CN111081513A - Ion source system with automatic diaphragm and ion beam processing system - Google Patents
Ion source system with automatic diaphragm and ion beam processing system Download PDFInfo
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- CN111081513A CN111081513A CN201911407475.1A CN201911407475A CN111081513A CN 111081513 A CN111081513 A CN 111081513A CN 201911407475 A CN201911407475 A CN 201911407475A CN 111081513 A CN111081513 A CN 111081513A
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- ion beam
- diaphragm
- automatic diaphragm
- automatic
- ion source
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an ion source system with an automatic diaphragm and an ion beam processing system, wherein the processing system comprises the ion source system with the automatic diaphragm, and is characterized in that the diaphragm can be automatically adjusted and completely closed, so that the size of an ion beam can be changed, and the existence of the ion beam can be controlled, therefore, after the primary ion beam processing is finished, a vacuum cavity does not need to be opened, the diaphragm can be manually replaced, the cost is saved, and the stability is improved.
Description
Technical Field
The invention relates to the technical field of ion beam shape modification processing in a vacuum environment, in particular to an ion source system with a diaphragm and an ion beam processing system.
Background
Ion beam profiling is a technique for performing deterministic processing of components, and has the characteristics of high precision, high stability and non-contact processing. The basic principle is to remove materials by the physical sputtering effect when low-energy ions bombard the surface of an element under vacuum condition. Accurate correction of local profile errors can be achieved when a low energy ion beam is swept across the surface of the element with appropriate dwell times and motion paths.
In order to obtain ion beams of different shapes and sizes, an ion diaphragm is usually used downstream of the ion beam to control the shape and size of the ion beam. For the ion beam processing equipment with the fixed diaphragm, in order to adjust the shape and the size of the ion beam, the processing vacuum chamber needs to be vacuumized, then the diaphragm with different apertures needs to be replaced, and after the diaphragm is replaced, the processing vacuum chamber needs to be vacuumized again. This greatly increases processing time, reduces processing efficiency, and can even introduce contamination.
The invention provides an ion source system with an automatic diaphragm and an ion beam reshaping processing system, which are used for solving the problems that the diaphragm for an ion source needs to be manually replaced and the conventional ion beam reshaping processing equipment repeatedly breaks vacuum and pumps vacuum.
Disclosure of Invention
The technical scheme provided by the invention is as follows:
an automatic diaphragm for ion beam includes an ion source and an automatic diaphragm which is located in the path of the ion beam emitted from the ion source and can automatically adjust the aperture of the diaphragm, thereby adjusting the beam diameter of the downstream ion beam.
Preferably, the automatic diaphragm comprises a driving control unit and a transmission pinion connected with the driving control unit; the transmission gear is meshed with the transmission pinion; the transmission gear disc surface is provided with a plane rectangular thread A, the bottom surface of the movable claw is provided with a plane rectangular thread B which is meshed with the plane rectangular thread A, and the movable claw is meshed with the plane rectangular thread of the transmission gear disc surface; the separation blades are uniformly and symmetrically distributed along the circumference and are connected with the movable claws; the shell restrains the movable claw from sliding along the radial direction.
Preferably, the automatic diaphragm comprises a driving control unit and a transmission pinion connected with the driving control unit; the transmission gear is meshed with the transmission pinion; the rotating shell is connected with the transmission gear; one end of the aperture blade is connected with the fixed ring, and the other end is connected with the rotary shell 7.
As a further improvement of the invention:
preferably, the automatic diaphragm aperture can be adjusted to be fully closed so that the diaphragm can control the presence or absence of the ion beam.
Preferably, the automatic diaphragm is installed on the existing ion source, and the ion source system with the automatic diaphragm is combined.
Preferably, the ion source system with the automatic diaphragm is installed on an existing ion beam processing system to form the ion beam processing system with the automatic diaphragm.
