CN111006774B - System and method for testing calibration blackbody radiation source manufactured by MEMS (micro-electromechanical systems) process - Google Patents
System and method for testing calibration blackbody radiation source manufactured by MEMS (micro-electromechanical systems) process Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
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Abstract
The specification provides a system and a method for testing the service life of a calibration blackbody radiation source processed by adopting an MEMS (micro electro mechanical system) process, wherein the system comprises a vacuum test device and a high-low temperature box; the vacuum test device comprises a vacuum test box, a first objective table, a refrigeration mechanism and an infrared imaging temperature measuring instrument; the first objective table is arranged in a vacuum cavity of the vacuum test chamber; a first power supply interface is arranged on the first object stage; the refrigeration component of the refrigeration mechanism is used for maintaining the vacuum test chamber in a specific low-temperature environment; a measuring window is arranged on the box body of the vacuum test box; the infrared imaging thermometer is arranged at the measuring window; the high-low temperature box comprises a box body and a second objective table for bearing a calibration blackbody radiation source to be tested; and a second power supply interface is arranged on the second object stage. Because the system can simulate the working environment of the on-orbit star, an effective basis is provided for calibrating whether the blackbody radiation source can be loaded with the star or not.
Description
Technical Field
The invention relates to the technical field of instruments and meters, in particular to a system and a method for testing a calibration blackbody radiation source manufactured by adopting an MEMS (micro-electromechanical system) process.
Background
In the work of the satellite-borne infrared remote sensing system, the detection performance of an infrared detector in the satellite-borne infrared remote sensing system can drift, and the accuracy of infrared observation is influenced. In order to realize quantitative detection, the performance of the infrared detector running in the orbit needs to be regularly corrected by adopting a calibration black body. In order to cover the temperature detection range of the infrared detector and meet the high-precision detection requirement of the infrared detector in the temperature detection range, the calibration black body needs to have a wider calibration temperature range and multi-point calibration capability.
MEMS calibration blackbody radiation sources that can meet a wide calibration temperature range and multi-point calibration capability have begun to be manufactured in the industry using MEMS process technology. Thin film materials such as copper oxide inorganic glue and the like are arranged in the MEMS calibration black body, stress fatigue can be generated among the thin film materials due to the difference of expansion coefficients in the process of drastic temperature change, and cracks can be generated due to the stress fatigue; meanwhile, the temperature change may cause the diffusion of atoms in the black body, which causes the alloying of the black body material and the transformation of the specific heat capacity characteristic and the resistivity characteristic of the black body; the foregoing causes a reduction in the repetition accuracy of the calibration black body.
Before the MEMS calibration black body is really applied to the on-orbit star body, the life test needs to be carried out on the on-orbit star body so as to determine whether the on-orbit service life requirement can be met. Due to the on-orbit environmental particularity of the star, the testing environment is required to simulate the working environment of the MEMS calibration black body in the on-orbit environment and the environmental change characteristics caused by the self temperature change as much as possible; however, under the current ground conditions, there is no environment that can truly simulate the temperature change.
Disclosure of Invention
The specification provides a system and a method for testing the service life of a calibration blackbody radiation source processed by adopting an MEMS (micro electro mechanical systems) process, and the system and the method are used for realizing the test of the service characteristics and the service life of the calibration blackbody radiation source by constructing the same environment of the calibration blackbody radiation source when the calibration blackbody radiation source is used in an on-orbit mode.
The specification provides a system for testing the service life of a calibration blackbody radiation source processed by adopting an MEMS (micro electro mechanical system) process, which comprises a vacuum test device and a high-low temperature box;
the vacuum test device comprises a vacuum test box, a first objective table, a refrigeration mechanism and an infrared imaging temperature measuring instrument; the first objective table is arranged in a vacuum cavity of the vacuum test box and used for bearing a calibration blackbody radiation source to be tested; a first power supply interface for supplying power to a calibration blackbody radiation source to be tested is arranged on the first objective table; the refrigerating part of the refrigerating mechanism is used for maintaining the vacuum test chamber in a specific low-temperature environment;
a measuring window is arranged on the box body of the vacuum test box; the infrared imaging thermodetector is arranged at the measuring window and is used for measuring the radiation characteristic of the calibration black body radiation source to be tested;
the high-low temperature box comprises a box body and a second objective table used for bearing a calibration blackbody radiation source to be tested; the second object stage is arranged in the inner cavity of the box body; and a second power supply interface for supplying power to the calibration blackbody radiation source to be tested is arranged on the second objective table.
