CN111048615A - Electrical injection device and injection process of PERC solar cell - Google Patents
Electrical injection device and injection process of PERC solar cell Download PDFInfo
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- CN111048615A CN111048615A CN201911100435.2A CN201911100435A CN111048615A CN 111048615 A CN111048615 A CN 111048615A CN 201911100435 A CN201911100435 A CN 201911100435A CN 111048615 A CN111048615 A CN 111048615A
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- 238000000034 method Methods 0.000 title claims abstract description 66
- 238000002347 injection Methods 0.000 title claims abstract description 37
- 239000007924 injection Substances 0.000 title claims abstract description 37
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 title claims abstract 4
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 title claims abstract 4
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 title claims abstract 4
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000007664 blowing Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 5
- 238000013461 design Methods 0.000 abstract description 2
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000012806 monitoring device Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000013341 scale-up Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0725—Multiple junction or tandem solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses an electric injection device and an injection process of a PERC solar cell. The temperature monitoring device comprises a stacked battery piece in a process cavity, an upper thermocouple arranged on the surface of an upper electrode of the stacked battery piece and a lower thermocouple arranged on the surface of a lower electrode of the stacked battery piece, wherein a temperature tester is further arranged in the middle of the process cavity, and the upper thermocouple, the lower thermocouple and the temperature tester can monitor the temperature of the top, the bottom and the middle of the process cavity, so that the temperature of the stacked battery piece can be controlled through a cooling device according to monitoring data. The advantages are that: the device has a simple structure, is convenient to use, can perform multi-point temperature control on a process cavity in the process of electric injection on the basis of ensuring that the cost and the energy consumption are not increased, redefines the post-treatment process and performs special design on the voltage, the constant current and the process time of an upper electrode and a lower electrode during the electric injection, greatly reduces the problem of uneven LID photoinduced attenuation and well controls the production cost in the production process.
Description
Technical Field
The invention relates to an electric injection device and an injection process of a PERC solar cell, and belongs to the technical field of solar cell manufacturing.
Background
The high efficiency and low cost are the main targets pursued by the prior crystalline silicon solar cell; passivated Emitter Rear Contact (PERC) cell technology, with higher conversion efficiency due to good aluminum oxide back surface passivation, is currently one of the most promising high efficiency cell technologies considered by the industry; however, the serious Light Induced Degradation (LID) problem caused by the boron-oxygen complex formed in the illumination process of the PERC cell becomes an important bottleneck for the scale-up of the PERC cell, so that the research on the light induced degradation process of the PERC cell is very important for developing a more efficient PERC cell.
Light induced attenuation (LID) is a general concern in the industry at present, and how to reduce or even eliminate LID has become an important direction of research in the industry. Two approaches are currently used in the industry to address the LID problem. The first method adopts an electrical injection technology, and injects current carriers into the silicon chip by applying an external power supply to two ends of a battery. The second method uses light injection technology, and uses high-intensity LED or laser to irradiate the surface of the cell piece at a certain temperature, so as to inject carriers into the silicon piece.
Compared with the electrical injection technology, the light injection technology has the advantages that the injection intensity can be improved, the BO attenuation can be improved, the HID (hydrogen induced attenuation) can also be improved, the concentration of the electrical injection carrier can not be improved too much, and the BO type light attenuation can only be solved; in addition, light injection is to treat light attenuation by irradiating the surface of a cell by a single sheet, and electric injection is to treat a stack of cells, so that the advantage of LID light-induced attenuation uniformity exists, and poor uniformity easily causes light and dark sheets to appear on the component.
Disclosure of Invention
The invention aims to solve the technical problem of providing an electric injection device and an injection process of a PERC solar cell, which can greatly reduce the problem of uneven LID photoinduced attenuation and have low production cost.
In order to solve the technical problem, the electrical injection device of the PERC solar cell comprises a stacked cell piece which is arranged in a process cavity and is provided with an upper electrode and a lower electrode, an upper thermocouple which is arranged on the surface of the upper electrode of the stacked cell piece and corresponds to the top of the process cavity, and a lower thermocouple which is arranged on the surface of the lower electrode of the stacked cell piece and corresponds to the bottom of the process cavity, wherein a temperature tester which is positioned on one side of the stacked cell piece is also arranged in the middle position in the process cavity, and the upper thermocouple, the lower thermocouple and the temperature tester can monitor the temperature of the top, the bottom and the middle part of the process cavity, so that the temperature of the stacked cell piece can be controlled through a temperature reduction device according to monitoring data.
