CN111006006B - Gear transmission device coated with super-lubrication solid film - Google Patents

Gear transmission device coated with super-lubrication solid film Download PDF

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Publication number
CN111006006B
CN111006006B CN201911362583.1A CN201911362583A CN111006006B CN 111006006 B CN111006006 B CN 111006006B CN 201911362583 A CN201911362583 A CN 201911362583A CN 111006006 B CN111006006 B CN 111006006B
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gear
solid film
super
coated
lubrication
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CN111006006A (en
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周晖
刘兴光
张凯锋
苟世宁
郝宏
冯兴国
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/04—Features relating to lubrication or cooling or heating
    • F16H57/041—Coatings or solid lubricants, e.g. antiseize layers or pastes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/04—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising a rack
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H49/00—Other gearings
    • F16H49/001—Wave gearings, e.g. harmonic drive transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/04—Features relating to lubrication or cooling or heating
    • F16H57/048—Type of gearings to be lubricated, cooled or heated
    • F16H57/0493—Gearings with spur or bevel gears
    • F16H57/0495—Gearings with spur or bevel gears with fixed gear ratio
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/04—Features relating to lubrication or cooling or heating
    • F16H57/048—Type of gearings to be lubricated, cooled or heated
    • F16H57/0498—Worm gearings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The invention discloses a gear transmission device plated with a super-lubrication solid film, which consists of a gear transmission device body and a-C:H-based super-lubrication solid film plated on one or both sides of a gear meshing surface; the coating part is provided with a threaded hole for conduction and is used for communicating with a conductive area of the processing platform through a conductive screw during preparation. The invention can greatly reduce the running friction moment through coating, increase the rotation stability and reduce the energy loss, and the addition of the threaded hole for electric conduction can also ensure the electric conduction between the coating part and the workbench during processing.

Description

Gear transmission device coated with super-lubrication solid film
Technical Field
The invention belongs to the technical field of bearings, and relates to a gear transmission device plated with a super-lubrication solid film.
Background
Super-lubricating solid film and conventional solid lubricating film (such as MoS 2 ) Compared with the friction coefficient%<0.005 1-2 orders of magnitude lowerThe fluctuation of the friction moment is greatly reduced, the running stability of the movable mechanism can be greatly improved, the friction moment and the energy consumption are reduced, and the friction moment and the energy consumption have irreplaceable important roles in improving the running stability of a space spacecraft, reducing noise and power attenuation caused by friction and the like.
Although a great deal of research is carried out on super-lubricating materials by a plurality of colleges and universities and research institutes at home and abroad and preparation of super-lubricating films on a macroscopic scale is tried, no super-lubricating film can be successfully applied to solid lubrication bearings for space up to the present. The main problems involved therein are as follows: (1) Super-lubrication research is basically limited to a microscopic scale, and a microscopic super-lubrication mechanism is difficult to reproduce in a macroscopic manner; (2) A few materials (such as hydrogen-containing amorphous carbon film, a-C: H) which show super-lubrication characteristics in macroscopic size have shorter service life and larger fluctuation of friction coefficient, and cannot meet the space application requirements; (3) Most of the currently studied superlubricating materials do not have spatial environmental adaptations (e.g., vacuum, irradiation, atomic oxygen, etc.).
The hydrogen-containing amorphous carbon (a-C: H) film is currently the only superlubricating material with space application feasibility due to three aspects: h films are the only materials in reported literature that exhibit superlubricity under conventional testing conditions on macro-scale (i.e. "large scale" as interpreted in the concept and connotation) specimens; the H film is an amorphous film, does not depend on a perfect crystal structure and an ultra-clean surface, can be effectively plated on a non-planar surface (such as an inner ring and an outer ring of a rolling ball bearing) and is difficult to realize for materials such as graphite single crystals, H-BN single crystals and the like; (III) diamond-like carbon (DLC) films similar to a-C: H films in composition and structure have been successfully applied to space-motion mechanisms for many times, and have obtained space flight verification, so a-C: H films have high space environment adaptation potential, which is not possessed by other two-dimensional materials.
However, when preparing a-C H-based super-lubricated solid films, the film material is deposited on the work table at the same time. Because the film material itself has poor conductivity, the conductivity between the workpiece table and the coating part gradually becomes poor along with the coating process. However, the process of plating a-C:H-based super-lubrication solid film needs to have good conductivity between the workpiece to be plated and the workpiece table so as to apply direct current or pulse voltage to ensure the structure and performance of the super-lubrication film. Therefore, good conductivity between the work table and the plating member is required, and thus the coating of the work table with the thin film material may cause poor process effects.
Disclosure of Invention
In view of the above, the present invention provides a gear transmission device coated with a super-lubricating solid film, which can greatly reduce the running friction torque, increase the rotation stability, reduce the energy loss, and ensure the conductivity between a coated part and a workbench during processing by adding a conductive threaded hole.
