CN111014020A

CN111014020A - Screening machine for semiconductor production and screening method thereof

Info

Publication number: CN111014020A
Application number: CN201911164511.6A
Authority: CN
Inventors: 王振国
Original assignee: Datong Xincheng New Material Co Ltd
Current assignee: Datong Xincheng New Material Co Ltd
Priority date: 2019-11-25
Filing date: 2019-11-25
Publication date: 2020-04-17
Anticipated expiration: 2039-11-25
Also published as: CN111014020B

Abstract

The invention discloses a screening machine used in semiconductor production and a screening method thereof, and the screening machine comprises a base plate, a base and a screening mechanism arranged on the base, wherein the base plate is horizontally arranged, a plurality of support columns are fixed on the bottom surface of the base plate, the base is fixed on one side of the top surface of the base plate, the base is of a box-type structure with an open top end, a vibration mechanism is arranged in the base, the screening mechanism comprises a screening box and a material distribution box, the screening box is a rectangular box movably arranged in the base, the bottom of the screening box is connected with the vibration mechanism, at least two rotatable screen plates are obliquely arranged in the screening box, the bottom ends of the screen plates are in contact with the inner wall of the screening box, screening holes for screening products are uniformly distributed in the screen plates, the diameter of the screening holes of the screen plates positioned above is larger. The invention can carry out grading screening on the semiconductor crystal grains, and products after screening are respectively stored, and the screening precision is adjustable.

Description

Screening machine for semiconductor production and screening method thereof

Technical Field

The invention relates to the field of semiconductor production, in particular to a screening machine used in semiconductor production and a screening method thereof.

Background

As is well known, a die made of semiconductor material is widely used in integrated circuits and semiconductor cooling chips, and generally, the integrated circuits are manufactured on a large semiconductor wafer in a large batch manner through multiple steps such as photolithography, and then are divided into square small particles, which are called as dies, and each die is a duplicate of the integrated circuit. Similarly, the semiconductor crystal grains of the semiconductor refrigeration chip are manufactured by cutting a long bar into wafer wafers through a warp cutting process, and then cutting the wafer wafers into small square granules. Typically, hundreds or even thousands of small dies are separated from a wafer. The crystal grains to be divided are generally micro-cubes or cuboids, incomplete crystal grains such as broken and unfilled corners or crystal grains with smaller sizes are often generated after cutting, and the partial cut broken crystal grains and the crystal grains with smaller sizes are often difficult to screen. In the prior art, the screening of the crystal grains is mostly carried out by adopting a manual selection method and by means of a screen made of a metal material or visual inspection, so that the labor and the working hours are consumed, the labor intensity is high, the screening efficiency is extremely low, and the method is not suitable for being applied to large-scale production.

Disclosure of Invention

The invention aims to provide a screening machine used in semiconductor production and a screening method thereof, so as to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme:

a sieve separator for among semiconductor production, including base plate, base and locate the screening mechanism on the base, the base plate level sets up, and a plurality of support columns are fixed to the bottom surface of base plate, the base is fixed in top surface one side of base plate, and the base is the open box structure in top, is equipped with vibration mechanism in the base.

Screening mechanism is including screening box and branch magazine, the rectangle box in the base is established for the activity to the screening box, the bottom of screening box with vibration mechanism connects, and the slope is equipped with two piece at least rotatable sieves in the screening box, the bottom and the contact of screening box inner wall of sieve, the equipartition has the screening hole that is used for screening the product on the sieve, and the screening hole diameter of the sieve that is located the top is greater than the screening hole diameter of the sieve that is located the below, and is equipped with feeding pipe on the lateral wall of screening box.

Install the rotatory drive unit of drive sieve respectively on the screening box, the bottom and the separation of screening box inner wall of drive unit drive sieve to the product that realizes on the sieve falls the sieve below.

The outer wall one side correspondence of screening box is equipped with row material pipe, installs the solenoid valve in the material discharge pipe, arranges material pipe and the inside intercommunication of screening box, and the feed port who arranges the material pipe is located the top that corresponds the sieve, divide the magazine to be equipped with the figure correspondence with the sieve, and divide the magazine to fix on the base plate, divide the magazine to be connected through the conveying pipeline that a plurality of slopes set up with arranging the material pipe, the bottom of conveying pipeline is located divides the magazine, divides magazine one side uncovered, slides in the branch magazine and sets up the drawer that can take out from uncovered department.

