CN111043327A - Pressure regulating valve, pressure control valve and reaction chamber - Google Patents
Pressure regulating valve, pressure control valve and reaction chamber Download PDFInfo
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- CN111043327A CN111043327A CN201911300970.2A CN201911300970A CN111043327A CN 111043327 A CN111043327 A CN 111043327A CN 201911300970 A CN201911300970 A CN 201911300970A CN 111043327 A CN111043327 A CN 111043327A
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- valve
- pressure
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- regulating valve
- sealing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
- F16K1/221—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves specially adapted operating means therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
- F16K1/226—Shaping or arrangements of the sealing
- F16K1/2263—Shaping or arrangements of the sealing the sealing being arranged on the valve seat
- F16K1/2265—Shaping or arrangements of the sealing the sealing being arranged on the valve seat with a channel- or U-shaped seal covering a central body portion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
- F16K1/226—Shaping or arrangements of the sealing
- F16K1/2263—Shaping or arrangements of the sealing the sealing being arranged on the valve seat
- F16K1/2266—Shaping or arrangements of the sealing the sealing being arranged on the valve seat and being forced into sealing contact with the valve member by a spring or a spring-like member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0209—Check valves or pivoted valves
- F16K27/0218—Butterfly valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
Abstract
The invention provides a pressure regulating valve, which is a three-eccentric butterfly valve, wherein the three-eccentric butterfly valve comprises a valve seat with a flow channel, a disc and a sealing ring, wherein the disc is arranged in the flow channel; the sealing ring comprises a supporting part and a sealing part, a second matching part is arranged on the supporting part, the supporting part is arranged in the groove, the second matching part is clamped with the first matching part to prevent the sealing ring from falling off from the groove, and the sealing part is connected with the supporting part and used for sealing the spaces on two sides of the disc when the disc is closed. The second matching part and the first matching part are matched with each other to fix the sealing ring in the flow channel of the valve seat, so that the sealing ring is prevented from falling off, the sealing performance of the pressure regulating valve is improved, and the stability of the pressure regulating valve is improved. The invention also provides a pressure control valve and a reaction chamber.
Description
Technical Field
The invention belongs to the technical field of semiconductor manufacturing, and particularly relates to a pressure regulating valve, a pressure control valve and a reaction chamber.
Background
Oxidation furnaces are important equipment in the fields of semiconductor manufacturing, photovoltaics, and the like. The reaction gas entering the reaction chamber of the oxidation furnace is chemically reacted under a constant pressure to secure the thickness of the plating layer. The pressure control system is used for controlling the pressure in the reaction chamber, when the pressure in the reaction chamber suddenly changes, the thickness of the coating can be influenced, and the response time of the pressure control system also influences the thickness of the coating, so that the pressure precision in the reaction chamber and the response time of the pressure control system must be ensured.
FIG. 1 is a system diagram of a conventional pressure control system; FIG. 2 is a cross-sectional view of a prior art pressure control valve; FIG. 3 is another angular cross-sectional view of the pressure control valve of FIG. 2. As shown in fig. 1 to 3, the pressure control valve includes a regulator valve member 60 and a shutoff valve member 70 arranged in parallel. The regulating valve component 60 comprises a stepping motor 61, a locking nut 65, a valve rod 66 and a disc 67, the stepping motor is connected with the valve rod 66 to achieve the purpose of transmitting torque, the disc 67 is fixed on the valve rod 66 through a screw, the valve rod 66 is installed in the valve seat 30 through the locking nut 65, therefore, the stepping motor 61 can indirectly drive the disc 67 to rotate through the valve rod 66, the flow of gas flowing through is regulated through rotating different angles, and the purpose of controlling the internal pressure of the reaction chamber is achieved.
In the pressure control valve, when the disc is completely closed, the flow channel of the disc and the flow channel of the valve seat are in clearance fit, and complete sealing cannot be achieved, so that accurate control of the pressure in the reaction chamber cannot be achieved. In addition, when any component in the whole process pipeline is replaced, the pressure control valve is required to be used for detecting the leakage of the whole pipeline, once the pressure control valve generates gas leakage, the specific position of the leakage cannot be quickly found, so that the working efficiency is low, economic loss is caused, serious persons cause safety accidents such as poisoning of process personnel, the pressure in the reaction chamber is influenced, and safety accidents such as poisoning of the process personnel are caused.
