CN111075836B - Slider, table device, industrial machine, and method for suppressing warpage of slider - Google Patents

Slider, table device, industrial machine, and method for suppressing warpage of slider Download PDF

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Publication number
CN111075836B
CN111075836B CN201910967652.5A CN201910967652A CN111075836B CN 111075836 B CN111075836 B CN 111075836B CN 201910967652 A CN201910967652 A CN 201910967652A CN 111075836 B CN111075836 B CN 111075836B
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China
Prior art keywords
air
slider
axis
axis direction
cover member
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CN111075836A (en
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北村圭史
松冈大记
荻野正
小林一三
竹内博之
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Guanyuan Production Co ltd
Panasonic Holdings Corp
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Guanyuan Production Co ltd
Panasonic Holdings Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention provides a slider, a table device, an industrial machine, and a method for suppressing the warpage of a slider, which can suppress the warpage due to drying. A cover member is attached to the outer side surface of each block constituting a Y-axis slide block (70B) made of stone with a seal member interposed therebetween. The cover member is disposed apart from the outer side surface of each block by the seal member, and a drying chamber is formed in a space surrounded by the seal member, the outer side surface of each block, and the cover member. The inner surface of each block is an air bearing surface and is exposed to compressed air for drying, and the outer surface of each block is also exposed to compressed air introduced into the drying chamber. This suppresses warpage of the stone block caused by drying of one side surface.

Description

Slider, table device, industrial machine, and method for suppressing warpage of slider
Technical Field
The invention relates to a slider, a table device, an industrial machine, and a method for suppressing warpage of a slider.
Background
Conventionally, in industrial machines such as high-precision measuring devices, inspection devices, machine tools, machining devices, and semiconductor manufacturing devices, positioning has been performed by moving a measurement object, a detector, a tool, a machining object, and the like with high precision. Therefore, in the above-described movement and positioning, a table device having an air bearing is used so as not to be affected by friction or the like (see patent documents 1 and 2).
The slider having the air bearing is made of cast iron or stone, and is often formed in a block shape. In particular, unlike cast iron, a stone slider has advantages such that it hardly suffers from secular changes such as rust, has higher wear resistance than cast iron, and hardly suffers from unevenness in flatness because "burrs" are not generated even when scratched.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2000-120685
Patent document 2: japanese laid-open patent publication No. 11-294456
Disclosure of Invention
Problems to be solved by the invention
However, although flatness is ensured in the stone slider, the surface of the slider is microscopically observed to have many fine recesses as a whole. In the concave portion, moisture may be accumulated due to the surrounding environment.
Fig. 18(a) shows a state where the slider 100 is disposed on the rail 102. The slider 100 has an air flow path 101 formed therein. The air flow path 101 is provided with an air supply hole 105 that opens to an air bearing surface 104 facing the rail 102 of the slider 100. Compressed air (dry gas) is supplied from a compressed air source to the air flow path 101, and the compressed air is supplied from the air supply hole 105 to between the rail 102 and the air bearing surface 104.
As a result, the air bearing surface 104 is exposed to the compressed air (dry gas) supplied thereto. Further, since the compressed air used for the air bearing is cleaned by a filter, a dryer, or the like so as not to contain impurities, moisture, or the like, the air bearing surface 104 is easily dried.
That is, when moisture is present in the plurality of concave portions, the slider 100 may be warped in a concave shape by contraction due to drying of the air bearing surface 104 after that (see fig. 18 (b)). In fig. 18(a), the intervals between the respective members are shown enlarged more than actually, and in fig. 18(b), the deformation is shown exaggerated than actually for easy understanding. The bearing gap between the air bearing surface 104 of the compressed air and the rail 102 is about several μm to 20 μm, and the flatness of the air bearing surface of the slider 100 is on the order of μm, but the adverse effect on the bearing gap due to the deformation of the concave shape is large. The amount of deformation of the slider 100 due to such a phenomenon is greater than that in the width direction when the longitudinal direction of the slider 100 coincides with the moving direction in which the slider is guided by a guide member such as a rail, and therefore there is a problem that the slider 100 interferes with the guide member during movement.
An object of the present invention is to solve the above problems and provide a stone slider, a table device, an industrial machine, and a method for suppressing warpage of a slider, which can suppress warpage.
Means for solving the problems
In order to solve the above problem, one aspect of the slider is a stone slider having an air bearing and relatively moving along a guide member, the slider including: a 1 st surface forming an air bearing surface of the air bearing; a 2 nd surface located on the opposite side of the guide member with respect to the 1 st surface; and an air introduction unit for supplying air to the 2 nd surface.
According to the above configuration, the 1 st surface (air bearing surface) of the slider is dried by the air used in the air bearing, and the 2 nd surface of the slider is also dried by the air supplied from the air introduction portion, thereby suppressing warpage of the slider.
The slider may have a cover member covering the 2 nd surface.
According to the above configuration, air is supplied from the air introduction portion between the 2 nd surface and the cover member, and the 2 nd surface can be dried by the air, thereby suppressing warping of the slider.
The slider may have a member provided in a gap formed between the cover member and the 2 nd surface and adapted to accumulate air supplied from the air introduction portion into the gap.
According to the above configuration, the member for accumulating the air supplied from the air introduction portion is provided in the gap between the cover member and the 2 nd surface, and the air supplied from the air introduction portion can be accumulated in the gap. The 2 nd surface is also dried by the trapped air, and warpage of the slider is suppressed.
A table device according to one aspect includes the slider and a guide member that guides the slider along the 1 st surface of the slider.
According to the above configuration, the table device including the slider with suppressed warpage can be provided.
The stage device according to another aspect may include a 1 st slider and a 2 nd slider that moves across the moving direction of the 1 st slider, wherein the 1 st slider is the slider described above, and the 2 nd slider is a slider having the cover member described above, and the cover member is a guide member that guides the movement of the 1 st slider.
According to the above configuration, the table device including the 1 st slider and the 2 nd slider can be provided.
An industrial machine according to one embodiment includes the above-described table device.
According to the above configuration, it is possible to provide an industrial machine including a table device including a slider with suppressed warpage.
A method for suppressing warpage of a slider according to one aspect relates to a method for suppressing warpage of a stone slider provided with an air bearing and moving relatively along a guide member. The slider has a 1 st surface forming an air bearing surface of the air bearing and a 2 nd surface located on a side opposite to the guide member with respect to the 1 st surface. The method comprises the following steps: a unit for introducing air is arranged on the 2 nd surface; and suppressing the warpage by introducing air to the 2 nd surface by the unit.
According to the above method, the 1 st surface (air bearing surface) of the slider is dried by air, and the 2 nd surface located on the opposite side of the guide member with respect to the 1 st surface can also be dried, whereby warping of the stone slider can be suppressed.
Effects of the invention
According to the present invention, the effect of suppressing the warpage of the stone slider is obtained.
Drawings
Fig. 1 is a schematic perspective view of a table device of an industrial machine according to embodiment 1.
Fig. 2 is a schematic perspective view of the Y-axis slider.
Fig. 3 is a side sectional view of the Y-axis slider with the cover member omitted.
Fig. 4 is a schematic perspective view of the Y-axis slider when the cover member is seen through.
Fig. 5 is a schematic perspective view of a table device of an industrial machine according to a modification of embodiment 1.
Fig. 6 is a schematic perspective view of a table device of an industrial machine according to embodiment 2.
Fig. 7 is a schematic perspective view of an upper block of the Y-axis slider.
Fig. 8 is a cross-sectional view of the Y-axis slider.
Fig. 9 is a cross-sectional view of the Y-axis slider.
Fig. 10 is a sectional view of a Y-axis slider according to modification 1 of embodiment 2.
Fig. 11 is a cross-sectional view of a Y-axis slider according to modification 2 of embodiment 2.
Fig. 12 is a schematic perspective view of a table device of an industrial machine according to modification 3 of embodiment 2.
Fig. 13 is a schematic diagram showing the overall configuration of the three-dimensional shape measuring apparatus according to embodiment 3.
Fig. 14 is a perspective view showing the structure of a Z-axis table portion of the three-dimensional shape measuring apparatus according to embodiment 3.
Fig. 15 is a longitudinal sectional view showing the structure of the Z-axis table portion.
Fig. 16 is a longitudinal sectional view showing a schematic configuration in a state where a part of an air slider outer frame is removed from a Z-axis table section.
Fig. 17 is a schematic plan view of the Z-axis table portion.
Fig. 18(a) is an explanatory view of a state before the slider is dried, and fig. 18(b) is an explanatory view of a state when the slider is dried.
Detailed Description
Hereinafter, various embodiments will be described with reference to the drawings. In addition, in the drawings, the characteristic portions may be enlarged for easy understanding, and the dimensional ratios of the components in each drawing are not limited to the actual dimensional ratios or the dimensional ratios in other drawings. In addition, in the sectional view, in order to easily understand the sectional structure of each member, a shadow of a part of the member may be omitted.