In order to solve the technical problems, the invention is realized as follows:
a gear transmission device coated with a super-lubrication solid film consists of a gear transmission device body and a-C:H-based super-lubrication solid film coated on one or both sides of a gear meshing surface; the coating part is provided with a threaded hole for conduction and is used for communicating with a conductive area of the processing platform through a conductive screw during preparation.
Preferably, the gear transmission device is a straight tooth gear, a helical tooth gear, a herringbone gear, a conical gear, a hypoid gear, a staggered shaft helical gear, a gear rack mechanism or a worm and gear.
Preferably, the gear transmission device is a harmonic reducer serving as a gear transmission speed reducer, and in the harmonic reducer, the surface of the gear teeth of the rigid gear and/or the surface of the gear teeth of the flexible gear are coated with the a-C:H-based super-lubrication solid film.
Preferably, the inner surface of the flexible gear of the harmonic reducer is plated with the a-C:H-based super-lubrication solid film.
Preferably, the types of harmonic reducers include single wave harmonic reducers, double wave harmonic reducers, and triple wave harmonic reducers.
Preferably, the thickness of the a-C H-based super-lubrication solid film is 0.1-10 mu m.
Preferably, the thickness of the a-C H-based super-lubrication solid film is 1-3 mu m.
Preferably, the thickness of the a-C H-based super-lubrication solid film is 1.5-2.5 mu m.
Preferably, one or more elements of Ti, al, zr, cr, cu, mo, V, si, ag are doped in the a-C H-based super-lubricating solid film; the microstructure of the a-C H-based super-lubrication solid film is amorphous, nanocrystalline or a combination of the amorphous and nanocrystalline.
Preferably, when the coating part is prepared, a conductive screw is used for connecting with a threaded hole for conduction, and a wire belt is used for communicating the part to be coated with the workpiece table; the resistance from the part to be coated to the workpiece table is smaller than 5 ohms by the size of the conductive threaded hole, the material of the conductive screw and the design of the material of the wire belt.
The preparation method of the a-C H-based super-lubrication solid film can be physical vapor deposition or chemical vapor deposition.
The beneficial effects are that:
the invention coats a-C H-based super-lubrication solid film on the tooth surface of the gear transmission device, which can greatly reduce friction energy consumption in the running process of the gear transmission device, prolong the service life of the gear transmission device, improve the transmission efficiency and increase the running stability of the gear transmission device. The device is particularly suitable for a movable mechanism in space or planetary detection, such as a unfolding mechanism, a mechanical arm, a driving mechanism and the like, which have requirements of long service life, high precision, high stability and the like. .
Meanwhile, the coating part is provided with a conductive threaded hole which is used for being communicated with a conductive area of the processing platform through a conductive screw during preparation, so that the conductivity between the coating part and the workbench during processing can be ensured, and the influence of sputtering non-conductive materials is avoided.
The invention is not only suitable for spacecraft parts, but also suitable for ground movable parts, in particular for servo systems with high dynamic characteristics. The application fields of the device comprise aviation, navigation, robots, energy, bionic machinery, machine tools, instruments, electronic equipment, transportation, hoisting machinery, medical machinery, agricultural machinery, mine metallurgy, ships and warships and the like.
Drawings
FIG. 1 is a schematic view of a straight tooth gear pair for a spacecraft coated with a superlubrication solid film;
FIG. 2 is a schematic diagram of a rack and pinion for a spacecraft coated with a superlubricating solid film;
FIG. 3 is a schematic diagram of a harmonic reducer for a spacecraft coated with a superlubricating solid film.
Detailed Description
The invention provides a gear transmission device plated with a super-lubrication solid film, which consists of a gear transmission device body and a-C:H-based super-lubrication solid film plated on one or both sides of a gear meshing surface; the coating part is provided with a threaded hole for conduction and is used for communicating with a conductive area of the processing platform through a conductive screw during preparation. The use of the H-based super-lubrication solid film can greatly reduce the friction energy consumption in the running process of the gear transmission device, prolong the service life of the gear transmission device, improve the transmission efficiency of the gear transmission device and increase the running stability of the gear transmission device; more importantly, the addition and use of the threaded holes for conduction can ensure the conduction between the coating part and the workbench during processing, and the conductive part is not influenced by sputtered non-conductive materials.
