CN111111542B - A material loading structure that is used for high-purity electronic grade chemistry blending device - Google Patents
A material loading structure that is used for high-purity electronic grade chemistry blending device Download PDFInfo
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- CN111111542B CN111111542B CN201911374803.2A CN201911374803A CN111111542B CN 111111542 B CN111111542 B CN 111111542B CN 201911374803 A CN201911374803 A CN 201911374803A CN 111111542 B CN111111542 B CN 111111542B
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- Prior art keywords
- butt joint
- receiving box
- reagent
- storage tank
- electronic grade
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/71715—Feed mechanisms characterised by the means for feeding the components to the mixer using buckets, cups or open containers
Abstract
The invention discloses a feeding structure for a high-purity electronic grade chemical blending device, which comprises a receiving box, wherein a feeding hole and a discharging hole are formed in the receiving box, a purifying mechanism is connected to the top of the receiving box, a hose is connected to the feeding hole, the other end of the hose is connected with a butt joint device connected with a tank opening of a reagent storage tank, a turnover frame used for turning over the reagent storage tank is connected to the butt joint device, the feeding structure for the high-purity electronic grade chemical blending device is used for bearing the reagent storage tank through the turnover frame, the reagent storage tank is connected with the tank opening through a butt joint pipeline in the butt joint device after being loaded, a locking connection device is used for locking to complete sealing, a tray is driven by a second motor to turn over to enable the storage tank to incline, a reagent enters the receiving box through the hose, clean air is introduced into the receiving box through the purifying mechanism, so that the receiving box can replace gas with the storage tank when receiving the reagent, and avoid letting in outside air when interfacing apparatus breaks away from to make reagent contaminated.
Description
Technical Field
The invention relates to the technical field of chemical equipment, in particular to a feeding structure for a high-purity electronic grade chemical blending device.
Background
The high-purity electronic grade chemical reagent is one of key basic chemical materials in the manufacturing process of the ultra-large scale integrated circuit, is mainly used for cleaning and etching a chip, is also used for chip doping and precipitation processes, and has very important influence on the yield, the electrical property and the reliability of the integrated circuit due to the purity and the cleanliness of the ultra-clean high-purity reagent.
When the mill carries out single reagent and mixes and produce the chemical reaction and generate required chemical synthesis reagent, need mix different single material, if directly topple over, the process of this mode single reagent can exist with air contact, electronic grade chemical reagent need be under airtight clean environmental condition (less than hundred grades) in order to avoid being contaminated, consequently need set up clean space, but these devices are all great, clean large-scale space can bring great cost, and the process of constantly carrying clean space at single reagent also can make clean space contaminated. To this end, we propose a feeding structure for high purity electronic grade chemical compounding units.
Disclosure of Invention
The invention aims to provide a feeding structure for a high-purity electronic grade chemical mixing device, which is low in cost and free from pollution, so as to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a feed structure for high-purity electronic grade chemistry blending unit, includes the receiving box, be provided with feed inlet and discharge gate on the receiving box, just the top of receiving box is connected with purification mechanism, the feed inlet is connected with the hose and the other end of hose is connected with the interfacing apparatus who is connected with the jar mouth of reagent holding vessel, the last roll-over stand that is used for upset reagent holding vessel that is connected with of interfacing apparatus.
Preferably, the butt joint device comprises a butt joint pipeline, one end of the butt joint pipeline is connected with the hose, the other end of the butt joint pipeline is connected with the locking connection device, the outer side wall of the butt joint pipeline is provided with an installation lug, the butt joint pipeline is connected with the receiving box, and the other end of the butt joint pipeline is connected with the storage tank of the reagent through the locking connection device and is locked to realize sealing.
Preferably, the locking connection device comprises a butt joint ring, the butt joint ring is connected with a butt joint pipeline, the other end of the butt joint ring is connected with a wedge block, the outer side surface of the butt joint ring is connected with a locking ring through threads, the outer side of the locking ring is connected with a gear in a meshing manner, the side wall of the butt joint pipeline is provided with a first motor, the output end of the first motor is fixedly connected with the gear, the gear drives the locking ring through the first motor, and therefore the locking ring extrudes the wedge block, the storage tank of the wedge block locking reagent is enabled to be locked automatically.