Optionally, the system comprises a controller and a temperature sensor for controlling the vacuum test device;
the temperature sensor is arranged in a vacuum cavity of the vacuum test chamber and used for testing the temperature of the vacuum test chamber;
the controller is used for adjusting the working state of the refrigerating mechanism according to the temperature measured by the temperature sensor, so that the vacuum test chamber maintains a stable low-temperature environment.
Optionally, the first stage includes a displacement driving mechanism, a plurality of first bearing portions, and a first power interface matched with each of the first bearing portions; each first bearing part is used for bearing different calibration blackbody radiation sources to be tested; the displacement driving mechanism is used for switching each first bearing part to a specific position relative to the measuring window; and/or the presence of a gas in the gas,
the second object stage comprises a plurality of second bearing parts and second power interfaces matched with the second bearing parts; and each second bearing part is respectively used for bearing different calibration blackbody radiation sources to be tested.
Optionally, the displacement driving mechanism is a rotating mechanism or a translating mechanism.
Optionally, when the calibrated blackbody radiation source to be tested is loaded, the cavity of the high-low temperature chamber is filled with inert gas.
Optionally, the refrigeration mechanism adopts circulating liquid for refrigeration.
The specification also provides a method for testing the service life of the calibration blackbody radiation source processed by the MEMS process, which is characterized in that the system for testing the service life of the calibration blackbody radiation source processed by the MEMS process is adopted; the method comprises the following steps:
carrying out cycle test on the calibration blackbody radiation source to be tested; placing a calibration blackbody radiation source to be tested in the vacuum test box, carrying out use test according to a first process, and measuring a radiation signal in the first process by using the infrared imaging temperature measuring instrument; placing the calibration blackbody radiation source to be tested in the high-low temperature box, and testing according to a second process;
analyzing a radiation signal detected by the infrared imaging thermodetector, and determining the failure time of the calibration black body radiation source to be tested;
the number of the cyclic tests is determined according to the preset using number and the redundancy coefficient of the calibration blackbody radiation source to be tested; the first process is a process that simulates heating using calibration with a calibrated blackbody radiation source; the second process is a process of heating preparation before the calibration of the analog calibration black body radiation source and a heat dissipation process after the calibration black body radiation source is used.
Optionally, the number of the calibration blackbody radiation sources to be tested is multiple;
the analyzing the radiation signal detected by the infrared imaging thermometer to determine the failure time of the calibration blackbody radiation source to be tested comprises the following steps:
judging whether the calibration black body radiation source to be tested fails or not according to the radiation signal;
under the condition that a calibration blackbody radiation source to be tested fails, the method adopts
Determining failure time;
wherein, tk,tk-1For the kth test interval (t)k-1,tk) Two test moments in (r)kIs a test interval (t)k-1,tk) I is the test level, j is 1,2, …, rk。
Optionally, the method further includes: and under the condition that the calibration blackbody radiation source to be tested has no failure and only has parameter degradation, calculating the pseudo failure life according to the degradation amount-time model, and taking the pseudo failure life as failure time.
Optionally, the method stops the cycle test of the failed calibration blackbody radiation source under the condition that the calibration blackbody radiation source to be tested is determined to be failed according to the radiation signal.
After the test system is used and the test method is adopted, before the calibration blackbody radiation source is applied to the in-orbit satellite, the calibration blackbody radiation source can be tested under the ground test condition according to the use environment of the satellite in the orbit, and whether the performance of the calibration blackbody radiation source meets the in-orbit service life requirement or not is judged. Because the testing process is carried out under the condition of strictly simulating the in-orbit use environment of the star body, the testing condition enables the calibration blackbody radiation source obtained by MEMS process machining to be tested with high probability of stress crack or material diffusion problem caused by temperature change, and an effective basis is provided for judging whether the calibration blackbody radiation source can be loaded with the star or not.
