CN110967782A - High-quality Bessel beam lens - Google Patents
High-quality Bessel beam lens Download PDFInfo
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- CN110967782A CN110967782A CN202010004193.3A CN202010004193A CN110967782A CN 110967782 A CN110967782 A CN 110967782A CN 202010004193 A CN202010004193 A CN 202010004193A CN 110967782 A CN110967782 A CN 110967782A
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- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000009826 distribution Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 210000003050 axon Anatomy 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
Abstract
The invention discloses a high-quality Bessel beam lens, which comprises a conical lens with a cambered surface at the top, wherein the surface area of the conical lens comprises a bottom plane, a side curved surface and a conical top curved surface, and the bottom plane is the bottom surface of the conical lens and is an incident surface on which laser is incident on the conical lens; the side curved surface is the side surface of the conical lens and is an emergent surface of the laser ray on the conical lens; the cone top curved surface is located the cone lens apex angle region, and the high anti-rete of having plated in the cone top curved surface outside. The technical scheme of the invention is that the coating film is controlled to control the energy distribution of the emergent laser on the conical lens in the manufacturing process of the conical lens, thereby eliminating the influence of the vertex angle of the conical lens, reducing the Bessel light energy fluctuation, having no diffraction influence when the diaphragm is introduced, and being convenient to process and use.
Description
Technical Field
The invention relates to the technical field of laser processing lenses, in particular to a high-quality Bessel beam lens.
Background
At present, the application of cutting brittle materials such as glass, sapphire and the like by using the Bessel beam is wider and wider, the corresponding processing effect requirement is higher and higher, and the processing effect is directly related to the quality of the Bessel beam. The cone lens can generate approximate Bessel beams in a certain range, has higher diffraction efficiency, is an ideal device for generating the Bessel beams to perform laser processing, but because the cone angle position of the cone lens is an arc angle due to manufacturing errors, the energy consistency of the Bessel beams can be influenced by the arc angle, the processing effect is influenced, and a method which can effectively eliminate the influence of the defect of the top angle and is convenient to use is found to have practical value.
The bessel beams are generated by using a cone lens, an ideal cone lens is shown in fig. 1, and two directional wave fronts formed after parallel beams pass through are respectively parallel to the cone surface. The Bezier light beam is generated in the direction of the optical axis, the intensity curve of the light intensity along the transmission direction is smooth, and the light intensity can be considered as the ideal Bezier light beam with constant intensity along the transmission direction within a certain distance. The ideal axicon lens apex angle is the edges and corners, but axicon lens apex angle is great, is generally greater than 150, because manufacturing process limits, the axicon lens apex angle of actually processing out is the arc, and light through this arc point can interfere with the Bessel light that produces through other positions, produces intensity modulation to Bessel light beam, and the intensity change is no longer gentle on making the axial direction, but has certain shake.
Fig. 2 shows a cone lens with processing defects, in which after parallel light passes through the cone lens, an arc-shaped curved surface near the center of the cone lens converges a gaussian beam incident at a focal portion to make the gaussian beam closer to an optical axis, and a convergent near-spherical wave is formed behind an axon, so that an axial beam passing through the position is modulated, and thus, an intensity curve of a bessel beam is not smooth any more, but has a certain jitter, and the bessel beam is not an ideal bessel beam any more within a certain distance. In practical laser processing application, laser is in Gaussian distribution, the central incident energy is high, and axial intensity fluctuation is more obvious.
The existing solution is to add a diaphragm, but the diaphragm has the following defects: 1. the diaphragm needs to be matched with the arc size of the sharp corner, the size is small, and the manufacturing and assembling difficulty is high; 2. the introduction of the diaphragm can cause diffraction phenomena.
Disclosure of Invention
The invention aims to provide a high-quality Bessel beam lens which is scientific and reasonable in structure and can form an approximate ideal Bessel beam.
The invention is realized by the following technical scheme in order to achieve the purpose:
a high-quality Bessel beam lens comprises a conical lens with a cambered surface at the top, wherein the surface area of the conical lens comprises a bottom plane, a side curved surface and a conical top curved surface, the bottom plane is the bottom surface of the conical lens and is an incident surface of laser incident on the conical lens, the side curved surface is the side surface of the conical lens and is an emergent surface of laser rays on the conical lens, the conical top curved surface is positioned in the conical lens vertex angle area, a high-reflection film layer is plated on the outer side of the conical top curved surface, the thickness d of the high-reflection film layer is lambda/2 n cos α,
wherein λ is the wavelength of incident light, n is the film refractive index of the highly reflective film layer, α is the incident angle of light on the highly reflective film layer, and the incident angle is the angle between the incident light and the normal of the incident surface of the highly reflective film layer.
