CN110988397A - Excitation circuit for quartz resonance accelerometer - Google Patents
Excitation circuit for quartz resonance accelerometer Download PDFInfo
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- CN110988397A CN110988397A CN201911319198.9A CN201911319198A CN110988397A CN 110988397 A CN110988397 A CN 110988397A CN 201911319198 A CN201911319198 A CN 201911319198A CN 110988397 A CN110988397 A CN 110988397A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
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Abstract
The invention discloses an excitation circuit for a quartz resonance accelerometer, which comprises: the COMS inverter U1A is connected with a resistor R1 in parallel; the output end of the COMS inverter U1A is connected with one end of a resistor R2, and the other end of the resistor R2 is connected with the input end of a COMS inverter U2A; the COMS inverter U2A is connected with a resistor R3 in parallel; the output end of the COMS inverter U2A is connected with the non-inverting input end of the operational amplifier; a resistor R3 is connected in series between the non-inverting input end and the output end of the operational amplifier, the inverting input end of the operational amplifier is connected with one end of a resistor R4, and the other end of the resistor R4 is connected with GND; the output end of the operational amplifier is connected with one end of a resistor R6, and the other end of a resistor R6 is connected with one end of a capacitor C4 and one end of a resistor R7; the other end of the capacitor C4 is connected with the other end of the resistor R2, and the other end of the resistor R7 is connected with the input end of the COMS inverter U2A. Compared with the traditional excitation circuit, the invention has higher gain and more high energy and can meet the working requirement of the high-impedance quartz vibration beam.
Description
Technical Field
The invention belongs to the technical field of crystal oscillation circuits, relates to an excitation circuit of a quartz resonance accelerometer, and particularly relates to an excitation circuit for a quartz resonance accelerometer.
Background
The quartz resonance accelerometer is widely applied to an inertial measurement system and has an irreplaceable status in the relevant fields of aviation, aerospace and the like. The excitation circuit is used as a driving unit of the resonant accelerometer, and the design quality of the excitation circuit not only determines whether the quartz vibrating beam can work normally, but also influences the quality of an output signal of the accelerometer. The quartz vibration beam is used as a sensitive element of the accelerometer, along with the improvement of the manufacturing and processing precision and the limitation of the electrode area, the equivalent resistance of the quartz vibration beam is far larger than the impedance of the crystal oscillator, and the traditional oscillation circuit cannot meet the working requirement of the quartz vibration beam.
Aiming at the high impedance characteristic of the quartz vibrating beam, a high-gain exciting circuit is designed, and the normal work of the exciting circuit must meet the following two conditions:
amplitude balance conditions: a (ω) F (ω)/1;
the vibration exciting circuit adopted by the quartz resonance accelerometer mainly comprises a series resonance circuit and a parallel resonance circuit, wherein the quartz vibration beam of the parallel resonance circuit has the inductance characteristic, and the quartz vibration beam of the series resonance circuit has the resistance characteristic. The oscillation circuit of the parallel excitation circuit consists of capacitors C1 and C2 and a crystal, forms a three-point oscillation circuit, and meets the principle of 'injection same base reverse', so that the phase balance condition is met. As long as A (omega) F (omega)/1 is ensured, a resonance system consisting of the excitation circuit and the quartz vibration beam can realize stable oscillation, has a simple structure and higher output precision, and is suitable for occasions with high frequency and low noise; the quartz vibrating beam with the large equivalent resistance has the disadvantages that the power consumption of the circuit is concentrated on the resistance, the overcurrent phenomenon is easy to generate, the power of the whole resonance system is increased for the quartz vibrating beam with the large equivalent resistance, more heat is generated to cause the temperature drift of the sensor, the normal working state of the sensor is influenced, and the quartz vibrating beam with the large equivalent resistance is not suitable for the quartz vibrating beam with the large equivalent resistance. The quartz vibration beam in the series excitation circuit is pure resistive, low in power consumption and less in heat generation, and the resonance sensor is not prone to temperature drift. Therefore, the resonance system formed by the series excitation circuit and the quartz vibration beam has good stability, makes full use of the frequency selection characteristic of the quartz vibration beam, and has higher measurement precision.
