CN109811322A - A kind of super lubricating solid film with space environment adaptability - Google Patents
A kind of super lubricating solid film with space environment adaptability Download PDFInfo
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Abstract
The invention belongs to super composite lubricating film technical fields, are related to a kind of super lubricating solid film with space environment adaptability.The film is made of anti-hydrogen diffusion layer, hydrogen storage middle layer and the super lubricating function layer being sequentially located on matrix；The anti-hydrogen diffusion layer is the fine and close object that maximum interplanar distance is less than 0.25nm；The hydrogen storage middle layer is the hydrogen storage material that desorption temperature is higher than space environment temperature, and the material of the super lubricating function layer includes a-C:H.The film can meet the use demand of spacecraft moving parts in terms of service life, stable friction factor.
Description
Technical field
The invention belongs to super composite lubricating film technical fields, and it is thin to be related to a kind of super lubricating solid with space environment adaptability
Film.
Background technique
With the development of China's aerospace industry, military spacecraft proposes the performance indexes of its payload more next
Higher requirement, for example, the required superelevation positioning accuracy of components such as antenna, camera of military reconnaissance satellite, high stability,
Low vibration noise etc..Although current common solid lubricating film (such as MoS in space2) substantially meet China's different tracks at present
Aircraft application demand, but its coefficient of friction is relatively high (~0.05), and moment of friction fluctuation is larger, is unable to satisfy subsequent
Increasingly harsher demand of the military spacecraft for superhigh precision, high stability, low vibration noise etc..
Super lubricating solid film is compared with conventional solid composite lubricating film, the low 1-2 order of magnitude of coefficient of friction (< 0.005),
Moment of friction fluctuation is greatly lowered, and can increase substantially the transmission accuracy of military satellite movable device, increase output torque
Stationarity, while greatly reducing friction bring noise and power decaying.Therefore, developing has the super of space environment adaptability
Lubricating solid film is the necessity that subsequent military spacecraft movable device performance is substantially improved.
Although domestic and international multiple colleges and universities and research institute have conducted extensive research super lubriation material, and have attempted macro-scale
The preparation of super composite lubricating film there is no a kind of super composite lubricating film that can be successfully applied to space operation mechanism but so far.Its
Involved in main problem it is as follows: (1) super Study on Lubrication is confined to micro-scale substantially, and microcosmic super lubrication mechanism is difficult to macro
It sees and reappears；(2) a small number of materials (such as hydrogeneous amorphous carbon-film, a-C:H) in macro-size performance excess of export lubrication property, the service life compared with
Short, coefficient of friction fluctuation is larger, is unable to satisfy space application demand；(3) the super lubriation material that most of current researches obtain, no
With space environment adaptability (such as vacuum, irradiation, elemental oxygen).
It is the currently the only super lubriation material with space application feasibility containing hydrogen amorphous (a-C:H) film, due to three
A aspect: (one) a-C:H film has been reported in document, uniquely in macro-scale (" the big ruler explained in " concept and intension "
Degree ") material of super greasy property is shown on sample, under conventional test conditions；(2) a-C:H film is amorphous film, has not been depended on
The crystal structure of beauty does not depend on ultra-clean surface yet, therefore can be overlying on nonplanar surface (such as rolling ball bearing by effective plating
Internal and external cycle etc.), these are difficult to realize for materials such as graphite monocrystalline, h-BN monocrystalline；(3) with a-C:H film component, structure all classes
As diamond-like-carbon (DLC) film, many successes be applied to space operation mechanism, obtain space flight verifying, therefore
There is a-C:H film very high space environment to adapt to potentiality, this is that other two-dimensional materials do not have.
However, pressing current progress, the stable friction factor of a-C:H film is still to be improved, the super lubrication of a-C:H base
Film is because abrasion causes c h bond to be broken in military service, and also there is a big difference for membrane life time metric space application demand.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of super lubricating solid film with space environment adaptability,
The film can meet the use demand of spacecraft moving parts in terms of service life, stable friction factor.