The scheme is further improved, the high-reflection film layer comprises N layers of dielectric high-reflection films, N is a natural number not less than 1, and the thickness d of the x-th layer of dielectric high-reflection filmxIs composed of
dx＝λ/2*nx*cosαx，
Wherein x is more than or equal to 1 and less than or equal to N, x is a natural number, lambda is the wavelength of incident light, and NxFilm layer refractive index of the x-th dielectric high-reflection film, αxHigh reflection for light in the x-th layer dielectricThe incident angle on the film is the included angle between the incident light and the normal of the incident surface of each dielectric high reflection film, and the thickness of the high reflection film layer 14 is the sum of the thicknesses of the N layers of dielectric high reflection film layers.
The scheme is further improved, and the side curved surface is plated with a first high-transmittance film layer.
The scheme is further improved, and the bottom plane and the side curved surface are not coated with films.
The scheme is further improved, and the bottom plane is plated with a second high-transmittance film layer.
The further improvement of the scheme also comprises a cylindrical lens, wherein the two ends of the cylindrical lens are respectively a first end surface and a second end surface, the first end surface and the bottom plane of the conical lens are integrated, and the second end surface is an incident surface of the laser ray on the cylindrical lens.
The scheme is further improved, and the second end face is plated with a third high-transmittance film layer.
In a further improvement of the above scheme, the second end surface is not coated with a film.
The technical scheme of the invention is that the coating film is controlled to control the energy distribution of the emergent laser on the conical lens in the manufacturing process of the conical lens, thereby eliminating the influence of the vertex angle of the conical lens, reducing the Bessel light energy fluctuation, having no diffraction influence when the diaphragm is introduced, and being convenient to process and use.
The cone lens can be selectively coated with an infrared and green light high-transmittance film or not coated with a film according to the wavelength of laser used in processing when in selection, the incident surface and the emergent surface of the cone lens are uniform and consistent in high transmittance, in order to eliminate the influence caused by the processing defect of the cone lens vertex angle, the light energy near the vertex angle needs to be reduced as much as possible, but the light energy near the vertex angle is strongest due to the Gaussian distribution of incident light, and the light energy near the cone top curved surface at the vertex angle of the cone lens is reduced by controlling the coating mode without influencing the light transmission of other parts. The incident bottom plane part and the emergent side curved surface part are plated with high-transmittance films or are not plated with films, the film thickness of each layer of the cone top curved surface multilayer dielectric high-reflection film is controlled by changing the film plating condition of the cone top curved surface part at the vertex angle of the cone lens, the optical path difference is enabled to be lambda/2, and the purpose of destructive transmission interference is achieved. The laser is reflected at the position of the conical top curved surface, and the light rays at other positions are transmitted, so that the laser is coherently superposed at the optical axis to generate a Bessel light beam, and the Bessel light eliminates intensity modulation caused by the irregular vertex angle of the conical lens. And because there is certain angle of incidence in the curved surface position of the conical top, the reflected light can be dispersed, will not return on the same way, thus guarantee the laser will not receive the reflection influence.
Drawings
FIG. 1 is a schematic diagram of the light beam incident of an ideal axicon lens;
FIG. 2 is an axicon lens with processing defects;
FIG. 3 is a schematic view of an axicon structure of the present invention;
FIG. 4 is a schematic diagram of the beam incident condition of the axicon lens of the present invention;
FIG. 5 is a schematic view of an axicon lens structure of embodiment 2 of the invention;
FIG. 6 is a schematic view of an axicon lens structure according to embodiment 3 of the present invention;
FIG. 7 is a schematic view of an axicon lens structure of embodiment 4 of the invention;
fig. 8 is a schematic view of an axicon lens structure in embodiment 5 of the invention.