(embodiment 1)
Hereinafter, a table device according to an embodiment will be described with reference to fig. 1 to 4.
Fig. 1 illustrates a table device 10 used in an inspection device as an industrial machine. The stage device 10 positions the inspection object in an X-axis direction (1 st direction) and a Y-axis direction (2 nd direction orthogonal to the 1 st direction) orthogonal to the X-axis direction on a horizontal plane. The table device 10 includes a stone plate 20, an X-axis guide 30, an X-axis slider 32, a pair of Y-axis guides 60A and 60B, and a pair of Y- axis sliders 70A and 70B.
The Y- axis guide portions 60A and 60B are made of stone, extend in the Y-axis direction so as to be parallel to each other, and are fixed to the upper surface of the stone plate 20. The Y-axis guides 60A and 60B correspond to guide members. The Y- axis sliders 70A and 70B are guided by the Y- axis guide portions 60A and 60B, respectively, and move in the Y-axis direction. The X-axis guide 30 is a long stone member extending in the X-axis direction, and has a rectangular cross section, and both ends thereof are supported by the Y- axis sliders 70A, 70B via the support posts 80A, 80B. Therefore, the X-axis guide 30 and the X-axis slider 32 can move in the Y-axis direction in accordance with the movement of the Y- axis sliders 70A and 70B in the Y-axis direction.
In the present embodiment, the X-axis slider 32 is made of ceramic, and is not warped by the humidity of the surrounding environment.
As shown in fig. 1, the X-axis slider 32 is formed in a substantially C-shape as viewed from the X-axis direction by an upper side wall 32a and a pair of side walls 32b and 32C facing in the Y-axis direction with respect to the X-axis guide 30, and a known air bearing (not shown) is provided on each side wall, and the air bearing slidably supports the X-axis slider 32 on the X-axis guide 30 by compressed air. The air bearing is connected to an air delivery pipe (also not shown) connected to a compressed air generation source such as a compressor, and cleaned compressed air (hereinafter simply referred to as air) from the compressed air generation source is discharged from the air bearing to the upper surface and the lower surface of the X-axis guide portion 30 and to both side surfaces facing each other in the Y-axis direction.
Although not shown, the X-axis slider 32 is provided with a known driving device for reciprocating in the X-axis direction. Thereby, the X-axis slider 32 is guided by the X-axis guide 30 and can move in the X-axis direction when driven by the driving device. A table, not shown, is fixed to the upper surface of the X-axis slider 32, and an inspection object can be placed on the table. Then, by moving the Y- axis sliders 70A and 70B in the Y-axis direction and moving the X-axis slider 32 in the X-axis direction, the table can be moved in the XY-axis direction to position the inspection object in the XY-axis direction.
The Y- axis guide portions 60A and 60B include a lower base 61 fixed to the upper surface of the stone plate 20, a neck portion 62 protruding upward from the lower base 61 and having a width narrower than the lower base 61, and a head portion 63 supported by the neck portion 62, and a portion above the lower base 61 is formed in a T-shaped cross section.
As shown in fig. 2, the Y-axis slider 70A includes an upper block 71 disposed on the upper surface of the head portion 63 of the Y-axis guide portion 60A, a pair of side blocks 72 and 73 integrally fixed to the lower surfaces of both ends of the upper block 71 in the X-axis direction, and lower blocks 74 and 75 integrally fixed to the lower inner surfaces of the side blocks 72 and 73. The blocks are connected to each other by bolts or the like. The upper block 71 is made of stone, is formed in a plate shape, and extends in the Y-axis direction. The upper block 71 is disposed parallel to the upper surface of the head 63 of the Y-axis guide 60A with a predetermined gap therebetween. That is, the upper block 71 is provided with an air bearing, and the upper block 71 has a lower surface facing the upper surface of the head 63 of the Y-axis guide portion 60A as an air bearing surface 71 a. The upper block 71 corresponds to a bearing main body.
As shown in fig. 3, two rows of a plurality of air supply holes 71b spaced apart from each other by a predetermined interval in the Y-axis direction are provided in the air bearing surface 71a in the width direction (X-axis direction). The air supply holes 71b in each row communicate with an air flow path 71c formed to penetrate in the Y-axis direction from one end surface toward the other end surface in the upper block 71. One of both ends of the air flow path 71c is closed by a plug portion 71 d. As shown in fig. 3, the opening at the other end of the air flow path 71c is connected to the pipe joint 51. An air delivery pipe is connected to the pipe joint 51, and the air delivery pipe is connected to a compressed air generation source such as a compressor, not shown. The compressed air generating source generates compressed air. Although not shown, a throttle is provided at the opening end of the air supply hole 71 b.
By supplying the air from the opening end of the air supply hole 71b to between the air bearing surface 71a and the upper surface of the head portion 63 of the Y-axis guide portion 60A, a gap of a predetermined interval is formed between the air bearing surface 71a and the upper surface (opposing surface) of the head portion 63 of the Y-axis guide portion 60A. The air bearing surface 71a corresponds to the 1 st surface.
The side blocks 72 and 73 are made of stone, formed in a plate shape, and extend in the Y-axis direction. The side blocks 72 and 73 are arranged in parallel with the side surfaces of the head portion 63 of the Y-axis guide portion 60A facing in the width direction (X-axis direction) at a predetermined interval. That is, as shown in fig. 2, the side blocks 72 and 73 are provided with air bearings, and the side blocks 72 and 73 have inner surfaces facing the Y-axis guide portion 60A as air bearing surfaces 72a and 73 a. The side blocks 72, 73 correspond to bearing bodies.
As shown in fig. 3, air supply holes 72b and 73b are provided in the air bearing surfaces 72a and 73a at predetermined intervals in the Y-axis direction. The air supply holes 72b, 73b communicate with air flow passages 72c, 73c formed to penetrate in the Y-axis direction from one end surface toward the other end surface in the side blocks 72, 73.
As shown in fig. 3, one of both ends of the air flow paths 72c and 73c is closed by plugs 72d and 73 d. Further, the openings at the other ends of the air flow paths 72c and 73c are connected to the pipe joint 52. An air delivery pipe, not shown, connected to the compressed air generation source is connected to the pipe joint 52. Although not shown, a throttle is provided at the opening end of the air supply holes 72b and 73 b.
By supplying the air from the opening end of the air supply hole 72b, 73b to between the air bearing surface 72a, 73a and the side surface of the head portion 63 of the Y-axis guide portion 60A, a gap of a predetermined interval is formed between the air bearing surface 72a, 73a and the side surface (opposing surface) of the head portion 63 of the Y-axis guide portion 60A. The air bearing surfaces 72a and 73a correspond to the 1 st surface.
The lower blocks 74 and 75 are made of stone, formed in a rectangular parallelepiped shape, and extend in the Y-axis direction. The lower blocks 74 and 75 are arranged in parallel with the lower surface of the head 63 of the Y-axis guide 60A at a predetermined interval. That is, as shown in fig. 3, the lower blocks 74 and 75 are provided as bearing bodies, and have upper surfaces as air bearing surfaces 74a and 75a facing the lower surface of the head portion 63 of the Y-axis guide portion 60A. As shown in fig. 3, air supply holes 74b and 75b are provided in rows on the air bearing surfaces 74a and 75a at predetermined intervals from each other in the Y-axis direction. The air supply holes 74b, 75b communicate with air flow passages 74c, 75c formed to penetrate in the Y-axis direction from one end surface toward the other end surface in the lower blocks 74, 75.
As shown in fig. 3, one of both ends of the air flow paths 74c and 75c is closed by plugs 74d and 75 d. Further, the openings at the other ends of the air flow paths 74c and 75c are connected to the pipe joint 53. An air delivery pipe is connected to the pipe joint 53, and the air delivery pipe is connected to the compressed air generation source, not shown. The compressed air generating source generates compressed air. Although not shown, a throttle is provided at the opening end of the air supply holes 74b and 75 b.
By supplying the air from the opening ends of the air supply holes 74b, 75b to the gaps between the air bearing surfaces 74a, 75a and the lower surface (the opposing surface) of the head portion 63 of the Y-axis guide portion 60A, gaps of a predetermined interval are formed between the air bearing surfaces 74a, 75a and the lower surface (the opposing surface) of the head portion 63 of the Y-axis guide portion 60A. The air bearing surfaces 74a and 75a correspond to the 1 st surface.
