CN110986614A - High-efficiency vacuum condenser - Google Patents
High-efficiency vacuum condenser Download PDFInfo
- Publication number
- CN110986614A CN110986614A CN201911073795.8A CN201911073795A CN110986614A CN 110986614 A CN110986614 A CN 110986614A CN 201911073795 A CN201911073795 A CN 201911073795A CN 110986614 A CN110986614 A CN 110986614A
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- China
- Prior art keywords
- water
- retaining member
- retaining
- tank body
- tank
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B3/00—Condensers in which the steam or vapour comes into direct contact with the cooling medium
- F28B3/04—Condensers in which the steam or vapour comes into direct contact with the cooling medium by injecting cooling liquid into the steam or vapour
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B9/00—Auxiliary systems, arrangements, or devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B9/00—Auxiliary systems, arrangements, or devices
- F28B9/04—Auxiliary systems, arrangements, or devices for feeding, collecting, and storing cooling water or other cooling liquid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/005—Other auxiliary members within casings, e.g. internal filling means or sealing means
Abstract
The invention relates to a condenser, in particular to a high-efficiency vacuum condenser, which comprises a tank body (1), wherein a vacuumizing port (6) butted with a vacuumizing tube is arranged at the upper part of the tank body (1), a drainage recovery port (3) butted with a drainage pipe is arranged at the bottom of the tank body (1), a water inlet (4) butted with a water inlet pipe is arranged at the upper part of the tank body (1), an air inlet (5) butted with equipment needing vacuumizing is arranged at the lower part of the tank body (1), a heat exchange water-vapor separation structure (5) which is convenient for fully exchanging water vapor and separating water vapor is arranged in the tank body (1), and a water retaining structure (2) capable of preventing water in the tank body from being pumped out from the vacuumizing port (6) is arranged in the tank body (1) and below the vacuumizing port (6). The present case has heat exchange efficiency height, can reach effectively and save the efficiency.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to a high-efficiency vacuum condenser.
[ background of the invention ]
The vacuum condenser is widely applied to the manufacturing industry, and the configuration of the system of the vacuum condenser relates to energy conservation, consumption reduction and environmental protection of enterprises.
The traditional vacuum condenser is generally characterized in that gas passes through the exchange winding pipe, and then low-temperature water passes through the exchange winding pipe, so that heat is exchanged, and the purpose of cooling the vacuum gas is achieved.
However, this heat exchange method keeps the air and water isolated, and the heat exchange efficiency is always limited, and the best effect is not achieved. The scheme is designed for solving the problem.
[ summary of the invention ]
One of the purposes of the invention is to overcome the defects of the prior art and provide a high-efficiency vacuum condenser with high heat exchange efficiency, ingenious structure and good energy-saving effect.
Aiming at the purposes, the invention adopts the following technical scheme:
the utility model provides a high-efficient vacuum condenser, its characterized in that includes a jar body 1, be equipped with the evacuation mouth 6 with the butt joint of evacuation pipe on the upper portion of jar body 1, be equipped with the drainage recovery mouth 3 with the drain pipe butt joint bottom of jar body 1, be equipped with the water inlet 4 with the inlet tube butt joint on the upper portion of jar body 1, be equipped with the air inlet 5 with the butt joint of needs evacuation equipment in the lower part of jar body 1, be equipped with the heat exchange steam separation structure 5 that the steam heat exchange of being convenient for is abundant and make steam separation in jar body 1 inside, be equipped with the manger plate structure 2 that can prevent that the internal water of jar from taking out from evacuation mouth 6 in jar body below evacuation mouth.
As above, the water retaining structure 2 comprises a first water retaining member 21 arranged on one side of the upper part of the tank body and a second water retaining member 22 arranged on the other side of the upper part of the tank body opposite to the first water retaining member, the first water retaining member 21 and the second water retaining member 22 are arranged between the lower part of the vacuumizing hole 6 and the upper part of the water inlet 4; and the first water retaining pieces 21 and the second water retaining pieces 22 are arranged in a staggered manner, and the orthographic projections of the first water retaining pieces 21 and the second water retaining pieces 22 can cover the vacuumizing hole 6.
As described above, the tank body 1 is cylindrical, the first water blocking member 21 and the second water blocking member 22 are formed in arc shapes, and the arcs of the first water blocking member 21 and the second water blocking member 22 are major arcs.
As mentioned above, the first water retaining member 21 and the second water retaining member 22 are both composed of one or more water retaining plates, and the first water retaining member 21 and the second water retaining member 22 are arranged in a vertically staggered manner.
