CN111060526A - Method for detecting surface defects of metal target based on picture processing - Google Patents
Method for detecting surface defects of metal target based on picture processing Download PDFInfo
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- CN111060526A CN111060526A CN201811205335.1A CN201811205335A CN111060526A CN 111060526 A CN111060526 A CN 111060526A CN 201811205335 A CN201811205335 A CN 201811205335A CN 111060526 A CN111060526 A CN 111060526A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 16
- 239000002184 metal Substances 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000012545 processing Methods 0.000 title claims abstract description 14
- 230000007547 defect Effects 0.000 title claims abstract description 13
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000004544 sputter deposition Methods 0.000 claims description 42
- 238000005286 illumination Methods 0.000 claims description 6
- 230000000007 visual effect Effects 0.000 claims description 4
- 239000013077 target material Substances 0.000 abstract description 10
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005477 sputtering target Methods 0.000 description 7
- 238000005498 polishing Methods 0.000 description 5
- 239000011324 bead Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
The invention discloses a method for detecting surface defects of a metal target based on picture processing, which comprises the following steps of S1: turning on a coaxial light source, and detecting knife lines by a camera; s2: and (5) closing the coaxial light source, opening the strip-shaped light source, and picking up images by a camera to detect scratches. The invention has the beneficial effects that: the detection efficiency is high, and the detection result is accurate. Whether knife lines and scratches exist on the surface of the target material can be effectively detected.
Description
Technical Field
The invention relates to the technical field of targets, in particular to a method for detecting surface defects of a metal target based on picture processing.
Background
With the society entering the information age, the demand of human production and life on various products such as semiconductor chips, liquid crystal panels and the like is rapidly increased, and the sputtering target is one of the indispensable key materials for processing and manufacturing the products. Depending on the application, the sputtering target can be made of pure metals, alloys, ceramics or borides by fine machining. Compared with the traditional material industry, the sputtering target has extremely high technical requirements, which include target size, purity, impurity content, density, resistance value, magnetic permeability, flatness, surface roughness, grain size and uniformity, component and structure uniformity, foreign matter content and size, processing defect control and the like. For example, the purity of metal sputtering targets is often required to reach 99.9% -99.999%, and qualified smooth surfaces have ultrahigh fineness, flatness, uniformity and mirror-like light reflecting characteristics. Only a few enterprises worldwide are able to process and manufacture such products. At present, a very high-precision numerical control lathe and a tool are needed when the surface of the sputtering target is processed, and the skilled machine tool operation skill and rich quality detection experience of workers are matched. In order to improve the production efficiency and ensure the product quality, the sputtering target material production and processing process needs to be automatically and intelligently designed and modified, and the interconnection with an MES system is realized. The industrial robot can replace manual work to realize automatic feeding and discharging, and the PLC can be connected with a numerical control machine tool as a communication and control center to realize automatic target cutting operation. However, the above modification measures cannot avoid surface defects, such as knife lines and scratches with different depths, which affect the use function of the product, occurring in the sputtering target production and processing process. Detecting these surface defects is an engineering challenge. Firstly, the lathe needs to be paused for one time or a plurality of times in the processing process, then the surface quality of the target material is judged manually, and if the target material is unqualified, further processing is needed. Sometimes, the defects are not obvious, and workers cannot directly judge the defects on the lathe by naked eyes after the machining is finished, so that the target material is taken down from the lathe and sent to a professional quality inspection department for detection in a special environment. The method increases the transfer time and labor cost, greatly restricts the production efficiency, prevents the realization of full-automatic production, and is easy to cause missing detection and false detection because the judgment is not uniform by only naked eye observation and scale.
Disclosure of Invention
The invention aims to provide a method for detecting the surface defects of a metal target based on image processing, which has high detection efficiency and accurate detection result.
In order to achieve the purpose, the invention adopts the technical scheme that
A method for detecting surface defects of a metal target based on picture processing comprises the following steps,
s1: turning on a coaxial light source, and detecting knife lines by a camera: the light is reflected to enter the camera through the sputtering surface of the target, and when the sputtering surface is qualified and has no knife mark, the camera obtains an image with uniformly changed gray scale; when the sputtering surface has the knife pattern, because the height difference exists between the knife pattern and the surface of the sputtering surface, light rays are subjected to diffuse reflection on the knife pattern, and the knife pattern is represented as a bright strip in an image;
s2: closing the coaxial light source, opening the strip light source, and detecting scratches by a camera in an image acquisition mode:
the visual field range of the camera is positioned in a part with small illumination intensity scattered by the strip-shaped light source, and as the sputtering surface of the target is smooth and light is reflected by a mirror surface on the surface, when the sputtering surface is qualified and has no scratch, the camera can obtain a darker image; when the scratch exists on the sputtering surface, due to the height difference between the scratch and the surface of the sputtering surface, the light rays are diffusely reflected at the scratch, so that the scratch appears as a bright mark in the image.
