CN111110262B - X-ray imaging system and X-ray imaging method - Google Patents

X-ray imaging system and X-ray imaging method Download PDF

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CN111110262B
CN111110262B CN202010014060.4A CN202010014060A CN111110262B CN 111110262 B CN111110262 B CN 111110262B CN 202010014060 A CN202010014060 A CN 202010014060A CN 111110262 B CN111110262 B CN 111110262B
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CN111110262A (en
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王文琳
周莉
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BOE Technology Group Co Ltd
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    • AHUMAN NECESSITIES
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    • AHUMAN NECESSITIES
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    • G03B42/02Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays

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Abstract

The invention discloses an X-ray imaging system and an X-ray imaging method. An X-ray imaging system comprising: an emitting device for emitting collimated X-rays; the modulating device is arranged between the transmitting device and the object to be detected and is used for modulating the collimated X rays and forming a modulated light field; the single-pixel detection device is arranged on one side of the object to be detected, far away from the modulation device, and is used for collecting measurement signals of the X-rays after passing through the modulation device and the object to be detected; the processing device is connected with the single-pixel detection device and is used for carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be detected. According to the embodiment of the invention, the modulation device is arranged, so that the image of the object to be measured is obtained based on the spatial association relation between the reference signal and the measurement signal. Because the single-pixel detection device is adopted to collect the measurement signals, the sampling time of the object to be measured is reduced, the X-ray intensity is attenuated to the single photon level, and the damage to the living body is effectively reduced.

Description

X-ray imaging system and X-ray imaging method
Technical Field
The present invention relates to the field of X-ray imaging technology, and more particularly, to an X-ray imaging system and an X-ray imaging method.
Background
Since X-rays are discovered in ethical in 1985 and applied to the field of medical imaging, the medical X-ray imaging technology is rapidly developed and popularized, and currently occupies the largest share of the field of medical imaging, and has wide application in human disease diagnosis and health care. Since the object to be measured is a living body, the medical X-ray image is developed toward the direction of low dose and high imaging quality.
Conventional X-ray imaging often relies on high imaging quality flat panel detection devices, such as amorphous silicon, complementary Metal Oxide Semiconductor (CMOS), etc., with pixel sizes of about 100 μm, for example, varex4343R products, and pixel numbers of up to 1024X 1024 or more. The flat panel detection device production relates to multiple mask (mask) processes such as photoetching, vapor deposition and the like, and has the advantages of complex process, high cost and lower yield.
Currently, in order to obtain clear images, an X-ray imaging system needs to expose a living body to X-rays for a long enough time, which inevitably causes great damage to the living body.
Disclosure of Invention
The embodiment of the invention provides an X-ray imaging system which is used for solving the problem that the existing X-ray imaging system causes great damage to a living body.
In order to solve the above problems, an embodiment of the present invention provides an X-ray imaging system including:
an emitting device for emitting collimated X-rays;
the modulating device is arranged between the transmitting device and the object to be detected and is used for modulating the collimated X rays and forming a modulated light field;
the single-pixel detection device is arranged on one side of the object to be detected, far away from the modulation device, and is used for collecting measurement signals of the X-rays after passing through the modulation device and the object to be detected;
the processing device is connected with the single-pixel detection device and is used for carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be detected.
Optionally, the emission device includes an X-ray emission source and a collimator, the collimator is arranged in the light emitting direction of the X-ray emission source, the collimator includes a collimation plate provided with a small hole, and the X-rays emitted by the X-ray emission source form collimated X-rays through the small hole.
Optionally, the X-ray emitting source comprises a monochromatic X-ray emitting source or a non-monochromatic X-ray emitting source.
Optionally, the modulation device comprises a modulator and a driver, the modulator being arranged on the driver, the driver being arranged to drive the modulator to move in a plane perpendicular to the collimated X-rays.
