CN111093899A - Finishing machine tool - Google Patents
Finishing machine tool Download PDFInfo
- Publication number
- CN111093899A CN111093899A CN201880054747.1A CN201880054747A CN111093899A CN 111093899 A CN111093899 A CN 111093899A CN 201880054747 A CN201880054747 A CN 201880054747A CN 111093899 A CN111093899 A CN 111093899A
- Authority
- CN
- China
- Prior art keywords
- finishing machine
- tool
- rotor
- drive
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
Abstract
The invention relates to a finishing machine having a tool with a rotating active surface (36, 44) for machining a workpiece, wherein a drive for rotationally driving the workpiece is provided, which drive drives the tool about a rotational axis (58) perpendicular to the active surface, wherein the drive is designed in the form of a torque motor having a stator and a rotor, wherein the rotor is connected to the tool without further transmission elements being interposed, and drives the tool about the rotational axis (58, 130).
Description
Technical Field
The invention relates to a finishing machine comprising a tool having a rotating active surface for machining a workpiece, wherein a drive is provided for rotationally driving the workpiece, wherein the drive drives the tool about a rotational axis perpendicular to the active surface.
Background
EP 2689891 a2 discloses a double-disk machine tool for surface machining, in which a one-piece unit made of hard rock is provided for arranging various drives and transmissions.
Disclosure of Invention
The object of the invention is to provide a finishing machine with a construction which is as simple as possible.
According to the invention, this object is achieved by a finishing machine of the above-mentioned type in that the drive is constructed in the form of a torque motor having a stator and a rotor, wherein the rotor is connected to the tool without further transmission elements being interposed and drives the tool about an axis of rotation.
According to the present invention, there is provided a compact actuator capable of arranging some of the other components of the finishing machine having a large volume, so that it is possible to provide a compact and simply-structured finishing machine as a whole. The torque motor according to the invention is easy to maintain and is therefore particularly suitable for permanently used fine machining machines.
Furthermore, the drive according to the invention has low vibrations, which further simplifies the construction of the finishing machine; a relatively simple frame may be used, since the frame does not have to be adapted to dampen or compensate for the vibrations generated by the drive.
The rotor is arranged inside with respect to the stator (so-called "inner rotor" configuration), whereby a particularly advantageous configuration is obtained. The advantage of this configuration is that the stator, which is located radially outside the rotor, can be connected simply to the frame of the finishing machine via the stator-side housing. In addition, the supply of the electrical energy required by the torque motor is simplified. Furthermore, the cooling medium for cooling the torque motor can be supplied and discharged from the radially outer side. The stator-side housing can also be used to supply a processing fluid (in particular an emulsion for cooling and/or lubrication in the working area, in which the active surface of the tool is in contact with the workpiece to be processed).
In a particularly preferred embodiment of the invention, the rotor and/or the rotor housing part define a cavity concentric with the axis of rotation. Particularly advantageously, the rotor is arranged on the inside with respect to the stator. The cavity of the rotor or rotor housing component can be used to arrange other components of the finishing machine. In the simplest case, the other component may be an electrical, pneumatic or hydraulic line.
Particularly preferably, a drive element for rotationally driving the rotor disk is arranged in the cavity. The rotor disk is used to position the workpiece in the working area of the finishing machine. By the rotary drive of the rotor disc, the movement of one or more workpieces can be controlled independently of the movement of the tool.
Another possibility for using the cavity of the rotor consists in arranging a sensor element in the cavity for detecting a machining parameter. For example, the sensor element may be used to detect material removal due to machining of a workpiece. In particular, the removed layer thickness can be detected, from which the subsequent remaining (remaining) thickness of the workpiece is derived. It is also conceivable that the sensor element detects other process parameters (e.g. temperature and/or pressure).
Another possibility for using the cavity of the rotor consists in arranging in the cavity an assembly comprising at least one bearing by means of which the tool and the rotor are mounted on the stator housing part in a manner rotatable about the axis of rotation. Thereby, the cavity of the rotor can be optimally utilized, and a particularly compact drive unit can be provided, and free space is created in the radially outer environment of the stator.