The triple offset butterfly valve, as another common regulating valve component, includes a valve seat having a flow passage, a sealing ring disposed in the flow passage, and a disk, which is pressed against the sealing ring when closed, so as to seal spaces on both sides of the disk. Although this kind of structure can effectively improve sealed effect, uses the back repeatedly, and the sealing washer drops from the runner easily, in case the sealing washer drops, then can lead to gas leakage to, the sealing washer after the drop is followed the runner and is removed, causes whole runner gas unsmooth, and can't accurately control gas pressure.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art and provides a pressure regulating valve, a pressure control valve and a reaction chamber.
As an aspect of the present invention, there is provided a pressure regulating valve, the regulating valve being a triple offset butterfly valve including a valve seat having a flow passage, a disc disposed in the flow passage, and a sealing ring; wherein the content of the first and second substances,
a groove is formed in the peripheral wall of the flow channel, and a first matching part is arranged on the side wall of the groove;
the sealing ring comprises a supporting part and a sealing part, a second matching part is arranged on the supporting part, the supporting part is arranged in the groove, the second matching part is clamped with the first matching part to prevent the sealing ring from falling off from the groove, and the sealing part is connected with the supporting part and used for sealing the spaces at two sides of the disc when the disc is closed.
The first matching part is a step recessed along the axial direction of the flow channel, the second matching part is a step protruding along the axial direction of the flow channel, and the shape and the position of the first matching part correspond to those of the second matching part.
Wherein the support portion is further configured to generate compression deformation and apply a pressing force to the disc when the disc is closed.
Wherein the sealing part is made of rubber.
Wherein, the material of the supporting part is metal.
And on the axial section of the flow channel, the corner of the disc opposite to the sealing ring is a round angle.
The three-eccentric butterfly valve further comprises a valve rod, the axis of the valve rod is perpendicular to the axial direction of the flow channel, and the valve rod is connected with the disc.
The valve rod is a stepped shaft, the stepped shaft comprises a plurality of sections of shaft sections, the diameters of the shaft ends are sequentially increased, wherein an external thread is arranged on one section of the shaft section and used for fixing the axial position of the disc through a fixing nut.
Wherein the material of the disc comprises polytetrafluoroethylene or polyetheretherketone;
the material of at least the portion of the valve stem located in the flow passage comprises polytetrafluoroethylene or polyetheretherketone;
the material of at least the portion of the valve seat that forms the flow passage comprises polytetrafluoroethylene or polyetheretherketone.
As another aspect of the present invention, the present invention further provides a pressure control valve, including a pressure regulating valve, wherein the pressure regulating valve is the pressure regulating valve provided by the present invention.
The pressure regulating valve is characterized by further comprising a stop valve, and the stop valve and the pressure regulating valve are arranged in parallel.
As another aspect of the present invention, the present invention further provides a reaction chamber comprising a pressure control valve, wherein the pressure control valve is the pressure control valve provided by the present invention.
In order to solve the problems, the invention provides the following beneficial effects:
the invention provides a pressure regulating valve, which is a three-eccentric butterfly valve, wherein the three-eccentric butterfly valve comprises a valve seat with a flow channel, a disc and a sealing ring, wherein the disc is arranged in the flow channel; the sealing ring comprises a supporting part and a sealing part, a second matching part is arranged on the supporting part, the supporting part is arranged in the groove, the second matching part is clamped with the first matching part to prevent the sealing ring from falling off from the groove, and the sealing part is connected with the supporting part and used for sealing the spaces on two sides of the disc when the disc is closed. The second matching part and the first matching part are matched with each other to fix the sealing ring in the flow channel of the valve seat, so that the sealing ring is prevented from falling off, the sealing performance of the pressure regulating valve is improved, and the stability of the pressure regulating valve is improved.
According to the pressure control valve and the reaction chamber, due to the use of the pressure regulating valve, the leakage detection time of a process pipeline can be shortened, the working efficiency is improved, the cost is reduced, and the safety of process personnel is guaranteed.
Drawings
FIG. 1 is a system diagram of a conventional pressure control system;
FIG. 2 is a cross-sectional view of a prior art pressure control valve;
FIG. 3 is a cross-sectional view of the pressure control valve of FIG. 2 at another angle;
FIG. 4 is a cross-sectional view of a pressure regulator valve provided in accordance with an embodiment of the present invention;
FIG. 5 is a cross-sectional view of a seal ring used in an embodiment of the present invention; and
fig. 6 is a cross-sectional view of another angle of the pressure regulating valve of fig. 4.