As above, the water inlet branch pipe 41 connected with the water inlet 4 is arranged in the tank body 1, the water inlet branch pipe 41 is connected with two water spray pipes 42 with downward openings, the two water spray pipes 42 are arranged on two opposite sides in the tank body 1, and the water outlets of the two water spray pipes 42 face the heat exchange water vapor separation structure 5.
As described above, the heat exchange water-vapor separation structure 5 includes at least one set of first-stage separation layers 51 and second-stage separation layers 52 arranged in the tank 1 in a staggered manner from top to bottom; the water from the two spargers 42 is injected into the primary separation layer 51 and the overflow falls onto the secondary separation layer 52.
As mentioned above, the primary separating layer 51 comprises two primary separating plates 51 connected to two opposite sides of the inner wall of the tank 1, the primary separating plates 51 comprise a water storing part 511 and a water retaining part 512, the water storing part 511 and the water retaining part 512 enclose the inner wall of the tank 1 to form a water storage cavity, and the water outlet of the water spraying pipe 42 is directed towards the water storage cavity to inject water into the water storage cavity.
As mentioned above, the secondary separation layer 52 is a secondary separation plate disposed at the middle part of the tank 1, and two side edges of the secondary separation plate are bent upwards to form a small baffle plate 521, so that water falls on the secondary separation plate to form a thin water storage layer.
As described above, the water-retaining portion 512 disposed at the uppermost one-stage separation layer 51 is higher in height than the water-retaining portion of the lower one-stage separation layer 51.
As described above, the high-efficiency vacuum condenser is characterized in that the number of the primary separation layers 51 is three, and the number of the secondary separation layers 52 is two.
The invention has the following beneficial effects:
first, the present case adopts evacuation gas direct and low temperature water phase contact for its gas and low temperature water direct contact, and heat exchange efficiency is high, can save the efficiency effectively.
Secondly, the present case adopts heat exchange steam separation structure, makes gas and low temperature water fully contact, and the heat exchange is abundant.
Thirdly, the present case water retaining structure for after gaseous and low temperature water fully contact, enable gaseous and water and separate well, solve this kind of aqueous vapor and directly mix, moisture content problem is taken away to gaseous.
Fourthly, the heat exchange water-vapor separation structure comprises at least one group of primary separation layers 51 and secondary separation layers 52 which are arranged in the tank body 1 in a staggered manner from top to bottom. So that the water and the gas can be fully contacted and heat exchange can be better carried out.
[ description of the drawings ]
Fig. 1 is a front view of the present invention.
Fig. 2 is a sectional view of fig. 1.
Fig. 3 is an exploded view of the present invention.
Fig. 4 is a perspective view of the present invention.
Fig. 5 is a schematic perspective view of the present invention installed in a factory.
[ detailed description ] embodiments
The invention is described in detail below with reference to the following figures and examples:
for the purpose of enhancing the understanding of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and embodiment examples. The invention can be implemented by:
as shown in the figure, the high-efficiency vacuum condenser comprises a tank body 1, wherein a vacuumizing port 6 in butt joint with a vacuumizing pipe is arranged at the upper part of the tank body 1, and the vacuumizing pipe of a vacuum pump is connected to the vacuumizing port 6. Further, the vertical height between the position where the vacuum pump is placed and the vacuum port 6 is generally 12 m or more. The bottom of the tank body 1 is provided with a drainage recovery port 3 butted with a drainage pipe, and the height between the drainage recovery port 3 and the ground is generally more than 10.5 meters. The upper part of the tank body 1 is provided with a water inlet 4 butted with the water inlet pipe, and the water inlet 4 is butted with a pump water pipe of the water pump. An air inlet 5 which is butted with equipment needing vacuum pumping is arranged at the lower part of the tank body 1, and pipelines of the equipment needing vacuum pumping can be connected to the air inlet 5. The tank body 1 is internally provided with a heat exchange water-vapor separation structure 5 which is convenient for water-vapor heat exchange to be sufficient and enables water-vapor separation.
The internal water inlet distributive pipe 41 that is connected with water inlet 4 that is equipped with of jar, water inlet distributive pipe 41 is connected with two opening spray pipes 42 down, is provided with two spray pipes 42, also is in order to reach better heat transfer effect. The two water spray pipes 42 are arranged at two opposite sides in the tank body 1, and the water outlets of the two water spray pipes 42 face the heat exchange water-vapor separation structure 5.