As shown in fig. 2, in the Y-axis slider 70A, the upper surface 71e, the side surfaces 72e, 73e, and the lower surfaces 74e, 75e of the upper block 71, the side blocks 72, 73, and the lower blocks 74, 75 on the opposite side of the air bearing surfaces 71a, 72a, 73a, 74a, 75a are covered with cover members 76 to 79, 83, 84, 92, 93, which are cover members, respectively. The upper surface 71e, the side surfaces 72e, 73e, and the lower surfaces 74e, 75e are flat surfaces parallel to the air bearing surfaces 71a, 72a, 73a, 74a, 75a, respectively. The upper surface 71e, the side surfaces 72e, 73e, and the lower surfaces 74e, 75e correspond to the 2 nd surface.
Referring to fig. 4, a cover member 84 covering the side surface 73e of the side block 73 will be representatively described. Fig. 4 illustrates the cover member 84 in a perspective view. The cover member 84 is formed of a plate material having a rectangular shape that covers substantially the entire side surface 73e and covers one side end surface of the upper block 71. Although the material of the cover member 84 is not limited, it is made of stainless steel in the present embodiment. A seal member 85 having a rectangular shape and disposed around the periphery of the cover member 84 (i.e., the side surface 73e) is interposed between the cover member 84 and the side surface 73 e. The sealing member 85 corresponds to a member for accumulating air.
As shown in fig. 4, in the present embodiment, a plurality of mounting brackets 54 forming an L shape are used as members for pressing the outer surface of the cover member 84 and fixing the cover member 84 to the Y-axis slider 70B. These mounting brackets 54 are fastened and fixed to the upper surface of the upper block 71 and the lower surface of the side block 73 by bolts or the like. In fig. 2, for convenience of explanation, the members for fixing the cover member 84 and the cover member other than the cover member 84 to the Y-axis slider 70A (70B) are not shown.
A drying chamber 86, which is a gap having a height corresponding to the thickness of the seal member 85, is formed between the side surface 73e and one side end surface of the upper block 71 and the cover member 84. As shown in fig. 2, a plurality of through holes 84a are formed in the upper and lower portions of the cover member 84 along the Y-axis direction, and pipe joints 87 and 88 (see fig. 4) are respectively fitted to the through holes 84 a. Among the plurality of through holes 84a, an upper through hole 84a for fitting the pipe joint 87 corresponds to an air introduction portion, and a lower through hole 84a for fitting the pipe joint 88 corresponds to a discharge portion.
The pipe joint 87 is connected to an air supply pipe, which is connected to the compressed air generation source, not shown, and introduces air into the drying chamber 86. The pipe joint 88 is connected to an air discharge pipe, not shown, and discharges the air in the drying chamber 86 to the outside. As described above, air is introduced into the drying chamber 86, and the side surface 73e existing in the drying chamber 86 is dried by the air.
As shown in fig. 2, the cover member 83 is made of the same material as the cover member 84, and is attached and fixed to the side surface 72e of the side block 72 and one side end surface of the upper block 71 via the seal member 89 by the same attachment method as the cover member 84. A drying chamber, which is a gap not shown, having a height corresponding to the thickness of the sealing member 89 is formed by the cover member 83. The sealing member 89 corresponds to a member for accumulating air.
A plurality of through holes, not shown, are formed in the upper and lower portions of the cover member 83 along the Y-axis direction, and a pipe joint is attached to each through hole, as in the cover member 84. Among these through holes, the through hole positioned above the upper portion of the cover member 83 corresponds to an air introduction portion, and is connected to an air delivery pipe, not shown, connected to the compressed air generation source via a pipe joint, for introducing air into the drying chamber. Among the plurality of through holes, the through hole located below the lower portion of the cover member 83 corresponds to a discharge portion, and is connected to an air discharge pipe, not shown, via a pipe joint, to discharge the air in the drying chamber to the outside.
As described above, the side surface 72e is dried by introducing air into the drying chamber defined by the cover member 83 to make the drying atmosphere in the drying chamber.
As shown in fig. 2, the cover members 76, 77 are formed in a rectangular shape by a plate material made of the same material as the cover member 84, and the cover members 76, 77 are attached and fixed to one end portion side and the other end portion side in the Y-axis direction with the support column 80A interposed therebetween on the upper surface 71e of the upper block 71. For convenience of explanation, although the members for fixing the cover members 76 and 77 to the upper block 71 are not shown in fig. 2, they are attached by bolts, bonding, or the like.
The cover members 76 and 77 are fixed to the upper surface 71e of the upper block 71 via the seal member 90, and a drying chamber, which is a gap not shown, having a height corresponding to the thickness of the seal member 90 is formed. The sealing member 90 corresponds to a member for accumulating air. The cover members 76, 77 have a pair of through holes 76a, 77a formed at both ends in the X axis direction, respectively, and pipe joints, not shown, are fitted into the through holes 76a, 77 a. In the cover members 76 and 77, an air delivery pipe, not shown, is connected to one pipe joint, and the air delivery pipe is connected to the compressed air generation source to introduce air into the drying chamber. The other pipe joint is connected to an air discharge pipe, not shown, for discharging air in the drying chamber to the outside. The through holes 76a and 77a to which one pipe joint connected to the air sending pipe is attached correspond to the air introducing portion. The through holes 76a and 77a to which the other pipe joint connected to the air outlet pipe is attached correspond to the outlet portion.
As described above, the region in the Y axis direction with the support posts 80A interposed therebetween is dried on the upper surface 71e by introducing air into the drying chamber defined by the cover members 76, 77 and making the inside of the drying chamber a dry atmosphere.
As shown in fig. 2, the cover members 78, 79 are plate members made of the same material as the cover member 84, and the cover members 78, 79 are attached and fixed to one end portion side and the other end portion side in the X-axis direction on the upper surface 71e of the upper block 71 with the support column 80A interposed therebetween. For convenience of explanation, although the members for fixing the cover members 78 and 79 to the upper block 71 are not shown in fig. 2, they are attached by bolts, bonding, or the like.
The cover members 78 and 79 are fixed to the upper surface 71e of the upper block 71 via the seal member 91, thereby forming a drying chamber, not shown, having a height corresponding to the thickness of the seal member 91. The seal member 91 corresponds to a member for accumulating air. The cover members 78, 79 have a pair of through holes 78a, 79a formed at both ends in the Y axis direction, respectively, and pipe joints not shown are fitted to the through holes 78a, 79 a. In the cover members 78 and 79, one pipe joint is connected to an air sending pipe, which is connected to the compressed air generating source, not shown, and introduces air into the drying chamber. The other pipe joint is connected to an air discharge pipe, not shown, for discharging air in the drying chamber to the outside.
The through holes 78a and 79a to which one pipe joint connected to the air sending pipe is attached correspond to the air introducing portion. The through holes 78a, 79a to which the other pipe joint connected to the air outlet pipe is attached correspond to the outlet portion.
As described above, the region in the X-axis direction with the support posts 80A interposed therebetween is dried on the upper surface 71e by introducing air into the drying chamber defined by the cover members 78, 79 and making the inside of the drying chamber a dry atmosphere.
As shown in fig. 2 and 4, the cover members 92, 93 are fitted and fixed to the entire lower surfaces 74e, 75e of the lower blocks 74, 75. Although the members for fixing the cover members 92 and 93 to the lower blocks 74 and 75 are not shown for convenience of explanation, the cover members 92 and 93 are fixed by bolt attachment, adhesion, or the like.
The cover members 92 and 93 are fixed to the lower surfaces 74e and 75e of the lower blocks 74 and 75 via seal members 94 and 95, respectively, and a drying chamber, not shown, having a height corresponding to the thickness of the seal members 94 and 95 is formed. The sealing members 94 and 95 correspond to members for accumulating air.
As shown in fig. 4, a pair of through holes 93a are formed in the cover member 93 at both ends in the Y axis direction, respectively, and a pipe joint, not shown, is fitted into the through holes 93 a. Similarly, a pair of through holes, not shown, are formed in both end portions of the cover member 92 in the Y-axis direction, and a pipe joint, not shown, is fitted into the through holes.
In the cover members 92 and 93, an air delivery pipe, not shown, is connected to one pipe joint, and the air delivery pipe is connected to the compressed air generation source to introduce air into the drying chamber. The other pipe joint is connected to an air discharge pipe, not shown, for discharging air in the drying chamber to the outside. The through hole 93a to which the pipe joint connected to the air sending pipe is fixed (and the through hole of the cover member 92) corresponds to the air introducing portion, and the through hole 93a to which the pipe joint connected to the air discharging pipe is fixed (and the through hole of the cover member 92) corresponds to the discharging portion. As described above, the lower surfaces 74e and 75e are dried by introducing air into the drying chamber defined by the cover members 92 and 93 and making the drying atmosphere in the drying chamber.
Since the cover member and the drying chamber provided in the Y-axis slider 70B have the same configurations as the cover member and the drying chamber provided in the Y-axis slider 70A, the same reference numerals as those of the constituent members of the Y-axis slider 70A are attached to the same configurations, and the description thereof is omitted.