Optionally, the modulator comprises a substrate and a plurality of modulation blocks arranged in an array on the substrate, and the shape of the modulation blocks in a plane perpendicular to the collimated X-rays comprises a circle, an ellipse, a rectangle, a regular polygon, a trapezoid or a triangle.
Alternatively, the modulation blocks have an equivalent length of 5 μm to 20 μm and an equivalent width of 5 μm to 20 μm, and the gaps between adjacent modulation blocks are 10 μm or less.
Alternatively, the thickness of the modulator block is 50 μm-900 μm in a plane parallel to the collimated X-rays.
Optionally, the material of the modulation block comprises one or more of aluminum oxide, silicon carbide, and silicon nitride.
Optionally, the modulator further comprises a buffer layer covering the modulation block and a protective layer disposed on the buffer layer.
Optionally, the device further comprises a flat panel detection device and a position exchange mechanism, wherein the flat panel detection device is arranged on the position exchange mechanism, and the position exchange mechanism is used for exchanging the flat panel detection device to a test position of an object to be tested, so that the flat panel detection device collects reference signals modulated by the modulation device; the reference signal is a light intensity distribution signal modulating the light field.
The embodiment of the invention also provides an X-ray imaging method, which comprises the following steps:
emitting collimated X-rays;
the modulation device modulates the collimated X-rays to form a modulated light field;
collecting measurement signals of X-rays after passing through a modulation device and an object to be measured;
and carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be measured.
Optionally, the modulation device includes a modulator and a driver, and the modulation device modulates the collimated X-rays to form a modulated light field, including: the driver drives the modulator to move in a plane perpendicular to the collimated X rays, and modulates the collimated X rays to form a modulated light field; wherein the movement comprises a rotational movement or a linear movement.
Optionally, collecting measurement signals of the collimated X-rays after passing through the modulating device and the object to be measured includes: a single-pixel detection device is adopted to collect measurement signals of the collimated X rays after passing through a modulation device and an object to be measured; the measurement signal is the total light intensity signal.
Optionally, the X-ray imaging method further comprises: a flat panel detection device is adopted to collect reference signals of the X-rays after passing through a modulation device; the reference signal is a light intensity distribution signal modulating the light field.
According to the X-ray imaging system and the X-ray imaging method provided by the embodiment of the invention, the image of the object to be measured is obtained based on the spatial association relation between the reference signal and the measurement signal by arranging the modulation device for forming the modulated light field. Because the single-pixel detection device is adopted to collect the measurement signals, the sampling time of the object to be measured is reduced, the X-ray intensity can be attenuated to the single photon level, the radiation dose received by a living body is reduced, and the damage to the living body is effectively reduced.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate and do not limit the invention.
FIG. 1 is a block diagram of an X-ray imaging system according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating the operation of an X-ray imaging system according to an embodiment of the present invention;
FIG. 3 is a block diagram of a modulator according to an embodiment of the present invention;
FIG. 4 is a plan view of a modulator according to an embodiment of the present invention;
FIG. 5 is a block diagram of an embodiment of the present invention after a modulation block pattern is formed;
fig. 6 is a block diagram of a buffer layer formed according to an embodiment of the present invention.
Drawings
10-transmitting means; an 11-X-ray emission source; a 12-collimator;
20-modulating means; a 21-modulator; 22-drives;
30-single pixel detection means; 40-a processing device; 50-a flat panel detection device;
60-an object to be measured; 211-a substrate; 212-modulating blocks;
213-a buffer layer; 214-a protective layer.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail hereinafter with reference to the accompanying drawings. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be arbitrarily combined with each other.