Specifically, the heat exchange water vapor separation structure 5 is crucial in this case, and specifically, the heat exchange water vapor separation structure 5 includes at least one set of primary separation layer 51 and secondary separation layer 52 arranged in the tank 1 in a staggered manner from top to bottom. The water from the two spargers 42 is injected into the primary separation layer 51 and the overflow falls onto the secondary separation layer 52. The primary separation layer 51 and the secondary separation layer 52 are alternately arranged, so that water continuously flows in the tank body 1 and the contact area with gas is increased as much as possible.
More specifically, the primary separating layer 51 comprises two primary separating plates 51 connected to two opposite sides of the inner wall of the tank 1, the primary separating plates 51 comprise a water storing part 511 and a water retaining part 512, and the water storing part 511 and the water retaining part 512 enclose the inner wall of the tank 1 to form a water storage cavity. The water outlet of the spray pipe 42 is directed towards the water storage cavity to inject water into the water storage cavity. This water storage chamber can be until preventing that the water that comes out from spray pipe 42 from flying the splash, and water falls into the water storage chamber after, slowly is full of manger plate 512, falls into on second grade separation layer 52 again, makes it to form a water cloth, forms water cloth benefit firstly in order to increase aqueous vapor area of contact, secondly prevents that gas from taking away most moisture. The water in the water storage cavities on the left side and the right side flows through the water retaining part 512 and falls into the secondary separation layer 52 together.
The secondary separation layer 52 is a secondary separation plate arranged in the middle of the tank body 1, and two side edges of the secondary separation plate are bent upwards to form a small baffle plate 521, so that water falls on the secondary separation plate to form a thin water storage layer. The water falling on the second-stage separation plate is received from the first-stage separation plate 51, and also falls on the first-stage separation layer 51 of the next group from both sides thereof.
The height of the water-retaining portion 512 disposed at the uppermost separation layer 51 is higher than that of the water-retaining portion of the lower separation layer 51. In this arrangement, since the water jet pipe 42 has a relatively large impact force against water, the water blocking portion 512 of the uppermost separation layer 51 is higher than the water blocking portion of the lower separation layer 51.
For better effect, there are three primary separation layers 51 and two secondary separation layers 52, so that heat between moisture can be sufficiently exchanged. Of course, the number of the primary separation layers 51 and the secondary separation layers 52 is not limited, and may be set according to the space inside the tank 1.
In addition, another key point of the scheme is that a water retaining structure 2 capable of preventing water in the tank body from being pumped out from the vacuum pumping port 6 is arranged below the vacuum pumping port 6 in the tank body 1, and the water retaining structure 2 is the key point of water-gas separation. Specifically, the water retaining structure 2 comprises a first water retaining member 21 arranged on one side of the upper part of the tank body and a second water retaining member 22 arranged on the other side of the upper part of the tank body opposite to the first water retaining member. The first water retaining member 21 and the second water retaining member 22 are disposed between the lower side of the vacuuming port 6 and the upper side of the water inlet 4. And the first water retaining pieces 21 and the second water retaining pieces 22 are arranged in a staggered manner, and the orthographic projections of the first water retaining pieces 21 and the second water retaining pieces 22 can cover the vacuumizing hole 6. Adopt crisscross setting to orthographic projection homoenergetic covers evacuation mouth 6, and the purpose makes following aqueous vapor mix and evacuation mouth 6 like this, not on same straight line, and when water smoke can not go out from evacuation mouth 6, must can be earlier with the surface contact of first retaining member 21, second retaining member 22, and that water smoke will stay on its surface after contacting with the surface of first retaining member 21, second retaining member 22, forms certain weight after, will drop down. In addition, the first water retaining member 21 and the second water retaining member 22 form a set, and a plurality of sets of such first water retaining member 21 and second water retaining member 22 may be provided in the tank body 1 as required. The first water retaining piece and the second water retaining piece are inclined downwards in the tank body. The water in the water mist is more difficult to bypass the first water retaining piece and the second water retaining piece, and finally the water stays on the surfaces of the first water retaining piece and the second water retaining piece.