Although not shown, a known driving device for reciprocating the Y- axis sliders 70A and 70B in the Y-axis direction is provided.
(operation of embodiment 1)
In the table device 10 configured as described above, the operation of the Y- axis sliders 70A and 70B will be described.
The Y- axis sliders 70A, 70B are moved in the Y-axis direction by a known drive device. At this time, in the air bearing surfaces 71a, 72a, 73a, 74a, 75a of the blocks 71, 72, 73, 74, 75, air supplied from the compressed air generation source is supplied from the air supply holes 71B, 72B, 73B, 74B, 75B, and gaps of a predetermined interval are formed between the air bearing surfaces and the opposing surfaces of the Y- axis guide portions 60A, 60B that face the air bearing surfaces. On the other hand, in each block, air supplied from the compressed air generation source flows in the same manner in the drying chamber 86 and the like between the cover members 76 to 79, 83, 84, 92, 93 and the surfaces (upper surface 71e, side surface 72e, side surface 73e, lower surfaces 74e, 75e) facing the cover members.
Therefore, the air bearing surfaces 71a, 72a, 73a, 74a, 75a (the 1 st surface) of the Y- axis sliders 70A, 70B and the upper surface 71e, the side surfaces 72e, 73e, and the lower surfaces 74e, 75e (the 2 nd surface) forming the drying chamber 86 and the like located on the opposite side of the air bearing surfaces 71a, 72a, 73a, 74a, 75a are exposed to air and dried. Therefore, warpage due to drying only one side of the stone upper block 71, the side blocks 72, 73, and the lower blocks 74, 75 can be suppressed.
The present embodiment has the following features.
(1) The Y- axis sliders 70A and 70B of the present embodiment are stone sliders having air bearings and moving relatively along the Y- axis guide portions 60A and 60B (guide members). The Y- axis sliders 70A and 70B have air bearing surfaces 71a, 72a, 73a, 74a, and 75a as the 1 st surfaces. The Y- axis sliders 70A and 70B have, as the 2 nd surface, an upper surface 71e, side surfaces 72e and 73e, and lower surfaces 74e and 75e, which are located on the opposite side of the Y- axis guide portions 60A and 60B (guide members) with respect to the 1 st surface. The Y- axis sliders 70A and 70B are provided with air introduction portions (through holes 84a, etc.) for supplying air to the 2 nd surface.
As a result, although the 1 st surfaces (air bearing surfaces) of the Y- axis sliders 70A and 70B are dried by air, since air is introduced into the 2 nd surfaces (the upper surface 71e, the side surfaces 72e and 73e, and the lower surfaces 74e and 75e) of the Y- axis sliders 70A and 70B, the 2 nd surfaces can also be dried, and warpage of the sliders can be suppressed. In the present embodiment, since the upper surface 71e, the side surfaces 72e and 73e, and the lower surfaces 74e and 75e (the 2 nd surface) are formed as flat surfaces, it is not necessary to provide a recess for forming the drying chamber.
(2) In the present embodiment, the Y- axis sliders 70A and 70B have cover members (cover members) 76 to 79, 83, 84, 92, and 93 covering the 2 nd surface.
As a result, air is supplied from the air introduction portion between the 2 nd surface and the cover member, and the 2 nd surface can be dried by the air, whereby warping of the slider can be suppressed.
(3) The Y- axis sliders 70A and 70B of the present embodiment further include the following components: gaps formed between the cover members (cover members) 76 to 79, 83, 84, 92, 93 and the 2 nd surface are provided, and air supplied from the air introduction part to the gaps is accumulated. For example, in the present embodiment, the sealing members 85, 89 to 91, 94, 95 are members for accumulating air.
As a result, the air supplied from the air introduction portion can be accumulated in the gap. The 2 nd surface can be dried by the trapped air, and warpage of the slider is suppressed.
(4) The table device 10 of the present embodiment includes the Y- axis sliders 70A and 70B described in (1) to (3) above, and also includes Y- axis guide portions 60A and 60B (guide members) for guiding the Y- axis sliders 70A and 70B along the 1 st plane. As a result, the table device 10 of the present embodiment can exhibit the effects (1) to (3) described above.
(5) The table device 10 of the present embodiment is used as an inspection device for an industrial machine. As a result, the inspection apparatus of the present embodiment can achieve the effects (1) and (2) described above.
(6) The Y- axis sliders 70A, 70B include air bearing surfaces 71a, 72a, 73a, 74a, 75a and air flow passages 71c, 72c, 73c, 74c, 75c communicating with the air supply holes, the air bearing surfaces 71a, 72a, 73a, 74a, 75a respectively include air supply holes 71B, 72B, 73B, 74B, 75B for supplying air to the outside, and the air is supplied from the air supply holes to the air bearing surfaces 71a, 72a, 73a, 74a, 75a through the air flow passages.
The Y- axis sliders 70A and 70B have air bearing surfaces 71a, 72a, 73a, 74a, and 75a as the 1 st surface, a surface opposite to the 1 st surface as the 2 nd surface, cover members (cover members) 76 to 79, 83, 84, 92, and 93 covering the 2 nd surface, and a drying chamber 86 and the like are formed between the 2 nd surface and the cover members.
The warpage suppressing method of the present embodiment includes: a unit for introducing air is arranged on the 2 nd surface; and supplying air to the 2 nd surface by the unit to suppress warping of the sliders (Y- axis sliders 70A, 70B in this example). That is, the warping of the stone Y- axis sliders 70A and 70B is suppressed by passing air through the drying chamber 86 including the 2 nd surface and the like. As described above, according to the method of the present embodiment, since the drying chamber 86 for drying the 2 nd surface of the bearing main body is provided between the cover members 76 to 79, 83, 84, 92, 93 and the upper surfaces 71e, the side surfaces 72e, 73e and the lower surfaces 74e, 75e (the 2 nd surface) of the Y- axis sliders 70A, 70B, the 2 nd surface can also be dried, and warping of the bearing main body can be suppressed.
(modification of embodiment 1)
Next, a modification of embodiment 1 will be described with reference to fig. 5.
In this modification, the X-axis slider 32 is made of stone, and the following components are attached to the X-axis slider 32, unlike the embodiment 1.
That is, the upper side wall 32a and the pair of side walls 32b, 32c facing in the Y-axis direction are covered with the cover members 33, 34, 35. The material of the cover members 33, 34, 35 is not limited, but in this modification, stainless steel is used. Further, similarly to the cover member 84 of embodiment 1 and the like, a seal member (not shown) having a quadrangular shape and disposed around the periphery thereof is interposed between each of the cover members 33, 34, 35 and the side wall surface of the object to be covered therewith. In the present modification, each of these sealing members corresponds to a member for accumulating air.
Therefore, a drying chamber (not shown) having a height corresponding to the thickness of the seal member is formed between the cover members 33, 34, 35 and the side wall surfaces of the objects covered therewith. The cover members 33, 34, and 35 are provided with a plurality of through holes (not shown) similar to the cover member 84, and a pipe joint (not shown) is attached to each through hole. At least one of the through holes provided in the cover members 33, 34, and 35 serves as an air introduction portion for introducing air into the drying chamber, and at least another one serves as a discharge portion for discharging air from the drying chamber.
In the modification described above, in addition to the operational effects of embodiment 1, warping of the stone X-axis slider 32 can be suppressed.
(embodiment 2)
Next, an inspection apparatus for an industrial machine according to embodiment 2 will be described with reference to fig. 6 to 9.
Fig. 6 illustrates a table device 200 used as an inspection device for an industrial machine. The table device 200 positions the inspection object in the X-axis direction (2 nd direction) and in the horizontal plane in the Y-axis direction (1 st direction orthogonal to the 2 nd direction) orthogonal to the X-axis direction. The table device 200 includes a stone plate 210 serving also as a Y-axis guide, a Y-axis slider 220, an X-axis guide 240, and an X-axis slider 250.
The stone plate 210 includes a pair of guide side surfaces 211 facing in the X-axis direction and an upper surface 212 formed horizontally. The pair of guide side surfaces 211 extends in the Y-axis direction in parallel with each other. The stone plate 210 corresponds to a guide member.
The Y-axis slider 220 is guided by the pair of guide side surfaces 211 to move in the Y-axis direction. The X-axis guide 240 is made of a long stone extending in the X-axis direction, has a rectangular cross section, is formed in a flat plate shape, and is fixed to the Y-axis slider 220. Therefore, the X-axis guide 240 and the X-axis slider 250 can move in the Y-axis direction along with the movement of the Y-axis slider 220 in the Y-axis direction. In embodiment 2, the X-axis slider 250 is made of ceramic, and is not warped by the humidity of the surrounding environment.