An upper cover plate is arranged between the stacked battery pieces and the upper electrode, and a lower cover plate is arranged between the stacked battery pieces and the lower electrode.
The temperature tester is an infrared temperature tester.
An electrical injection process of a PERC solar cell is characterized by comprising the following specific steps: in operation, applying a voltage to the upper electrode and the lower electrode while applying a constant current to the stacked battery pieces; when the sensing temperature of the upper thermocouple and the lower thermocouple exceeds a set value, the upper electrode and the lower electrode stop applying voltage, and the upper cell piece and the lower cell piece in the stacked cell piece in the process cavity start to cool; when the temperature is reduced to be lower than the set temperature, the upper electrode and the lower electrode apply voltage immediately to enable the temperature of the upper cell piece and the lower cell piece in the stacked cell pieces in the process cavity to be increased; when the temperature tester displays that the temperature of the middle part in the process cavity exceeds a set value, the battery piece in the middle part starts to be cooled under the action of air blowing through the cooling device; when the temperature is reduced to be lower than the set temperature, the temperature of the battery piece at the middle part is raised, and the multi-point temperature control is repeatedly carried out according to the method.
The temperature of the upper electrode is controlled to be 120-170 ℃, the temperature of the middle part of the stacked battery piece is controlled to be 120-170 ℃, and the temperature of the lower electrode is controlled to be 120-170 ℃.
The voltage of the upper electrode is higher than 60V, the voltage of the lower electrode is higher than 65V, the constant current is higher than 8A, and the heating time of the process chamber is higher than 380s and less than 600 s.
The heating time of the process chamber is 400-500 s.
The cooling device is organic row and CDA.
The invention has the advantages that: through setting up the thermocouple at the last electrode and the bottom electrode of piling up the battery piece, the thermocouple is down and set up the temperature tester at the side of piling up the battery piece, its simple structure, high durability and convenient use, can be in the electricity injection in-process, on the basis of guaranteeing cost, energy consumption does not increase, carry out the multiple spot accuse temperature to the process chamber, especially based on the injection technology that this kind of structure adopted, redefine the processing technology after and carry out special design to upper and lower electrode voltage, constant current and process time during the electricity injection, reduced the inhomogeneous problem of LID photoinduced attenuation by a wide margin and in the production process fine control manufacturing cost.
Drawings
Fig. 1 is a schematic structural diagram of an electrical injection device of a PERC solar cell according to the present invention.
Detailed Description
The following describes the electrical implantation apparatus and implantation process of the PERC solar cell in further detail with reference to the accompanying drawings and the detailed description.
The first embodiment is as follows:
as shown in the figure, the electrical injection device for the PERC solar cell of the present invention includes a stacked cell 3 having an upper electrode 1 and a lower electrode 2, which is placed in a process chamber, an upper thermocouple 4 (for monitoring the temperature of the top of the process chamber) disposed on the surface of the upper electrode of the stacked cell and corresponding to the top of the process chamber, and a lower thermocouple 5 (for monitoring the temperature of the bottom of the process chamber) disposed on the surface of the lower electrode of the stacked cell and corresponding to the bottom of the process chamber, wherein an infrared temperature tester 6 (for monitoring the temperature of the middle portion of the process chamber) is further disposed at a middle position in the process chamber, and the upper thermocouple 4, the lower thermocouple 5, and the infrared temperature tester 6 can monitor the temperatures of the top, the bottom, and the middle portion of the process chamber, so that the temperature of the stacked cell can be controlled by a.
Further, an upper cover plate 7 may be disposed between the stacked battery piece 3 and the upper electrode 1, and a lower cover plate 8 may be disposed between the stacked battery piece 3 and the lower electrode 2.