A kind of super lubricating solid film with space environment adaptability, the film is by the anti-hydrogen that is sequentially located on matrix
Diffusion layer, hydrogen storage middle layer and super lubricating function layer composition；The anti-hydrogen diffusion layer is maximum interplanar distance less than 0.25nm's
Fine and close object；The hydrogen storage middle layer is the hydrogen storage material that desorption temperature is higher than space environment temperature, the super lubricating function layer
Material includes a-C:H.
Preferably, the anti-hydrogen diffusion layer is dense ceramic material or intermetallic compound.
Preferably, the anti-hydrogen diffusion layer includes but is not limited to TiN, ZrN, Al2O3Or Ni3Al。
Preferably, the thickness of the anti-hydrogen diffusion layer are as follows: 0 thickness≤2 μm <.
Preferably, the material of the hydrogen storage middle layer includes but is not limited to TiHx、TiFeHxOr Ti2NiHx, due to hydrogen storage material
The content of H is variation in material, therefore indicates H proportion in hydrogen storage material with X.
Preferably, the thickness of the hydrogen storage middle layer are as follows: 0 thickness≤2 μm <.
Preferably, the material of the super lubricating function layer further includes the a-C:H doped with Ti, Si, Ag or Cu element.
Preferably, the microstructure of the super lubricating function layer is non crystalline structure and/or nanocrystalline structure, for gas
It is nanocrystalline often to be existed simultaneously with amorphous mutually for the thin-film material of deposition, and general means of testing, such as X is used to penetrate
Line diffraction (XRD), usually cannot be distinguished, so being often used together when describing film.
Preferably, the thickness of the super lubricating function layer are as follows: 0 thickness≤1 μm <.
Preferably, the thickness of the super lubricating solid film with space environment adaptability are as follows: 0 thickness≤3 μm < are rubbed
Wipe coefficient≤0.005.
A kind of super lubricating solid film with space environment adaptability of the present invention uses physical vapour deposition (PVD)
(PVD) method is prepared, and the technological parameter in the method is selected as the conventional selection of this field.
Beneficial effect
The present invention is based on the a-C:H films of performance excess of export lubrication property, dexterously propose anti-hydrogen diffusion layer, among hydrogen storage
Three layers of complex thin film structure design scheme of layer, the super lubricating function layer of a-C:H.By being added between a-C:H film and matrix
One layer of hydrogen storage middle layer so that the super composite lubricating film of a-C:H base in military service because abrasion causes c h bond to be broken, can be by after hydrogen loss
Hydrogen storage layer carries out supplement reparation, has super composite lubricating film in commission self-reparing capability.Hydrogen storage in hydrogen storage material carries
Body includes but is not limited to Ti, TiFe or Ti2Ni etc..These materials as the characteristics of hydrogen storage middle layer are stabilized not under room temperature
Dehydrogenation, just starts dehydrogenation when being heated to certain temperature (such as~300 DEG C), and dehydrogenation rate is increased with temperature and increased.These are special
Property, on the one hand can guarantee to stablize the stage of super lubricating action of playing in a-C:H film, the hydrogen storage long-time storage of middle layer and
Not dehydrogenation；On the other hand, after the regional area hydrogen atom of a-C:H film is because of frictional dissipation, this region is due to frictional force increases
Local temperature is caused to rise (although almost unchanged in this initial stage entirety components temperature, in micro-scale, because of play
Temperature caused by strong friction rises the fusing point that may be up to material), because a-C:H film is in nanoscale (two-dimensional material), therefore position
It will be rapidly heated in hydrogen storage middle layer below, and reach desorption temperature, hydrogen is released, and is diffused into surface, is formed with new
Unsaturated carbon bond combine, be passivated, the super lubrication interface of " repairing " because of friction breakage.