Preferably, the ion beam processing system with the automatic diaphragm comprises a main vacuum chamber and an auxiliary vacuum chamber which can be mutually communicated or closed through a gate valve; an ion source with an automatic diaphragm and an ion source movement system for driving the ion source to move are arranged in the main vacuum chamber; and a processing station of the workpiece and a workpiece motion system for driving the station to move are arranged in the auxiliary vacuum chamber.
Preferably, the ion source moving system of the ion beam processing system with the automatic diaphragm comprises a linear moving system consisting of an X-direction moving unit, a Y-direction moving unit and a Z-direction moving unit and a rotating system consisting of an A-direction rotating unit and a B-direction rotating unit, and the ion source with the automatic diaphragm driven by the ion source moving system can realize the five-dimensional movement facing the workpiece, so that various high-gradient complex surface-shaped elements can be processed with high precision.
The invention has the following beneficial effects:
1. the automatic diaphragm for ion beams can automatically adjust the aperture of the diaphragm through various connection modes of the ion source and the automatic diaphragm, thereby adjusting the beam diameter of downstream ion beams.
1. According to the automatic diaphragm ion beam shape-modifying processing system, during processing, the diaphragm aperture is directly arranged in a vacuum environment, the beam shape of the ion beam is adjusted, the ion source diaphragm does not need to be manually replaced by breaking vacuum, and the cost is greatly saved. In addition, the relative position of the workpiece to be processed and the ion source is not changed, so that the time for repeated positioning is saved, and the processing efficiency is improved.
2. In a preferred scheme, the diaphragm of the automatic diaphragm ion beam shaping processing system can be automatically adjusted to be in a completely closed state. Therefore, when the processing path is planned, the automatic diaphragm is closed, and the ion source can move above the workpiece, so that the processing path is optimized, and the processing time is saved.
In addition to the objects, features and advantages described above, other objects, features and advantages of the present invention are also provided. The present invention will be described in further detail below with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of an ion beam processing system with an automatic aperture according to the present invention;
FIG. 2 is a schematic diagram of an ion source system with an automatic diaphragm according to the present invention;
FIG. 3 is a schematic view of the structure of an ion source with an automatic diaphragm according to the preferred embodiment 1 of the present invention;
fig. 4 is a schematic view of the structure of the ion source with an automatic diaphragm according to the preferred embodiment 2 of the present invention.
The reference numerals in the figures denote:
1. a secondary vacuum chamber; 2. a workpiece; 3. an operating door; 4. a gate valve; 5. a workpiece motion system; 6. an ion source motion system; 61. an X-direction motion unit; 62. a Y-direction moving unit; 63. a Z-direction motion unit; 64. an A-direction rotating unit; 65. a B-direction rotating unit; 7. an ion source with an automatic diaphragm; 71. an ion source; 72. automatic diaphragm; 721. a drive control unit; 722. a drive pinion; 723. a transmission gear; 724. a movable jaw; 725. a baffle plate; 726. a housing; 727. a transmission gear A; 728. aperture blades; 729. a fixing ring; 7210. a rotating housing; 8. a main vacuum chamber;
Detailed Description
The embodiments of the invention will be described in detail below with reference to the drawings, but the invention can be implemented in many different ways as defined and covered by the claims.
The following embodiments are merely illustrative, and are not intended to limit the manner in which features may be combined, and any features may be combined as appropriate across the embodiments.
Example 1:
referring to fig. 1, the ion beam reshaping system with an automatic diaphragm of the present embodiment includes a main vacuum chamber 8 and an auxiliary vacuum chamber 1 which can be communicated with each other or closed by a gate valve 4; a processing station of the workpiece 2 and a workpiece motion system 5 for driving the workpiece 2 to move are arranged in the auxiliary vacuum chamber 1; an ion source 7 with an automatic diaphragm and an ion source motion system 6 for driving the ion source 7 to move are arranged in the main vacuum chamber 8; the main vacuum chamber 8 is arranged along the ion beam irradiation direction of the ion source 7 with an automatic diaphragm, and the processing station is in the irradiation range of the ion source 7; the sub-vacuum chamber 1 is openable and closable with the operation door 3, which facilitates mounting of the workpiece 2 on the workpiece moving system 5.