In a further preferred embodiment of the invention, at least one tool of the finishing machine is mounted on the stator housing part by means of an Axial-Radial bearing (Axial-Radial-Lagers). In this way, a tool can be provided which is particularly precisely aligned with respect to its axial position and its radial position with respect to the axis of rotation. Particularly advantageously, the finishing machine has a plurality of tools.
In particular, in case the finishing machine has a plurality of tools, preferably at least one tool of the finishing machine is mounted on the stator housing part by means of tapered roller bearings (Kegelrollenlagers). This makes it possible to achieve a particularly stable and inexpensive mounting of the tool. Advantageously, a compensating element for tolerance compensation is provided between the stator housing part and the tool, whereby the inclination of the tool and its active surface can be changed at least slightly (for example, at most one or two degrees). Within the scope of the invention, the compensating element does not form a transmission element; instead, the transmission element is to be understood as being used to achieve an acceleration or deceleration or a steering of the drive movement.
It is particularly advantageous if the active surface of one or more tools of the finishing machine is flat.
Within the scope of the invention, the tool may be a grinding tool (schleifferkzeug), a lapping toolOr a polishing tool (Polierwerkzeug).
The finishing machine is particularly advantageously designed in the form of a double-sided flat grinding machine (Doppelseiten-planschleifmischine). Such grinding machines have two grinding tools with two mutually facing flat active surfaces which define a working area. Preferably, a separate drive, in particular in the form of a torque motor, is provided for each of the grinding tools.
Other features and advantages of the invention are the subject of the following description and the accompanying drawings of the preferred embodiments.
Drawings
FIG. 1 shows a perspective view of an embodiment of a finishing machine;
fig. 2 shows a perspective view of a first component of the finishing machine according to fig. 1; and
fig. 3 shows a perspective view of a second component of the finishing machine according to fig. 1.
Detailed Description
An embodiment of a finishing machine, generally indicated by reference numeral 10, is shown in the drawings. The finishing machine 10 is a double-sided flat grinding machine. The finishing machine has a frame 12, the frame 12 having a fixed frame part 14 in the form of a cylindrical wall, the frame part 14 being adapted to receive a bolt 16, the bolt 16 being adapted to secure a first component 18 shown in fig. 2 to the frame 12.
The frame 12 also has a guide rail 20 perpendicular with respect to the direction of gravity, along which guide rail 20 a slide 22 can be moved. The slide 22 has a slide part 24, for example in the form of a flange, the slide part 24 being movable together with the slide 22 along the guide rail 20, and a second assembly 28, shown in fig. 3, is fixed to the slide part 24 by means of bolts 26.
The first module 18 has a receiving tray 30 for receiving and cooling a lower first grinding tool 32, the lower grinding tool 32 being coated with an abrasive layer 34, the abrasive layer 34 forming a planar active surface 36 of the grinding tool 32.
In a corresponding manner, the second module 28 has a receiving disk 38 for receiving and cooling the upper second grinding tool 40. The upper second grinding tool 40 is provided with an abrasive layer 42, which abrasive layer 42 forms a planar active surface 44.
A working space 46 defined between the mutually parallel active surfaces 36 and 44 is used for arranging the work pieces to be ground from opposite sides.
A rotor disk 48 with a workpiece disk 50 is provided for processing the workpieces, in which workpiece disk 50 a positioning ring (Nester)52 is provided for arranging the workpieces to be ground. The workpiece disk 50 is supported between an inner ring gear 54 and a stationary outer ring gear 56. The inner ring gear 54 may be driven to rotate about an axis of rotation 58. The rotational movement of the inner toothed ring 54 is transmitted to the workpiece disk 50, which workpiece disk 50 rolls on the outer toothed ring 56. Since the cage 52 is arranged eccentrically with respect to the center axis of the workpiece disk 50, the workpiece accommodated in the cage 52 moves along a cycloid path when the workpiece disk 50 rotates.
The rotary drive of rotor disk 48 is generally indicated by reference numeral 60. The drive 60 comprises a drive motor 62, a 90 ° bevel gear 64, which is only schematically shown, and a drive shaft 66, which drive shaft 66 extends concentrically with respect to the axis of rotation 58 and is provided at its end with a drive disk 68 for driving the inner toothed ring 54.