Wherein:
1-a valve seat; 11-a groove; 2-a valve stem; 3-disc; 4-sealing ring; 41-a sealing part; 42-a support portion; 5-locking the nut; 6-O type sealing ring; 7-shaft sleeve; 8-fixing the nut; 30-a valve seat; 60-a regulating valve member; 70-a shut-off valve member; 61-a stepper motor; 65-locking the nut; 66-a valve stem; 67-disc.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the pressure regulating valve, the pressure control valve and the reaction chamber provided by the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 4 is a sectional view of a pressure regulating valve according to an embodiment of the present invention, fig. 5 is a sectional view of a seal ring used in an embodiment of the present invention, and fig. 6 is a sectional view of another angle of the pressure regulating valve of fig. 4. as shown in fig. 4 to 6, an embodiment of the present invention provides a pressure regulating valve which is a triple offset butterfly valve including a valve seat 1 having a flow passage, a disc 3 disposed in the flow passage, and a seal ring 4, wherein a groove 11 is provided on a circumferential wall of the flow passage, and a first fitting portion is provided on a side wall of the groove 11; the sealing ring 4 includes a supporting portion 42 and a sealing portion 41, the supporting portion 42 is provided with a second matching portion, the supporting portion 42 is disposed in the groove 11, and the second matching portion is engaged with the first matching portion to prevent the sealing ring 4 from falling off from the groove 11, the sealing portion 41 is connected with the supporting portion 42 for sealing the space on both sides of the disc 3 when the disc 3 is closed.
The term "disc closed" refers to a position where the disc 3 rotates to prevent the fluid in the flow channel from flowing from one side of the disc 3 to the other side of the disc, and at this time, the sealing surface of the disc 3 contacts and presses against the sealing surface of the sealing ring 4.
According to the invention, the second matching part arranged on the supporting part 42 of the sealing ring 4 is matched with the first matching part arranged in the groove 11 of the flow channel, so that the sealing ring 4 is fixed in the flow channel of the valve seat 1, the sealing ring 4 is prevented from falling off, the sealing performance of the pressure regulating valve is further improved, and the stability of the pressure regulating valve is increased.
It should be noted that the triple offset butterfly valve means: the axis of the valve rod deviates from the axis of the flow passage; the axis of the valve rod deviates from the central line of the sealing surface of the disc; when the disc is completely closed, the extension line of the tangent line of the sealing surface of the disc deviates from the axis of the flow channel. In the three eccentric butterfly valve, the disc rotates between 0 degree and 90 degrees, wherein the disc is in a cone shape, the sealing section of the disc is an ellipse, the shape of the sealing surface of the disc is also asymmetric, and the disc presents a shape with one side inclined to the central line of the disc and the other side parallel to the central line of the disc, so that the three eccentric butterfly valve is in torsion sealing, namely when the disc is opened or closed, the sealing surface of the disc is gradually separated from or gradually pressed against the sealing surface of the flow channel, thereby eliminating the mechanical abrasion between the two sealing surfaces when the disc is opened or closed, and the disc is uniformly stressed when closed, has strong pressure bearing capacity, and has no blocking phenomenon in the opening or closing process.
The present invention is not limited to the specific shape of the first mating portion and the second mating portion, and the present invention is within the protection scope as long as the seal ring 4 can be prevented from falling off from the groove 11 after the first mating portion and the second mating portion are engaged. For example, the first matching part is a step recessed along the axial direction of the flow passage, the second matching part is a step protruding along the axial direction of the flow passage, and the first matching part and the second matching part are matched in shape and size, so that clamping is realized. For example, as shown in fig. 4, the groove 11 is a T-shaped groove, and the sealing ring 4 is a T-shaped sealing ring as a whole, and as another example, the groove is a dovetail groove, and the sealing ring is a trapezoidal sealing ring as a whole. Of course, the first matching portion and the second matching portion with other shapes also belong to the protection scope of the present invention as long as the first matching portion and the second matching portion can avoid the seal ring 4 from falling off from the groove 11 after being clamped.
In the present invention, the sealing ring 4 includes a supporting portion 42 and a sealing portion 41, the supporting portion 42 is used for supporting the sealing portion 41 and clamping the sealing ring 4 in the groove 11 as a whole, and the sealing portion 41 covers at least the surface of the supporting portion 42 contacting with the disc 3 to perform a sealing function.
Preferably, the supporting portion 42 is completely covered by the sealing portion 41, that is, the second matching portion of the supporting portion 42 is also covered by the sealing portion 41, so that when the second matching portion is engaged with the first matching portion, the two are in an interference fit manner, so as to further improve the stability of the sealing ring 4 in the groove 11 and prevent the sealing ring 4 from being separated from the groove 11.
Wherein the material of the sealing portion 41 includes rubber.
The supporting portion 42 is made of a material resistant to corrosion and high temperature, including metal.