At present, researches on series excitation circuits are few, researchers for researches on Beijing space control instruments propose a double-gate oscillation circuit in documents, the structure of a double-inverter of the double-gate oscillation circuit has higher gain and higher driving capability than a typical Hegler oscillation circuit, but the frequency of the double-inverter is lower than 0.25HZ within 90 minutes, the oscillation starting effect is poor when the double-inverter is used for a quartz oscillation beam with dynamic resistance reaching M omega level and high impedance, and the working requirement of a high-precision quartz resonance sensor of 10HZ/g cannot be met.
In summary, a new high-gain excitation circuit for a high-impedance quartz resonant accelerometer is needed.
Disclosure of Invention
The invention aims to provide an excitation circuit for a quartz resonant accelerometer, and aims to solve the technical problem that a traditional excitation circuit cannot start oscillation due to overlarge impedance of a quartz vibrating beam dynamic resistance in the quartz resonant accelerometer at the level of M omega. The excitation circuit is a series resonant circuit, has higher gain and more high energy than the traditional excitation circuit, and can meet the working requirement of the high-impedance quartz vibrating beam.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention discloses an excitation circuit for a quartz resonant accelerometer, which comprises: a COMS inverter U1A, a COMS inverter U2A, and an operational amplifier; the COMS inverter U1A is connected with a resistor R1 in parallel; the output end of the COMS inverter U1A is connected with one end of a resistor R2, and the other end of the resistor R2 is connected with the input end of a COMS inverter U2A; the COMS inverter U2A is connected with a resistor R3 in parallel; the output end of the COMS inverter U2A is connected with the non-inverting input end of the operational amplifier; a resistor R3 is connected in series between the non-inverting input end and the output end of the operational amplifier, the inverting input end of the operational amplifier is connected with one end of a resistor R4, and the other end of the resistor R4 is connected with GND; the output end of the operational amplifier is connected with one end of a resistor R6, and the other end of a resistor R6 is connected with one end of a capacitor C4 and one end of a resistor R7; the other end of the capacitor C4 is connected with the other end of the resistor R2, and the other end of the resistor R7 is connected with the input end of the COMS inverter U2A.
The invention further improves the method and also comprises the following steps: a capacitance C2; the output end of the COMS inverter U1A is connected with one end of a capacitor C2, and the other end of the capacitor C2 is connected with GND.
The invention further improves the method and also comprises the following steps: a capacitance C3; the output end of the COMS inverter U2A is connected with a capacitor C3, and the other end of the capacitor C3 is connected with GND.
The invention is further improved in that the COMS inverter U1A and the COMS inverter U2A adopt an HEF4069UB chip.
The invention is further improved in that the operational amplifier adopts an LM358 chip.
The invention further improves the method and also comprises the following steps: a cmos inverter U3A; the output of the operational amplifier is connected to the input of the cmos inverter U3A.
A further development of the invention is that the output signal is a square-wave signal.
A further development of the invention is that the output signal can be up to 10-5An order of magnitude.
The invention has the further improvement that the excitation circuit is connected with the quartz vibration beam, and the change of the output signal is less than 0.1 Hz.
Compared with the prior art, the invention has the following beneficial effects:
the excitation circuit is a series resonant circuit, positive feedback is formed on the basis of a double-gate oscillating circuit and an operational amplifier, a parallel RC harmonic suppression network has a better effect of suppressing high frequency and stabilizing frequency, and the excitation circuit has the characteristics of high gain and high energy and can meet the working requirement of a high-impedance quartz vibrating beam. Compared with the traditional excitation circuit, the high-power quartz resonant accelerometer has the advantages of higher gain, more high energy and better frequency stabilization effect as shown in figure 1, and has the advantages of less circuit components, low manufacturing cost, simple structure, easiness in miniaturization and high precision, thereby having important significance for researching high-precision quartz resonant accelerometers. The circuit has fewer peripheral circuit elements and is easy to miniaturize. The quartz resonant sensor has a good vibration starting effect when the dynamic resistance reaches the M omega level high-impedance quartz vibrating beam, and can meet the working requirement of a high-precision quartz resonant sensor of 10 HZ/g.
The invention adopts the RC frequency-selecting network, has better frequency stabilization effect and does not output harmonic overtone frequency.
The output signal of the invention is a standard square wave signal, and the square wave has good quality and does not need to be subjected to complex shaping when the frequency is measured.