Preferably, the metal target is mounted on a rotary lathe, and is driven to rotate by a main shaft of the rotary lathe, so that the metal target is subjected to regional detection.
The working principle of the invention is as follows:
the target surface detection vision hardware comprises:
the industrial camera, the large target surface CMOS chip network port industrial camera, is matched with a CCTV lens with high precision and low distortion, and is used for collecting high-definition images of the sputtering surface of the target material.
The strip-shaped light source is blue, the length of the strip-shaped light source meets the radius of a sputtering surface of the target, multiple rows of LED lamp beads are adopted, stray light is filtered through a polarizing film, and the light source emits parallel light. The light source is parallel to a camera for lighting, and is used for detecting scratches of the sputtering surface of the target through dark field illumination.
The coaxial light source is blue, and the LED lamp beads reflect uniform parallel light through the 45-degree reflector, so that the problem of lamp images does not exist when the LED lamp beads are applied to a strong mirror surface reflection object. The light source is perpendicular to a camera for polishing, and is used for detecting the knife lines on the sputtering surface of the target through bright field illumination.
And (4) detecting the knife lines of the sputtering surface of the target material, and polishing by using coaxial light. The coaxial light is parallel to the sputtering surface and forms a certain angle, and bright field is used for polishing.
The light is reflected by the sputtering surface of the target material and enters the camera, and when the sputtering surface is qualified and has no knife mark, the camera can obtain an image with uniformly changed gray scale; when the sputtering surface has knife grains, because the height difference exists between the knife grains and the surface of the sputtering surface, light rays are diffusely reflected on the knife grains, so that the knife grains are represented as bright stripes in the image, and the image becomes not fine and smooth.
And (4) detecting scratches on the sputtering surface of the target material, and polishing by using a strip-shaped light. The strip light is parallel to the sputtering surface and forms a certain angle, and a dark field is used for polishing;
the visual field range of the camera is positioned in a part with small illumination intensity scattered by the strip-shaped light source, and as the sputtering surface of the target is smooth and light is reflected by a mirror surface on the surface, when the sputtering surface is qualified and has no scratch, the camera can obtain a darker image; when the sputtering surface has scratches, because the height difference exists between the scratches and the surface of the sputtering surface, light rays are diffusely reflected at the scratches, so that the scratches are expressed as 'bright marks' in an image;
alternately opening coaxial light and strip light, and respectively detecting knife lines and scratches of the sputtering surface; and after one block is detected, rotating the target to detect the next block until the whole sputtering surface of the target is detected.
The invention has the beneficial effects that: the detection efficiency is high, and the detection result is accurate. Whether knife lines and scratches exist on the surface of the target material can be effectively detected.
Drawings
FIG. 1 is a schematic flow diagram of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The technical scheme of the specific implementation of the invention is as follows:
a method for detecting surface defects of a metal target based on picture processing comprises the following steps,
s1: turning on a coaxial light source, and detecting knife lines by a camera: the light is reflected to enter the camera through the sputtering surface of the target, and when the sputtering surface is qualified and has no knife mark, the camera obtains an image with uniformly changed gray scale; when the sputtering surface has the knife pattern, because the height difference exists between the knife pattern and the surface of the sputtering surface, light rays are subjected to diffuse reflection on the knife pattern, and the knife pattern is represented as a bright strip in an image;
s2: closing the coaxial light source, opening the strip light source, and detecting scratches by a camera in an image acquisition mode:
the visual field range of the camera is positioned in a part with small illumination intensity scattered by the strip-shaped light source, and as the sputtering surface of the target is smooth and light is reflected by a mirror surface on the surface, when the sputtering surface is qualified and has no scratch, the camera can obtain a darker image; when the scratch exists on the sputtering surface, due to the height difference between the scratch and the surface of the sputtering surface, the light rays are diffusely reflected at the scratch, so that the scratch appears as a bright mark in the image.