As shown in fig. 6, the X-axis slider 250 is formed into a substantially C-shape when viewed in the X-axis direction by an upper side wall 250a and a pair of side walls 250b and 250C facing in the Y-axis direction, and a known air bearing (not shown) is provided on each side wall to slidably support the X-axis slider 250 on the X-axis guide 240 by compressed air. Although not shown, a known driving device for reciprocating the X-axis slider 250 in the X-axis direction is provided. Thus, the X-axis slider 250 is guided by the X-axis guide 240 and can move in the X-axis direction when driven by the driving device.
A table, not shown, is fixed to the upper surface of the X-axis slider 250, and an inspection object can be placed on the table. By moving the Y-axis slider 220 in the Y-axis direction and moving the X-axis slider 250 in the X-axis direction, the table can be moved in the XY-axis direction to position the inspection object in the XY-axis direction. As shown in fig. 6 and 7, the Y-axis slider 220 includes an upper block 222 disposed on the upper surface 212 of the stone plate 210, and a pair of side blocks 224 and 226 fixed to lower surfaces of both ends of the upper block 222 in the X-axis direction by bolt attachment or the like.
The upper block 222 is made of stone, is formed in a plate shape extending in the X-axis direction, and has an upper surface and a lower surface formed in parallel with each other. The upper block 222 is arranged to be parallel to the upper surface 212 of the stone plate 210 with a predetermined space therebetween. That is, the upper block 222 is provided with an air bearing, and the lower surface of the upper block 222 serves as an air bearing surface 222 a. The upper block 222 corresponds to a bearing main body. As shown in fig. 7 and 8, a plurality of rows of air supply holes 222b are provided at both ends of the air bearing surface 222a in the X axis direction so as to be spaced apart from each other by a predetermined interval along the Y axis direction. The air supply holes 222b in each row communicate with an air flow path 222c formed through the upper block 222 from one side to the other side, which are separated in the Y-axis direction. Both ends of the air flow path 222c in the Y axis direction are closed by the plug portion 222 d.
The air flow path 222c communicates with an air flow path 222e extending in the X-axis direction from each end surface of the upper block 222 divided in the X-axis direction. As shown in fig. 8, the opening of the air flow path 222e is connected to a pipe joint 223. An air delivery pipe is connected to the pipe joint 223, and the air delivery pipe is connected to a compressed air generation source such as a compressor, not shown. A throttle valve, not shown, is provided at the opening end of the air supply hole 222 b.
The air is supplied to the outside from the open end of the air supply hole 222b to the upper surface 212 of the stone plate 210, so that a gap of a predetermined interval is formed between the air bearing surface 222a and the upper surface 212 of the stone plate 210. The air bearing surface 222a corresponds to the 1 st surface.
The upper surface of the upper block 222 has a plane having high regions 228 (hereinafter referred to as "1 st regions") at both ends in the X-axis direction, and a region between the two 1 st regions 228 is a plane having a low region 230 (hereinafter referred to as "2 nd regions"). The height difference between the 1 st region 228 and the 2 nd region 230 is set to be several mm or less. The plane of the 2 nd region 230 corresponds to the 2 nd plane.
As shown in fig. 8 and 9, both ends of the X-axis guide 240 in the X-axis direction are fixed to the two 1 st regions 228. A gap formed between the plane of the 2 nd region 230 and the X-axis guide 240 becomes the drying chamber 235. In addition, both side ends of the drying chamber 235 facing in the Y-axis direction are opened to communicate with the external space.
As shown in fig. 7 and 9, a plurality of rows of air supply holes 230a are provided in the 2 nd area 230 so as to be spaced apart from each other by a predetermined interval along the X-axis direction. Each air supply hole 230a communicates with an air flow path 230b formed in the upper block 222 so as to penetrate from one end surface to the other end surface, the air flow path being separated in the X-axis direction. Both ends of the air flow path 230b in the X axis direction are closed by the plug 230 c. As shown in fig. 7, the air flow path 230b communicates with an air flow path 230d extending in the Y-axis direction from one side portion of the upper block 222 facing in the Y-axis direction. The opening of the air flow passage 230d is connected to a pipe joint, not shown. An air delivery pipe is connected to the pipe joint, and the air delivery pipe is connected to a compressed air generation source such as a compressor, not shown. Further, a throttle valve, not shown, is provided at the opening end of the air supply hole 230 a. The air supply hole 230a corresponds to an air introduction portion.
By supplying air into the drying chamber 235 from the opening end of the air supply hole 230a, the plane of the 2 nd area 230 facing the drying chamber 235 can be dried. The air discharged into the drying chamber 235 is released to the outside space through the opening 235a (see fig. 8 and 9) formed by opening both ends of the drying chamber 235 facing in the Y-axis direction. The opening 235a corresponds to a discharge portion.
As described above, the X-axis guide 240 also functions as a cover member. The X-axis guide 240 corresponds to a guide member.
As shown in fig. 8, the side blocks 224 and 226 are made of stone, formed in a plate shape, and extend in the Y-axis direction. The side blocks 224 and 226 are arranged to be parallel to the leading side surface 211 of the stone plate 210 at a predetermined interval. That is, as shown in fig. 8 and 9, the side blocks 224 and 226 are provided with air bearings, and the side blocks 224 and 226 have inner surfaces facing the guide side surface 211 of the stone plate 210 as air bearing surfaces 224a and 226 a.
As shown in fig. 8, the air bearing surfaces 224a and 226a are provided with rows of air supply holes 224b and 226b spaced apart from each other by a predetermined interval in the Y-axis direction. In fig. 8, only one air supply hole 224b and 226b is shown. The air supply holes 224b and 226b communicate with air flow passages 224c and 226c formed to penetrate in the Y axis direction from one end surface facing in the Y axis direction to the other end surface in the side blocks 224 and 226.
The air flow passages 224c, 226c communicate with air flow passages 224e, 226e extending in the X-axis direction from respective end surfaces of the divided side blocks 224, 226. Both ends of the air flow paths 224c and 226c are closed by plugs, not shown. As shown in fig. 8, the openings of the air flow paths 224e and 226e are connected to a pipe joint 229. An air delivery pipe is connected to the pipe joint 229, and the air delivery pipe is connected to a compressed air generation source such as a compressor, not shown. Further, throttle valves, not shown, are provided at the opening ends of the air supply holes 224b and 226 b.
The air is supplied to the guide side surface 211 of the stone plate 210 from the opening ends of the air supply holes 224b, 226b to the outside, so that gaps of a predetermined interval are formed between the air bearing surfaces 224a, 226a and the guide side surface 211. Although not shown, a known driving device for reciprocating the Y-axis slider 220 in the Y-axis direction is provided.
(operation of embodiment 2)
In the table device 200 configured as described above, the operation of the Y-axis slider 220 will be described.
The Y-axis slider 220 is moved in the Y-axis direction by a known driving device. At this time, air supplied from the compressed air generation source is supplied to the outside from the air supply holes 222b, 224b, 226b of the air bearing surfaces 222a, 224a, 226a of the blocks 222, 224, 226, and a gap of a predetermined interval is formed between each air bearing surface and the facing surface of the stone plate 210 facing the air bearing surface.
On the other hand, in the upper block 222, air supplied from a compressed air generation source similarly flows in the drying chamber 235 between the X-axis guide 240 as a cover member and the plane of the 2 nd region 230 of the upper block 222 facing the X-axis guide 240. Therefore, the plane of the 2 nd area 230 constituting the upper surface of the upper block 222 as the 2 nd surface is exposed to the air and dried. Therefore, warpage due to drying of only the air bearing surface 222a in the stone upper block 222 can be suppressed.
Embodiment 2 has the following features.
(1) In embodiment 2, the air bearing surface 222a (1 st surface) of the upper block 222 (bearing main body) is dried by air supplied from the air supply hole 222b to the outside. However, since the drying chamber 235 for drying the 2 nd surface (the 2 nd region 230) of the upper block 222 (the bearing main body) is provided between the X-axis guide 240 (the cover member) and the plane of the two 1 st regions 228 as the upper surfaces of the upper block 222, the 2 nd surface of the upper block 222 can be dried, and warping of the bearing main body can be suppressed.
(1 st modification of embodiment 2)
As shown in fig. 10, the entire upper surface of the upper block 222 is formed as a flat surface having no step, but instead, a step may be provided on the lower surface of the X-axis guide 240, and a recess 241 facing downward in cross section may be provided between both end portions 248 in the X-axis direction. In fig. 10, the lower surfaces of the left and right end portions 248 except the concave portion 241 are fitted and fixed to the upper surface of the upper block 222. The depth of the recess 241 is set to several mm or less. Here, a drying chamber 245 is formed between the concave portion 241 and the upper block 222. Both sides of drying chamber 245 in the Y axis direction are open to the external space.