The output signal of the invention can reach 10-5And the magnitude order and the precision are high.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art are briefly introduced below; it is obvious that the drawings in the following description are some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic diagram of a conventional dual gate oscillator circuit;
FIG. 2 is a schematic diagram of an embodiment of the present invention without a filter capacitor;
FIG. 3 is a schematic diagram of a high-gain excitation circuit for a high-impedance quartz resonant accelerometer according to an embodiment of the invention;
FIG. 4 is a waveform schematic diagram of the output signal of the resonant system formed by the circuit of FIG. 2 connected to a quartz vibrating beam;
FIG. 5 is a schematic waveform diagram of the output signal of the resonant system formed by the circuit of FIG. 3 connected to a quartz vibrating beam;
FIG. 6 is a statistical schematic diagram of the output frequency signal of the resonant system formed by the circuit of FIG. 3 connected to a quartz vibrating beam.
Detailed Description
In order to make the purpose, technical effect and technical solution of the embodiments of the present invention clearer, the following clearly and completely describes the technical solution of the embodiments of the present invention with reference to the drawings in the embodiments of the present invention; it is to be understood that the described embodiments are only some of the embodiments of the present invention. Other embodiments, which can be derived by one of ordinary skill in the art from the disclosed embodiments without inventive faculty, are intended to be within the scope of the invention.
Referring to fig. 2, an excitation circuit for a quartz resonant accelerometer according to an embodiment of the present invention adopts a design of a dual inverter in combination with an operational amplifier, and includes: COMS inverter U1A, COMS inverter U2A, operational amplifier and a number of resistors and capacitors.
The COMS inverter U1A is connected with a resistor R1 in parallel, the output end of the COMS inverter U1A is connected with one end of the resistor R2, the other end of the resistor R2 is connected with the input end of the COMS inverter U2A, the COMS inverter U2A is connected with a resistor R3 in parallel, and the output end of the COMS inverter U2A is connected with the non-inverting input end of an operational amplifier; the non-inverting input end of the operational amplifier is connected with the output end of the COMS inverter U2A, a resistor R3 is connected between the non-inverting input end and the output end of the operational amplifier in series, the inverting input end of the operational amplifier is connected with a resistor R4 in series, and the other end of the resistor R4 is connected with GND.
Referring to fig. 3, preferably, the output terminal of the cmos inverter U1A is connected to the capacitor C2, and the other terminal of the capacitor is connected to GND.
Preferably, the output end of the cmos inverter U2A is connected to the capacitor C3, and the other end of the capacitor C3 is connected to GND.
Alternatively, HEF4069UB chips are used for U1A and U2A.
Optionally, the operational amplifier is an LM358 chip.
Preferably, a cmos inverter U3A is also provided for output waveform quality requirements and for ease of later signal acquisition.
Optionally, the operational amplifier may use a lower power consumption, reduce the heat productivity, and improve the thermal stability of the circuit; the operational amplifier can be a precise operational amplifier with higher precision.
Referring to fig. 3, a high-gain excitation circuit for a high-impedance quartz resonant accelerometer according to an embodiment of the present invention adopts a design of a dual inverter in combination with an operational amplifier, and includes: three cmos inverters, an LM358 operational amplifier, and several resistors and capacitors.
The U1A and U2A adopt an HEF4069UB chip, an R2 chip, an R3 chip and a quartz vibrating beam to form a double-gate oscillating circuit as an amplifying part of an excitation circuit, each inverter can provide 180-degree phase shift, and the two inverters can provide 360-degree phase shift to meet the working condition of phase balance of the excitation circuit.
Aiming at the design of the excitation circuit of the quartz resonance accelerometer based on the double beams, two independent excitation circuits are required to be used for driving, each excitation circuit comprises 3 inverters, and each HEF4069UB chip comprises 6 inverters, so that the design requirement can be met.
For the high-impedance quartz vibration beam, the driving circuit of the high-impedance quartz vibration beam needs to provide more energy and higher gain due to larger dynamic resistance during starting vibration, the output of a double-gate oscillation circuit U2A is connected to an operational amplifier interface 1 to form a positive feedback loop, a capacitor is connected to an interface 2 and is connected with the ground, and an LM358 chip is selected to contain two independent high-gain operational amplifiers.
The operational amplifier has infinite gain in an open loop system, has an amplification effect on the input of the circuit, and can provide more energy for the circuit to work. Because the gain-bandwidth product of the driving circuit is limited, the gain of a resistance regulation loop is prevented from being serially connected between the input and the output of the operational amplifier due to the overlarge phase offset caused by the high gain of the operational amplifier.