Referring to fig. 1 and 2, the ion source system with an automatic diaphragm of the present embodiment includes an ion source moving system 6 and an ion source 7 with an automatic diaphragm. The processing motion system comprises a linear motion system consisting of an X-direction motion unit 61, a Y-direction motion unit 62 and a Z-direction motion unit 63, and a rotating system consisting of an A-direction rotating unit 64 and a B-direction rotating unit 65. The ion source 7 with the automatic diaphragm is driven by the ion source moving system 6 to realize the space five-dimensional movement facing the workpiece 2, so that various high-gradient complex surface-shaped elements can be processed with high precision. In practical implementation, the linear motion system is driven by a rotating motor to convert rotation into linear motion through a transmission mechanism, or by a linear motor. The workpiece motion system 5 and the ion source motion system 6 form a processing motion system, and the situation that various workpiece motion systems 5 are matched with the ion source motion system 6 is formed by adopting various forming modes according to actual requirements, so that the processing motion system is suitable for processing various workpieces 2. Therefore, the ion source moving system 6 may be composed of one or more of an X-direction moving unit 61, a Y-direction moving unit 62, a Z-direction moving unit 63, an a-direction rotating unit 64, and a B-direction rotating unit 65. Accordingly, the workpiece motion system 5 may be composed of the remaining motion units described above. And considering the requirements of cost and precision and the shape, a processing system with proper cost and volume is configured, so that the purposes of adjusting the conditions and saving the cost are achieved.
Referring to fig. 3, the ion source 7 with an automatic diaphragm in the present embodiment is composed of an ion source 71 and an automatic diaphragm 72, wherein the automatic diaphragm 72 includes: a drive control unit 721 and a drive pinion 722 connected thereto; the drive gear 723 intermeshes with the drive pinion 722; the disc surface of the transmission gear 723 is provided with a plane rectangular thread A, the bottom surface of the movable claw 724 is provided with a plane rectangular thread B which is meshed with the plane rectangular thread A, and the blocking pieces 725 are uniformly and symmetrically distributed along the circumference and are connected with the movable claw 724; housing 726 constrains movable jaw 724 to slide radially.
In practice, the connection relationship between the ion source 71 and the automatic diaphragm 72 may be flange bolt connection, clamp connection, welding connection or other connection methods.
In operation, referring to fig. 3, the beam shape of the ion beam is constrained by the following method:
the drive control unit 721 rotates the transmission gear 723 engaged with the transmission pinion 722 by driving it; with the clockwise or counterclockwise rotation of the transmission gear 723, the movable claw 724 engaged with the transmission gear 723 through the planar rectangular thread slides centripetally or centrifugally along the radial slideway of the housing 726; the baffle 725 centripetally or centrifugally moves along with the movable claw 724; the uniformly distributed baffles 725 collectively form a variable-size aperture, thereby effecting beam shape modification of the ion beam. Therefore, the 'breaking vacuum' is omitted, the vacuum chamber is opened, the time for manually replacing the ion source diaphragm is saved, and the processing efficiency is improved.
In operation, referring to fig. 1, the following processing method is adopted to process the workpiece 2:
closing the gate valve 4, vacuumizing the main vacuum chamber 8, opening the operating door 3 of the auxiliary vacuum chamber 1, and clamping the workpiece 2 on the workpiece motion system 5; closing the operation door 3, vacuumizing the auxiliary vacuum chamber 1, keeping the vacuum degree between the main vacuum chamber 8 and the auxiliary vacuum chamber 1 basically consistent, and opening the gate valve 4; adjusting the automatic diaphragm 72 to the appropriate size; the workpiece 2 is processed by the matching of the ion source motion system 6 and the workpiece motion system 5, and the size of the automatic diaphragm 72 can be continuously adjusted in the processing process; after the processing is finished, closing the gate valve 4; the sub-vacuum chamber 1 is inflated to the ambient atmospheric pressure, the operation door 3 is opened, and the workpiece 2 is taken out.