(modification 2 of embodiment 2)
In the above embodiment 2, the Y-axis slider 220 is provided with the air flow path 230b so that compressed air (dry gas) is supplied from the air supply hole 230a between the 2 nd area 230 and the lower surface of the X-axis guide 240. That is, the air flow path 230b and the air supply hole 230a for drying the 2 nd area 230 of the Y-axis slider 220 are provided in the Y-axis slider 220 itself. The air flow path 230b and the air supply hole 230a may be omitted, and the configuration may be changed to that shown in fig. 11. In addition, the structure of fig. 11 is shown as a modification of fig. 10.
As shown in fig. 11, the X-axis guide 240 is provided with an air flow path 240b connected to a compressed air source and an air supply hole 240a communicating with the air flow path 240b to supply compressed air (dry gas) to a gap between the concave portion 241 and the upper surface of the Y-axis slider 220. As shown in fig. 11, both side ends of drying chamber 245 facing in the Y-axis direction are open to communicate with the external space. Here, the upper surface of the Y-axis slider 220 facing the concave portion 241 corresponds to the 2 nd surface.
In this modification, compressed air is supplied into the drying chamber 245 from the opening end of the air supply hole 240a, so that the upper surface of the Y-axis slider 220 facing the drying chamber 245 can be dried. The air discharged into drying chamber 245 is discharged to the outside space through open ports 245a formed at both side ends of drying chamber 245 facing each other in the Y-axis direction. The opening 245a corresponds to a discharge portion.
(modification 3 of embodiment 2)
Next, a 3 rd modification of embodiment 2 will be described with reference to fig. 12.
In this modification, the X-axis slider 250 is made of stone, and the following components are attached to the X-axis slider 250, which is different from the embodiment 2.
That is, the upper side wall 250a and the pair of side walls 250b, 250c facing in the Y-axis direction are covered with the cover members 251, 252, 253. The material of the cover members 251, 252, and 253 is not limited, but in modification 3, stainless steel is used. Further, similarly to the cover member 84 of embodiment 1, a seal member (not shown) having a rectangular shape and disposed on the four peripheral edges thereof is interposed between the cover members 251, 252, and 253 and the side wall surfaces to be covered therewith. In the 3 rd modification, each of these seal members corresponds to a member for accumulating air.
Therefore, a drying chamber (not shown) having a height corresponding to the thickness of the sealing member is formed between the cover members 251, 252, and 253 and the side wall surface of the object covered therewith. The cover members 251, 252, and 253 are provided with a plurality of through holes (not shown) similar to the cover member 84, and a pipe joint (not shown) is attached to each through hole. In the cover members 251, 252, and 253, at least one of the through holes provided in the cover members serves as an air introduction portion for introducing air into the drying chamber, and at least another one serves as a discharge portion for discharging air from the drying chamber.
In the above-described modification 3, in addition to the operational effects of embodiment 2, warping of the stone X-axis slider 250 can be suppressed.
(embodiment 3)
Next, embodiment 3 will be described with reference to fig. 13 to 17.
Embodiment 3 embodies the Z-axis table section 301 of the three-dimensional shape measuring apparatus 300 as a table apparatus. First, the overall structure of the three-dimensional shape measuring apparatus 300 is shown in fig. 13.
The three-dimensional shape measuring apparatus 300 includes an XY table 302, a Z-axis table unit 301, and a controller 500. The XY table 302 is disposed on a stage 310 so as to be movable in the XY axis direction, and is capable of placing and holding the measurement object 303 and moving the measurement object 303 in the XY axis direction.
The Z-axis table section 301 is supported by the stage 310 so as to be movable in the Z-axis direction, that is, in the vertical direction (vertical direction), and is capable of moving the probe section 403 up and down by supporting the probe section 403 in contact with the measurement surface of the measurement object 303 at the lower end.
As shown in fig. 15, the control unit 500 is connected to the focusing optical system 404, the XY stage 302 (see fig. 13), the Z-axis stage unit 301, the He — Ne laser 305, and the like, and controls the three-dimensional shape measuring operation by performing operation control of each. In fig. 13, reference numeral 306 denotes an X-axis direction mirror, 307 denotes a Y-axis direction mirror, and 308 denotes an X-axis length measuring laser beam.
The probe 403 is brought into contact with the measurement object 303 while the measurement object 303 is moved in the X-axis direction and the Y-axis direction by the XY table 302, and the movement of the probe 403 is detected by an optical system connected to the Z-axis table unit 301, thereby measuring the three-dimensional shape of the measurement object 303.
The three-dimensional shape measuring apparatus 300 moves the relative position of the measurement surface of the measurement object 303 and the probe part 403 in the XYZ-axis direction by moving the XY table 302 of the measurement surface in the XY-axis direction and the Z-axis table part 301 of the probe part 403 in the Z-axis direction.
As shown in fig. 14 to 17, the Z-axis table section 301 includes an air slider outer frame 401, an air slider hollow shaft 402, two support arms 405, two driving sections 407, two support sections 408, a probe section 403, a focusing optical system 404, and the like.
As shown in fig. 13, 14, and 15, the focusing optical system 404 is an optical system including at least the He — Ne laser 305, and is provided at both ends of the air slider hollow shaft 402. As shown in fig. 15, the focusing optical system 404 is roughly composed of the He — Ne laser 305, a focusing element 450, a collimator lens 451, a dichroic mirror 452, a collimator lens 453, and a reflecting mirror 454. The focusing element 450, the collimating lens 451, and the dichroic mirror 452 are disposed at the upper end of the air slider hollow shaft 402. A collimating lens 453 and a mirror 454 are disposed at the lower end of the air slider hollow shaft 402. A mirror 454 is fixed to an upper end of a stylus 456 supported by the micro slider 455 of the probe 403.
The tilt optical system 410 is disposed at the upper end and inside of the hollow shaft 402 of the air slider, in parallel with the optical path of the focusing optical system 404. The tilt optical system 410 includes a tilt optical system semiconductor laser 457, a collimator lens 458, a mirror 459, a polarization beam splitter 460, an 1/4 wavelength plate 461, a mirror 454, a tilt signal adjusting mirror 462, and a tilt optical system light receiving element 463. When the micro slider 455 provided in the lens barrel of the probe 403 is tilted, the position at which light emitted from the semiconductor laser 457 for a tilt optical system is reflected by the mirror 454 on the upper surface of the micro slider 455 and received by the light receiving element 463 for a tilt optical system changes. The change is detected to perform tilt correction.
The air slider outer frame 401 is made of stone, has heat insulation properties, is formed in a rectangular frame shape elongated in the vertical direction (see fig. 17), and supports the air slider hollow shaft 402 inside thereof so as to be movable in the vertical direction (Z-axis direction). The air slider frame 401 is fixed to the stage 310 of the three-dimensional shape measuring apparatus 300.
As shown in fig. 15 and 16, the air slider frame 401 is configured by an integral structure in which an upper support portion 401a having a quadrangular frame shape disposed on the upper side and a lower support portion 401b having a quadrangular frame shape disposed on the lower side are integrally connected. A gap 401c is provided between the upper support portion 401a and the lower support portion 401b so that the two support arms 405 extending in the lateral direction can move up and down. Each of the upper support portion 401a and the lower support portion 401b is provided with an air bearing portion 350, and the air bearing portion 350 includes a plurality of air bearings 351, 352, 353, 354 (see fig. 17) supported in a non-contact state on the air slider hollow shaft 402 so as to be movable up and down and not to be movable in a lateral direction orthogonal to the up and down direction.
The air slider hollow shaft 402 functions as a Z-axis drive shaft of the Z-axis table section 301, and is a rectangular parallelepiped tubular member elongated in the vertical direction.
As shown in fig. 17, air bearings 351, 352, 353, 354 are provided on the inner surface sides of the front, rear, right, and left side walls of the air slider frame 401, respectively, which face the front, rear, right, and left side surfaces, which are the outer surfaces of the air slider hollow shaft 402. The air bearings 351a, 352a, 353a, 354a of the air bearing surfaces 351, 352, 353a, 354a facing the front surface, the rear surface, and the left and right side surfaces, which are the outer surfaces of the air slider hollow shaft 402, are provided with a plurality of air supply holes (i.e., air ejection holes), not shown.
The compressed air is supplied from the 3 rd air supply source 380 to the air bearings 351, 352, 353, 354 at a constant pressure at all times, and is ejected from the plurality of air supply holes to the front surface, the rear surface, the right side surface, and the left side surface, which are the outer surfaces of the air slider hollow shaft 402. Thereby, an air gap 360 (see fig. 16) with a minute gap is formed between the air slider outer frame 401 and the air slider hollow shaft 402. The air slider hollow shaft 402 corresponds to a guide member for guiding the air slider outer frame 401.