Preferably, the tank body 1 is cylindrical, the first water blocking member 21 and the second water blocking member 22 are circular arcs, and arcs of the first water blocking member 21 and the second water blocking member 22 are major arcs. The major arc is adopted, so that the two water retaining members, namely the first water retaining member 21 and the second water retaining member 22, are partially overlapped, and the gas does not form a straight line from the tank body 1 to the vacuum pumping port 6 but needs to go around a curve. Preferably, the first water retaining member 21 and the second water retaining member 22 are both composed of one or more water retaining plates, and the first water retaining member 21 and the second water retaining member 22 are arranged in a staggered manner. The first water retaining member 21 and the second water retaining member 22 can be made of new water material or coated with new water layer, which is more effective.
The working process is as follows: the vacuum pump action, the water pump also moves simultaneously, and the water of water pump gets into from the water inlet to fall into the water storage chamber through the distributive pipe that intakes, after the water storage chamber is full of water, form the water cloth and fall to the second grade separation layer, fall to the one-level separation layer of next group again after the second grade separation layer is full of water, finally fall to jar body bottom, retrieve mouthful outflow and retrieve the circulation from the drainage. And the gas pumped by the vacuum pump enters from the gas inlet, the gas entering from the lower part of the tank body moves upwards, and in the process of moving upwards, the gas cannot move upwards linearly under the action of the primary separation layer 51 and the secondary separation layer 52, but flows back and forth continuously between the primary separation layer 51 and the secondary separation layer 52. In this case, the gas is turned back at least 6 times, and the gas flows out from the heat exchange water-vapor separation structure, and in the process, the gas and the water are fully heat exchanged. Then, the gas comes to the water retaining structure again, and the water-gas separation is realized at the water retaining structure, and the heat exchange between the water and the gas is also carried out.
Finally, it should be noted that: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (10)
1. The utility model provides a high-efficient vacuum condenser, its characterized in that is including a jar body (1), be equipped with on the upper portion of jar body (1) with evacuation mouth (6) of evacuation pipe butt joint, be equipped with drainage recovery mouth (3) with the drain pipe butt joint in the bottom of jar body (1), be equipped with on the upper portion of jar body (1) with water inlet pipe butt joint water inlet (4), be equipped with air inlet (5) with the butt joint of needs evacuation equipment in the lower part of jar body (1), be equipped with heat exchange steam separation structure (5) that the steam heat exchange of being convenient for is abundant and make steam separation in jar body (1) inside, evacuation mouth (6) below is equipped with can prevent that the water in the jar body from evacuation mouth (6) manger plate structure (2) of taking out.
2. The high-efficiency vacuum condenser as claimed in claim 1, wherein the water retaining structure (2) comprises a first water retaining member (21) disposed on one side of the upper portion of the tank and a second water retaining member (22) disposed on the other side of the upper portion of the tank opposite to the first water retaining member, the first water retaining member (21) and the second water retaining member (22) are disposed between the lower portion of the vacuum pumping port (6) and the upper portion of the water inlet port (4); and the first water retaining pieces (21) and the second water retaining pieces (22) are arranged in a staggered mode, and the orthographic projections of the first water retaining pieces (21) and the second water retaining pieces (22) can cover the vacuumizing port (6).
3. The condenser according to claim 2, wherein the tank (1) is cylindrical, the first water-retaining member (21) and the second water-retaining member (22) are circular arcs, and the arcs of the first water-retaining member (21) and the second water-retaining member (22) are major arcs.
4. The condenser according to claim 2, wherein the first water-retaining member (21) and the second water-retaining member (22) are both composed of one or more water-retaining plates, and the first water-retaining member (21) and the second water-retaining member (22) are arranged in a staggered manner from top to bottom; the first water retaining piece and the second water retaining piece are inclined downwards in the tank body.
5. The high-efficiency vacuum condenser as claimed in claim 1, 2 or 3, wherein a water inlet branch pipe (41) connected with the water inlet (4) is arranged in the tank body (1), the water inlet branch pipe (41) is connected with two water spray pipes (42) with downward openings, the two water spray pipes (42) are arranged on two opposite sides in the tank body (1), and the water outlets of the two water spray pipes (42) face the heat exchange water-vapor separation structure (5).
6. The high-efficiency vacuum condenser as claimed in claim 5, wherein the heat exchange water-vapor separation structure (5) comprises at least one set of primary separation layer (51) and secondary separation layer (52) which are staggered from top to bottom in the tank body (1); the water from the two water jets (42) is injected into the primary separation layer (51) and the overflow falls onto the secondary separation layer (52).