Further, vibration mechanism includes spring, cam, pivot and motor, the bottom of spring is connected with the bottom surface of base, and the top of spring and the bottom surface of screening box are connected, and the pivot level is rotated and is located in the base, and the motor is installed outside the base and is connected with the one end drive of pivot, install a plurality of cam in the pivot, the top of cam contacts with the bottom surface of base.

Furthermore, the inner wall of the base is longitudinally provided with a sliding groove, and the bottom of the outer wall of the screening box is provided with a sliding block in sliding fit with the sliding groove.

Further, a strip-shaped hole is horizontally formed in the side wall of the screening box, a rotary column is arranged in the strip-shaped hole in a rotating mode, the rotary column is partially located in the screening box and fixed to the top end of the screen plate, and the driving unit is used for driving the rotary column to rotate.

Further, drive unit includes fly leaf, driving piece, the fly leaf is L shape of plate form, and the top parallel position of fly leaf pass through the driving piece in the top of screening box and with the top surface of screening box and be connected, and the bottom of fly leaf is parallel with the screening box side that is equipped with the gyration post, and the bottom side that is close to the fly leaf of screening box is equipped with the pinion rack, the gyration post is many prisms form, gyration post and pinion rack transmission meshing.

Further, the side face of the screening box provided with the rotary column is provided with a guard plate, the movable plate is located between the guard plate and the screening box, and the guard plate and the movable plate are connected in a longitudinally sliding mode.

Furthermore, the driving piece is an electric telescopic rod.

Furthermore, the bottom in the screening box is provided with a notch, the bottom in the screening box is provided with a drawing plate in a sliding manner, and the outer end of the drawing plate can be drawn out of the notch.

Furthermore, the sieve plate is provided with three sieve plates, and the inclination angle of the upper sieve plate is between thirty degrees and sixty degrees.

A screening method for a screening machine used in semiconductor manufacturing includes the steps of,

the method comprises the following steps: the product is put into the screening box from a feeding pipe on the side wall of the screening box, and the driving piece works to drive the movable plate to move downwards to drive the screening plate to rotate, so that the bottom end of the screening plate is in contact with the inner wall of the screening box, and the product is prevented from being stored above the screening plate;

step two: the motor works to drive the rotating shaft to rotate and drive the cam to rotate, so that the screening box is driven to vibrate up and down, part of products pass through the screening holes in the screening plate and fall into the lower part of the screening plate, the products which do not pass through the screening plate are discharged into the corresponding material distribution box from the discharge pipe, and the steps are repeated until all the products fall into the material distribution box and the bottom in the screening box;

step three: and taking out the products falling into the screening box below the screening plate, and taking out the products screened in the material distribution box.

The invention has the beneficial effects that:

the screening box is movably arranged in the base, the screening mechanism for driving the screening box to vibrate is arranged in the base, the screening box is internally provided with at least two screen plates, the diameters of screening holes on the screen plates from top to bottom are gradually reduced, semiconductor crystal grains with different diameters can be conveniently screened and distinguished through the screen plates and are separately stored in different areas, the operation is stable and reliable, and the screening efficiency is improved.

The sieve plate can rotate under the driving of the driving unit, when the bottom end of the sieve plate is separated from the inner wall of the screening box, the product screening function cannot be achieved, the device can achieve screening of semiconductor crystal grains with different precision levels by controlling the number of the sieve plates with the screening function, work efficiency is improved, and the device is simple in structure and convenient to operate.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:

FIG. 1 is a perspective view of the overall construction of the present invention;

FIG. 2 is a schematic view of the internal structure of the base of the present invention;

FIG. 3 is a schematic top view of the present invention;

FIG. 4 is an enlarged view of a portion of the structure of the present invention;

FIG. 5 is a flow chart of the present invention.