The ghost imaging technology is an indirect imaging technology based on intensity correlation, light field distribution incident on an object is collected through a flat panel detection device, light transmitted or reflected from the object is collected through a single pixel detection device, and a signal collected by the flat panel detection device and a signal collected by the single pixel detection device are subjected to space correlation calculation to obtain an image of the object to be detected. The image of the ghost imaging technology can have high resolution exceeding the Rayleigh diffraction limit, is not influenced by environment, and is successively subjected to the development of entangled two-photon ghost imaging, pseudo-thermal ghost imaging, eukaryotic ghost imaging, emitted light ghost imaging, calculated ghost imaging and the like, and has higher application potential in the aspects of a microscope, a long-distance laser radar and the like. If the ghost imaging can be applied to medical X-ray imaging, the exposure dose of the object light can be greatly reduced by separating the reference light from the object light, and the damage to a living body is reduced. But is limited by the strong transmission capacity of X-rays, the common beam splitter does not have a beam splitting function, and the development of X-ray ghost imaging is limited.
In order to solve the problem that the existing X-ray imaging system causes great damage to a living body, an embodiment of the present invention provides an X-ray imaging system, including:
an emitting device for emitting collimated X-rays;
the modulating device is arranged between the transmitting device and the object to be detected and is used for modulating the collimated X rays and forming a modulated light field;
the single-pixel detection device is arranged on one side of the object to be detected, far away from the modulation device, and is used for collecting measurement signals of the X-rays after passing through the modulation device and the object to be detected;
the processing device is connected with the single-pixel detection device and is used for carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be detected.
According to the X-ray imaging system provided by the embodiment of the invention, the image of the object to be detected is obtained based on the spatial association relation between the reference signal and the measurement signal by arranging the modulation device for forming the modulated light field. Because the single-pixel detection device is adopted to collect the measurement signals, the sampling time of the object to be measured is reduced, the X-ray intensity can be attenuated to the single photon level, the radiation dose received by a living body is reduced, and the damage to the living body is effectively reduced.
Fig. 1 is a block diagram of an X-ray imaging system according to an embodiment of the present invention. As shown in fig. 1:
the X-ray imaging system comprises an emitting means 10, a modulating means 20, a single pixel detection means 30 and a processing means 40. The modulation device 20 is disposed between the emission device 10 and the object 60 to be measured, and the single-pixel detection device 30 is disposed on a side of the object 60 to be measured away from the modulation device 20 and is connected to the processing device 40.
The emitting device 10 is used for generating collimated X-rays. The emitting device 10 includes an X-ray emitting source 11 and a collimator 12. The X-ray emission source 11 is configured to emit X-rays, and the collimator 12 is disposed in an emitting direction of the X-ray emission source 11, and is configured to form collimated X-rays. Specifically, the collimator 12 includes a collimator plate provided with a small hole, and the X-rays emitted from the X-ray emission source 11 pass through the small hole to form collimated X-rays. The X-ray emission source 11 may employ a general X-ray emission source without monochromaticity, i.e., the X-ray emission source 11 includes a monochromatic X-ray emission source or a non-monochromatic X-ray emission source. The collimation plate is made of an X-ray impermeable material, such as lead (Pb).
The modulation means 20 are for modulating the collimated X-rays to form a modulated light field. The modulation device 20 includes a modulator 21 and a driver 22. The modulator 21 is arranged on a driver 22, which driver 22 can drive the modulator 21 in a plane perpendicular to the collimated X-rays. Wherein the motion comprises a rotary motion or a linear motion, and the linear motion comprises an up-and-down motion, a left-and-right motion and a combination of the motion modes. The driver 22 may employ a motor, such as a stepper motor.
The single-pixel detection device 30 is used for collecting measurement signals of the X-rays after passing through the modulation device and the object to be measured. Specifically, the single-pixel detecting device 30 collects the total light intensity signal of the X-ray transmitted and scattered by the object to be detected, and forms a measurement signal, where the measurement signal is a light intensity value. The single pixel detector 30, also known as a bucket detector, has no spatial resolution capability and therefore is less expensive to manufacture than a flat panel detector, thereby reducing the cost of the overall X-ray imaging system.
The processing device 40 is configured to perform spatial correlation calculation on the measurement signal and a pre-stored reference signal, and obtain an image of the object to be measured. The reference signal is a light intensity distribution signal modulating the light field. The processing means 40 spatially correlate the reference signal with the measurement signal to obtain an image of the object to be measured. The spatial correlation calculation method may be a ghost imaging technique spatial correlation calculation method, which is not described herein.