In the invention, the technical schemes can be combined with each other to realize more preferable combination schemes. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the invention, wherein like reference numerals are used to designate like parts throughout.
FIG. 1 is a schematic structural diagram of a test system adopted in an embodiment;
FIG. 2 is a schematic view of the structure of a vacuum test apparatus according to an embodiment;
FIG. 3 is a schematic diagram of the structure of a high-temperature and low-temperature box provided by the embodiment;
FIG. 4 is a flow chart of a testing method provided by an embodiment;
reference numerals: 11-a vacuum test device, 111-a vacuum test box, 111 a-a measurement window, 112-a first objective table, 113-a refrigeration mechanism, 114-an infrared imaging thermometer, 12-a high-low temperature box, 121-a box body, 122-a second objective table, 13-an execution mechanism and 14-a calibration black body radiation source.
Detailed Description
The embodiment of the specification provides a system and a method for testing the service life of a calibration blackbody radiation source applied to MEMS (micro electro mechanical systems) process machining of a satellite.
It should be noted that the problems that the blackbody radiation source may have stress fatigue during use, cracks due to the stress fatigue and material property changes due to the thermal environment are caused just by the particularity of the use environment, the structural characteristics of the calibration blackbody radiation source processed by the MEMS process and the severe temperature change during use; therefore, the core of the test system and method of the present specification is to construct a simulated test environment and perform a test under the test environment.
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate preferred embodiments of the invention and together with the description, serve to explain the principles of the invention and not to limit the scope of the invention.
The present specification provides a system for testing the life of a calibrated blackbody radiation source processed using MEMS technology. FIG. 1 is a schematic structural diagram of a test system adopted in an embodiment; as shown in fig. 1, the present embodiment provides a system including a vacuum test apparatus 11 and a high and low temperature chamber 12.
The vacuum test device 11 is used for constructing an environment similar to a calibration blackbody radiation source when the calibration blackbody radiation source works on a satellite. FIG. 2 is a schematic view of the vacuum test apparatus according to the embodiment. As shown in fig. 2, the vacuum test apparatus 11 includes a vacuum test chamber 111, a first stage 112, a refrigeration mechanism 113, and an infrared imaging thermometer 114.
The vacuum test chamber 111 is used for providing a vacuum environment for testing; in practical applications, the vacuum pumping mechanism in the vacuum test chamber 111 can pump out the ambient gas in the box body 121, so that the inner cavity of the vacuum test chamber 111 becomes a vacuum cavity.
The first stage 112 is disposed in a vacuum chamber of the vacuum test chamber 111 for carrying a calibration blackbody radiation source to be tested. Specifically, the first stage 112 is provided with a first power interface, and the first power interface is connected to an interface of the calibration black body radiation source 14 to be tested during the test process and supplies power to the calibration combined radiation source. In addition, a mechanism for fixing the calibration blackbody radiation source to be tested is further arranged on the first object stage 112, so as to ensure the stability of the calibration blackbody radiation source in the test process; of course, under some conditions, the aforementioned first power interface may also be used as a structure for realizing the fixation of the calibration blackbody radiation source.
The refrigerating mechanism 113 is used for refrigerating the vacuum test chamber 111; specifically, the refrigeration component in the refrigeration mechanism 113 and the box body 121 of the vacuum test chamber 111 form a specific position, so as to realize refrigeration of the test environment of the vacuum test chamber 111. Preferably, the refrigeration component is disposed in the vacuum cavity of the vacuum test chamber 111.
In addition, a measurement window 111a is further formed in the box body 121 of the vacuum test chamber 111, the measurement window 111a is arranged opposite to the first object stage 112, and the calibration blackbody radiation source 14 placed on the first object stage 112 can be directly observed through the measurement window 111 a. In practical applications, the measurement window 111a may be set according to a window structure of the on-satellite infrared measurement device.