Further, the supporting portion 42 is also used for compressing the supporting portion 42 and applying a pressing force to the disc 3 when the disc 3 is closed, at this time, the disc 3 gradually presses the seal ring 4 during the closing of the disc 3, and under this pressing, the supporting portion 42 is compressed and feeds back an elastic force to the disc 3. With the aid of the supporting portion 42 capable of generating elastic deformation, when the disc 3 just contacts the seal ring 4, the friction force between the disc 3 and the seal ring 4 is not large due to the compression of the supporting portion 42, and when the disc 3 further rotates to the fully closed state, the friction force between the disc 3 and the seal ring 4 is gradually increased under the elastic force generated by the supporting portion 42 until the disc 3 is fully closed, so that the friction force of the disc 3 in the opening or closing process is gradually changed, and the opening or closing process of the disc 3 is smoother.
Furthermore, on the axial section of the flow channel, the edge angle a of the disc 3 opposite to the sealing ring 4 is a round angle. The time that the disc 3 contacts the sealing ring 4 is delayed, so that the duration of the friction force applied to the disc 3 during the closing process is reduced, the friction force of the disc 3 during the opening or closing process is gradually changed, and the opening or closing process of the disc 3 is smoother.
In the embodiment of the invention, the triple offset butterfly valve further comprises a valve rod 2, the axis of the valve rod 2 is perpendicular to the axial direction of the flow channel, and the valve rod 2 is connected with the disc 3 so as to drive the disc 3 to rotate together when the valve rod 2 rotates.
As shown in fig. 6, in the embodiment of the present invention, the valve rod 2 is a stepped shaft, the stepped shaft includes a plurality of shaft sections, and the diameters of the shaft sections are sequentially increased, wherein an external thread is provided on one shaft end of the shaft section for fixing the axial position of the disc 3 on the valve rod 2 by the fixing nut 8.
Preferably, the number of the shaft sections is three, wherein the small end of the valve rod 2 extends into the valve seat 1 and is used for fixing the position of the small end of the valve rod 2 in the valve seat 1; the middle section of the valve rod 2 is provided with external threads which are used for fixing the disc 3 together with the fixing nut 8; the big end of the valve rod 2 penetrates through the side wall of the valve seat 1, the position of the big section of the valve rod 2 in the valve seat 1 is fixed through the locking nut 5, an O-shaped sealing ring 6 is arranged among the valve seat 1, the valve rod 2 and the locking nut 5 to prevent fluid from leaking from a gap between the valve rod 2 and the valve seat 1, and in addition, a shaft sleeve 7 is further sleeved on the big end of the valve rod 2 to fix the position of the O-shaped sealing ring 6. So set up, reduce the length of external screw thread, can be convenient for the processing of valve rod 2, can be convenient for disc 3's fixed simultaneously.
In the embodiment of the invention, the material of the part of the pressure regulating valve, which is in contact with the fluid, comprises polytetrafluoroethylene, polyetheretherketone and ZrO coated on the surface2Or SiO2316L stainless steel, the lining PTFE 316L stainless steel to make pressure regulating valve have high temperature resistant corrosion-resistant long service life's characteristics. The part of the pressure regulating valve, which is in contact with the fluid, refers to the disc 3, at least the part of the valve rod 2, which is located in the flow channel, and at least the part of the valve seat 1, which forms the flow channel.
According to the invention, the groove is provided with the first matching part, and the supporting part is provided with the second matching part, so that when the second matching part is matched with the first matching part, the sealing ring can be fixed in the flow channel of the valve seat, the sealing ring is prevented from falling off, the sealing property of the pressure regulating valve is further improved, and the stability of the pressure regulating valve is increased.
The invention further provides a pressure control valve as another aspect of the invention, and the pressure control valve comprises the pressure regulating valve provided by the embodiment of the invention.
The pressure control valve provided by the invention can improve the sealing performance of the pressure control valve and increase the stability of the pressure control valve due to the use of the pressure regulating valve provided by the invention.
Wherein, pressure control valve still includes the stop valve, and the stop valve sets up with pressure regulating valve is parallelly connected.
As a further aspect of the present invention, the present invention further provides a reaction chamber including a pressure control valve, wherein the pressure control valve is provided in an embodiment of the present invention.
The reaction chamber provided by the invention has the advantages that the pressure control valve provided by the invention is used, so that the leakage detection time of a process pipeline can be shortened, the working efficiency is improved, the cost is reduced, and the safety of process personnel is guaranteed.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (12)
1. A pressure regulating valve is characterized in that the regulating valve is a three-eccentric butterfly valve which comprises a valve seat with a flow channel, a disc and a sealing ring, wherein the disc and the sealing ring are arranged in the flow channel; wherein the content of the first and second substances,
a groove is formed in the peripheral wall of the flow channel, and a first matching part is arranged on the side wall of the groove;
the sealing ring comprises a supporting part and a sealing part, a second matching part is arranged on the supporting part, the supporting part is arranged in the groove, the second matching part is clamped with the first matching part to prevent the sealing ring from falling off from the groove, and the sealing part is connected with the supporting part and used for sealing the spaces at two sides of the disc when the disc is closed.