Example 2:
the ion beam shaping processing system with the automatic diaphragm of this embodiment has basically the same structure as that of embodiment 1, and is not described herein again. The difference between the two is only that: referring to fig. 4, in the present embodiment, the automatic diaphragm 72 includes: a drive control unit 721 and a drive pinion 722 connected thereto; the transmission gear A727 is meshed with the transmission pinion 722; the rotary shell 7210 is connected with a transmission gear A727; the diaphragm blades 728 are connected at one end to the stationary ring 729 and at the other end to the rotary housing 7210.
In operation, referring to fig. 4, the beam shape of the ion beam is constrained by the following method:
the driving control unit 721 drives the transmission gear A727 meshed with the driving control unit to rotate through the transmission pinion 722; with the clockwise or counterclockwise rotation of the transmission gear A727, the rotary housing 7210 connected with the transmission gear A727 rotates; the rotary shell 7210 drives one end of the diaphragm blade 728 fixed with the rotary shell to slide; the uniformly distributed aperture blades 728 collectively form a variable aperture stop, thereby effecting beam shape modification of the ion beam.
The above is 2 common automatic diaphragm implementations, and besides the above examples, the interaction between the driving unit 721 and the rotary housing 7210 (the transmission gear 723 in the embodiment 1) in the form of belt transmission, chain transmission, shaft transmission, gear transmission, friction transmission, hydraulic transmission, pneumatic transmission, or the like is all the idea of the present invention.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. An automatic diaphragm for an ion beam, comprising an ion source (71) and an automatic diaphragm (72), characterized in that the automatic diaphragm (72) is located in the path of the ion beam emitted by the ion source (71) and is capable of automatically adjusting the diaphragm aperture, thereby adjusting the beam diameter of the downstream ion beam.
2. An automatic diaphragm for an ion beam as claimed in claim 1, wherein the automatic diaphragm (72) comprises a drive control unit (721) and a drive pinion (722) connected thereto; the transmission gear (723) is meshed with the transmission pinion (722); a plane rectangular thread A is arranged on the disc surface of the transmission gear (723), and a plane rectangular thread B meshed with the plane rectangular thread A is arranged on the bottom surface of the movable claw (724); the blocking pieces (725) are uniformly and symmetrically distributed along the circumference and are connected with the movable claws (724); housing (726) constrains moveable jaw (724) to slide radially.
3. An automatic diaphragm for an ion beam as claimed in claim 1, wherein the automatic diaphragm (72) comprises a drive control unit (721) and a drive pinion (722) connected thereto; the transmission gear (727) is meshed with the transmission pinion (722); the rotary shell (7210) is connected with the transmission gear (727); one end of the diaphragm blade (728) is connected with the fixed ring (729), and the other end is connected with the rotary shell (7210).
4. An automatic ion beam stop as claimed in claim 2, wherein said automatic stop (72) is adjustable to be fully closed to control the presence or absence of the ion beam.
5. An automatic ion beam stop as claimed in claim 3, wherein said automatic stop (72) is adjustable to be fully closed to control the presence or absence of the ion beam.
6. An ion source system with an automatic diaphragm, characterized in that the automatic diaphragm of the ion beam according to any one of claims 1 to 5 is applied in the ion source system.
7. An ion beam processing system with an automatic diaphragm, characterized in that the ion beam processing system employs the ion source system with an automatic diaphragm of claim 6.
