CN110986908A - 椭圆谐振模态压电式mems圆环陀螺仪 - Google Patents
椭圆谐振模态压电式mems圆环陀螺仪 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111536994A (zh) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | 一种谐振式微陀螺多模态协同控制方法、系统及谐振式微陀螺 |
CN112629514A (zh) * | 2021-02-24 | 2021-04-09 | 中北大学 | 一种具有多曲面融合回转体结构的壳体振动陀螺谐振子 |
CN113639735A (zh) * | 2021-08-30 | 2021-11-12 | 武汉大学 | 恒温控制mems陀螺仪 |
Citations (13)
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CN110160514A (zh) * | 2019-05-31 | 2019-08-23 | 东南大学 | 一种硅mems陀螺仪多回路数字化闭环控制装置 |
CN110289823A (zh) * | 2019-05-31 | 2019-09-27 | 武汉大学 | 一种微机械谐振器 |
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2019
- 2019-12-16 CN CN201911296057.XA patent/CN110986908B/zh active Active
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US20070097375A1 (en) * | 2005-11-02 | 2007-05-03 | Honeywell International, Inc. | Transmission mode RFOG and method for detecting rotation with RFOG |
US20080079947A1 (en) * | 2006-09-29 | 2008-04-03 | Honeywell International, Inc. | Optical resonator gyro and method for reducing resonance asymmetry errors |
CN201772882U (zh) * | 2010-07-06 | 2011-03-23 | 北京自动化控制设备研究所 | 一种用于光纤陀螺仪的隔热装置 |
CN104079263A (zh) * | 2013-03-29 | 2014-10-01 | 精工爱普生株式会社 | 振动元件、振子、振荡器、电子设备、传感器以及移动体 |
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CN105043369A (zh) * | 2015-05-29 | 2015-11-11 | 上海交通大学 | 一种外缘固定式激光加工压电驱动多环陀螺及其制备方法 |
CN105737811A (zh) * | 2016-04-19 | 2016-07-06 | 西安交通大学 | 一种谐振式mems全量程倾角传感器 |
CN109798886A (zh) * | 2017-11-16 | 2019-05-24 | 上海矽睿科技有限公司 | 一种陀螺仪结构 |
CN108007449A (zh) * | 2017-12-06 | 2018-05-08 | 中国人民解放军国防科技大学 | 带周期分布柔性子系统的嵌套环式mems振动陀螺 |
CN108731661A (zh) * | 2018-05-04 | 2018-11-02 | 北京航天控制仪器研究所 | 一种用于微型核磁共振陀螺仪的气室加热集成单元结构 |
CN109931959A (zh) * | 2019-03-27 | 2019-06-25 | 河海大学常州校区 | 硅微陀螺仪正交误差校正方法 |
CN110160514A (zh) * | 2019-05-31 | 2019-08-23 | 东南大学 | 一种硅mems陀螺仪多回路数字化闭环控制装置 |
CN110289823A (zh) * | 2019-05-31 | 2019-09-27 | 武汉大学 | 一种微机械谐振器 |
Non-Patent Citations (4)
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GORELICK, S.等: ""Piezoelectrically actuated linear resonators on ring-shaped suspensions for applications in MEMS phase-sensitive gyroscope"", 《28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS)》 * |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111536994A (zh) * | 2020-04-29 | 2020-08-14 | 中国人民解放军国防科技大学 | 一种谐振式微陀螺多模态协同控制方法、系统及谐振式微陀螺 |
CN111536994B (zh) * | 2020-04-29 | 2021-09-24 | 中国人民解放军国防科技大学 | 一种谐振式微陀螺多模态协同控制方法、系统及谐振式微陀螺 |
CN112629514A (zh) * | 2021-02-24 | 2021-04-09 | 中北大学 | 一种具有多曲面融合回转体结构的壳体振动陀螺谐振子 |
CN113639735A (zh) * | 2021-08-30 | 2021-11-12 | 武汉大学 | 恒温控制mems陀螺仪 |
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