Hydrogen storage middle layer is in military service when dehydrogenation, and since hydrogen atom is very small, diffusion is very fast, and to titanium alloy, steel and
Speech, can all cause " hydrogen embrittlement " phenomenon.Therefore, the present invention devises one layer of anti-hydrogen diffusion layer between hydrogen storage middle layer and matrix, prevents
The material that hydrogen diffusion layer uses includes but is not limited to ceramic of compact phase TiN, ZrN, Al2O3Deng or intermetallic compound Ni3Al etc..
A kind of super lubricating solid film with space environment adaptability of the present invention, can significantly extend a-C:
The service life of H film is the solid lubrication of space operation mechanism, provides a kind of super composite lubricating film structure design solution party of selfreparing
Case.The present invention is especially suitable for the space operation mechanisms with requirements such as long-life, high-precision, high stabilities, such as roller ball axis
It holds, gear, worm and gear, harmonic speed reducer etc..
A kind of super lubricating solid film with space environment adaptability of the present invention can be not only used for space use
Movable device can be used for land operations components and civil field, as auto industry, processing manufacturing industry, transport service,
Shipping industry etc., antifriction consumption reduction, raising efficiency of energy utilization for civil use industry moving parts, mechanism, reduces exhaust gas row
High-volume etc., there is huge application value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of film of the present invention.
Wherein, 1- matrix, the anti-hydrogen diffusion layer of 2-, 3- hydrogen storage middle layer, the super lubricating function layer of 4-.
Specific embodiment
The present invention will be further described in detail below with reference to specific embodiments.
Embodiment 1
As shown in Figure 1, a kind of super lubricating solid film with space environment adaptability, the film is by being in turn attached to
Anti- hydrogen diffusion layer 2, hydrogen storage middle layer 3 and super lubricating function layer 4 composition on matrix 1, wherein matrix 1 is stainless steel 9Cr18,
Anti- hydrogen diffusion layer 2 is TiN, and hydrogen storage middle layer 3 is TiHx, super lubricating function layer 4 is a-C:H.
The film is prepared using reaction magnetocontrol sputtering technology: vacuum chamber background vacuum is less than or equal in deposition process
1×10-3Pa, total sedimentation time are 1.5 hours.
(1) preparation of anti-hydrogen diffusion layer 2: target is higher than 99.99% Ti target using purity, and reaction gas is big using purity
In the high pure nitrogen for being equal to 99.999%, other parameters are selected as conventional technical means in the art, sedimentation time are controlled, in matrix
The anti-hydrogen diffusion layer 2 of 400nm thickness is deposited on 1；
(2) preparation of hydrogen storage middle layer 3: target is higher than 99.99% Ti target using purity, and reaction gas is big using purity
In the high-purity hydrogen for being equal to 99.999%, other parameters are selected as conventional technical means in the art, sedimentation time are controlled, in anti-hydrogen
The hydrogen storage middle layer 3 of 400nm thickness is deposited on diffusion layer 2；
(3) preparation of super lubricating function layer 4: reaction gas is the acetylene gas other parameters that purity is more than or equal to 99.9%
It is selected as conventional technical means in the art, controls sedimentation time, the super lubricating function of 100nm thickness is deposited in hydrogen storage middle layer 3
Layer 4 obtains a kind of super lubricating solid film with space environment adaptability that overall thickness is 900nm in matrix 1.
According to institute, Chinese Academy of Space Technology standard Q/W1106-2007 " spacecraft sputtering sedimentation MoS2Solid lubrication
Film performance test method " it is tested, the adhesive force is more than or equal to 300mN, and coefficient of friction 0.002, the service life is big
In equal to 1.5 × 107Turn.
Embodiment 2
A kind of super lubricating solid film with space environment adaptability, the film is by being in turn attached on matrix 1
Anti- hydrogen diffusion layer 2, hydrogen storage middle layer 3 and super lubricating function layer 4 composition, wherein matrix 1 is beating steel GCr15, anti-hydrogen diffusion layer
2 be ZrN, and hydrogen storage middle layer 3 is TiFeHx, super lubricating function layer 4 is a-C:H.