In this embodiment, the diameter of the aperture is 8 μm to 1000 μm, and the distance between the collimator and the object to be measured is 80mm to 500mm. Alternatively, when the wavelength of X-rays is 1nm, the diameter of the small hole is 10 small holes, and the distance between the collimator and the object to be measured is 100mm.
Based on the theory of ghost imaging technology, the imaging resolution, visibility and signal-to-noise ratio of the X-ray imaging system are independent of the X-ray intensity, so that compared with the traditional X-ray imaging, under the condition of weak light, the signal-to-noise ratio higher than that of the traditional X-ray imaging can be obtained. Meanwhile, since the signal-to-noise ratio of the X-ray imaging system is positively correlated with the measurement times, when an image with the same definition as that of the traditional X-ray imaging is obtained, the time of each sampling of an object to be measured can be reduced to attenuate the X-ray intensity to a single photon level, and the signal-to-noise ratio is increased by increasing the measurement times of the object to be measured, that is, when a reference signal is obtained, the X-ray measurement with a plurality of times and a large dose can be adopted to modulate light field information, and when a measurement signal is obtained, the extremely low radiation dose (single photon level) can be selected.
Compared with the traditional X-ray imaging, the X-ray imaging system provided by the embodiment of the invention separates the reference signal acquisition from the measurement signal acquisition, and reduces the X-ray intensity to the single photon magnitude by reducing the time of each sampling of an object to be detected under the condition of ensuring the definition of X-ray imaging based on the spatial association relation of the reference signal and the measurement signal, thereby reducing the radiation dose accepted by a living body and reducing the damage to the living body.
The technical scheme of the present embodiment is further described below through the working process of the X-ray imaging system of the present embodiment, and fig. 2 is a diagram of the working process of the X-ray imaging system of the present embodiment, as shown in fig. 2:
(1) Acquiring a reference signal of a modulated light field: the X-ray emission source 11 emits X-rays, the X-rays pass through small holes on the collimation plate to form collimated X-rays, the modulator 21 is driven by the driver 22 to move at a uniform speed along the vertical direction and the horizontal direction in the plane, the collimated X-rays are modulated to form a modulated light field, and the high-precision flat panel detection device 50 is utilized to collect light intensity distribution signals, namely reference signals, of the X-rays after passing through the modulation device for multiple times. The data of the reference signal may be stored in a processing device of the X-ray imaging system for sale, or may be stored in a storage medium such as a flash disk.
(2) Acquiring a measurement signal of an object: according to the method and process for testing the reference signal measured by the supplier of the X-ray imaging system, the user of the X-ray imaging system modulates the X-rays in the same way to form a modulated light field, the object 60 to be tested stands at the test position which is the same as the placement position of the flat panel detection device in the process, and the single-pixel detection device 30 (also called a barrel detection device) acquires the total light intensity signal, namely the measurement signal, after the X-rays pass through the modulation device and the object to be tested for many times, wherein the total light intensity signal comprises the light intensity signal scattered by the object to be tested and the object to be tested. In the step, under the condition of meeting the definition of X-ray imaging, the single exposure time of the object to be detected can be reduced as much as possible, and then the radiation dose received by the object to be detected is reduced.
(3) Spatial correlation calculation: and performing space correlation calculation on the measurement signal and the reference signal through the processing device to acquire an image of the object to be measured.
In the above process, when the reference signal of the modulated light field is obtained, the exposure time of the flat panel detection device can be increased as much as possible, so as to increase the intensity of the reference signal and obtain a clear speckle pattern of the modulated light field. The process of acquiring the reference signal of the modulated light field may be performed by an X-ray imaging system provider.
Based on the inventive concept of the present invention, in order to ensure good reproducibility of a modulated light field, the present application provides a modulator, which includes a substrate and a plurality of modulation blocks arrayed on the substrate.