An infrared imaging thermometer 114 is disposed at the measurement window 111a for measuring the radiation characteristic of the calibration black body radiation source 14, i.e., determining the light emission characteristic of the calibration black body radiation source 14 by testing the radiation light characteristic outputted through the measurement window 111a, and then determining whether the calibration black body radiation source 14 is operating normally or not by the radiation light characteristic.
It should be noted that in practical applications, the measurement range of infrared imaging thermometer 114 should be greater than the test range of the calibration blackbody radiation source, and the test accuracy of infrared imaging thermometer 114 should be higher than the operating temperature accuracy of calibration blackbody radiation source 14 to ensure that the temperature variation characteristics of the calibration blackbody radiation source can be reproduced.
The high-low temperature box 12 is used for simulating the placing environment of the calibration blackbody radiation source under the non-test condition, in particular for simulating the placing environment of the calibration blackbody radiation source in the preparation use stage and after use.
Fig. 3 is a schematic diagram of the structure of the high-low temperature box 12 provided by the embodiment. As shown in fig. 3, the high and low temperature chamber 12 includes a chamber 121 and a second stage 122, and the second stage 122 is disposed in an inner cavity of the chamber 121. The second objective table 122 is provided with a second power interface, and the second power interface is used for being connected with the calibration blackbody radiation source to be tested and supplying power to the calibration blackbody radiation source.
In practical application, the vacuum test chamber 111 and the high-low temperature chamber 12 are used in cooperation, so that the calibration blackbody radiation source works alternately in the vacuum test chamber 111 and the high-low temperature chamber 12, and the simulation of the specific use environment on the satellite is realized. Of course, the calibration blackbody radiator 14 may be transferred to one of the vacuum test chamber 111 and the high and low temperature chamber 12 to perform other test processes after the corresponding test process is completed. Hereinafter, the method of using the test system provided in the present specification will be described in detail.
In one particular application, the aforementioned vacuum test apparatus 11 may also include a controller and a temperature sensor. The temperature sensor is arranged in a vacuum cavity of the vacuum test box 111 and used for testing the ambient temperature and generating an ambient temperature signal; the controller is in communication connection with the temperature sensor and is used for adjusting the working state of the refrigerating mechanism 113 according to the temperature signal generated by the temperature sensor, so that the ambient temperature of the vacuum test box 111 is kept at a specific level, the phenomenon that the ambient temperature is greatly changed due to the temperature radiation of the calibration black body radiation source is avoided, and then other components in the box body 121 also become infrared radiation sources of specific frequency bands.
In one particular application of the embodiments of the present specification, six temperature sensors are provided within the vacuum chamber of the vacuum test chamber 111 to enable temperature measurement of a localized area.
Of course, in other embodiments, if the refrigeration mechanism 113 is always in the full power operation state, the temperature of the vacuum test chamber 111 is always in the specific low temperature environment, and the aforementioned temperature sensor and controller may not be provided. Of course, such an approach may result in a large energy consumption for the operation of the vacuum test chamber 111.
The embodiment of the specification provides a test system. The first stage 112 includes a plurality of first bearing portions, a plurality of first power interfaces, and a displacement driving mechanism. The first bearing parts are respectively used for bearing different calibration blackbody radiation sources, and the bearing parts are arranged in a staggered manner; each first power interface is respectively matched with one corresponding first bearing part and supplies power for the first power interfaces arranged on the corresponding first bearing parts. The displacement driving mechanism is used for moving the first stage 112 relative to the vacuum test chamber 111 and switching each first bearing part to a specific position corresponding to the measurement window hole. In this way, the radiation state of each blackbody radiation source can be tested alternately.
In a specific application, the calibration blackbody radiation sources 14 on the first bearing portions may be arranged at intervals, so that when one calibration blackbody radiation source is tested, radiation light emitted by other calibration blackbody radiation sources is not received by the infrared imaging thermometer 114.
In some specific applications, in order to avoid other types of radiation generated by the light emitted from the calibrated blackbody radiation source 14 after being absorbed by the sidewall of the inner cavity of the vacuum chamber, the inner wall of the chamber 121 of the vacuum chamber is made of a material with low radiation characteristics or a material whose radiation characteristics do not match the detection band of the infrared imaging thermometer 114.