Example two:
an electrical injection process of a PERC solar cell comprises the following specific steps: in operation, applying voltage to an upper electrode and a lower electrode, and simultaneously applying constant current to the stacked battery piece through an electrode plate, wherein the voltage of the upper electrode is higher than 60V, the voltage of the lower electrode is higher than 65V, the constant current is higher than 8A, the heating time of a process chamber is higher than 380s and less than 600s, preferably 400s-500s, the voltage is applied to ensure that the upper part and the lower part of the stacked battery piece have certain temperature, and the constant current is applied to ensure that the middle part of the stacked battery piece also keeps certain temperature; controlling the temperature of the upper electrode at 120-170 ℃, controlling the temperature of the lower electrode at 120-170 ℃, when the induced temperatures of the upper thermocouple and the lower thermocouple exceed set values, stopping applying voltage to the upper electrode and the lower electrode, and starting cooling the upper battery piece and the lower battery piece in the stacked battery pieces in the process cavity under the action of the organic rows; when the temperature is reduced to be lower than the set temperature, the upper electrode and the lower electrode apply voltage immediately to enable the temperature of the upper cell piece and the lower cell piece in the stacked cell pieces in the process cavity to be increased; controlling the temperature of the middle part of the stacked battery pieces to be 120-170 ℃, and increasing CDA blowing air by a machine station when the temperature of the middle part in the process cavity is displayed by a temperature tester to exceed a set value so that the battery pieces in the middle part start to be cooled under the action of the blowing air; when the temperature is reduced to be lower than the set temperature, the machine reduces the blowing of CDA to ensure that the middle cell begins to be heated, and the multi-point temperature control is repeatedly carried out according to the method.
The following specific comparative tests prove that the invention has the following practical effects:
comparative example one:
the PERC cell comprising a central crystal silicon wafer, a silicon nitride film layer superposed on the crystal layer and a metal electrode superposed on the silicon nitride film layer is adopted to carry out conventional electric injection treatment, the temperature of a heating process cavity is controlled at 140 ℃, the electric injection time of each heating process cavity is 480s, and the LID photoinduced attenuation of stacked cells is stabilized at about 1.2%.
The first test example:
the PERC battery comprising a central crystal silicon wafer, a silicon nitride film layer superposed on the crystal layer and a metal electrode superposed on the silicon nitride film layer is also adopted to carry out electric injection treatment, the electric injection time of each heating process cavity is 450s, the light attenuation of a battery pack is controlled at 1.2 percent, and the specific process parameters are as follows:
| station one | Station two | Station three | Station four | Station five | Six work stations | Seven working positions | Eight stations | |
| Upper electrode temperature control | 125℃ | 125℃ | 125℃ | 125℃ | 125℃ | 125℃ | 125℃ | 125℃ |
| Controlling temperature in cavity | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ | 110℃ | 110℃ |
| Current setting | 7A | 7A | 7A | 7A | 7A | 7A | 6A | 6A |
| Time of the process | 450s | 450s | 450s | 450s | 450s | 450s | 450s | 450s |
| Lower electrode temperature control | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ | 120℃ |
Test example two:
the PERC battery comprising a central crystal silicon wafer, a silicon nitride film layer superposed on the crystal layer and a metal electrode superposed on the silicon nitride film layer is also adopted to carry out electric injection treatment, the electric injection time of each heating process cavity is 450s, the light attenuation of a battery pack is controlled at 1.4 percent, and the specific process parameters are as follows:
| station one | Station two | Station three | Station four | Station five | Six work stations | Seven working positions | Eight stations | |
| Upper electrode temperature control | 165℃ | 165℃ | 165℃ | 165℃ | 165℃ | 165℃ | 165℃ | 165℃ |
| Controlling temperature in cavity | 150℃ | 150℃ | 150℃ | 150℃ | 150℃ | 150℃ | 150℃ | 150℃ |
| Current setting | 8A | 8A | 8A | 8A | 8A | 8A | 8A | 8A |
| Time of the process | 450s | 450s | 450s | 450s | 450s | 450s | 450s | 450s |
| Lower electrode temperature control | 175℃ | 175℃ | 175℃ | 175℃ | 175℃ | 175℃ | 175℃ | 175℃ |
By counting the light attenuation data, the comparison result is as follows:
| light decay group | Top battery plate in process cavity | Middle battery piece in process cavity | Bottom battery piece in process cavity |
| Comparative example 1 | 1.60% | 1.20% | 1.80% |
| Test example 1 | 1.12% | 1.27% | 1.18% |
| Test example two | 1.41% | 1.48% | 1.36% |
It can be seen from the above test data that, compared with the specific production process of the comparative example, the light attenuation of the cell in the upper, middle and lower portions in the process chamber using the electrical injection process of the present invention is significantly uniform and small.