The a-C/H-based super-lubrication solid film used in the invention can be any one of the existing a-C/H-based super-lubrication solid films. The thickness of the a-C H-based super-lubrication solid film is 0.1-10 mu m, and the preferable range is 1-3 mu m. When the thickness of the a-C H-based super-lubrication solid film is 1.5-2.5 mu m, the preparation time can be reduced while a better effect is achieved, and the process cost is greatly reduced. The composition of the a-C H-based super-lubricating solid film can only contain C element and H element, or can also contain one or more elements such as Ti, al, zr, cr, cu, mo, V, si, ag besides C, H element. And the microstructure of the a-C H-based super-lubrication solid film can be amorphous, nanocrystalline or a combination of the amorphous and nanocrystalline.
The scheme can be applied to various gear transmission devices, and comprises a straight tooth gear, a helical tooth gear, a herringbone gear, a conical gear, a halved gear, a staggered shaft helical gear, a gear rack mechanism or a worm gear and worm, and a harmonic reducer serving as a gear transmission reduction device.
The present invention will be described in detail below with reference to three embodiments, taking a straight-tooth gear, a rack-and-pinion mechanism, and a harmonic reducer for a spacecraft as an example.
Example 1
As shown in fig. 1, a solid lubrication spur gear pair coated with a super-lubrication solid film, wherein the spur gear pair consists of a pinion 11 and a large gear 12; the tooth surfaces of the small gear 11 and the large gear 12 are plated with a-C:H-based super-lubrication solid films 13. The pinion 11 and the bull gear 12 are provided with screw holes 14 and 15 for electric conduction. The preparation process of the a-C H-based super-lubrication solid film 15 comprises the following steps:
the a-C H-based super-lubrication solid film is prepared by adopting a reaction magnetron sputtering technology, and a stainless steel screw is connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; the component to be coated is communicated with the workpiece table by adopting the wire belt, and the resistance from the component to be coated to the workpiece table is smaller than 5 ohms by the size of the conductive threaded hole, the material of the conductive screw and the design of the material of the wire belt. In the embodiment, the conductive screw is a stainless steel screw, the wire belt is a braided copper wire belt, and the measured resistance from the part to be coated to the workpiece table is less than 0.3 ohm.
Secondly, the target material uses a Ti target with purity higher than 99.99%, and the reaction gas adopts high-purity hydrogen with purity higher than 99.999%, high-purity nitrogen with purity higher than 99.999% and acetylene gas with purity higher than 99.9%. The background vacuum degree of the vacuum chamber in the deposition preparation process is better than 1 multiplied by 10 -3 Pa. In this example, the total deposition time was 1.5 hours, resulting in a total film thickness of about 1.2 μm.
MoS for sputter deposition for spacecraft according to national institute of space technology standard Q/W1106-2007 2 The solid lubrication film performance test method tests that the film adhesive force is more than or equal to 250mN and the friction coefficient<0.003。
In the practical application, a-C/H-based super-lubrication solid film can be plated on one part of the small gear 11 and the large gear 12. To ensure the lubrication effect, it is also possible to plate another part with another type of lubricating film.
Example 2
As shown in fig. 2, a solid lubrication straight tooth gear pair coated with a super-lubrication solid film consists of a gear 21 and a rack 22. The tooth surfaces of the gear 21 and the rack 22 are plated with a-C:H-based super-lubrication solid films 23. The gear 21 and the rack 22 are provided with screw holes 24 and 25 for electric conduction. The preparation process of the a-C H-based super-lubrication solid film 23 comprises the following steps:
the a-C H-based super-lubrication film is prepared by adopting a reaction magnetron sputtering technology, and a stainless steel screw is connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; the component to be coated is communicated with the workpiece table by adopting the wire belt, and the resistance from the component to be coated to the workpiece table is smaller than 5 ohms by the size of the conductive threaded hole, the material of the conductive screw and the design of the material of the wire belt. In the embodiment, the conductive screw is a stainless steel screw, the wire belt is a braided copper wire belt, and the measured resistance from the part to be coated to the workpiece table is less than 0.3 ohm.
Secondly, the target material uses a Ti target with purity higher than 99.99%, and the reaction gas adopts high-purity hydrogen with purity higher than 99.999%, high-purity nitrogen with purity higher than 99.999% and acetylene gas with purity higher than 99.9%. The background vacuum degree of the vacuum chamber in the deposition preparation process is better than 1 multiplied by 10 -3 Pa. In this example, the total deposition time was 2 hours, resulting in a total film thickness of about 1.5 μm.
MoS for sputter deposition for spacecraft according to national institute of space technology standard Q/W1106-2007 2 The solid lubrication film performance test method tests that the film adhesive force is more than or equal to 280mN and the friction coefficient<0.003。
In the practical application, an a-C/H-based super-lubrication solid film can be plated on one part of the gear 21 and the rack 22. To ensure the lubrication effect, it is also possible to plate another part with another type of lubricating film.