Preferably, be provided with first telescopic link in the installation lug, the output of first telescopic link is connected with the fixed block, install vacuum chuck on the fixed block, vacuum chuck is adsorbable and covers in the sealed of holding vessel of reagent, then is driven by first telescopic link to take off the lid automatically under airtight environment, avoid polluting.
Preferably, the roll-over stand includes the mount, the both sides wall of mount all is connected with the axis of rotation, and two be connected with the tray between the axis of rotation, the top of tray is provided with spacing frame, arbitrary one the one end of axis of rotation is connected with the second motor, thereby the second motor rotation can drive the axis of rotation and make the tray rotate to the reagent holding vessel inclines, thereby pours out reagent.
Preferably, the top of mount is connected with the mounting panel, just the bottom of mounting panel is provided with the second telescopic link, the output of second telescopic link is connected with the I-shaped pole, the outside of butt joint pipeline is provided with the shelves pole, and the I-shaped pole passes through the shelves pole and realizes interfacing apparatus's rising and decline to realize butt joint and separation.
Preferably, purification mechanism includes hundred grades of laminar flow covers, hundred grades of laminar flow covers's bottom is connected with the buffer box, be connected with the gas-supply pipe between buffer box and the receiving box, hundred grades of laminar flow covers produce required clean air and input the buffer box, then input the receiving box by the gas-supply pipe to convenient taking a breath and non-staining reagent.
Preferably, the air conveying pipe is provided with a control valve, and the control valve is used for controlling the introduction and closing of the clean air and the introduction rate so as to adjust the appropriate rate.
Compared with the prior art, the invention has the beneficial effects that:
the invention uses the turnover frame to bear the storage tank of single reagent, and after loading, the storage tank is connected with the tank opening of the reagent storage tank through the butt joint pipeline in the butt joint device, and then the locking connection device locks to complete sealing, and then the second motor drives the tray to turn over to incline the storage tank of the reagent, the reagent enters the receiving box through the hose, the purifying mechanism introduces clean air into the receiving box, so that the receiving box replaces gas with the storage tank when receiving the reagent, and the introduction of external air when the butt joint device is separated is avoided, thereby the reagent is polluted.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of the docking device and the roll-over stand;
FIG. 3 is an enlarged view of area A in FIG. 2;
FIG. 4 is a schematic view of a half-section structure of the docking device;
FIG. 5 is an enlarged view of area B in FIG. 4;
FIG. 6 is a schematic view; schematic connection state diagram of locking connection device
FIG. 7 is an enlarged schematic view of region C of FIG. 6;
FIG. 8 is a schematic view showing the structure of the docking device;
fig. 9 is an enlarged view of region D in fig. 8.
In the figure: 1-a receiving box; 2-a feed inlet; 3-discharging port; 4-a purification mechanism; 5-a hose; 6-a docking device; 7-a roll-over stand; 8-butting pipelines; 9-locking the connecting device; 10-mounting a bump; 11-a docking ring; 12-a wedge block; 13-a locking ring; 14-a gear; 15-a first electric machine; 16-a first telescoping rod; 17-fixing block; 18-vacuum chuck; 19-a fixed mount; 20-a rotating shaft; 21-a tray; 22-a limit frame; 23-a second motor; 24-a mounting plate; 25-a second telescoping rod; 26-an i-beam; 27-a gear lever; 28-hundred stages of laminar flow hood; 29-cache box; 30-gas transmission pipe; 31-control valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-9, the present invention provides a technical solution: a feeding structure for a high-purity electronic grade chemical blending device comprises a receiving box 1, wherein the receiving box 1 is used for temporarily storing a single reagent, because different reagents need a certain time for mixing reaction, the amount of the reagent needed by the next round of mixing is temporarily stored through the receiving box 1, the receiving box 1 is provided with a feeding port 2 and a discharging port 3, the reagent is introduced into the feeding port, the reagent is discharged into a mixing reaction device through a discharging warehouse, the top of the receiving box 1 is connected with a purifying mechanism 4, the purifying mechanism 4 generates clean air and introduces the clean air into the receiving box 1, so that negative pressure cannot be generated when the receiving box 1 discharges the reagent, no external air enters the receiving box 1 when a butting device 6 is butted and separated, so that pollution is prevented, the feeding port 2 is connected with a hose 5, and the other end of the hose 5 is connected with a butting device 6 connected with a tank port of a reagent storage tank, because the storage tank needs to rotate, consequently adopt hose 5 to be connected between feed inlet 2 and interfacing apparatus 6 to convenient the rotation, interfacing apparatus 6 is last to be connected with roll-over stand 7 that is used for overturning the reagent holding vessel, is provided with pivoted equipment on the roll-over stand 7, thereby so that the reagent slope in the storage tank flows into receiving box 1.