In the figure: the screening device comprises a base plate 1, support columns 2, a base 3, a drawing plate 4, a screening box 5, a guard plate 6, a movable plate 7, a driving piece 8, a screening plate 9, a conveying pipe 10, a material distributing box 11, a drawer 12, a spring 13, a cam 14, a rotating shaft 15, a motor 16, a strip-shaped hole 17, a rotary column 18 and a discharging pipe 19.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1: referring to fig. 1-4, a screening machine for semiconductor production comprises a substrate 1, a base 3 and a screening mechanism arranged on the base 3, wherein the substrate 1 is horizontally arranged, a plurality of supporting columns 2 are fixed on the bottom surface of the substrate 1, the base 3 is fixed on one side of the top surface of the substrate 1, the base 3 is of a box-type structure with an open top end, and a vibration mechanism is arranged in the base 3.

Screening mechanism is including screening box 5 and branch magazine 11, screening box 5 establishes the rectangle box in base 3 for the activity, the bottom of screening box 5 with vibration mechanism connects, and the slope is equipped with two piece at least rotatable sieve 9 in the screening box 5, and the bottom of sieve 9 and the contact of 5 inner walls of screening box, the equipartition has the screening hole that is used for screening the product on the sieve 9, and the screening hole diameter of the sieve 9 that is located the top is greater than the screening hole diameter of the sieve 9 that is located the below, and is equipped with on the lateral wall of screening box 5 and not show in the dog-house picture that corresponds with sieve 9.

Install the rotatory drive unit of drive sieve 9 respectively on the screening box 5, the bottom and the separation of 5 inner walls of screening box of drive unit drive sieve 9 to realize that the product on the sieve 9 falls to sieve 9 below.

The outer wall one side correspondence of screening box 5 is equipped with row material pipe 19, arranges and installs the solenoid valve in the material pipe 19, arranges material pipe 19 and the inside intercommunication of screening box 5, and arranges the feed port of material pipe 19 and be located the top that corresponds sieve 9, divide magazine 11 to be equipped with the figure with sieve 9 and correspond, and divide magazine 9 to fix on base plate 1, divide magazine 11 to be connected through the conveying pipeline 10 of a plurality of slopes settings with row material pipe 19, and the bottom of conveying pipeline 10 is located divides magazine 11, divides magazine 11 one side uncovered, slides in branch magazine 11 and sets up the drawer 12 that can take out from opening department.

Further, vibration mechanism includes spring 13, cam 14, pivot 15 and motor 16, spring 13's bottom is connected with base 3's bottom surface, and spring 13's top and the bottom surface of screening box 5 are connected, and in base 3 was located in the rotation of pivot 15 level, motor 16 installed outside base 3 and was connected with the one end drive of pivot 15, install a plurality of cam 14 in the pivot 15, cam 14's top and base 3's bottom surface contact.

Further, a sliding groove is longitudinally formed in the inner wall of the base 3, and a sliding block in sliding fit with the sliding groove is arranged at the bottom of the outer wall of the screening box 5; the structure cooperation is stable, and spare part operation is reliable, and work is permanent.

Further, a strip-shaped hole 17 is horizontally formed in the side wall of the screening box 5, a rotary column 18 is rotatably arranged in the strip-shaped hole 17, part of the rotary column 18 is located in the screening box 5 and fixed with the top end of the sieve plate 9, and the driving unit is used for driving the rotary column 18 to rotate; simple structure, the convenient drive gyration post 18 of going to.

Further, the drive unit includes fly leaf 7, driving piece 8, fly leaf 7 is L shaped plate form, and the top parallel of fly leaf 7 lies in the top of screening box 5 and passes through driving piece 8 with the top surface of screening box 5 to be connected, and the bottom of fly leaf 7 is parallel with screening box 5 side that is equipped with the gyration post 18, and the bottom side that is close to fly leaf 7 of screening box 5 is equipped with the pinion rack, gyration post 18 is the polygon prism form, gyration post 18 and pinion rack transmission engagement.

Further, the screening box 5 provided with the rotary column 18 is laterally provided with a guard plate 6, the movable plate 7 is positioned between the guard plate 6 and the screening box 5, and the guard plate 6 and the movable plate 7 are connected in a sliding mode along the longitudinal direction.

Further, the driving member 8 is an electric telescopic rod.

Furthermore, a notch is arranged at the bottom in the screening box 5, a drawing plate 4 is arranged at the bottom in the screening box 5 in a sliding manner, and the outer end of the drawing plate 4 can be drawn out of the notch; the products at the bottom in the screening box 5 can be conveniently taken out.

