CN111124502A - Method for accelerating driving program of optical fiber loop main controller of ion implanter - Google Patents

Method for accelerating driving program of optical fiber loop main controller of ion implanter Download PDF

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Publication number
CN111124502A
CN111124502A CN201811306650.3A CN201811306650A CN111124502A CN 111124502 A CN111124502 A CN 111124502A CN 201811306650 A CN201811306650 A CN 201811306650A CN 111124502 A CN111124502 A CN 111124502A
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China
Prior art keywords
optical fiber
main controller
fiber loop
loop main
controller board
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CN201811306650.3A
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Chinese (zh)
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CN111124502B (en
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周雷
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Beijing Zhongkexin Electronic Equipment Co Ltd
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Beijing Zhongkexin Electronic Equipment Co Ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00Arrangements for program control, e.g. control units
    • G06F9/06Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44Arrangements for executing specific programs
    • G06F9/4401Bootstrapping
    • G06F9/4411Configuring for operating with peripheral devices; Loading of device drivers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30Electron or ion beam tubes for processing objects
    • H01J2237/317Processing objects on a microscale
    • H01J2237/31701Ion implantation

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  • Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Security & Cryptography (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optical Communication System (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)

Abstract

The invention discloses a method for accelerating a driver of an optical fiber loop main controller of an ion implanter, which comprises the following steps: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5). The optical fiber loop main controller board card (1) is necessary hardware equipment and runs on an ion implanter. The memory buffer (2) and the timer (3) are Windows system resources. The driver (4) and the interface (5) are components of the ion implanter software.

Description

Method for accelerating driving program of optical fiber loop main controller of ion implanter
Technical Field
The method is applied to the ion implanter software, can improve the driving speed of the optical fiber loop main controller, and can avoid the problem of data display jamming in the beam-adjusting interface, thereby improving the use experience and the beam-adjusting efficiency of the software.
Background
Ion implanters are important equipment in microelectronic fabrication. In the ion implanter software, the fiber loop main controller driver is a very important driver. It controls the input and output of nearly thousands of digital and analog quantities in an ion implanter. These digital and analog ports, in turn, control the power supplies, valves, and pumps of the ion implanter. In establishing a beam interface of ion implanter software, a large amount of power supply and Faraday cup feedback data need to be displayed in real time. These data are all from the fibre loop master controller driver. When the driving speed of the optical fiber loop main controller is low, the problem of blockage of data updating of the beam adjusting interface can occur, and the use experience and the beam adjusting efficiency of software can be reduced. Therefore, the speed of driving the optical fiber loop main controller is significant.
Disclosure of Invention
The invention discloses a method for accelerating a driver of an optical fiber loop main controller of an ion implanter, which is mainly used in ion implanter software. There is a need for real-time display of a large amount of power supply and faraday cup feedback data in a beam-conditioning interface of an ion implanter. The method can improve the driving speed of the optical fiber loop main controller, and avoid the problem of data display jamming of the beam-adjusting interface.
The invention is realized by the following technical scheme: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5).
The method is characterized in that: and after sending a read operation command to the optical fiber loop main controller board card (1) each time, the driver (4) backs up all IO (input/output) returned by the optical fiber loop main controller board card into a predefined memory buffer (2), and simultaneously starts a timer (3) to start timing. When the interface program (5) calls the driving program (4) to read a certain IO amount, if the timing value of the timer (3) is smaller than a set value at the moment, the driving program (4) directly reads the backup IO amount required by the interface program (5) from the memory buffer (2), if the timing value is larger than the set value, the reading operation command is sent to the optical fiber loop main controller board (1) again, all digital and analog port IO amounts returned by the optical fiber loop main controller board (1) are backed up in the memory buffer (2), the timing value of the timer (3) is reset at the same time, and finally the IO amount required by the interface program (5) is returned.
Drawings
FIG. 1 flow chart of the driving procedure
Detailed Description
1. A method for accelerating a driver of an optical fiber loop main controller of an ion implanter comprises the following steps: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5).
2. After a drive program (4) sends a read operation command to the optical fiber loop main controller board (1) every time, all digital and analog port IO quantities returned by the optical fiber loop main controller board (1) are backed up in a predefined memory buffer (2), and a timer (3) is started to start timing at the same time.
3. When the interface program (5) calls the driver (4) to read a certain IO amount, the driver (4) firstly reads the timing value of the timer (3). And if the timing value of the timer (3) is smaller than the set value at the moment, directly reading the backup IO amount required by the interface program (5) from the memory buffer (2) and returning the backup IO amount to the interface program (5). And if the timing value is larger than the set value, sending a read operation command to the optical fiber loop main controller board (1) again, backing up all digital and analog port IO (input/output) quantities returned by the optical fiber loop main controller board (1) into the memory buffer (2), resetting the timing value of the timer (3) at the same time, and finally returning the IO quantities required by the interface program (5).
The contents of the present patent have been described in detail with reference to specific embodiments thereof. Any obvious modifications to the disclosure herein disclosed which do not depart from the spirit of the disclosure herein will be readily apparent to those skilled in the art as a violation of the disclosure and the pertinent legal responsibility will be afforded thereto.