In the figure, 1, an axicon; 11. a bottom plane; 12. a side curved surface; 13. a cone top curved surface; 14. a high reflective film layer; 15. a first high-permeability film layer; 16. a second high-permeability film layer; 2. a cylindrical lens; 21. a first end face; 22. a second end face; 23. and a third high-permeability film layer.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 3, in embodiment 1, a high quality bessel beam lens of the present invention, a conical axicon lens 1, a surface of the axicon lens 1 includes a bottom plane 11, a side curved surface 12 and a conical top curved surface 13, the bottom plane 1 is a bottom surface of the axicon lens and is an incident surface on the laser incident axicon lens 1, the side curved surface 2 is a side surface of the axicon lens 1 and is an emergent surface of laser light on the axicon lens 1, the conical top curved surface 13 is located in a top corner region of the axicon lens 1, the conical top curved surface 13 and the side curved surface 2 are in smooth transition, a high reflective film layer 14 is plated on an outer side of the conical top curved surface 13, a thickness d of the high reflective film layer 14 is λ/2 n cos α,
wherein λ is the wavelength of the incident light, n is the refractive index of the highly reflective film layer, α is the incident angle of the light on the highly reflective film layer, the incident angle is the angle between the incident light and the normal of the incident surface of the highly reflective film layer 14, and the thickness of the highly reflective film layer 14 is gradually decreased from the center to both sides.
In another embodiment, the high-reflection film layer 14 comprises N layers of dielectric high-reflection films, N is a natural number greater than or equal to 1, and the thickness d of the x-th layer of dielectric high-reflection filmxIs composed of
dx＝λ/2*nx*cosαx，
Wherein x is more than or equal to 1 and less than or equal to N, x is a natural number, lambda is the wavelength of incident light, and NxFilm layer refractive index of the x-th dielectric high-reflection film, αxThe incident angle of the light ray on the x-th dielectric high-reflection film is the included angle between the incident light ray and the normal of the incident surface of each dielectric high-reflection film. The thickness of the high-reflection film layer 14 is the sum of the thicknesses of the N dielectric high-reflection film layers.
Fig. 4 shows the situation of the light of the laser passing through the axicon lens in fig. 3, the light passes through the side curved surface 12 and is coherently superposed on the optical axis to form an approximate ideal bessel beam, the light at the vertex curved surface 13 is reflected, and a certain angle exists between the reflection and the incident direction, so that the influence of the reflected light on the laser is avoided.
As shown in fig. 5, in embodiment 2 of the present invention, a first high-permeability film layer 15 is coated on the side curved surface based on the structure of embodiment 1. As shown in fig. 6, embodiment 3 is further improved on the basis of embodiment 1 or 2, and the bottom plane 11 is plated with a second high-permeability film layer 16.
As shown in fig. 7, embodiment 4 is a further improvement on embodiments 1 to 3, the lens of the present invention further includes a cylindrical lens 2, two ends of the cylindrical lens 2 are respectively a first end face 21 and a second end face 22, the first end face 21 is integrally connected with the bottom plane 11 of the axicon lens 1, the second end face 22 is an incident face of the laser beam on the cylindrical lens 2, and the second end face 22 is not coated. As shown in fig. 8, in embodiment 5, on the basis of embodiment 4, further, the second end face 22 is plated with a third high-permeability film layer 23.
The invention inhibits the manufacturing defect by changing the film coating condition of the lens 1, wherein the conical top curved surface 13 of the conical lens is the arc angle position of the conical lens, the position is coated with a high reflection film, and the positions of the bottom plane 11 and the side curved surface 12 are coated with a high transmission film or are not coated with a film. Plating a multi-layer dielectric high-reflection film at the position of the conical top curved surface 13, wherein n isxAnd dxRefractive index and thickness of the film layer, α respectivelyxThickness d of each film layer for the incident angle of each film layerxNeed to satisfy the optical path difference of 2nx*dx*cosαxλ. As can be seen from the formula, the film thickness of the high-reflection film layer 14 varies according to the variation of the incident angle, and the specific thickness thereof can be obtained according to the formula.
The embodiments of the present invention are merely illustrative and not restrictive, and those skilled in the art can modify the embodiments without inventive contribution as required after reading the present specification, but the present invention is protected by patent law within the scope of the appended claims.
Claims (8)
1. A high-quality Bessel beam lens is characterized by comprising a conical lens (1) with a cambered top, wherein the surface area of the conical lens comprises a bottom plane (11), a side curved surface (12) and a conical top curved surface (13), the bottom plane is the bottom surface of the conical lens and is used as an incident surface for laser to be incident on the conical lens, the side curved surface is the side surface of the conical lens and is an emergent surface of laser rays on the conical lens, the conical top curved surface is positioned in the conical lens vertex angle area, a high reflection film layer (14) is plated on the outer side of the conical top curved surface, the thickness d of the high reflection film layer is lambda/2 n cos α,
wherein λ is the wavelength of incident light, n is the refractive index of the film layer of the highly reflective film layer, α is the incident angle of light on the highly reflective film layer, and the incident angle is the angle between the incident light and the normal of the incident surface of the highly reflective film layer.
