (17), the connecting seat (18) is respectively connected with the first supporting seat (6) and the second supporting seat (17) through a bearing, an angle motor (5) is arranged on the first supporting seat (6), the angle motor (5) is connected with the first supporting seat (6) through a bolt, a first encoder (21) is arranged on the second supporting seat (17), the first encoder (21) is fixed on the second supporting seat (17) through a screw, the motor base (4) is arranged above the connecting seat (18), the motor base (4) is connected with the connecting seat (18) through a bolt, a rotating motor (25) is arranged in the motor base (4), the rotating motor (25) is connected with the motor base (4) through a bolt, a second encoder (26) is arranged below the rotating motor (25), the second encoder (26) is connected with the motor base (4) through a screw, a supporting and guiding structure (3) is arranged above the motor base (4), the clamp base (2) is arranged above the supporting and guiding structure (3), a clamping block (1) is arranged above the clamp base (2), and the clamping block (1) is connected with the clamp base (2) in a sliding manner, a clamping motor (19) is arranged on the side surface of the clamp seat (2), the clamping motor (19) is connected with the clamp seat (2) through a bolt, a torsion sensor (20) is arranged at the other end of the clamping motor (19), the torsion sensor (20) is connected with the clamping motor (19) through a screw, a clamping disc (27) and a bevel gear (28) are arranged in the clamp seat (2), the clamping disc (27) is connected with the clamp seat (2) through a bearing, the bevel gear (28) and the clamping motor (19) are connected through a spline, the bevel gear (28) and the clamping disc (27) are meshed together, the clamping disc (27) and the clamping block (1) are meshed together, the angle motor (5), the clamping motor (19) and the rotating motor (25) are respectively connected to the frequency converter (31) through wires.
2. A rotatable positioning apparatus for semiconductor processing as recited in claim 1, wherein: a supporting beam (9) is arranged between the supporting legs (8), and the supporting legs (8) and the supporting beam (9) are welded through electric welding.
3. A rotatable positioning apparatus for semiconductor processing as set forth in claim 2, wherein: a support leg (10) is arranged below the support leg (8), and the support leg (10) is connected with the support leg (8) through threads.
4. A rotatable positioning apparatus for semiconductor processing as set forth in claim 3, wherein: the control console (14) is provided with a touch display screen (13), and the touch display screen (13) is fixed on the control console (14) through screws.
5. A rotatable positioning apparatus for semiconductor processing as set forth in claim 4, wherein: touch display screen (13) the place ahead is provided with speaker (15) and swift keyboard (12), treater (32) converter (31) with speaker (15) are connected to through the wire respectively controller (29), swift keyboard (12) touch display screen (13) first encoder (21) torque sensor (20) with second encoder (26) are connected to through the wire respectively treater (32).
6. A rotatable positioning apparatus for semiconductor processing as set forth in claim 5, wherein: the loudspeaker (15) and the shortcut keyboard (12) are respectively fixed on the console (14) through screws.
7. A rotatable positioning apparatus for semiconductor processing as set forth in claim 6, wherein: the support guide structure (3) comprises an upper support guide ring (22), balls (23) and a lower support guide ring (24), the balls (23) are located between the upper support guide ring (22) and the lower support guide ring (24), and the upper support guide ring (22) is located above the lower support guide ring (24).
8. A rotatable positioning apparatus for semiconductor processing as set forth in claim 7, wherein: the upper support guide ring (22) is connected with the clamp seat (2) through a bolt.
9. A rotatable positioning apparatus for semiconductor processing as set forth in claim 8, wherein: the lower support guide ring (24) is connected with the motor base (4) through bolts.
10. A rotatable positioning apparatus for semiconductor processing as set forth in claim 9, wherein: the balls (23) are in clearance fit with the upper support guide ring (22) and the lower support guide ring (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811296224.6A CN111128827A (en) | 2018-11-01 | 2018-11-01 | Rotatable positioning device for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811296224.6A CN111128827A (en) | 2018-11-01 | 2018-11-01 | Rotatable positioning device for semiconductor processing |
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| Publication Number | Publication Date |
|---|---|
| CN111128827A true CN111128827A (en) | 2020-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811296224.6A Pending CN111128827A (en) | 2018-11-01 | 2018-11-01 | Rotatable positioning device for semiconductor processing |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1902556A (en) * | 2003-12-01 | 2007-01-24 | 德事隆系统公司 | Positioning system with continuous-range inclination and rotation angles |
| CN104555367A (en) * | 2013-10-16 | 2015-04-29 | Smc株式会社 | Workpiece positioning device |
| CN205600320U (en) * | 2016-03-01 | 2016-09-28 | 深圳市鑫科隆工业自动化有限公司 | High -precision swivel table |
| CN107443104A (en) * | 2017-09-18 | 2017-12-08 | 嘉泰数控科技股份公司 | A kind of machining center for being used to process wheel hub |
| KR101844782B1 (en) * | 2017-11-21 | 2018-04-03 | 박명식 | fixture assembly for a machining center |
| CN108461440A (en) * | 2018-03-30 | 2018-08-28 | 上海新创达智能科技有限公司 | A kind of wafer centralising device and method |
-
2018
- 2018-11-01 CN CN201811296224.6A patent/CN111128827A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1902556A (en) * | 2003-12-01 | 2007-01-24 | 德事隆系统公司 | Positioning system with continuous-range inclination and rotation angles |
| CN104555367A (en) * | 2013-10-16 | 2015-04-29 | Smc株式会社 | Workpiece positioning device |
| CN205600320U (en) * | 2016-03-01 | 2016-09-28 | 深圳市鑫科隆工业自动化有限公司 | High -precision swivel table |
| CN107443104A (en) * | 2017-09-18 | 2017-12-08 | 嘉泰数控科技股份公司 | A kind of machining center for being used to process wheel hub |
| KR101844782B1 (en) * | 2017-11-21 | 2018-04-03 | 박명식 | fixture assembly for a machining center |
| CN108461440A (en) * | 2018-03-30 | 2018-08-28 | 上海新创达智能科技有限公司 | A kind of wafer centralising device and method |
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Application publication date: 20200508 |
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