The film is prepared using reaction magnetocontrol sputtering technology: Zr target and purity of the target using purity higher than 99.99%
Ti-Fe alloy target (mass ratio 50:50) more than or equal to 99.99%, reaction gas are high-purity better than 99.999% using purity
Hydrogen and purity are better than 99.9% acetylene gas.
The film is prepared using reaction magnetocontrol sputtering technology: vacuum chamber background vacuum is less than or equal in deposition process
1×10-3Pa, total sedimentation time are 1.5 hours.
(1) preparation of anti-hydrogen diffusion layer 2: target is more than or equal to 99.99% Zr target using purity, and reaction gas is using pure
Degree is more than or equal to 99.999% high pure nitrogen, and other parameters are selected as conventional technical means in the art, controls sedimentation time,
The anti-hydrogen diffusion layer 2 of 400nm thickness is deposited on matrix 1；
(2) preparation of hydrogen storage middle layer 3: purity is more than or equal to 99.99% Ti-Fe alloy target (mass ratio 50:50), instead
Gas is answered to be more than or equal to 99.999% high-purity hydrogen using purity, other parameters are selected as conventional technical means in the art, control
Sedimentation time processed deposits the hydrogen storage middle layer 3 of 350nm thickness on anti-hydrogen diffusion layer 2；
(3) preparation of super lubricating function layer 4: reaction gas is the acetylene gas that purity is more than or equal to 99.9%, other ginsengs
Number is selected as conventional technical means in the art, controls sedimentation time, and the super lubrication function of 100nm thickness is deposited in hydrogen storage middle layer 3
Ergosphere 4 obtains a kind of super lubricating solid film with space environment adaptability that overall thickness is 850nm in matrix 1.
According to institute, Chinese Academy of Space Technology standard Q/W1106-2007 " spacecraft sputtering sedimentation MoS2Solid lubrication
Film performance test method " it is tested, the adhesive force is more than or equal to 250mN, and coefficient of friction 0.002, the service life is big
In equal to 1.5 × 107Turn.
Embodiment 3
A kind of super lubricating solid film with space environment adaptability, the film is by being in turn attached on matrix 1
Anti- hydrogen diffusion layer 2, hydrogen storage middle layer 3 and super lubricating function layer 4 composition, wherein matrix 1 is titanium alloy ti6al4v, anti-hydrogen diffusion
Layer 2 is Al2O3, hydrogen storage middle layer 3 is Ti2NiHx, super lubricating function layer 4 is a-C:H.
The film is prepared using reaction magnetocontrol sputtering technology: vacuum chamber background vacuum is less than or equal in deposition process
1×10-3Pa, total sedimentation time are 1.5 hours.
(1) preparation of anti-hydrogen diffusion layer 2: target is more than or equal to 99.99% Al target using purity, and reaction gas is using pure
Degree is more than or equal to 99.99% oxygen, and other parameters are selected as conventional technical means in the art, sedimentation time is controlled, in matrix 1
The anti-hydrogen diffusion layer 2 of upper deposition 400nm thickness；
(2) preparation of hydrogen storage middle layer 3: Ti target of the purity more than or equal to 99.99% and purity are more than or equal to 99.99%
Ni target, reaction gas are more than or equal to 99.999% high-purity hydrogen using purity, and other parameters are selected as this field routine techniques
Means control sedimentation time, and the hydrogen storage middle layer 3 of 400nm thickness is deposited on anti-hydrogen diffusion layer 2；
(3) preparation of super lubricating function layer 4: reaction gas is the acetylene gas that purity is more than or equal to 99.9%, other ginsengs
Number is selected as conventional technical means in the art, controls sedimentation time, and the super lubrication function of 100nm thickness is deposited in hydrogen storage middle layer 3
Ergosphere 4 obtains a kind of super lubricating solid film with space environment adaptability that overall thickness is 900nm in matrix 1.
According to institute, Chinese Academy of Space Technology standard Q/W1106-2007 " spacecraft sputtering sedimentation MoS2 solid lubrication
Film performance test method " it is tested, the adhesive force is more than or equal to 280mN, and coefficient of friction 0.002, the service life is big
In equal to 1.5 × 107Turn.