The drive shaft 66 extends through a cavity 70, the cavity 70 being concentric with respect to the axis of rotation 58 and defined by a rotor housing component 72 (see fig. 2) connected to an electrical rotor 74. The rotor housing part 72 is connected to a collar part 80 by means of bolts 76 arranged radially on the inside and by means of bolts 78 arranged radially on the outside, the collar part 80 likewise being concentric with respect to the axis of rotation 58 and rotating about the axis of rotation 58 together with the rotor 74 and the rotor housing part 72.
The collar part 80 is further connected to a bearing ring 82, the bearing ring 82 forming an outer ring of an axial-radial bearing generally indicated by reference numeral 84.
The first assembly 18 also has a stator-side base plate 86, the stator-side base plate 86 being connected to a hollow cylindrical stator housing member 88, the stator housing member 88 radially outwardly defining an electrical stator 90.
The electric stator 90 and the stator housing part 88 are connected to each other by a further stator housing part 92. The inner ring 94 of the bearing 84 is arranged on the other stator housing part 92.
The electrical rotor 74 and the electrical stator 90 together form a torque motor 96.
When power is applied to the torque motor 96, the electrical rotor 74 rotates with the rotor housing member 72 and the collar member 80, the collar member 80 being connected to the carrier plate 98 connected to the containment plate 30. The lower grinding tool 32 shown in fig. 1 is fixed to the receiving disk 30, so that the lower grinding tool 32 is rotated about the axis 58 by the torque motor 96, without further transmission elements being provided for this purpose.
In order to detect the rotational speed of the grinding tool 32, the rotor housing part 72 carries a full ring-shaped indicator element 100, the indicator element 100 interacting with a measuring sensor (not shown). Preferably, the measurement sensor is part of the controller of the torque motor 96, thereby enabling monitoring and adjustment for maintaining a target speed of the grinding tool.
Hereinafter, the second assembly 28 is explained with reference to fig. 3. The assembly 28 includes a carrier plate 102 for holding the containment plate 38, the containment plate 38 being connected to the second grinding tool 40 (see fig. 1). The carrier disc 102 is connected to a rotor shaft 104 on which an inner ring 106 of a tapered roller bearing 108 is arranged.
The rotor shaft 104 is connected to an electrical rotor 112 via a collar plate 110. The electrical rotor 112 is interfitted with the electrical stator 114. The rotor 112 and the stator 114 together form a torque motor 116.
The electrical stator 114 is defined by a hollow cylindrical stator housing member 118 connected at its upper end to a cover 120 and at its lower end to a carrier plate 122.
Carrier plate 122 is connected to slide 22 radially on the outside by means of bolts 26. Radially inwardly, the carrier disc 122 is connected to a further stator housing part 124, the further stator housing part 124 carrying a bearing ring 126 forming an outer ring of the tapered roller bearing 108.
The electrical stator 112 defines a cavity 128 for arranging the above-mentioned components (in particular the bearing 108 and the rotor shaft 104) radially inside with respect to the rotor 112.
The components that rotate with the rotor 112 rotate about an axis of rotation 130. The axis of rotation 130 is aligned with the axis of rotation 58 of the first torque motor 96 of the first assembly 18.
The rotor shaft 104 is hollow. This enables the supply line 132 to pass through a sensor element, generally indicated by reference numeral 134, the sensor element 134 facing the workspace 46 and serving to detect material removal.
The connection between the rotor shaft 104 and the carrier disc 102 comprises a compensation element 135 in the form of a spherical cap, which compensation element 135 enables an angular compensation of the second grinding tool 40 fixed to the receiving disc 38.
The assemblies 18 and 28 described above form compact drive units for the grinding tools 32 and 40, respectively. If it is desired to service the torque motor 96 or 116, the above-described assemblies 18 and 28 can be maintained as separate assemblies and can be installed as replacement assemblies.
The assemblies 18 and 28 include cooling devices 134, 136 for cooling the torque motors 96 and 116, respectively. The cooling device 134 of the torque motor 96 comprises an inlet 138 and an outlet 140 which are accessible from the radially outer side. A cooling housing 142 is disposed between the inlet 138 and the outlet 140. The cooling device 136 of the torque motor 116 has the same structure.