Fig. 3 and 4 show the structure of a modulator according to an embodiment of the present invention, fig. 3 is a structural diagram of the modulator according to an embodiment of the present invention, fig. 4 is a plan view of the modulator according to an embodiment of the present invention, and as shown in fig. 3 and 4, the modulator 21 includes:
a substrate 211;
a plurality of modulation blocks 212 arrayed on the substrate 211;
a buffer layer 213 covering the modulation block 212;
a protective layer 214 disposed on the buffer layer 213.
As shown in fig. 4, a rectangular array of a plurality of modulation blocks 212. Modulation block 212 is rectangular in a plane perpendicular to the collimated X-rays.
In addition, the shape of the modulation block in a plane perpendicular to the collimated X-rays also includes a circle, a triangle, a regular polygon, or a trapezoid. The modulation block array also includes a staggered array. The staggered array means that a plurality of modulation blocks are arranged in a plurality of rows at equal intervals, adjacent rows are arranged in a staggered manner, or a plurality of modulation blocks are arranged in a plurality of columns at equal intervals, and adjacent columns are arranged in a staggered manner.
In this embodiment, the equivalent length of the modulation block is 5 μm to 20 μm and the equivalent width of the modulation block is 5 μm to 20 μm. The gap between adjacent modulation blocks is less than or equal to 10 μm. The thickness of the modulator block is 50 μm-900 μm in a plane parallel to the collimated X-rays. Preferably, the thickness of the modulation block is 100 μm to 500. Mu.m.
In this embodiment, the modulation block may have a single-layer structure or a multi-layer structure. The material of the modulation block comprises alumina (Al 2 O 3 ) Silicon oxide (SiO) x ) Silicon carbide (SiC) and silicon nitride (SiN) x ) One or more of the following. When the modulation block has a single-layer structure, the modulation block includes alumina (Al 2 O 3 ) Silicon oxide (SiO) x ) Silicon carbide (SiC) and silicon nitride (SiN) x ) One of them; when the modulator block is a multilayer structure, it includes alumina (Al 2 O 3 ) Silicon oxide (SiO) x ) Silicon carbide (SiC) and silicon nitride (SiN) x ) In at least two combinations, e.g. silicon nitride (SiN) x ) Silicon oxide (SiO) x ) Or silicon carbide (SiC)/silicon nitride (SiN) x ) Or alumina (Al) 2 O 3 ) Silicon oxide (SiO) x ) Silicon nitride (SiN) x ) This is not a list.
In this embodiment, the substrate may be a glass substrate, a quartz substrate, a sapphire substrate, or a Polyimide (PI) substrate. The material of the buffer layer may be a photoresist, including a phenolic resin-based photoresist, a polymethacrylate-based photoresist, or an epoxy resin-based photoresist. The protective layer may be a glass layer, polyimide layer, sapphire layer, or quartz layer.
The technical scheme of the modulator of this embodiment is further described below through the preparation process of the modulator of this embodiment. The "patterning process" in this embodiment includes processes such as film deposition, photoresist coating, mask exposure, development, etching, photoresist stripping, etc., and is a well-known preparation process in the related art. The deposition may be performed by known processes such as sputtering, vapor deposition, chemical vapor deposition, and the like. The etching may be performed by a known method, and is not particularly limited herein. In the description of the present embodiment, it is to be understood that "thin film" refers to a thin film made by depositing or coating a certain material on a substrate. The "thin film" may also be referred to as a "layer" if the "thin film" does not require a patterning process or a photolithography process throughout the fabrication process. If the "film" is also subjected to a patterning process or a photolithography process during the entire fabrication process, it is referred to as a "film" before the patterning process, and as a "layer" after the patterning process. The "layer" after the patterning process or the photolithography process contains at least one "pattern".