Claims (8)
- The electric injection device of the PERC solar cell comprises a stacked cell piece, an upper thermocouple, a lower thermocouple, a temperature tester and a temperature control device, wherein the stacked cell piece is arranged in a process cavity and provided with an upper electrode and a lower electrode, the upper thermocouple is arranged on the surface of the upper electrode of the stacked cell piece and corresponds to the top of the process cavity, the lower thermocouple is arranged on the surface of the lower electrode of the stacked cell piece and corresponds to the bottom of the process cavity, the temperature tester is arranged in the middle of the process cavity and located on one side of the stacked cell piece, and the upper thermocouple, the lower thermocouple and the temperature tester can monitor the temperature of the top, the bottom and the middle of the process cavity, so that the temperature of the stacked cell piece.
- 2. An upper cover plate is arranged between the stacked battery pieces and the upper electrode, and a lower cover plate is arranged between the stacked battery pieces and the lower electrode.
- 3. The temperature tester is an infrared temperature tester.
- 4. An electrical injection process of a PERC solar cell is characterized by comprising the following specific steps: in operation, applying a voltage to the upper electrode and the lower electrode while applying a constant current to the stacked battery pieces; when the sensing temperature of the upper thermocouple and the lower thermocouple exceeds a set value, the upper electrode and the lower electrode stop applying voltage, and the upper cell piece and the lower cell piece in the stacked cell piece in the process cavity start to cool; when the temperature is reduced to be lower than the set temperature, the upper electrode and the lower electrode apply voltage immediately to enable the temperature of the upper cell piece and the lower cell piece in the stacked cell pieces in the process cavity to be increased; when the temperature tester displays that the temperature of the middle part in the process cavity exceeds a set value, the battery piece in the middle part starts to be cooled under the action of air blowing through the cooling device; when the temperature is reduced to be lower than the set temperature, the temperature of the battery piece at the middle part is raised, and the multi-point temperature control is repeatedly carried out according to the method.
- 5. The temperature of the upper electrode is controlled to be 120-170 ℃, the temperature of the middle part of the stacked battery piece is controlled to be 120-170 ℃, and the temperature of the lower electrode is controlled to be 120-170 ℃.
- 6. The voltage of the upper electrode is higher than 60V, the voltage of the lower electrode is higher than 65V, the constant current is higher than 8A, and the heating time of the process chamber is higher than 380s and less than 600 s.
- 7. The heating time of the process chamber is 400-500 s.
- 8. The cooling device is organic row and CDA.
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| CN201911100435.2A CN111048615A (en) | 2019-11-12 | 2019-11-12 | Electrical injection device and injection process of PERC solar cell |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114256368A (en) * | 2021-12-10 | 2022-03-29 | 中威新能源(成都)有限公司 | Electric injection method of solar cell |
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| CN109004061A (en) * | 2018-06-28 | 2018-12-14 | 华南理工大学 | Crystal silicon photovoltaic solar battery electrical pumping annealing test device and method |
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Patent Citations (5)
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| CN106601868A (en) * | 2016-12-05 | 2017-04-26 | 湖南红太阳光电科技有限公司 | Solar cell anti-light-decay method and anti-light-decay annealing furnace |
| CN207116457U (en) * | 2017-06-16 | 2018-03-16 | 苏州阿特斯阳光电力科技有限公司 | The annealing device of crystal silicon solar energy battery |
| CN109004061A (en) * | 2018-06-28 | 2018-12-14 | 华南理工大学 | Crystal silicon photovoltaic solar battery electrical pumping annealing test device and method |
| CN108962711A (en) * | 2018-06-29 | 2018-12-07 | 江西展宇新能源股份有限公司 | A kind of electrical pumping system |
| CN209461478U (en) * | 2019-03-29 | 2019-10-01 | 无锡秉杰机械有限公司 | A kind of solar battery sheet electricity enhancing hydrogen passivation furnace electrical pumping mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114256368A (en) * | 2021-12-10 | 2022-03-29 | 中威新能源(成都)有限公司 | Electric injection method of solar cell |
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