The butt joint device 6 comprises a butt joint pipeline 8, one end of a circular butt joint pipeline 8 is connected with a hose 5, the other end of the butt joint pipeline 8 is connected with a locking connection device 9, the locking connection device 9 realizes butt joint sealing of the butt joint pipeline 8 and a tank opening of a reagent storage tank, the locking connection device 9 comprises a butt joint ring 11, the butt joint ring 11 is connected with the butt joint pipeline 8, the other end of the butt joint ring 11 is connected with a wedge block 12, the outer side of the wedge block 12 presents a certain taper, the wedge block 12 has certain elasticity so as to realize locking under extrusion of the locking ring 13, further, the wedge block 12 is provided with four groups but not limited to four groups and is uniformly distributed along the axial direction of the port of the butt joint pipeline 8, the outer side surface of the butt joint ring 11 is connected with the locking ring 13 through threads, the outer side of the locking ring 13 is engaged and connected with a gear 14, the inner side of the locking ring 13 is also provided with an inclined plane with the same taper as the wedge block 12, so that the wedge block 12 is extruded when the locking block 13 advances through threaded connection, and the purpose of fixed locking is achieved, the outer side of the locking ring 3 is provided with outer teeth, meshing transmission is achieved through the outer teeth and the gear 14, the side wall of the butt joint pipeline 8 is provided with the first motor 15, the output end of the first motor 15 is fixedly connected with the gear 14, the output shaft of the first motor 15 is meshed with the locking ring 13 through the gear 14, and therefore transmission is achieved, and the purpose of automatic locking is achieved.
The outer side wall of the butt joint pipeline 8 is provided with a mounting lug 10, a first telescopic rod 16 is arranged in the mounting lug 10, the output end of the first telescopic rod 16 is connected with a fixed block 17, a vacuum sucker 18 is arranged on the fixed block 17, the first telescopic rod 16 can bring the vacuum sucker 18 and the inner sealing cover of the reagent storage tank into the groove on the mounting lug 10 after being shortened, so that the vacuum suction cup 18 and the inner sealing cover block the groove, the reagent can not contact the first telescopic rod 16, after the butt joint device 6 is in butt joint with the tank opening and locked, the first telescopic rod 16 works to enable the vacuum sucker to be in contact with the top of the inner sealing cover, the other end of the vacuum sucker 18 is connected with the compressor through a pipeline, air is pumped out to achieve adsorption, the first telescopic rod 16 drives the inner sealing cover to ascend after adsorption, the tank opening is opened, and therefore reagents are poured into the receiving box 1 conveniently.