As shown in fig. 14 and 17, four outer surfaces of the air slider frame 401, that is, surfaces opposite to the air slider hollow shaft 402, are covered with cover members 361, 362, 363, and 364 as cover members. The material of the cover members 361, 362, 363, 364 is not limited, but in embodiment 3, stainless steel is used. Although not shown, similarly to the cover member 84 of embodiment 1, a seal member (not shown) having a rectangular shape and disposed around the periphery of the cover members 361, 362, 363, 364 and the side wall surfaces of the objects covered therewith is interposed therebetween. These sealing members correspond to members for accumulating air.
Therefore, a drying chamber (not shown) having a height corresponding to the thickness of the sealing member is formed between the cover members 361, 362, 363, and 364 and the side wall surface of the object covered therewith. The cover members 361, 362, 363, and 364 are provided with a plurality of through holes (not shown) similar to the cover member 84 of embodiment 1, and a pipe joint (not shown) is attached to each through hole. In the cover members 361, 362, 363, 364, at least one of the through holes provided in the respective cover members serves as an air introduction portion for introducing air into the drying chamber, and at least another one serves as a discharge portion for discharging air from the drying chamber. Air is supplied to the air introduction portion from the 4 th air supply source 370 at a constant pressure at all times (see fig. 16).
A focusing optical system 404 (a part of it) is disposed at the upper end of the air slider hollow shaft 402, and a probe section 403 is disposed at the lower end. A through hole 406 is formed in the center of the air slider hollow shaft 402, and an optical path connecting the focusing optical system 404 and the mirror 454 at the upper end of the probe 403 is formed in the through hole 406.
The base ends of the two support arms 405 are fixed to the height of the center of gravity position of the air slider hollow shaft 402, which is the sum of the focusing optical system 404, the probe 403, and the air slider hollow shaft 402. The two support arms 405 are fixed to protrude from the height of the center of gravity position of the air slider hollow shaft 402 toward both sides in the lateral direction of the air slider hollow shaft 402, that is, in a direction symmetrically orthogonal to the center axis CL (see fig. 14) of the air slider hollow shaft 402. The pair of support arms 405 are symmetrical with respect to the center axis CL of the hollow air slider shaft 402. Each support arm 405 is made of a rigid body such as metal or ceramic.
The pair of driving units 407 are disposed symmetrically with respect to the center axis CL of the air slider hollow shaft 402 at positions near the air slider hollow shaft 402 of the support arms 405, and can drive the air slider hollow shaft 402 in the axial direction by the two support arms 405 with respect to the air slider frame 401. Here, each driving unit 407 is formed of an actuator. For example, the actuator is constituted by a linear motor 420.
As shown in fig. 15 and 17, the linear motor 420 is composed of a coil 421, a center yoke 422, an outer yoke 423, and a rectangular parallelepiped rod-shaped magnet 424, and is driven and controlled under the control of the control unit 500.
The coil 421 is disposed in the vicinity of the air slider hollow shaft 402 in each support arm 405, is formed in a rectangular frame shape, and is connected to the support arm 405 at the center in the axial direction thereof. The center yoke 422 is formed in a rectangular parallelepiped bar shape and fixed to the air slider frame 401 along the vertical direction. The outer yoke 423 is formed in a rectangular parallelepiped shape, is disposed at a gap interval in which the coil 421 can move up and down in front of and behind the center yoke 422, and is fixed to the air slider frame 401 in the up-down direction. The magnet 424 is fixed to the air slider housing 401. The coil 421 is fitted to the outside of the center yoke 422 and can move freely in the vertical direction.
The linear motor 420 moves the air slider hollow shaft 402 in the vertical direction with respect to the fixed center yoke 422 by applying a predetermined drive current to the coil 421 using a moving coil system.
The two linear motors 420 are arranged such that the central axis between the two drive shafts (central axis of the coil 421) coincides with the central axis passing through the center of gravity of the air slider hollow shaft 402. Therefore, the structure is as follows: since there is no offset between the two center axes, the control unit 500 synchronizes the two linear motors 420 to drive the air slider hollow shaft 402 up and down, thereby driving a portion of the center of gravity position of the air slider hollow shaft 402. Therefore, it is difficult to generate a rotational moment in the air slider hollow shaft 402.
The two support portions 408 are configured to support the front end portions of the two support arms 405 extending further in the lateral direction from the two driving portions 407. That is, the support portions 408 are disposed in the vicinity of the driving portion 407 of each support arm 405 and at positions spaced apart from the air slider hollow shaft 402, symmetrically with respect to the center axis CL of the air slider hollow shaft 402. Specifically, the central axis of each support portion 408 (e.g., the central axis of the rod 427 a), the central axis of each drive portion 407 (e.g., the central axis of the coil 421), and the central axis of the air slider hollow shaft 402 (i.e., the central axis of the air slider housing 401) are arranged parallel to each other.
Further, since the center axis of each support portion 408 (for example, the center axis of the rod 427 a), the center axis of each driving portion 407 (for example, the center axis of the coil 421), and the center axis of the air slider hollow shaft 402 (that is, the center axis of the air slider outer frame 401) are arranged in parallel to each other, each support arm 405 is configured such that the support portion 408 is arranged outside the driving portion 407, as viewed from the air slider hollow shaft 402. The two support portions 408 are movable in the lateral direction, and support the own weight of the air slider hollow shaft 402, the probe portion 403, the focusing optical system 404, and the two drive portions 407.
Each support portion 408 is a sliding support portion that allows movement in a plane orthogonal to the vertical direction (Z-axis direction) and tilting with respect to the vertical direction (Z-axis direction) with respect to the two support arms 405. That is, each support portion 408 supports the two support arms 405 so as to be movable in the directions of two orthogonal axes (X-axis direction and Y-axis direction) orthogonal to the vertical direction (Z-axis direction) and tiltable with respect to the Z-axis direction, thereby alleviating the deformation force acting on the air slider hollow shaft 402 due to the influence of heat or the like. That is, the two support arms 405 protrude from the air slider hollow shaft 402 to both sides, and have a cross-shaped structure in which the driving unit 407 is disposed at an intermediate position of each support arm 405, and the two support portions 408 of the two support arms 405 have a sliding structure and are capable of sliding laterally. Therefore, no lateral force is applied to the support arm 405, and no force acts on the air slider hollow shaft 402 via the support arm 405 to bend the air slider hollow shaft 402. Thus, the air slider hollow shaft 402 can move only in the vertical direction, and the rotational movement of the tip of the probe section 403 can be suppressed without applying a rotational moment around the center of gravity of the air slider hollow shaft 402.
As shown in fig. 15, each support portion 408 specifically includes a cylinder 427 that supports each support arm 405 so as to be movable up and down, an air cushion 428, and a spherical bearing portion 429. The housing 427c of the air cylinder 427 is fixed to the stage 310 of the three-dimensional shape measuring apparatus 300. The upper end of a rod 427a of the cylinder 427 is coupled to an air spring 428 via a spherical bearing portion 429.
Thus, the air bearing 428 is supported by the upper end of the rod 427a via the spherical bearing portion 429 so as to be tiltable in the 360-degree direction about the Z-axis. The upper surface of the air cushion 428 is disposed to face the lower surface of the flat surface of the inverted L-shaped support receiving portion 405a at the front end of the support arm 405.
A plurality of air ejection holes (not shown) are formed in the upper surface of the air cushion 428. Air is supplied from the 1 st air supply source 441 (see fig. 15) to the air suction ports (not shown) of the air pads 428 at a constant pressure at all times, and the air is ejected from the plurality of air ejection holes toward the lower surface of the support receiving portion 405a, thereby forming air gap portions 430 (see fig. 16) with a minute gap between the air pads 428 and the lower surface of the support receiving portion 405 a.
That is, the flat lower surface of the support receiving portion 405a at the tip of each support arm 405 faces the flat lower surface of the support receiving portion 405a at the tip of each support arm 405, and a slight gap (air gap portion 430) is opened between the flat lower surface of the support receiving portion 405a at the tip of each support arm 405 and the air cushion 428 by the pressure of the compressed air ejected from the air ejection holes of the air cushion 428. Through the gap, the support arms 405 are supported by the support portions 408 so as to be movable in the lateral direction.
As a result, the air gap 430 has very little sliding resistance in the horizontal direction, and almost no horizontal force from the support arms 405 acts on the support portions 408. The ball 429b of the spherical bearing portion 429 is rotatably supported between the air bearing 428 and the pedestal 429a of the spherical bearing portion 429, and when the air bearing 428 tilts, the tilt can be absorbed.