Similar to the first stage 112, in some specific applications of the present embodiment, the second stage 122 may include a plurality of second carrying portions, and second power interfaces respectively associated with the second carrying portions; and each second bearing part is respectively used for bearing different calibration blackbody radiation sources to be tested.
The displacement mechanism is a rotating mechanism or a translation mechanism, and this specification is not particularly limited as long as it is ensured that each first positioning portion can be moved to a relative position corresponding to the infrared thermometer, so that the infrared thermometer can only test one calibration black body radiation source.
In the embodiment of the present disclosure, when a calibrated blackbody radiation source to be tested is carried for testing, the box 121 of the high and low temperature box 12 is filled with an inert gas. The inert gas has stable performance, and the inert gas does not cause the problem of oxidation of the calibration black body radiation source in the process of testing the calibration black body radiation source. Of course, in some special cases, especially when the simulated star environment is a manned star environment and the calibrated blackbody radiation source needs to be exposed to an aerobic environment, the housing 121 of the high and low temperature chamber 12 may be filled with conventional air.
In the embodiment of the present specification, the refrigeration mechanism 113 for realizing the constant temperature treatment of the vacuum tank may employ circulating liquid refrigeration. In specific application, the circulating liquid can be liquid nitrogen or liquid hydrogen and other materials according to the requirement of the refrigeration temperature required to be achieved.
It should also be noted that the test system also includes a dc power supply; the direct current power supply is connected with each first power supply interface and each second power supply interface; for providing electrical energy to each of the calibration blackbody radiation sources to be tested.
In specific application, in order to simulate an on-satellite environment and an on-satellite actual connection structure, the first power supply interface and the second power supply interface in the embodiment both adopt vacuum flanges.
In a specific application, the design standard of the vacuum box is that the size of an internal vacuum cavity is 450mm in diameter and 350mm in height, the vacuum degree in use is better than 1 multiplied by 10 < -3 > Pa, the temperature control range is randomly selected between 240K and 300K, the temperature control uniformity is +/-1K, and the temperature control precision and stability reach 0.2K.
In a specific application, the infrared imaging thermometer 114 can be a thermometer with an InfraTec ImageIR8325 signal, the spectral range of the infrared imaging thermometer 114 is 2-5.5 μm, and the measurement temperature range is 263K-1473K.
In a specific application, the high-low temperature box 12 may also have a temperature control function, that is, it may also employ a certain circulating refrigeration mechanism 113 for refrigeration. In one specific application, the size of the casing 121 of the high and low temperature chamber 12 is 500mm in diameter and 500mm in height, the temperature control range is-40 ℃ to 80 ℃, and the temperature control precision and stability are also 0.2K.
In addition, for the subsequent method using the test system, the test system provided by the embodiment of the present specification may further include an actuator 13 for implementing the transfer of the calibration blackbody radiation source between the vacuum test chamber 111 and the high and low temperature chamber 12.
In addition to providing the aforementioned system for testing the life of a scaled blackbody radiation source processed using a MEMS process, embodiments of the present specification also provide a method for continuing a peaceful test using the aforementioned system.
FIG. 4 is a flowchart of a testing method provided by an embodiment. As shown in FIG. 4, the testing steps of the method of the present invention include S101-S103;
s101: and placing the calibration blackbody radiation source to be tested in a vacuum test box, carrying out use test according to a first process, and measuring a radiation signal in the first process by adopting an infrared imaging temperature measuring instrument.
The first process is a process for simulating the calibration and calibration of the on-satellite equipment by using the calibration blackbody radiation source, namely the first process is carried out strictly according to the use process of the calibration blackbody radiation source.
For example, in an in-orbit use of a certain model of calibrated blackbody radiator, the procedure for calibration is from 350K up to 710K and is maintained for 70s at 350K, 400K, 450K, 468.2K, 500K, 563.4K, 600K, 650K, 680K and 710K, respectively, so the first procedure described above is tested strictly following this procedure.
Of course, during the first process test, the vacuum box was maintained at a certain vacuum level, and the temperature of the vacuum box was maintained at a constant temperature range.