2. The high quality bessel beam lens of claim 1 wherein the high reflection film layer comprises N dielectric high reflection films, N beingNatural number more than or equal to 1, thickness d of x-th dielectric high-reflective filmxIs composed of
dx＝λ/2*nx*cosαx，
Wherein x is more than or equal to 1 and less than or equal to N, x is a natural number, lambda is the wavelength of incident light, and NxFilm layer refractive index of the x-th dielectric high-reflection film, αxThe incident angle of the light on the x-th dielectric high-reflection film is the included angle between the incident light and the normal of the incident surface of each dielectric high-reflection film, and the thickness of the high-reflection film layer 14 is the sum of the thicknesses of the N dielectric high-reflection film layers.
3. The high quality bessel beam lens according to claim 1, characterized in that the side curved surfaces are coated with a first high transmission film layer (15).
4. The high quality bessel beam lens of claim 1 wherein the base plane and the side curved surfaces are uncoated.
5. The high quality bessel beam lens according to claim 1, characterised in that the base plane is coated with a second high transmission film layer (16).
6. A high quality Bessel beam lens according to any one of claims 1 to 4, further comprising a cylindrical lens (2) having a first end surface (21) and a second end surface (22) at both ends, the first end surface being integrally connected to the bottom plane of the axicon lens, and the second end surface being an incident surface of the laser beam on the cylindrical lens.
7. The high quality bessel beam lens according to claim 6, characterised in that the second end face is coated with a third high transmission film layer (23).
8. The high quality bessel beam lens of claim 6 wherein the second end face is uncoated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010004193.3A CN110967782A (en) | 2020-01-03 | 2020-01-03 | High-quality Bessel beam lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010004193.3A CN110967782A (en) | 2020-01-03 | 2020-01-03 | High-quality Bessel beam lens |
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| CN110967782A true CN110967782A (en) | 2020-04-07 |
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| CN202010004193.3A Pending CN110967782A (en) | 2020-01-03 | 2020-01-03 | High-quality Bessel beam lens |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113296175A (en) * | 2021-05-25 | 2021-08-24 | 北京理工大学 | Method for processing micro-lens array with multiple numerical apertures |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160061763A (en) * | 2014-11-24 | 2016-06-01 | 주식회사 필옵틱스 | Optical apparus using bessel beam and cutting apparatus thereof |
| CN205720742U (en) * | 2016-02-26 | 2016-11-23 | 上海嘉强自动化技术有限公司 | A kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens |
| KR20170019855A (en) * | 2015-08-13 | 2017-02-22 | 한국기계연구원 | Multi-Angle Axicon Lens for Increased Laser Processing Efficiency of Bessel Beam |
| CN109839683A (en) * | 2017-11-26 | 2019-06-04 | 成都中源红科技有限公司 | A kind of non-diffraction Bessel beam non-spherical lens |
| CN211478691U (en) * | 2020-01-03 | 2020-09-11 | 北京卓镭激光技术有限公司 | High-quality Bessel beam lens |
-
2020
- 2020-01-03 CN CN202010004193.3A patent/CN110967782A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160061763A (en) * | 2014-11-24 | 2016-06-01 | 주식회사 필옵틱스 | Optical apparus using bessel beam and cutting apparatus thereof |
| KR20170019855A (en) * | 2015-08-13 | 2017-02-22 | 한국기계연구원 | Multi-Angle Axicon Lens for Increased Laser Processing Efficiency of Bessel Beam |
| CN205720742U (en) * | 2016-02-26 | 2016-11-23 | 上海嘉强自动化技术有限公司 | A kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens |
| CN109839683A (en) * | 2017-11-26 | 2019-06-04 | 成都中源红科技有限公司 | A kind of non-diffraction Bessel beam non-spherical lens |
| CN211478691U (en) * | 2020-01-03 | 2020-09-11 | 北京卓镭激光技术有限公司 | High-quality Bessel beam lens |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113296175A (en) * | 2021-05-25 | 2021-08-24 | 北京理工大学 | Method for processing micro-lens array with multiple numerical apertures |
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