An air bearing 427b that functions as an example of a piston is fixed to a lower end of the rod 427a of the cylinder 427. The air bearing 427b slides in the axial direction of the rod 427a within a housing 427c of the cylinder 427. The control unit 500 supplies air to the internal space 427d between the air bearing 427b and the housing 427c under the supply control of air from the 2 nd air supply source 442 and the opening/closing control of the control valve 443, and drives the pair of air cylinders 427 to move the rods 427a up and down, thereby supporting the pair of support arms 405 to maintain a predetermined height.
Thus, the pair of cylinders 427 support the pair of support arms 405 with a constant force throughout the stroke of the rod 427 a. The rod 427a is configured to be movable in the up-down direction from a housing 427c of the cylinder 427, and the housing 427c of the cylinder 427 and the rod 427a are supported by an air gap. Therefore, the sliding resistance in the vertical direction and the rotational direction around the axis is extremely small between the housing 427c and the rod 427 a.
As described above, each support portion 408 is disposed outermost with respect to each support arm 405. Further, when the driving portions 407 are disposed outside the supporting arms 405 with respect to the supporting portions 408, there may be a difference in the thrust between the left and right driving portions 407, for example, the left and right linear motors 420, and in this case, the bending moment increases when the distance from the air slider hollow shaft 402 to the center axis of the left and right linear motors 420 is long. Therefore, the left and right linear motors 420 are preferably positioned as close to the air slider hollow shaft 402 as possible. In addition, the bearing 408 is also preferably adjacent to the air slider hollow shaft 402.
With the above configuration, under the control of the controller 500, the air cylinder 427 of the two support portions 408 moves to an initial position where the Z-axis table portion 301 having the probe portion 403 is brought close to the measurement object 303 placed and held on the XY table 302, and then the air-slider hollow shaft 402 is supported by the two support portions 408 via the two support arms 405. Next, the control unit 500 controls the linear motors 420 of the two driving units 407 so that the probe 403 is brought into contact with the measurement surface of the measurement object 303 to scan the measurement object 303 at a predetermined scanning speed, thereby measuring the three-dimensional shape of the measurement object 303.
In the Z-axis table part 301 of the three-dimensional shape measuring apparatus 300, the outer surface of the air slider frame 401 (that is, the surface located on the opposite side of the air slider hollow shaft 402) located on the opposite side of the air bearing surfaces 351a, 352a, 353a, 354a of the stone-made air slider frame 401 from the air bearing portions 350 is covered with the cover members 361, 362, 363, 364, and air is introduced into the dry chamber between the cover members and the outer surface. As a result, warping of the air slider frame 401 made of stone can be suppressed.
The embodiments and modifications may be modified as described below.
In embodiment 1, the lower blocks 74 and 75, the cover members 92 and 93, the seal members 94 and 95, and the like may be omitted.
In embodiment 1, when the influence of warpage due to drying of the air bearing surfaces 74a and 75a of the lower blocks 74 and 75 does not become a problem, the cover members 92 and 93, the seal members 94 and 95, and the like may be omitted.
In embodiment 1, the cover members 76 to 79, 83, 84, 92, and 93 are provided with an air introduction portion for introducing air into the drying chamber and a discharge portion for discharging air in the drying chamber from the drying chamber to the outside, but each of the bearing bodies (i.e., each of the blocks 71 to 75) may be provided with an air introduction portion for introducing air into the drying chamber and a discharge portion for discharging air in the drying chamber from the drying chamber to the outside.
As a modification of embodiment 2, a sealing member may be interposed between the two 1 st regions 228 of the upper block 222 and the X-axis guide 240.
The above-described modification of fig. 10 or 11 may be combined with embodiment 2, and the gap formed between the recess 241 and the plane of the 2 nd region 230 may be used as a drying chamber.
The industrial machine is not limited to the inspection apparatus, and can be applied to other industrial machines such as a measuring apparatus, a machine tool, a processing apparatus, and a semiconductor manufacturing apparatus.
Description of the reference numerals
10 … table device, 20 … stone plate, 30 … X axis guide,
32 … X-axis slide block, 51, 52, 53 … pipe joints,
54 … mounting bracket, 60A, 60B … Y axis guide (guide member),
61 … lower table, 62 … neck, 63 … head,
70A, 70B … Y-axis slide block, 71 … upper block,
71a … air bearing surface (No. 1), 71b … air supply holes, 71c … air flow path,
71d …, 71e … upper surface (2 nd surface), 72, 73 … side block,
72a, 73a … air bearing surface (surface 1), 72b, 73b … air supply holes,
72c, 73c …, 72d, 73d … plug portion,
72e, 73e … side (No. 2), 74, 75 … lower block,
74a, 75a … air bearing surface, 74b, 75b … air supply holes,
74c, 75c … air flow path, 74d, 75d … plug,
74e, 75e …, cover members (cover members) 76 to 79 …,
76a, 77a, 78a, 79a … through holes (air inlet, outlet),
76B, 78B, 79B …, 80A, 80B … posts,
83. 84 … cover member (lid member),
84a … through holes (air inlet, outlet), 85 … sealing member, 86 … drying chamber,
87. 88 … pipe joints, 89 … seal components, 90, 91 … seal components,
92. 93 … cover member (lid member),
93a … through holes (air inlet, outlet), 94, 95 … sealing members,
100 … slider, 102 … recess, 104 … air bearing surface,
200 … bench set, 210 … stone plate, 211 … leading side,
212 … upper surface, 220 … Y-axis slide block, 222 … upper block,
222a … air bearing surface (No. 1), 222b … air supply holes, 222c … air flow path,
222d … plug, 222e … air flow path, 223 … pipe joint,
224. 226 … side block, 228 … zone 1, 230 … zone 2,
230a … air supply hole (air introduction part), 230b … air flow path, 230c … plug part,
230d … air flow path, 235 … drying chamber, 235a … open port (exhaust),
240 … X-axis guide (guide member, cover member),
240a … air supply holes, 240b … air flow passages, 241 … recesses, 245 … drying chamber,
245a … open mouth, 248 … end, 350 … air bearing portion,
351. 352, 353, 354 … air bearings,
351a, 352a, 353a, 354a …,
361. 362, 363, 364 … cover member (lid member),
370 …, 4 th air supply, 380 …, 3 rd air supply,
401 … air slide outer frame, 401a … upper support,
401b … lower support, 401c … gap,
402 … air slider hollow shaft (guide member), 404 … focusing optics,
405 …, 405a … support bearing, 406 … through hole,
407 … drive unit, 408 … support unit, 410 … tilt optical system,
420 … linear motor, 421 … coil, 422 … central yoke,
423 … outer yoke, 424 … magnet, 427 … cylinder,
427a … rod, 427b … air bearing, 427c … housing,
427d …, 428 … air spring, 429 … spherical bearing portion,
430 … air gap.

Claims (9)

1. A slider which is a stone slider having an air bearing and relatively moves along a guide member, the slider comprising:
a 1 st surface forming an air bearing surface of the air bearing;
a 2 nd surface located on the opposite side of the guide member with respect to the 1 st surface; and
and an air introduction unit for supplying air to the 2 nd surface.
2. The slider of claim 1, wherein,
the slider has a cover member covering the 2 nd surface.
3. The slider of claim 2,
the slider further includes a member provided in a gap formed between the cover member and the 2 nd surface and configured to accumulate air supplied from the air introduction portion to the gap.
4. The slider of claim 2,
the air introduction portion is at least one hole formed in the cover member or the 2 nd surface.
5. The slider of claim 2,
the cover member includes a plurality of holes, at least one of the plurality of holes is provided as the air introduction portion, and at least another one of the plurality of holes is provided as a discharge portion that discharges the air supplied from the air introduction portion to the 2 nd surface.
6. A table device having the slider as set forth in any one of claims 1 to 5 and having a guide member for guiding the slider along the 1 st surface.
7. A table device comprises a 1 st slide block and a 2 nd slide block moving across the moving direction of the 1 st slide block,
at least the 2 nd slider of the 1 st slider and the 2 nd slider is constituted by the slider of claim 2,
the cover member of the 2 nd slider is provided as a guide member for guiding the movement of the 1 st slider.
8. An industrial machine having the table device according to claim 6 or 7.
9. A method for suppressing warpage of a slider, which is a stone slider provided with an air bearing and relatively moving along a guide member,
the slider has a 1 st surface forming an air bearing surface of the air bearing and a 2 nd surface located on a side opposite to the guide member with respect to the 1 st surface,
the method comprises the following steps:
a unit for introducing air is arranged on the 2 nd surface; and
the warpage is suppressed by the unit supplying air to the 2 nd surface.
CN201910967652.5A 2018-10-18 2019-10-12 Slider, table device, industrial machine, and method for suppressing warpage of slider Active CN111075836B (en)

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JP2018196799A JP7090246B2 (en) 2018-10-18 2018-10-18 Sliders, stage devices, industrial machines, and methods for suppressing warpage of sliders
JP2018-196799 2018-10-18

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