S102: and taking out the calibration blackbody radiation source to be tested from the vacuum box, placing the calibration blackbody radiation source in the high-low temperature box, and testing according to a second process.
The second process is a heating preparation process before the calibration of the analog calibration black body radiation source and a heat dissipation process after the use. When a calibration blackbody radiation source of a certain model is used in an on-track mode, the heating preparation process is to heat the blackbody calibration radiation source from 250K to 350K, and the heat dissipation process is to cool the blackbody calibration radiation source from 350K to 250K after the calibration blackbody radiation source is used, so that the second process is to heat the calibration blackbody radiation source from 250K to 350K for a certain time and then cool the calibration blackbody radiation source to 250K; the duration of the second process is 170S according to actual use requirements.
It should be noted that the foregoing steps S101 and S102 are performed in a loop, and the number of the loop is determined according to the predetermined number of times of using the calibration blackbody radiation source to be tested and the redundancy coefficient; for example, if the number of in-orbit uses of a certain model of calibrated blackbody radiator is 5840 times, and the determined redundancy factor is 1.61, the number of actual tests is 9402.
S103: and analyzing the radiation signal tested by the infrared imaging temperature measuring instrument, and determining the failure time of the calibrated blackbody radiation source to be tested.
In practical applications, step S103 may be continued simultaneously during each execution of S101, or after all the test cycles of steps S101 and S102 are completed, but is preferably performed during each execution of S101, so as to find out the failure condition of the calibrated blackbody radiation source to be tested as soon as possible.
By combining the test system provided in the above expression, after the test method is adopted, before the calibration blackbody radiation source is applied to the in-orbit satellite, the calibration blackbody radiation source can be tested according to the use environment of the satellite in the in-orbit process under the ground test condition, and whether the performance meets the in-orbit service life requirement or not is judged.
The testing process is carried out under the condition of strictly simulating the in-orbit use environment of the star, so that the testing condition enables the calibration blackbody radiation source obtained by MEMS process machining to be tested with high probability of stress crack or material diffusion problem caused by temperature change, and an effective basis is provided for judging whether the calibration blackbody radiation source can be loaded with the star or not.
In a specific application, if in the process of performing steps S101 and S102, it can be determined whether the calibration black body radiation source fails according to the radiation signal detected by the infrared imaging thermometer 114. When the radiation signal measured by the infrared imaging thermometer 114 is not matched with the working temperature of the calibration blackbody radiation source within the corresponding time, determining that the calibration blackbody radiation source is invalid; at this time, the failure time may be determined using equation one.
In formula I, tk,tk-1For the kth test interval (t)k-1,tk) Two test moments in (r)kIs a test interval (t)k-1,tk) I is the test level, j is 1,2, …, rk。
However, when the calibrated blackbody radiation source measured by the infrared imaging thermometer 114 has no failure but is only stored in the condition of parameter degradation, a pseudo failure life can be deduced by a degradation amount-time model, and the pseudo failure life is used as the failure time.
In the process of performing step S103, in the case that it is determined that the calibration blackbody radiation source to be tested is failed by using the radiation signal, the cyclic test of the failed calibration blackbody radiation source may be immediately stopped.
In addition, steps S101 and S102 in this specification may be exchanged.
Those skilled in the art will appreciate that all or part of the flow of the method implementing the above embodiments may be implemented by a computer program, which is stored in a computer readable storage medium, to instruct related hardware. The computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (10)
1. The system for testing the calibration blackbody radiation source manufactured by adopting the MEMS process is characterized by comprising a vacuum test device and a high-low temperature box;
the vacuum test device comprises a vacuum test box, a first objective table, a refrigeration mechanism and an infrared imaging temperature measuring instrument; the first objective table is arranged in a vacuum cavity of the vacuum test box and used for bearing a calibration blackbody radiation source to be tested; a first power supply interface for supplying power to a calibration blackbody radiation source to be tested is arranged on the first objective table; the refrigerating part of the refrigerating mechanism is used for maintaining the vacuum test chamber in a specific low-temperature environment;
a measuring window is arranged on the box body of the vacuum test box; the infrared imaging thermodetector is arranged at the measuring window and used for measuring the radiation characteristic of the calibration black body radiation source to be tested;
the high-low temperature box comprises a box body and a second objective table used for bearing a calibration blackbody radiation source to be tested; the second object stage is arranged in the inner cavity of the box body; a second power supply interface for supplying power to the calibration blackbody radiation source to be tested is arranged on the second objective table;
the system comprises an actuating mechanism for realizing the transfer of the calibration blackbody radiation source between the vacuum test box and the high-low temperature box, and the calibration blackbody radiation source to be tested is subjected to cyclic test; and the cycle number is determined according to the preset using number and the redundancy coefficient of the calibration blackbody radiation source to be measured.