Furthermore, three sieve plates 9 are arranged, and the inclination angle of the upper sieve plate 9 is between thirty degrees and sixty degrees; through multistage screening, the screening effect is better.

Example 2: referring to fig. 5, a screening method for a screening machine in semiconductor manufacturing, comprising the steps of, step 1: throw the material pipe with the product on 5 lateral walls of screening box and drop into screening box 5 in, 8 work drive fly leaf 7 of driving piece move down, drive sieve 9 and rotate the bottom that makes sieve 9 and the inner wall contact of screening box 5, block that the product is stored in the top of sieve 9, step 2: the motor 16 works to drive the rotating shaft 15 to rotate and drive the cam 14 to rotate, so that the screening box 5 is driven to vibrate up and down, partial products pass through the screening holes in the screen plate 9 and fall below the screen plate 9, the products which do not pass through the screen plate 9 are discharged into the corresponding material distribution box 11 from the discharge pipe 19, and the steps are repeated until all the products fall into the material distribution box and the bottom in the screening box 5; and step 3: taking out the product falling into the screening box 5 below the screen plate 9, and taking out the product screened in the material separating box 11.

When the screening device is used, the screening device is normally electrified to work, a semiconductor crystal grain product to be screened is put into the screening box 5 from a feeding pipe above the side wall of the screening box 5, the driving piece 8 works to drive the movable plate 7 to move downwards, the sieve plate 9 is driven to rotate, so that the bottom end of the sieve plate 9 is contacted with the inner wall of the screening box 5, and the sieve plate stops the product from being stored above the sieve plate 9; turning on a motor 16 to work, wherein the motor 16 drives a rotating shaft 15 to rotate so as to drive a cam 14 to rotate, the top end of the cam 14 is in contact with the bottom surface of the screening box, so that the screening box 5 is driven to vibrate up and down, a part of products with particle diameters smaller than that of the screening holes penetrate through the screening holes in the screening plate 9 and fall onto the screening plate 9 below, the rest semiconductor crystal grains do not pass through the products of the screening plate 9, and an electromagnetic valve on a discharge pipe 19 is turned on so as to discharge the corresponding semiconductor crystal grains from the discharge pipe 19 to the corresponding material distribution box 11 through a material conveying pipe 10; after a period of vibration, all the semiconductor crystal grains are screened and stored in different material distribution boxes by the sieve plate, the crystal grains with the minimum diameter finally fall into the bottom in the screening box 5, and finally, products falling into the screening box 5 below the sieve plate 9 and products screened in each material distribution box 11 are manually and gradually taken out.

The screening box is movably arranged in the base, the screening mechanism for driving the screening box to vibrate is arranged in the base, the at least two screen plates are arranged in the screening box, the diameters of screening holes on the screen plates from top to bottom are gradually reduced, semiconductor crystal grains with different diameters can be conveniently screened and distinguished through the screen plates and are separately stored in different areas, the work is stable and reliable, and the screening efficiency is improved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A sieve separator for among semiconductor manufacture, including base plate (1), base (3) and locate the screening mechanism on base (3), its characterized in that: the base plate (1) is horizontally arranged, a plurality of support columns (2) are fixed on the bottom surface of the base plate (1), the base (3) is fixed on one side of the top surface of the base plate (1), the base (3) is of a box-type structure with an open top end, and a vibration mechanism is arranged in the base (3);

the screening mechanism comprises a screening box (5) and a material distribution box (11), the screening box (5) is a rectangular box movably arranged in the base (3), the bottom of the screening box (5) is connected with the vibrating mechanism, at least two rotatable screen plates (9) are obliquely arranged in the screening box (5), the bottom ends of the screen plates (9) are in contact with the inner wall of the screening box (5), screening holes for screening products are uniformly distributed in the screen plates (9), the diameter of the screening hole of the screen plate (9) positioned above is larger than that of the screening hole of the screen plate (9) positioned below, and a feeding pipe is arranged on the side wall of the screening box (5);

the screening box (5) is provided with driving units which respectively drive the screening plate (9) to rotate, and the driving units drive the bottom end of the screening plate (9) to be separated from the inner wall of the screening box (5) so as to realize that products on the screening plate (9) fall below the screening plate (9);

the outer wall one side correspondence of screening box (5) is equipped with row material pipe (19), arranges and installs the solenoid valve in material pipe (19), arranges material pipe (19) and screening box (5) inside intercommunication, and arranges the feed port of material pipe (19) and be located the top that corresponds sieve (9), divide magazine (11) to be equipped with the figure that corresponds with sieve (9), and divide magazine (9) to fix on base plate (1), divide magazine (11) to be connected through conveying pipeline (10) that a plurality of slopes set up with row material pipe (19), the bottom of conveying pipeline (10) is located branch magazine (11), divides magazine (11) one side uncovered, slides in branch magazine (11) and sets up drawer (12) that can take out from the opening.