The metal target is arranged on a rotary lathe and is driven to rotate by a main shaft of the rotary lathe, and then the metal target is subjected to regional detection.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (2)
1. A method for detecting surface defects of a metal target based on picture processing is characterized by comprising the following steps,
s1: turning on a coaxial light source, and detecting knife lines by a camera: the light is reflected to enter the camera through the sputtering surface of the target, and when the sputtering surface is qualified and has no knife mark, the camera obtains an image with uniformly changed gray scale; when the sputtering surface has the knife pattern, because the height difference exists between the knife pattern and the surface of the sputtering surface, light rays are subjected to diffuse reflection on the knife pattern, and the knife pattern is represented as a bright strip in an image;
s2: closing the coaxial light source, opening the strip light source, and detecting scratches by a camera in an image acquisition mode:
the visual field range of the camera is positioned in a part with small illumination intensity scattered by the strip-shaped light source, and as the sputtering surface of the target is smooth and light is reflected by a mirror surface on the surface, when the sputtering surface is qualified and has no scratch, the camera can obtain a darker image; when the scratch exists on the sputtering surface, due to the height difference between the scratch and the surface of the sputtering surface, the light rays are diffusely reflected at the scratch, so that the scratch appears as a bright mark in the image.
2. The method according to claim 1, wherein the metal target is mounted on a rotary lathe, and the spindle of the rotary lathe drives the metal target to rotate, so as to perform the detection in different regions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811205335.1A CN111060526A (en) | 2018-10-16 | 2018-10-16 | Method for detecting surface defects of metal target based on picture processing |
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| CN201811205335.1A CN111060526A (en) | 2018-10-16 | 2018-10-16 | Method for detecting surface defects of metal target based on picture processing |
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| CN111060526A true CN111060526A (en) | 2020-04-24 |
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| CN105372248A (en) * | 2015-11-12 | 2016-03-02 | 深圳市傲视检测技术有限公司 | Image acquisition device for small-sized glass panel surface defect detection |
| CN106157303A (en) * | 2016-06-24 | 2016-11-23 | 浙江工商大学 | A kind of method based on machine vision to Surface testing |
| CN107084993A (en) * | 2017-06-21 | 2017-08-22 | 无锡九霄科技有限公司 | Double camera single-station positive and negative vision inspection apparatus |
| CN107831211A (en) * | 2017-12-05 | 2018-03-23 | 广东工业大学 | A kind of method and device of metal weldment defects detection |
| CN107909573A (en) * | 2017-12-04 | 2018-04-13 | 广东嘉铭智能科技有限公司 | Metal works annular surface knife mark detection method and device |
| CN107945180A (en) * | 2017-12-26 | 2018-04-20 | 浙江大学台州研究院 | Come from the visible detection method of the shallow cut in quartz wafer surface of polishing |
| CN109142375A (en) * | 2018-08-20 | 2019-01-04 | 宁波市智能制造产业研究院 | A kind of high accuracy vision detection system and method for target |
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2018
- 2018-10-16 CN CN201811205335.1A patent/CN111060526A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280406A (en) * | 2014-09-16 | 2015-01-14 | 中国科学院广州能源研究所 | Machine vision system for detecting surface defects of copper part |
| CN105372248A (en) * | 2015-11-12 | 2016-03-02 | 深圳市傲视检测技术有限公司 | Image acquisition device for small-sized glass panel surface defect detection |
| CN106157303A (en) * | 2016-06-24 | 2016-11-23 | 浙江工商大学 | A kind of method based on machine vision to Surface testing |
| CN107084993A (en) * | 2017-06-21 | 2017-08-22 | 无锡九霄科技有限公司 | Double camera single-station positive and negative vision inspection apparatus |
| CN107909573A (en) * | 2017-12-04 | 2018-04-13 | 广东嘉铭智能科技有限公司 | Metal works annular surface knife mark detection method and device |
| CN107831211A (en) * | 2017-12-05 | 2018-03-23 | 广东工业大学 | A kind of method and device of metal weldment defects detection |
| CN107945180A (en) * | 2017-12-26 | 2018-04-20 | 浙江大学台州研究院 | Come from the visible detection method of the shallow cut in quartz wafer surface of polishing |
| CN109142375A (en) * | 2018-08-20 | 2019-01-04 | 宁波市智能制造产业研究院 | A kind of high accuracy vision detection system and method for target |
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Application publication date: 20200424 |