8. The ion beam processing system with automatic diaphragm as claimed in claim 7, wherein the ion beam processing system comprises a main vacuum chamber (8) and a sub vacuum chamber (1) which can be communicated with each other or closed by a gate valve (4); an ion source (7) with an automatic diaphragm and an ion source motion system (6) for driving the ion source (7) to move are arranged in the main vacuum chamber (8); a processing station of the workpiece (2) and a workpiece motion system (5) for driving the station to move are arranged in the auxiliary vacuum chamber (1).
9. The ion beam processing system with an automatic diaphragm according to claim 8, wherein the ion source moving system (6) comprises a linear moving system consisting of an X-direction moving unit (61), a Y-direction moving unit (62), and a Z-direction moving unit (63), and a rotary system consisting of an a-direction rotating unit (64) and a B-direction rotating unit (65).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911407475.1A CN111081513A (en) | 2019-12-31 | 2019-12-31 | Ion source system with automatic diaphragm and ion beam processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911407475.1A CN111081513A (en) | 2019-12-31 | 2019-12-31 | Ion source system with automatic diaphragm and ion beam processing system |
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| Publication Number | Publication Date |
|---|---|
| CN111081513A true CN111081513A (en) | 2020-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911407475.1A Pending CN111081513A (en) | 2019-12-31 | 2019-12-31 | Ion source system with automatic diaphragm and ion beam processing system |
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| CN (1) | CN111081513A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112885697A (en) * | 2021-01-11 | 2021-06-01 | 佛山市博顿光电科技有限公司 | Ion source mounting structure and vacuum equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH257428A (en) * | 1947-03-27 | 1948-10-15 | Antonietti Raoul | Device for automatically adjusting the diaphragm of a camera. |
| CN203490383U (en) * | 2013-08-26 | 2014-03-19 | 广州安特激光技术有限公司 | Electric adjustable diaphragm used for ultraviolet laser glass cutting machine |
| US20150160533A1 (en) * | 2012-08-24 | 2015-06-11 | Canon Denshi Kabushiki Kaisha | Light-quantity control apparatus and optical apparatus |
| CN207232480U (en) * | 2017-08-16 | 2018-04-13 | 南京航空航天大学 | Iris diaphgram light modulating device based on Driven by Ultrasonic Motors |
| CN108957735A (en) * | 2018-07-26 | 2018-12-07 | 湖北三江航天红林探控有限公司 | Heavy caliber class diaphragm regulating device |
| CN109243952A (en) * | 2018-10-26 | 2019-01-18 | 长沙埃福思科技有限公司 | Dual-vacuum chamber ion beam correction of the flank shape system of processing and modification processing |
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2019
- 2019-12-31 CN CN201911407475.1A patent/CN111081513A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH257428A (en) * | 1947-03-27 | 1948-10-15 | Antonietti Raoul | Device for automatically adjusting the diaphragm of a camera. |
| US20150160533A1 (en) * | 2012-08-24 | 2015-06-11 | Canon Denshi Kabushiki Kaisha | Light-quantity control apparatus and optical apparatus |
| CN203490383U (en) * | 2013-08-26 | 2014-03-19 | 广州安特激光技术有限公司 | Electric adjustable diaphragm used for ultraviolet laser glass cutting machine |
| CN207232480U (en) * | 2017-08-16 | 2018-04-13 | 南京航空航天大学 | Iris diaphgram light modulating device based on Driven by Ultrasonic Motors |
| CN108957735A (en) * | 2018-07-26 | 2018-12-07 | 湖北三江航天红林探控有限公司 | Heavy caliber class diaphragm regulating device |
| CN109243952A (en) * | 2018-10-26 | 2019-01-18 | 长沙埃福思科技有限公司 | Dual-vacuum chamber ion beam correction of the flank shape system of processing and modification processing |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112885697A (en) * | 2021-01-11 | 2021-06-01 | 佛山市博顿光电科技有限公司 | Ion source mounting structure and vacuum equipment |
| CN112885697B (en) * | 2021-01-11 | 2022-07-19 | 佛山市博顿光电科技有限公司 | Ion source mounting structure and vacuum equipment |
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