Claims (3)

1. A method for accelerating a driver of an optical fiber loop main controller of an ion implanter comprises the following steps: the optical fiber loop main controller board card (1), the memory buffer (2), the timer (3), the driver (4) and the interface program (5). The method is characterized in that: and after the drive program (4) sends a read operation command to the optical fiber loop main controller board card (1) every time, backing up all IO (input/output) quantities returned by the optical fiber loop main controller board card into the memory buffer (2), and starting the timer (3) to start timing. When the interface program (5) calls the driving program (4) to read a certain IO amount, if the timing value is smaller than the set value at the moment, the driving program (4) directly reads the backup IO amount required by the interface program (5) from the memory buffer (2), if the timing value is larger than the set value, the reading operation command is sent to the optical fiber loop main controller board (1) again, and the IO amount required by the interface program (5) is read from the optical fiber loop main controller board (1).
2. The method for speeding up the driver of the optical fiber loop main controller of the ion implanter according to claim 1, wherein the driver (4) backs up all the digital and analog port IO volumes returned by the optical fiber loop main controller board (1) into a predefined memory buffer (2) after sending a read operation command to the optical fiber loop main controller board (1) each time, and starts the timer (3) to start timing at the same time.
3. A method as claimed in claim 1, wherein the interface program (5) calls the driver (4) to read a certain IO volume, and the driver (4) first reads the timing value of the timer (3). And if the timing value of the timer (3) is smaller than the set value at the moment, directly reading the backup IO amount required by the interface program (5) from the memory buffer (2) and returning the backup IO amount to the interface program (5). And if the timing value is larger than the set value, sending a read operation command to the optical fiber loop main controller board (1) again, backing up all digital and analog port IO quantities returned by the optical fiber loop main controller board (1) into the memory buffer (2), resetting the timing value of the timer (3) at the same time, and finally returning the IO quantities required by the interface program (5).
CN201811306650.3A 2018-10-31 2018-10-31 Method for accelerating driving program of optical fiber loop main controller of ion implanter Active CN111124502B (en)

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CN111124502B CN111124502B (en) 2022-06-28

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112596818A (en) * 2020-12-30 2021-04-02 上海众源网络有限公司 Application program control method, system and device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5606681A (en) * 1994-03-02 1997-02-25 Eec Systems, Inc. Method and device implementing software virtual disk in computer RAM that uses a cache of IRPs to increase system performance
CN101286143A (en) * 2008-05-26 2008-10-15 中兴通讯股份有限公司 Method for supervisory unit driving cache
CN107643989A (en) * 2016-07-22 2018-01-30 北京中科信电子装备有限公司 One kind is based on pci bus agreement dual fiber ring road redundancy structure Communication Card

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5606681A (en) * 1994-03-02 1997-02-25 Eec Systems, Inc. Method and device implementing software virtual disk in computer RAM that uses a cache of IRPs to increase system performance
CN101286143A (en) * 2008-05-26 2008-10-15 中兴通讯股份有限公司 Method for supervisory unit driving cache
CN107643989A (en) * 2016-07-22 2018-01-30 北京中科信电子装备有限公司 One kind is based on pci bus agreement dual fiber ring road redundancy structure Communication Card

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
邱小莎等: "LC19离子注入机控制方法及主控制器原理分析", 《微细加工技术》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112596818A (en) * 2020-12-30 2021-04-02 上海众源网络有限公司 Application program control method, system and device
CN112596818B (en) * 2020-12-30 2023-12-05 上海众源网络有限公司 Application program control method, system and device

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