The roll-over stand 7 comprises a fixed frame 19, both side walls of the fixed frame 19 are connected with rotating shafts 20 through bearings, a tray 21 is connected between the two rotating shafts 20, the tray 21 is used for bearing a storage tank, a limiting frame 22 is arranged above the tray 21 and can further keep stable, one end of any one of the rotating shafts 20 is connected with a second motor 23, the second motor 23 drives the rotating shaft 20, so that the storage tank is inclined and the storage tank is conveniently placed on the tray 21, the top of the fixed frame 19 is connected with a mounting plate 24, a second telescopic rod 25 is arranged at the bottom of the mounting plate 24, the output end of the second telescopic rod 25 is connected with an I-shaped rod 26, a blocking rod 27 is arranged outside the butt joint pipeline 8, and semicircular grooves matched with the I-shaped rod 26 are formed in the upper surface and the lower surface of the further blocking rod 27, the second telescopic rod 25 is arranged to drive the docking device 6 to move, so as to realize automatic operation, initially, the baffle rod 27 is arranged in the middle of the I-shaped rod 26, the second telescopic rod 25 works to move downwards, the upper rod of the I-shaped rod 26 is in contact with the semicircular groove on the upper surface of the baffle rod 27 and pushes the docking device 6 to move, so that the docking device is docked with the tank opening, a guide mechanism (not shown in the figure) is further arranged on the docking device 6, so that the docking is more stable and cannot fall down when a reagent is poured, when the reagent is separated, the second telescopic rod 25 moves upwards, the lower rod of the I-shaped rod 26 is in contact with the semicircular groove on the lower surface of the baffle rod 27 and is driven to ascend, and the docking device 6 is separated from the tank opening.
The purification mechanism 4 comprises a hundred-level laminar flow cover 28, the hundred-level laminar flow cover 28 generates clean air required by an electronic-grade reagent and leads the clean air into a cache box 29, the bottom of the hundred-level laminar flow cover 28 is connected with the cache box 29, an air conveying pipe 30 is connected between the cache box 29 and the receiving box 1, a control valve 31 is arranged on the air conveying pipe 30, and the air inlet rate is controlled through the control valve 31 so as to be adjusted according to different specific conditions.
The working principle is as follows: firstly, the second motor rotates 23 to enable the tray 21 to incline so as to prevent the storage tank from entering the tray 21, after rotation, the enemy motor 23 rotates to enable the tray 21 to be placed right, then the second telescopic rod 25 drives the butt joint device 6 to be in butt joint with the tank opening, after butt joint, the first motor 15 rotates to enable the locking ring 13 to rotate and lock, after locking, the first telescopic rod 16 works, the vacuum suction disc 18 is in contact adsorption with the inner sealing cover of the storage tank, the first telescopic rod 16 ascends to take away the sealing cover, finally, the storage tank inclines towards one side connected with the butt joint device 6 due to rotation of the first motor 23, the reagent enters the receiving box 1 from the hose 5, after the reagent is poured, the recovery process is completely opposite to the previous process, and clean air is always introduced into the purification mechanism 4 in the whole process so as to avoid pollution during butt joint and separation.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A feeding structure for a high-purity electronic grade chemical blending device comprises a receiving box (1), wherein a feeding hole (2) and a discharging hole (3) are formed in the receiving box (1), a purifying mechanism (4) is connected to the top of the receiving box (1), the feeding hole (2) is connected with a hose (5), the other end of the hose (5) is connected with a butt joint device (6) connected with a tank opening of a reagent storage tank, the butt joint device (6) is connected with a turnover frame (7) used for turning over the reagent storage tank, the butt joint device (6) comprises a butt joint pipeline (8), one end of the butt joint pipeline (8) is connected with the hose (5), the other end of the butt joint pipeline (8) is connected with a locking connection device (9), an installation bump (10) is arranged on the outer side wall of the butt joint pipeline (8), the locking connection device (9) comprises a butt joint ring (11), butt joint ring (11) are connected with butt joint pipeline (8), just the other end of butt joint ring (11) is connected with voussoir (12), there is locking ring (13) outside surface through threaded connection of butt joint ring (11), the outside meshing of locking ring (13) is connected with gear (14), the lateral wall of butt joint pipeline (8) is provided with first motor (15), the output and gear (14) fixed connection of first motor (15), be provided with first telescopic link (16) in installation lug (10), the output of first telescopic link (16) is connected with fixed block (17), install vacuum chuck (18) on fixed block (17).