(1) A plurality of modulation block patterns are formed. Forming the plurality of modulation block patterns includes: depositing a modulation block film on a substrate 211, patterning the modulation block film by a patterning process to form a plurality of modulation blocks 212 arranged in an array, as shown in fig. 5, fig. 5 is a structure diagram of the embodiment of the present invention after forming a plurality of modulation block patterns;
(2) Forming a buffer layer. Forming the buffer layer includes: depositing or coating a buffer layer film on the substrate with the patterns, and then leveling the surface of the buffer layer film by etching or high-temperature baking to form a buffer layer 213, as shown in fig. 6, fig. 6 is a structural diagram of the buffer layer according to the embodiment of the present invention;
(3) And forming a protective layer. Forming the protective layer includes: a protective layer is coated on the substrate on which the buffer layer is formed, and the protective layer is laminated on the buffer layer to form the modulator structure shown in fig. 3.
As can be seen from the foregoing modulator fabrication process, embodiments of the present invention form a plurality of modulator blocks arranged in an array by depositing a modulator block film on a substrate and then patterning the modulator block film. Since the modulation block can absorb X-rays, differences may occur in the amplitude and phase of the X-rays passing through the gap between the modulation block and the plurality of modulation blocks, and thus X-ray speckle may be formed. The modulator is driven by the driver to form a controllable modulated light field. Meanwhile, due to the arrangement of the modulation blocks, not only can a clear X-ray speckle pattern be formed, but also the reconstruction of a post-modulation light field is facilitated. In the actual X-ray imaging process, the modulated light field can be effectively controlled by controlling the movement of the modulator according to the actual requirement, and the imaging quality of an X-ray imaging system is improved.
The embodiment of the invention provides an X-ray imaging system, which at least comprises the following beneficial effects:
1. compared with the traditional X-ray imaging, the X-ray imaging system provided by the embodiment realizes the separation of reference signal acquisition and measurement signal acquisition, and simultaneously can attenuate the X-ray intensity to the single photon magnitude by reducing the sampling time of an object to be detected under the condition of obtaining an X-ray image with the same definition based on the spatial association relation of the reference signal and the measurement signal, thereby greatly reducing the radiation dose born by a living body;
2. the reference signal and the measurement signal can be obtained separately, so that the use of a beam splitter is omitted, the problem that no proper differential speed device is available at present due to strong penetrability of X-rays is solved, and the investment cost of an X-ray imaging system is reduced;
3. the reference signal in the pre-existing processing device of the X-ray imaging system can be measured and provided by an X-ray imaging system provider, a high-imaging-quality flat panel detection device is not needed, the problems that the circuit design and the preparation process of the high-imaging-quality flat panel detection device are complex, the cost is high, and lower yield is easily brought are avoided, and therefore the overall cost of the X-ray imaging system is reduced, and the reliability of the X-ray imaging system is improved;
4. the X-ray imaging system adopts the single-pixel detection device to detect the measurement signal, thereby avoiding the need of distributing the energy of the imaging light of the similar traditional X-ray to each pixel of the flat panel detection device, improving the intensity of the measurement signal, reducing the influence of shot noise and improving the signal to noise ratio.
The embodiment of the invention also provides an X-ray imaging system, which comprises the technical scheme of the embodiment and a flat panel detection device for collecting reference signals, wherein the flat panel detection device can be exchanged to a test position of an object to be tested, so that the flat panel detection device collects the reference signals of X-rays after passing through the modulation device; the reference signal is a light intensity distribution signal modulating the light field.
Specifically, the flat panel detection device is arranged on the position exchange mechanism, and the position exchange mechanism is used for exchanging the flat panel detection device to a test position of an object to be tested, so that the flat panel detection device collects reference signals of X-rays after passing through the modulation device. The position exchanging mechanism may be a lifting mechanism, a translation mechanism, or a rotation mechanism, and is not limited herein.