2. The system of claim 1,
the vacuum test device comprises a controller and a temperature sensor;
the temperature sensor is arranged in a vacuum cavity of the vacuum test chamber and used for testing the temperature of the vacuum test chamber;
the controller is used for adjusting the working state of the refrigerating mechanism according to the temperature measured by the temperature sensor, so that the vacuum test chamber maintains a stable low-temperature environment.
3. The system according to claim 1 or 2,
the first objective table comprises a displacement driving mechanism, a plurality of first bearing parts and first power interfaces matched with the first bearing parts; each first bearing part is used for bearing different calibration blackbody radiation sources to be tested; the displacement driving mechanism is used for switching each first bearing part to a specific position relative to the measuring window; and/or the presence of a gas in the gas,
the second object stage comprises a plurality of second bearing parts and second power interfaces matched with the second bearing parts; and each second bearing part is respectively used for bearing different calibration blackbody radiation sources to be tested.
4. The system of claim 3,
the displacement driving mechanism is a rotating mechanism or a translation mechanism.
5. The system according to claim 1 or 2,
and when the calibration blackbody radiation source to be tested is carried, inert gas is filled in the cavity of the high-low temperature box.
6. The system of claim 1, wherein the refrigeration mechanism employs circulating liquid refrigeration.
7. Method for testing a scaled blackbody radiation source manufactured by an MEMS process, characterized in that a system for testing the lifetime of a scaled blackbody radiation source manufactured by an MEMS process as claimed in any of the claims 1-6 is used; the method comprises the following steps:
carrying out cycle test on the calibration blackbody radiation source to be tested; placing a calibration blackbody radiation source to be tested in the vacuum test box, carrying out use test according to a first process, and measuring a radiation signal in the first process by using the infrared imaging temperature measuring instrument; placing the calibration blackbody radiation source to be tested in the high-low temperature box, and testing according to a second process;
analyzing a radiation signal detected by the infrared imaging thermodetector, and determining the failure time of the calibration black body radiation source to be tested;
the number of the cyclic tests is determined according to the preset using number and the redundancy coefficient of the calibration blackbody radiation source to be tested; the first process is a process that simulates heating using calibration with a calibrated blackbody radiation source; the second process is a process of heating preparation before the calibration of the analog calibration black body radiation source and a heat dissipation process after the calibration black body radiation source is used.
8. The method as claimed in claim 7, wherein the number of the calibration blackbody radiation sources to be tested is plural;
the analyzing the radiation signal detected by the infrared imaging thermometer to determine the failure time of the calibration blackbody radiation source to be tested comprises the following steps:
judging whether the calibration black body radiation source to be tested fails or not according to the radiation signal;
under the condition that a calibration blackbody radiation source to be tested fails, the method adopts
Determining failure time;
wherein, tk,tk-1For the kth test interval (t)k-1,tk) Two measurements inTest time, rkIs a test interval (t)k-1,tk) I is the test level, j is 1,2, …, rk。
9. The method of claim 8, further comprising:
and under the condition that the calibration blackbody radiation source to be tested has no failure and only has parameter degradation, calculating the pseudo failure life according to the degradation amount-time model, and taking the pseudo failure life as failure time.
10. The method of claim 7,
and under the condition that the calibration blackbody radiation source to be tested is determined to be invalid according to the radiation signal, stopping the cyclic test of the invalid calibration blackbody radiation source.
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