2. The feeding structure for high-purity electronic grade chemical mixing units according to claim 1, wherein: roll-over stand (7) are including mount (19), the both sides wall of mount (19) all is connected with axis of rotation (20) through the bearing, and two be connected with tray (21) between axis of rotation (20), the top of tray (21) is provided with spacing frame (22), arbitrary one the one end of axis of rotation (20) is connected with second motor (23).
3. The feeding structure for high-purity electronic grade chemical mixing units according to claim 2, wherein: the top of mount (19) is connected with mounting panel (24), just the bottom of mounting panel (24) is provided with second telescopic link (25), the output of second telescopic link (25) is connected with I-shaped pole (26), the outside of butt joint pipeline (8) is provided with shelves pole (27).
4. The feeding structure for high-purity electronic grade chemical mixing units according to claim 1, wherein: the purification mechanism (4) comprises a hundred-level laminar flow cover (28), the bottom of the hundred-level laminar flow cover (28) is connected with a buffer box (29), and a gas pipe (30) is connected between the buffer box (29) and the receiving box (1).
5. The feeding structure for high-purity electronic grade chemical mixing units according to claim 4, wherein: the air delivery pipe (30) is provided with a control valve (31).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911374803.2A CN111111542B (en) | 2019-12-27 | 2019-12-27 | A material loading structure that is used for high-purity electronic grade chemistry blending device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911374803.2A CN111111542B (en) | 2019-12-27 | 2019-12-27 | A material loading structure that is used for high-purity electronic grade chemistry blending device |
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| CN111111542A CN111111542A (en) | 2020-05-08 |
| CN111111542B true CN111111542B (en) | 2021-12-28 |
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| CN201911374803.2A Active CN111111542B (en) | 2019-12-27 | 2019-12-27 | A material loading structure that is used for high-purity electronic grade chemistry blending device |
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Citations (6)
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| FR2479704A1 (en) * | 1980-04-04 | 1981-10-09 | Quinoleine Ses Derives | Container to load powder into hopper above mixing machine - forms leakproof transfer seal to prevent escape of powder to atmos. |
| CN105036048A (en) * | 2014-11-26 | 2015-11-11 | 安徽嘉智信诺化工有限公司 | Automatic vacuum material taking device |
| CN105084030A (en) * | 2015-09-11 | 2015-11-25 | 山东新华医疗器械股份有限公司 | Automatic feeding device for powder mixing machine |
| CN108001716A (en) * | 2017-12-06 | 2018-05-08 | 钢铁研究总院 | A kind of oxidizable inflammable and explosive powder is canned to use quick access device and application method |
| CN207680416U (en) * | 2017-10-11 | 2018-08-03 | 杨金义 | A kind of neodymium-iron-boron powder high-efficiency mixing device |
| CN209696798U (en) * | 2018-11-15 | 2019-11-29 | 广州市华南农大生物药品有限公司 | A kind of emulsification tank body for having temperature-detecting device that can realize online sterilizing function |
-
2019
- 2019-12-27 CN CN201911374803.2A patent/CN111111542B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2479704A1 (en) * | 1980-04-04 | 1981-10-09 | Quinoleine Ses Derives | Container to load powder into hopper above mixing machine - forms leakproof transfer seal to prevent escape of powder to atmos. |
| CN105036048A (en) * | 2014-11-26 | 2015-11-11 | 安徽嘉智信诺化工有限公司 | Automatic vacuum material taking device |
| CN105084030A (en) * | 2015-09-11 | 2015-11-25 | 山东新华医疗器械股份有限公司 | Automatic feeding device for powder mixing machine |
| CN207680416U (en) * | 2017-10-11 | 2018-08-03 | 杨金义 | A kind of neodymium-iron-boron powder high-efficiency mixing device |
| CN108001716A (en) * | 2017-12-06 | 2018-05-08 | 钢铁研究总院 | A kind of oxidizable inflammable and explosive powder is canned to use quick access device and application method |
| CN209696798U (en) * | 2018-11-15 | 2019-11-29 | 广州市华南农大生物药品有限公司 | A kind of emulsification tank body for having temperature-detecting device that can realize online sterilizing function |
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| CN111111542A (en) | 2020-05-08 |
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