The X-ray imaging system provided by the embodiment of the invention avoids imaging deviation of the X-ray imaging system caused by possible differences of the modulating device and the transmitting device in the reference signal acquisition system and the measuring signal acquisition system, and can ensure the parallelism of the test. Meanwhile, the X-ray imaging system of the embodiment can adjust the exposure time of the measurement signal by adjusting the exposure time of the reference signal according to actual conditions, and has the characteristic of high flexibility.
Based on the inventive concept, an embodiment of the present invention provides an X-ray imaging method, including:
(1) Emitting collimated X-rays;
(2) The modulation device modulates the collimated X-rays to form a modulated light field;
(3) Collecting measurement signals of the collimated X-rays after passing through a modulation device and an object to be measured;
(4) And carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be measured.
The emitting device comprises an X-ray emitting source and a collimator, wherein the collimator comprises a collimation plate provided with small holes.
Wherein step (1) comprises: x-rays emitted by the X-ray emission source pass through the small hole to form collimated X-rays.
The modulation device includes a modulator and a driver.
Wherein, step (2) includes:
the driver drives the modulator to move in a plane perpendicular to the collimated X rays, and modulates the collimated X rays to form a modulated light field; wherein the movement comprises a rotational movement or a linear movement.
Wherein, step (3) includes:
a single-pixel detection device is adopted to collect measurement signals of the collimated X rays after passing through a modulation device and an object to be measured; the measurement signal is the total light intensity signal.
The X-ray imaging method of the present embodiment further includes:
a flat panel detection device is adopted to collect reference signals of the X-rays after passing through a modulation device; the reference signal is a light intensity distribution signal modulating the light field.
According to the X-ray imaging method provided by the embodiment of the invention, the modulation device for forming the modulated light field is arranged, so that the image of the object to be detected is obtained based on the spatial association relation between the reference signal and the measurement signal, the sampling time of the object to be detected can be reduced, the X-ray intensity is attenuated to the single photon level, the radiation dose received by a living body is reduced, and the damage to the living body is effectively reduced.
In the description of the present invention, it should be noted that the terms "upper", "lower", "one side", "another side", "one end", "another end", "side", "opposite", "four corners", "periphery", "mouth" and "letter structure", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the structures referred to have a specific orientation, are configured and operated in a specific orientation, and thus are not to be construed as limiting the present invention.
In the description of embodiments of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "directly connected," "indirectly connected," "fixedly connected," "mounted," "assembled" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; the terms "mounted," "connected," and "fixedly connected" may be directly connected or indirectly connected through intervening media, and may also be in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Although the embodiments of the present invention are described above, the embodiments are only used for facilitating understanding of the present invention, and are not intended to limit the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is defined by the appended claims.

Claims (14)

1. An X-ray imaging system, comprising:
an emitting device for emitting collimated X-rays; when the object to be detected is sampled, the X-ray intensity is attenuated to the single photon magnitude;
the modulating device is arranged between the transmitting device and the object to be detected and is used for modulating the collimated X rays and forming a modulated light field; the modulating device comprises a modulator and a driver, wherein the modulator comprises a substrate and a plurality of modulating blocks arranged on the substrate in an array mode, the array mode of the modulating blocks comprises a staggered array, the staggered array means that the modulating blocks are arranged in a plurality of rows at equal intervals, adjacent rows are staggered, or the modulating blocks are arranged in a plurality of columns at equal intervals, and adjacent columns are staggered;
the single-pixel detection device is arranged on one side of the object to be detected, far away from the modulation device, and is used for collecting measurement signals of the X-rays after passing through the modulation device and the object to be detected;
and the processing device is connected with the single-pixel detection device and is used for carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be detected.
2. The X-ray imaging system of claim 1, wherein: the emitting device comprises an X-ray emitting source and a collimator, wherein the collimator is arranged in the light emitting direction of the X-ray emitting source and comprises a collimating plate provided with small holes, and X-rays emitted by the X-ray emitting source form collimated X-rays through the small holes.
3. The X-ray imaging system of claim 2, wherein: the X-ray emission source comprises a monochromatic X-ray emission source or a non-monochromatic X-ray emission source.