2. The screening machine for use in semiconductor manufacturing of claim 1, wherein: vibration mechanism includes spring (13), cam (14), pivot (15) and motor (16), the bottom of spring (13) is connected with the bottom surface of base (3), and the top of spring (13) is connected with the bottom surface of screening box (5), and pivot (15) level is rotated and is located in base (3), and motor (16) are installed outside base (3) and are connected with the one end drive of pivot (15), install a plurality of cam (14) on pivot (15), the top of cam (14) and the bottom surface contact of base (3).

3. The screening machine for use in semiconductor manufacturing of claim 1, wherein: the inner wall of the base (3) is longitudinally provided with a sliding chute, and the bottom of the outer wall of the screening box (5) is provided with a sliding block which is in sliding fit with the sliding chute.

4. The screening machine for use in semiconductor manufacturing of claim 1, wherein: a strip-shaped hole (17) is horizontally formed in the side wall of the screening box (5), a rotary column (18) is arranged in the strip-shaped hole (17) in a rotating mode, the rotary column (18) is partially located in the screening box (5) and fixed to the top end of the screen plate (9), and the driving unit is used for driving the rotary column (18) to rotate.

5. The screening machine for use in semiconductor manufacturing of claim 4, wherein: the drive unit includes fly leaf (7), driving piece (8), fly leaf (7) are L shape platelike, and the top parallel of fly leaf (7) is located the top of screening box (5) and passes through driving piece (8) with the top surface of screening box (5) and be connected, and the bottom of fly leaf (7) is parallel with screening box (5) side that is equipped with gyration post (18), and the bottom side that is close to fly leaf (7) of screening box (5) is equipped with the pinion rack, gyration post (18) are the polygon prism form, gyration post (18) and pinion rack transmission meshing.

6. The screening machine for use in semiconductor manufacturing of claim 5, wherein: the screening box (5) side-mounting that is equipped with gyration post (18) has backplate (6), fly leaf (7) are located between backplate (6) and screening box (5), and backplate (6) and fly leaf (7) along longitudinal sliding connection.

7. The screening machine for use in semiconductor manufacturing of claim 1, wherein: the driving piece (8) is an electric telescopic rod.

8. The screening machine for use in semiconductor manufacturing of claim 1, wherein: the bottom sets up the breach in screening box (5), and the bottom slides in screening box (5) is equipped with and takes out board (4), takes out the outer end pull-out breach of board (4).

9. The screening machine for use in semiconductor manufacturing of claim 1, wherein: the sieve plate (9) is provided with three sieve plates, and the inclination angle of the upper sieve plate (9) is between thirty degrees and sixty degrees.

10. The screening method of a screening machine for use in semiconductor manufacturing according to claims 1 to 9, comprising the steps of:

the method comprises the following steps: products are put into the screening box (5) from a feeding pipe on the side wall of the screening box (5), a driving piece (8) works to drive a movable plate (7) to move downwards, and the screen plate (9) is driven to rotate, so that the bottom end of the screen plate (9) is in contact with the inner wall of the screening box (5), and the products are prevented from being stored above the screen plate (9);

step two: the motor (16) works to drive the rotating shaft (15) to rotate and drive the cam (14) to rotate, so that the screening box (5) is driven to vibrate up and down, part of products pass through the screening holes on the screening plate (9) and fall onto the screening plate (9) below, the products which do not pass through the screening plate (9) are discharged into the corresponding material distribution box (11) from the discharge pipe (19), and the steps are repeated until all the products fall into the material distribution box and the inner bottom of the screening box (5);

step three: taking out the products falling into the screening box (5) below the screen plate (9), and taking out the products screened in the material separating box (11).