Example 3
As shown in fig. 3, a harmonic reducer for a spacecraft coated with a super-lubricating solid film, specifically, the harmonic reducer is composed of a rigid gear 31, a flexible gear 32, a flexible bearing 33, a cam 34 and a super-lubricating film 35. The compliant bearing 33 includes a compliant bearing outer ring 331, a compliant bearing inner ring 333, and a compliant bearing ball 332. Specific plating portions of the super-lubricating film 35 are: the gear tooth surface of the rigid gear 31 and the gear tooth surface of the flexible gear 32. The rigid gear 31 is provided with a conductive screw hole 36, and the flexible gear 32 itself is provided with a screw hole, which can be used as a conductive screw hole (not shown). Wherein, the super-lubrication film 35 is a-C H-based super-lubrication solid film, and the preparation process is as follows:
the a-C H-based super-lubrication film is prepared by adopting a reaction magnetron sputtering technology, and a stainless steel screw is connected with a threaded hole for electric conduction, so that a part to be coated is fixed on a workpiece table; and the part to be coated is communicated with the workpiece table by adopting a wire belt.
Then, the target material uses Ti target with purity higher than 99.99%, and the reaction gas adopts high-purity hydrogen with purity higher than 99.999%, high-purity nitrogen with purity higher than 99.999% and acetylene gas with purity higher than 99.9%. The background vacuum degree of the vacuum chamber in the deposition preparation process is better than 1 multiplied by 10 -3 Pa. In this example, the total deposition time was 1.5 hours, resulting in a total film thickness of about 1.2 μm.
MoS for sputter deposition for spacecraft according to national institute of space technology standard Q/W1106-2007 2 The solid lubrication film performance test method tests that the film adhesive force is more than or equal to 250mN and the friction coefficient<0.003。
In the practical application, a-C H-based super-lubrication solid film can be plated on one part of the gear teeth of the rigid gear and the gear teeth of the flexible gear 32; to ensure the lubrication effect, it is also possible to plate another part with another type of lubricating film. Preferably, the inner surface of the flexspline 32 may also be coated with the a-C: H-based superlubricating solid film. The harmonic reducer further comprises a flexible bearing 33, the flexible bearing is in rolling transmission, and films can be coated on the outer surface of the outer ring of the flexible bearing 33 and the surface of a channel of the inner ring of the flexible bearing 33. The film coating can be a lubricating film or an a-C/H-based super-lubricating solid film.
The examples in the specific embodiments are merely illustrative of the embodiments of the invention, and are neither specific nor exclusive.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. A gear transmission device coated with a super-lubrication solid film is characterized by comprising a gear transmission device body and a-C:H-based super-lubrication solid film coated on one or both sides of a gear meshing surface; the coating part is provided with a threaded hole for conducting electricity and is used for communicating with a conducting area of the processing platform through a conducting screw during preparation;
the thickness of the a-C H-based super-lubrication solid film is 1.5-2.5 mu m;
the a-C H-based super-lubrication solid film is doped with one or more elements of Ti, al, zr, cr, cu, mo, V, si, ag; the microstructure of the a-C H-based super-lubrication solid film is amorphous, nanocrystalline or a combination of the amorphous and nanocrystalline;
when the coating part is prepared, a conductive screw is used for connecting with a conductive threaded hole, and a wire belt is used for communicating the part to be coated with the workpiece table; the resistance from the part to be coated to the workpiece table is smaller than 5 ohms by the size of the conductive threaded hole, the material of the conductive screw and the design of the material of the wire belt.
2. The super-lubricated solid film coated gear recited in claim 1, wherein said gear is a spur gear, a helical gear, a herringbone gear, a conical gear, a hypoid gear, a staggered shaft helical gear, a rack and pinion mechanism, or a worm gear.
3. The gear transmission device coated with the super-lubricating solid film according to claim 1, wherein the gear transmission device is a harmonic reducer serving as a gear transmission speed reducer, and in the harmonic reducer, the surface of the gear teeth of the rigid gear and/or the surface of the gear teeth of the flexible gear are coated with the a-C:H-based super-lubricating solid film.
4. A super-lubricated solid film coated gear as recited in claim 3, wherein said a-c:h based super-lubricated solid film is coated on the inner surface of a flexspline of said harmonic reducer.
5. A superlubricated solid film coated gear device according to claim 3, wherein the types of harmonic reducers comprise single wave harmonic reducers, double wave harmonic reducers, and triple wave harmonic reducers.
CN201911362583.1A 2019-12-26 2019-12-26 Gear transmission device coated with super-lubrication solid film Active CN111006006B (en)

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CN114001142B (en) * 2021-10-26 2024-01-02 东风商用车有限公司 High-load gear with low transmission noise and preparation method thereof
CN113969967B (en) * 2021-10-26 2023-11-10 松山湖材料实验室 Rigid wheel, preparation method thereof, harmonic reducer and application thereof

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