CN111124502B

CN111124502B - Method for accelerating driving program of optical fiber loop main controller of ion implanter

Info

Publication number: CN111124502B
Application number: CN201811306650.3A
Authority: CN
Inventors: 周雷
Original assignee: Beijing Zhongkexin Electronic Equipment Co Ltd
Current assignee: Beijing Zhongkexin Electronic Equipment Co Ltd
Priority date: 2018-10-31
Filing date: 2018-10-31
Publication date: 2022-06-28
Anticipated expiration: 2038-10-31
Also published as: CN111124502A

Abstract

The invention discloses a method for accelerating a driver of an optical fiber loop main controller of an ion implanter, which comprises the following steps: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5). The optical fiber loop main controller board card (1) is necessary hardware equipment and runs on an ion implanter. The memory buffer (2) and the timer (3) are Windows system resources. The driver (4) and the interface (5) are components of the ion implanter software.

Description

Method for accelerating driving program of optical fiber loop main controller of ion implanter

Technical Field

The method is applied to the ion implanter software, can improve the driving speed of the optical fiber loop main controller, and can avoid the problem of data display jamming in the beam-adjusting interface, thereby improving the use experience and the beam-adjusting efficiency of the software.

Background

Ion implanters are important equipment in microelectronic fabrication. In the ion implanter software, the fiber loop main controller driver is a very important driver. It controls the input and output of nearly thousands of digital and analog quantities in an ion implanter. These digital and analog ports, in turn, control the power supplies, valves, and pumps of the ion implanter. In establishing a beam interface of ion implanter software, a large amount of power supply and Faraday cup feedback data need to be displayed in real time. These data are all from the fibre loop master controller driver. When the driving speed of the optical fiber loop main controller is low, the problem of blockage of data updating of the beam adjusting interface can occur, and the use experience and the beam adjusting efficiency of software can be reduced. Therefore, the speed of driving the optical fiber loop main controller is significant.

Disclosure of Invention

The invention discloses a method for accelerating a driver of an optical fiber loop main controller of an ion implanter, which is mainly used in ion implanter software. There is a need for real-time display of a large amount of power supply and faraday cup feedback data in a beam-conditioning interface of an ion implanter. The method can improve the driving speed of the optical fiber loop main controller, and avoid the problem of data display jamming of the beam-adjusting interface.

The invention is realized by the following technical scheme: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5).

The method is characterized in that: and after sending a read operation command to the optical fiber loop main controller board card (1) each time, the driver (4) backs up all IO (input/output) returned by the optical fiber loop main controller board card into a predefined memory buffer (2), and simultaneously starts a timer (3) to start timing. When the interface program (5) calls the driving program (4) to read a certain IO amount, if the timing value of the timer (3) is smaller than a set value at the moment, the driving program (4) directly reads the backup IO amount required by the interface program (5) from the memory buffer (2), if the timing value is larger than the set value, the reading operation command is sent to the optical fiber loop main controller board (1) again, all digital and analog port IO amounts returned by the optical fiber loop main controller board (1) are backed up in the memory buffer (2), the timing value of the timer (3) is reset at the same time, and finally the IO amount required by the interface program (5) is returned.

Drawings

FIG. 1 flow chart of the driving procedure

Detailed Description

1. A method for accelerating a driver of an optical fiber loop main controller of an ion implanter comprises the following steps: the system comprises an optical fiber loop main controller board card (1), a memory buffer (2), a timer (3), a driving program (4) and an interface program (5).

2. After the driver (4) sends a read operation command to the optical fiber loop main controller board card (1) each time, all digital and analog port IO quantities returned by the optical fiber loop main controller board card (1) are backed up to the predefined memory buffer (2), and the timer (3) is started to start timing at the same time.

3. When the interface program (5) calls the driving program (4) to read a certain IO amount, the driving program (4) firstly reads the timing value of the timer (3). And if the timing value of the timer (3) is smaller than the set value at the moment, directly reading the backup IO amount required by the interface program (5) from the memory buffer (2) and returning the backup IO amount to the interface program (5). If the timing value is larger than the set value, the optical fiber loop main controller board card (1) is sent with a read operation command again, all digital and analog port IO quantities returned by the optical fiber loop main controller board card (1) are backed up in the memory buffer (2), the timing value of the timer (3) is reset at the same time, and finally the IO quantities required by the interface program (5) are returned.

The contents of this patent have been described in detail with respect to specific embodiments thereof. Any obvious modifications thereof, which would be obvious to one skilled in the art without departing from the spirit of the invention, constitute an infringement of this invention and are therefore subject to corresponding legal liability.

Claims

1. A method for accelerating the speed of a main controller driver of an optical fiber loop of an ion implanter is characterized in that: after a drive program sends a read operation command to the optical fiber loop main controller board card every time, all IO (input/output) quantities returned by the optical fiber loop main controller board card are backed up to a memory buffer, a timer is started to start timing, when an interface program calls the drive program to read a certain IO quantity, if the timing value is smaller than a set value at the moment, the drive program directly reads the backed IO quantity required by the interface program from the memory buffer, if the timing value is larger than the set value, the read operation command is sent to the optical fiber loop main controller board card again, and the IO quantity required by the interface program is read from the optical fiber loop main controller board card.

2. The method according to claim 1, wherein the driver backs up all digital and analog port IO volumes returned by the optical fiber loop main controller board to a predefined memory buffer after sending a read operation command to the optical fiber loop main controller board each time, and simultaneously starts a timer to start timing.

3. The method according to claim 1, wherein when the interface program calls the driver program to read a certain IO volume, the driver program first reads a timing value of the timer, and if the timing value of the timer is smaller than a set value, the driver program directly reads a backup IO volume required by the interface program from the memory buffer and returns the backup IO volume to the interface program, and if the timing value is larger than the set value, the driver program sends a read operation command to the optical fiber loop host controller board again, backs up all digital and analog port IO volumes returned by the optical fiber loop host controller board to the memory buffer, resets the timing value of the timer, and finally returns the IO volume required by the interface program.