It should be noted that a kind of super lubricating solid film with space environment adaptability of the present invention, includes
Anti- hydrogen diffusion layer, hydrogen storage middle layer and super three functional layers of lubricating function layer a-C:H film.Wherein, super lubricating function layer is hydrogeneous
Amorphous carbon a-C:H film；Anti- hydrogen diffusion layer can be but not limited to Ti, TiFe or Ti2Ni etc., hydrogen storage middle layer can be but unlimited
In ceramic of compact phase TiN, ZrN, Al2O3Or intermetallic compound Ni3Al etc..Three examples in specific embodiment, are only lifted
Example illustrates embodiments of the present invention, does not both have particularity, does not also have exclusiveness.
In conclusion invention includes but is not limited to above embodiments, it is all to be carried out under the spirit and principles in the present invention
Any equivalent replacement or local improvement, all will be regarded as within protection scope of the present invention.
Claims (10)
1. a kind of super lubricating solid film with space environment adaptability, it is characterised in that: the film is by being sequentially located at base
Anti- hydrogen diffusion layer (2), hydrogen storage middle layer (3) and super lubricating function layer (4) composition on body (1)；The anti-hydrogen diffusion layer (2) is
Maximum interplanar distance is less than the fine and close object of 0.25nm；The hydrogen storage middle layer (3) is that desorption temperature is higher than space environment temperature
The material of hydrogen storage material, the super lubricating function layer (4) includes a-C:H.
2. a kind of super lubricating solid film with space environment adaptability as described in claim 1, it is characterised in that: described
Anti- hydrogen diffusion layer (2) is dense ceramic material or intermetallic compound.
3. a kind of super lubricating solid film with space environment adaptability as claimed in claim 1 or 2, it is characterised in that:
The anti-hydrogen diffusion layer (2) includes TiN, ZrN, Al2O3Or Ni3Al。
4. a kind of super lubricating solid film with space environment adaptability as claimed in claim 1 or 2, it is characterised in that:
The thickness of the anti-hydrogen diffusion layer (2) are as follows: 0 thickness≤2 μm <.
5. a kind of super lubricating solid film with space environment adaptability as described in claim 1, it is characterised in that: hydrogen storage
The material of middle layer (3) includes TiHx、TiFeHxOr Ti2NiHx。
6. a kind of super lubricating solid film with space environment adaptability as claimed in claim 1 or 5, it is characterised in that:
The thickness of the hydrogen storage middle layer (3) are as follows: 0 thickness≤2 μm <.
7. a kind of super lubricating solid film with space environment adaptability as described in claim 1, it is characterised in that: described
The material of super lubricating function layer (4) further includes doped with Ti, Si, Ag or Cu element
a-C:H。
8. a kind of super lubricating solid film with space environment adaptability as claimed in claim 1 or 7, it is characterised in that:
The microstructure of the super lubricating function layer (4) is non crystalline structure and/or nanocrystalline structure.
9. a kind of super lubricating solid film with space environment adaptability as claimed in claim 1 or 7, it is characterised in that:
The thickness of the super lubricating function layer (4) are as follows: 0 thickness≤1 μm <.
10. a kind of super lubricating solid film with space environment adaptability as described in claim 1, it is characterised in that: institute
State the thickness of the super lubricating solid film with space environment adaptability are as follows: 0 thickness≤3 μm <, coefficient of friction≤0.005.
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| CN111006006A (en) * | 2019-12-26 | 2020-04-14 | 兰州空间技术物理研究所 | Gear transmission device for plating super-lubricating solid film |
| CN111156255A (en) * | 2019-12-26 | 2020-05-15 | 兰州空间技术物理研究所 | Rolling transmission device for plating super-lubricating solid film |
| CN114001142A (en) * | 2021-10-26 | 2022-02-01 | 东风商用车有限公司 | High-load gear with low transmission noise and preparation method thereof |
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