4. An X-ray imaging system according to any of claims 1-3, wherein: the modulator is arranged on a driver for driving the modulator to move in a plane perpendicular to the collimated X-rays.
5. The X-ray imaging system of claim 4, wherein: the shape of the modulation block in a plane perpendicular to the collimated X-rays includes a circle, an ellipse, a rectangle, a regular polygon, a trapezoid, or a triangle.
6. The X-ray imaging system of claim 5, wherein: the equivalent length of the modulation blocks is 5-20 mu m, the equivalent width of the modulation blocks is 5-20 mu m, and the gap between adjacent modulation blocks is less than or equal to 10 mu m.
7. The X-ray imaging system of claim 5, wherein: the thickness of the modulator block is 50 μm-900 μm in a plane parallel to the collimated X-rays.
8. The X-ray imaging system of claim 5, wherein: the material of the modulation block comprises one or more of aluminum oxide, silicon carbide and silicon nitride.
9. The X-ray imaging system of claim 5, wherein: the modulator further comprises a buffer layer covering the modulation block and a protective layer arranged on the buffer layer.
10. An X-ray imaging system according to any of claims 1-3, wherein: the device comprises a modulating device, a flat panel detection device and a position exchange mechanism, wherein the flat panel detection device is arranged on the position exchange mechanism, and the position exchange mechanism is used for exchanging the flat panel detection device to a test position of an object to be tested, so that the flat panel detection device acquires a reference signal of the X-ray after passing through the modulating device; the reference signal is a light intensity distribution signal of the modulated light field.
11. An X-ray imaging method, comprising:
emitting collimated X-rays; when the object to be detected is sampled, the X-ray intensity is attenuated to the single photon magnitude;
the modulation device modulates the collimated X-rays to form a modulated light field; the modulating device comprises a modulator and a driver, wherein the modulator comprises a substrate and a plurality of modulating blocks arranged on the substrate in an array mode, the array mode of the modulating blocks comprises a staggered array, the staggered array means that the modulating blocks are arranged in a plurality of rows at equal intervals, adjacent rows are staggered, or the modulating blocks are arranged in a plurality of columns at equal intervals, and adjacent columns are staggered;
collecting measurement signals of the collimated X-rays after passing through the modulation device and an object to be measured;
and carrying out space correlation calculation on the measurement signal and a pre-stored reference signal to obtain an image of the object to be measured.
12. The X-ray imaging method according to claim 11, wherein: the modulation device modulates the collimated X-rays to form a modulated light field, and the modulation device comprises:
the driver drives the modulator to move in a plane perpendicular to the collimated X rays, and modulates the collimated X rays to form a modulated light field; wherein the movement comprises a rotational movement or a linear movement.
13. The X-ray imaging method according to claim 11, wherein: collecting measurement signals of the X-rays after passing through the modulation device and an object to be measured, wherein the measurement signals comprise:
a single-pixel detection device is adopted to collect measurement signals of the X-rays after passing through the modulation device and an object to be measured; the measurement signal is a total light intensity signal.
14. The X-ray imaging method according to any one of claims 11-13, wherein: further comprises:
collecting a reference signal of the collimated X-rays after passing through the modulation device by adopting a flat panel detection device; the reference signal is a light intensity distribution signal of the modulated light field.
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CN105676613A (en) * 2016-03-29 2016-06-15 山东大学 Digital holography ghost imaging system by adopting single-pixel or bucket detector and working method thereof
CN110308614A (en) * 2018-03-20 2019-10-08 中国科学院物理研究所 The method and apparatus of X-ray intensity relevance imaging

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Publication number Priority date Publication date Assignee Title
CN105676613A (en) * 2016-03-29 2016-06-15 山东大学 Digital holography ghost imaging system by adopting single-pixel or bucket detector and working method thereof
CN110308614A (en) * 2018-03-20 2019-10-08 中国科学院物理研究所 The method and apparatus of X-ray intensity relevance imaging

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