2. The pressure-regulating valve according to claim 1, wherein the first fitting portion is a step that is recessed in an axial direction of the flow passage, the second fitting portion is a step that protrudes in the axial direction of the flow passage, and the first fitting portion corresponds in shape and position to the second fitting portion.
3. The pressure-regulating valve according to claim 1, wherein the support portion is further configured to generate compression deformation and apply pressing force to the disc when the disc is closed.
4. The pressure-regulating valve of claim 1, wherein the material of the sealing portion is rubber.
5. The pressure-regulating valve according to claim 1, wherein the material of the support portion is metal.
6. The pressure-regulating valve according to claim 1, wherein, in an axial cross-section of the flow passage, corners of the disc opposite to the seal ring are rounded.
7. The pressure-regulating valve according to any one of claims 1 to 6, wherein the triple offset butterfly valve further comprises a stem having an axis perpendicular to an axial direction of the flow passage, and wherein the stem is connected to the disk.
8. The pressure-regulating valve according to claim 8, wherein the valve stem is a stepped shaft comprising a plurality of shaft sections, and the shaft sections have successively larger diameters, and wherein an external thread is provided on one of the shaft sections for fixing the axial position of the disk by a fixing nut.
9. The pressure-regulating valve of claim 8, wherein the material of said disk comprises polytetrafluoroethylene or polyetheretherketone;
the material of at least the portion of the valve stem located in the flow passage comprises polytetrafluoroethylene or polyetheretherketone;
the material of at least the portion of the valve seat that forms the flow passage comprises polytetrafluoroethylene or polyetheretherketone.
10. A pressure control valve comprising a pressure regulating valve, characterized in that the pressure regulating valve is the pressure regulating valve of any one of claims 1 to 9.
11. The pressure control valve of claim 10, further comprising a shut-off valve disposed in parallel with the pressure regulating valve.
12. A reaction chamber comprising a pressure control valve, wherein the pressure control valve is the pressure control valve of claim 10 or 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911300970.2A CN111043327A (en) | 2019-12-17 | 2019-12-17 | Pressure regulating valve, pressure control valve and reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911300970.2A CN111043327A (en) | 2019-12-17 | 2019-12-17 | Pressure regulating valve, pressure control valve and reaction chamber |
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| Publication Number | Publication Date |
|---|---|
| CN111043327A true CN111043327A (en) | 2020-04-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911300970.2A Pending CN111043327A (en) | 2019-12-17 | 2019-12-17 | Pressure regulating valve, pressure control valve and reaction chamber |
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| CN (1) | CN111043327A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3048363A (en) * | 1957-02-21 | 1962-08-07 | Garrigan Helen | Butterfly valve |
| US4552332A (en) * | 1984-06-27 | 1985-11-12 | Itt Corporation | Butterfly valve, especially for dead-end service |
| EP1696156A2 (en) * | 2005-02-25 | 2006-08-30 | Ksb S.A.S | Butterfly valve |
| KR20060109282A (en) * | 2005-12-22 | 2006-10-19 | 주식회사 삼진정밀 | Sealing device of butterfly valve |
| CN202252028U (en) * | 2011-09-21 | 2012-05-30 | 铁岭方众阀门有限公司 | Metal-rubber sealing sub butterfly valve |
| CN110500429A (en) * | 2019-04-12 | 2019-11-26 | 北京七星华创流量计有限公司 | Flow control valve and reaction chamber pressure control device |
-
2019
- 2019-12-17 CN CN201911300970.2A patent/CN111043327A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3048363A (en) * | 1957-02-21 | 1962-08-07 | Garrigan Helen | Butterfly valve |
| US4552332A (en) * | 1984-06-27 | 1985-11-12 | Itt Corporation | Butterfly valve, especially for dead-end service |
| EP1696156A2 (en) * | 2005-02-25 | 2006-08-30 | Ksb S.A.S | Butterfly valve |
| KR20060109282A (en) * | 2005-12-22 | 2006-10-19 | 주식회사 삼진정밀 | Sealing device of butterfly valve |
| CN202252028U (en) * | 2011-09-21 | 2012-05-30 | 铁岭方众阀门有限公司 | Metal-rubber sealing sub butterfly valve |
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