7. The condenser of claim 6, wherein the primary separating layer (51) comprises two primary separating plates (51) connected to two opposite sides of the inner wall of the tank (1), the primary separating plates (51) comprise a water storing portion (511) and a water blocking portion (512), the water storing portion (511) and the water blocking portion (512) and the inner wall of the tank (1) enclose to form a water storage chamber, and the water outlet of the water spray pipe (42) is directed to the water storage chamber to inject water into the water storage chamber.
8. The condenser according to claim 7, wherein the secondary separation layer (52) is a secondary separation plate disposed at the middle part of the tank (1), and two sides of the secondary separation plate are bent upward to form a small baffle (521), so that the water falls to the secondary separation plate to form a thin water storage layer.
9. A high efficiency vacuum condenser as claimed in claim 6, wherein the water-retaining portion (512) of the uppermost separation layer (51) is higher than the water-retaining portion of the lower separation layer (51).
10. A high efficiency vacuum condenser as claimed in claim 6, wherein there are three primary separation layers (51) and two secondary separation layers (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911073795.8A CN110986614A (en) | 2019-11-06 | 2019-11-06 | High-efficiency vacuum condenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911073795.8A CN110986614A (en) | 2019-11-06 | 2019-11-06 | High-efficiency vacuum condenser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110986614A true CN110986614A (en) | 2020-04-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911073795.8A Pending CN110986614A (en) | 2019-11-06 | 2019-11-06 | High-efficiency vacuum condenser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110986614A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB869638A (en) * | 1957-12-23 | 1961-06-07 | Fluor Corp | Improved cooling tower moisture detraining apparatus |
| US4968336A (en) * | 1989-05-16 | 1990-11-06 | Nec Electronics Incorporated | Plasma etch vaporous exhaust collection system |
| CN2331855Y (en) * | 1998-04-26 | 1999-08-04 | 关云彪 | Smoke prevention and dust control apparatus with flush water-bed circulation water curtain |
| CN102895788A (en) * | 2012-10-31 | 2013-01-30 | 南通海发水处理工程有限公司 | Rising-film separation evaporator |
| CN202962145U (en) * | 2013-01-12 | 2013-06-05 | 山东白石新材料股份有限公司 | Carbon dioxide filtering device |
| CN205482426U (en) * | 2016-03-17 | 2016-08-17 | 惠州景华包装制品有限公司 | Vacuum condensing tower |
| CN206206114U (en) * | 2016-08-31 | 2017-05-31 | 湖北省神珑泵业有限责任公司 | A kind of vavuum pump stabilized voltage device |
| CN206513361U (en) * | 2017-03-01 | 2017-09-22 | 崔嘉成 | Oil well casing air separation |
| CN207722554U (en) * | 2017-12-27 | 2018-08-14 | 河北华阳生物科技有限公司 | A kind of steam-water separator |
| CN209588747U (en) * | 2019-02-27 | 2019-11-05 | 陕西金堆金能源科技有限公司 | A kind of steam turbine drainage recovering device |
-
2019
- 2019-11-06 CN CN201911073795.8A patent/CN110986614A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB869638A (en) * | 1957-12-23 | 1961-06-07 | Fluor Corp | Improved cooling tower moisture detraining apparatus |
| US4968336A (en) * | 1989-05-16 | 1990-11-06 | Nec Electronics Incorporated | Plasma etch vaporous exhaust collection system |
| CN2331855Y (en) * | 1998-04-26 | 1999-08-04 | 关云彪 | Smoke prevention and dust control apparatus with flush water-bed circulation water curtain |
| CN102895788A (en) * | 2012-10-31 | 2013-01-30 | 南通海发水处理工程有限公司 | Rising-film separation evaporator |
| CN202962145U (en) * | 2013-01-12 | 2013-06-05 | 山东白石新材料股份有限公司 | Carbon dioxide filtering device |
| CN205482426U (en) * | 2016-03-17 | 2016-08-17 | 惠州景华包装制品有限公司 | Vacuum condensing tower |
| CN206206114U (en) * | 2016-08-31 | 2017-05-31 | 湖北省神珑泵业有限责任公司 | A kind of vavuum pump stabilized voltage device |
| CN206513361U (en) * | 2017-03-01 | 2017-09-22 | 崔嘉成 | Oil well casing air separation |
| CN207722554U (en) * | 2017-12-27 | 2018-08-14 | 河北华阳生物科技有限公司 | A kind of steam-water separator |
| CN209588747U (en) * | 2019-02-27 | 2019-11-05 | 陕西金堆金能源科技有限公司 | A kind of steam turbine drainage recovering device |
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Application publication date: 20200410 |