The capacitor C4 and the resistor R7 form an RC frequency-selecting network, and the specific numerical values of the capacitor and the resistor of the RC frequency-selecting network are determined according to the fundamental frequency of the quartz vibrating beam. Each quartz vibrating beam has an inherent frequency which is called as a fundamental frequency and harmonic overtone frequency, and the RC frequency selection network in the exciting circuit can avoid harmonic overtone frequency of the circuit output frequency and is beneficial to frequency stabilization.
Referring to fig. 2 to 4, the crystal positions shown by the quartz vibrating beam access circuit are combined into a simple resonant system, and experiments are performed under the air condition to provide 5V direct current for the excitation circuit by using the direct current stabilized power supply module. The waveform diagram shown in fig. 4 can be obtained by testing the output signal of the resonance system by using an agilent DSO5012A model oscilloscope, wherein the waveform diagram shows that the waveform jitter is serious and the waveform jitter is caused by amplifying the electrical noise of the circuit by the operational amplifier.
Referring to fig. 3, noise reduction processing is introduced on the basis of fig. 2, the filter capacitor has the characteristic of passing ac current and blocking dc current, and ac current generated by the operation of the inverter is released to ground by using the filter capacitors C2 and C3, so as to ensure that less ac current interferes with the output signal input by the operational amplifier.
The output signal is shaped by the inverter U3A to obtain a standard square wave signal as shown in fig. 5, and the frequency of the output signal can be directly observed without complex waveform arrangement in the using process.
Referring to fig. 6, fig. 6 is a graph showing a statistical graph of broken lines of 1000 collected frequency signals after the quartz vibrating beam is connected to the excitation circuit to start vibration, and it can be known from fig. 6 that the variation of the output signal of the resonant system is less than 0.1 HZ.
Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can make modifications and equivalents to the embodiments of the present invention without departing from the spirit and scope of the present invention, which is set forth in the claims of the present application.
Claims (9)
1. An excitation circuit for a quartz resonant accelerometer, comprising: a COMS inverter U1A, a COMS inverter U2A, and an operational amplifier;
the COMS inverter U1A is connected with a resistor R1 in parallel; the output end of the COMS inverter U1A is connected with one end of a resistor R2, and the other end of the resistor R2 is connected with the input end of a COMS inverter U2A;
the COMS inverter U2A is connected with a resistor R3 in parallel; the output end of the COMS inverter U2A is connected with the non-inverting input end of the operational amplifier;
a resistor R3 is connected in series between the non-inverting input end and the output end of the operational amplifier, the inverting input end of the operational amplifier is connected with one end of a resistor R4, and the other end of the resistor R4 is connected with GND;
the output end of the operational amplifier is connected with one end of a resistor R6, and the other end of a resistor R6 is connected with one end of a capacitor C4 and one end of a resistor R7; the other end of the capacitor C4 is connected with the other end of the resistor R2, and the other end of the resistor R7 is connected with the input end of the COMS inverter U2A.
2. The excitation circuit for a quartz resonant accelerometer of claim 1, further comprising: a capacitance C2;
the output end of the COMS inverter U1A is connected with one end of a capacitor C2, and the other end of the capacitor C2 is connected with GND.
3. The excitation circuit for a quartz resonant accelerometer of claim 1, further comprising: a capacitance C3;
the output end of the COMS inverter U2A is connected with a capacitor C3, and the other end of the capacitor C3 is connected with GND.
4. The excitation circuit for a quartz resonant accelerometer of claim 1, wherein the COMS inverter U1A and the COMS inverter U2A are HEF4069UB chips.
5. The excitation circuit for a quartz resonant accelerometer of claim 1, wherein the operational amplifier is an LM358 chip.
6. The excitation circuit for a quartz resonant accelerometer of claim 1, further comprising: a cmos inverter U3A;
the output of the operational amplifier is connected to the input of the cmos inverter U3A.
7. The excitation circuit for a quartz resonant accelerometer of claim 1, wherein the output signal is a square wave signal.
8. The excitation circuit for a quartz resonant accelerometer of claim 1, wherein the output signal is up to 10-5An order of magnitude.
9. The excitation circuit for the quartz resonant accelerometer of claim 1, wherein the excitation circuit is connected to the quartz vibrating beam, and the variation of the output signal is less than 0.1 Hz.
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