An alternative coolant/lubricant supply system is described below that provides lubricant to the workspace 46 and cools the grinding tools 32 and 40.
The inlet of this alternative system is formed, for example, by a coolant inlet 144 (see fig. 3) arranged in the carrier disk 122.
The cooling fluid reaches the cooling spaces 146 and 148 from the carrier plate 122. The cooling space 146 feeds a line 150, through which line 150 the cooling liquid enters the working space 46 and then comes into contact from above with the drive disc 68 of the rotary drive 60. The cooling fluid passes from the drive disc 68 to the containment disc 30 via the radial holes 152, thereby supplying the cooling passages 154. The cooling passage 154 may be closed radially outward by a throttling element 156 so that fluid flow of the cooling fluid may be controlled.
The second cooling spaces 148 (see fig. 3) supply the cooling channels 158 of the respective containment discs 38. Here, a throttling element 160 for controlling the fluid flow is also provided.
Claims (11)
1. A finishing machine (10) having a tool with a rotating active surface (36, 44) for machining a workpiece, wherein a drive for rotationally driving the workpiece is provided, which drive drives the tool about an axis of rotation (58, 130) perpendicular to the active surface (36, 44),
characterized in that the drive is configured in the form of a torque motor (96, 116) having a stator (74, 112) and a rotor (90, 114), wherein the rotor (90, 114) is connected to the tool without further transmission elements being interposed and drives the tool about the rotational axis (58, 130).
2. A finishing machine (10) as claimed in claim 1, wherein said rotor (90, 114) is arranged inboard with respect to said stator (74, 112).
3. A finishing machine (10) according to claim 1 or 2, wherein the rotor (90, 114) and/or rotor housing part (72) defines a cavity (70, 128) concentric with the axis of rotation (58, 130).
4. Finishing machine (10) according to claim 3, characterized in that a drive element (66) for a rotary drive (60) of a rotor disk (48) is arranged in the cavity (70, 128).
5. Finishing machine (10) according to claim 3 or 4, characterized in that a sensor element (134) for detecting a finishing parameter is arranged in the cavity (70, 128).
6. A finishing machine (10) as claimed in any of claims 3 to 5, characterized in that a bearing (84, 108) is arranged in the cavity (70, 128), by means of which bearing the tool and the rotor are mounted on a stator housing part (92, 124) in a rotatable manner about the axis of rotation (58, 130).
7. Finishing machine (10) according to one of the preceding claims, characterized in that at least one of the tools of the finishing machine (10) is mounted on a stator housing part (92) by means of an axial-radial bearing (84).
8. A finishing machine (10) according to any of the preceding claims, characterized in that at least one of said tools of the finishing machine (10) is mounted on a stator housing part (124) by means of a tapered roller bearing (108).
9. A finishing machine (10) as claimed in any one of the foregoing claims, characterized in that said active surfaces (36, 44) are flat.
10. A finishing machine (10) according to any of the preceding claims, characterized in that said tool is a grinding tool (32, 40), a lapping tool or a polishing tool.
11. A finishing machine (10) according to any one of claims 1 to 9, characterized in that the finishing machine (10) is configured in the form of a double-sided flat grinding machine.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017121692.8 | 2017-09-19 | ||
DE102017121692.8A DE102017121692A1 (en) | 2017-09-19 | 2017-09-19 | Finishing machine |
PCT/EP2018/074584 WO2019057579A1 (en) | 2017-09-19 | 2018-09-12 | Precision finishing machine |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111093899A true CN111093899A (en) | 2020-05-01 |
Family
ID=63832357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201880054747.1A Pending CN111093899A (en) | 2017-09-19 | 2018-09-12 | Finishing machine tool |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN111093899A (en) |
CH (1) | CH715468B1 (en) |
DE (1) | DE102017121692A1 (en) |
WO (1) | WO2019057579A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102022125705A1 (en) * | 2022-10-05 | 2024-04-11 | Atm Qness Gmbh | Disc grinder/polishing machine |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US6250997B1 (en) * | 1998-10-27 | 2001-06-26 | Speedfam-Ipec Co Ltd | Processing machine |
CN102019579A (en) * | 2009-09-17 | 2011-04-20 | 旭硝子株式会社 | Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate |
CN202271254U (en) * | 2011-07-07 | 2012-06-13 | 曹建青 | Planet type workpiece clamping device for double-end-face grinding machine |
CN103331661A (en) * | 2013-06-06 | 2013-10-02 | 燕山大学 | High-precision electric servo double-faced grinding machine |
CN103894920A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Lower plate driving structure of plane grinder |
CN104400622A (en) * | 2014-10-17 | 2015-03-11 | 成都泰美克晶体技术有限公司 | Double-station grinding machine |
CN104400621A (en) * | 2014-10-17 | 2015-03-11 | 成都泰美克晶体技术有限公司 | Novel drive disengagement device for upper grinding disc and lower grinding disc of double-face grinding machine |
CN105474367A (en) * | 2013-08-28 | 2016-04-06 | 胜高科技股份有限公司 | Method and device for polishing semiconductor wafer |
CN107088971A (en) * | 2016-02-17 | 2017-08-25 | 株式会社迪思科 | Processing unit (plant) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29623999U1 (en) * | 1995-06-13 | 2001-03-08 | Bertsche Engineering Corp | Directly driven, multi-axis lathe head for milling machines |
JP2000052233A (en) * | 1998-08-10 | 2000-02-22 | Sony Corp | Polishing device |
ES2169666B1 (en) * | 2000-05-17 | 2004-02-16 | Danobat | MACHINE RECTIFIER WITH HEAD PORTAMUELA WITH POSSIBILITY OF TURN THROUGH DIRECT DRIVING. |
DE102006028164B4 (en) * | 2006-06-16 | 2009-04-02 | Satisloh Ag | Grinding and polishing machine for grinding and / or polishing workpieces in optical quality |
DE102012106777A1 (en) | 2012-07-25 | 2014-01-30 | FLP Microfinishing GmbH | Two-disc machine for surface treatment |
-
2017
- 2017-09-19 DE DE102017121692.8A patent/DE102017121692A1/en active Pending
-
2018
- 2018-09-12 CH CH00328/20A patent/CH715468B1/en not_active IP Right Cessation
- 2018-09-12 CN CN201880054747.1A patent/CN111093899A/en active Pending
- 2018-09-12 WO PCT/EP2018/074584 patent/WO2019057579A1/en active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6250997B1 (en) * | 1998-10-27 | 2001-06-26 | Speedfam-Ipec Co Ltd | Processing machine |
CN102019579A (en) * | 2009-09-17 | 2011-04-20 | 旭硝子株式会社 | Glass substrate manufacturing method, glass substrate polishing method, glass substrate polishing apparatus and glass substrate |
CN202271254U (en) * | 2011-07-07 | 2012-06-13 | 曹建青 | Planet type workpiece clamping device for double-end-face grinding machine |
CN103331661A (en) * | 2013-06-06 | 2013-10-02 | 燕山大学 | High-precision electric servo double-faced grinding machine |
CN105474367A (en) * | 2013-08-28 | 2016-04-06 | 胜高科技股份有限公司 | Method and device for polishing semiconductor wafer |
CN103894920A (en) * | 2014-03-26 | 2014-07-02 | 广东工业大学 | Lower plate driving structure of plane grinder |
CN104400622A (en) * | 2014-10-17 | 2015-03-11 | 成都泰美克晶体技术有限公司 | Double-station grinding machine |
CN104400621A (en) * | 2014-10-17 | 2015-03-11 | 成都泰美克晶体技术有限公司 | Novel drive disengagement device for upper grinding disc and lower grinding disc of double-face grinding machine |
CN107088971A (en) * | 2016-02-17 | 2017-08-25 | 株式会社迪思科 | Processing unit (plant) |
Also Published As
Publication number | Publication date |
---|---|
DE102017121692A1 (en) | 2019-03-21 |
WO2019057579A1 (en) | 2019-03-28 |
CH715468B1 (en) | 2022-02-28 |
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