CN110954578A - Humidity sensor and preparation method thereof, non-contact control screen and application - Google Patents
Humidity sensor and preparation method thereof, non-contact control screen and application Download PDFInfo
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- CN110954578A CN110954578A CN201911299655.2A CN201911299655A CN110954578A CN 110954578 A CN110954578 A CN 110954578A CN 201911299655 A CN201911299655 A CN 201911299655A CN 110954578 A CN110954578 A CN 110954578A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
- G06F21/31—User authentication
- G06F21/36—User authentication by graphic or iconic representation
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/017—Gesture based interaction, e.g. based on a set of recognized hand gestures
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/945—Proximity switches
Abstract
A humidity sensor and its preparation method, non-contact control screen and application, the preparation method of the humidity sensor includes preparing the interdigital electrode on the substrate; and preparing a humidity sensitive material on the substrate with the interdigital electrode to obtain the humidity sensor. Preparation of MoO adopted by the invention3The method for preparing the nano-sheet has the advantages of high yield, simple operation and extremely low cost; the non-contact control screen or control switch in the market at present mainly takes capacitance type or infrared sensing and mainly takes a rigid screen, but the invention firstly utilizes a humidity sensor with lower manufacturing cost and excellent performance and a flexible PET substrate to construct the transparent flexible non-contact control screen based on the humidity sensor array, thereby widening the application rangeThe application potential and the application range of the non-contact control screen are improved.
Description
Technical Field
The invention belongs to the technical field of preparation of flexible electronic devices, and particularly relates to a humidity sensor and a preparation method thereof, a non-contact control screen and application.
Background
As the human-computer interaction becomes more and more important and the interaction modes become more and more important along with the development of the internet, the development of various human-computer interaction modes is particularly important. As a human-computer interaction translator, the sensor can effectively convert signals sent by various human bodies into information which can be identified by a machine. Common man-machine interaction sensors often require a human body to come into direct physical contact with the sensor to generate a signal, such as a pressure sensor. Therefore, mechanical wear of the sensor is inevitably brought about or, in some applications, limited, such as toxic and harmful environments. Therefore, the non-contact sensor which does not need direct contact between a human and a machine can effectively compensate the defects. However, conventional non-contact sensors often require more complicated manufacturing processes and expensive manufacturing equipment, such as infrared sensors. Therefore, under the background of such research, a humidity sensor capable of effectively detecting the humidity of a fingertip can be used as a supplement to the existing sensor, namely, the humidity generated by the evaporation of sweat of a human fingertip is used as an information source as a human-computer interaction means. It has the advantages that: 1. the sensor can be controlled without direct physical contact with the sensor, so that the sensor can be used in special occasions, such as toxic and harmful environments or sensitive and dirtied environments, and meanwhile, the service life of the sensor can be prolonged due to no mechanical touch; 2. the humidity and the temperature of the fingertips can be combined, so that the specificity of the finger tip for detecting the human body signal is stronger than that of a pure pressure sensor; 3. the oxide is usually adopted, so that the preparation is cheap, easy to prepare and stable; 4. can effectively utilize metabolite sweat of a human body as an information source, is environment-friendly and energy-saving.
Due to the wearable, foldable and bendable characteristics, the flexible electronic device is considered to have great development potential in the fields of smart phones, medical detection and the like. There are very few flexible sensor arrays available on the market that can achieve non-contact sensing.
Disclosure of Invention
In view of the above, it is a primary objective of the present invention to provide a humidity sensor, a manufacturing method thereof, a non-contact control panel and an application thereof, so as to at least partially solve at least one of the above technical problems.
In order to achieve the above object, as one aspect of the present invention, there is provided a method of manufacturing a humidity sensor, including:
preparing interdigital electrodes on a substrate;
and preparing a humidity sensitive material on the substrate with the interdigital electrode to obtain the humidity sensor.
As another aspect of the invention, the invention also provides a humidity sensor which is obtained by adopting the preparation method.
As a further aspect of the present invention, there is also provided a non-contact control panel incorporating a humidity sensor as described above.
As a further aspect of the present invention, there is also provided the use of a humidity sensor as described above or a non-contact control screen as described above in the field of flexible electronics.
Based on the technical scheme, compared with the prior art, the humidity sensor and the preparation method, the non-contact control screen and the application thereof have at least one of the following advantages:
(1) preparation of MoO adopted by the invention3The method of (molybdenum trioxide) nanosheets has high yield (resulting MoO)3The mass ratio of the nano-sheet powder to the reaction precursor ammonium molybdate tetrahydrate is more than 80 percent), simple operation and extremely low cost;
(2) the humidity sensor prepared by the hydrothermal method has the advantages of high response speed (the response time is in the millisecond order) and high response on-off ratio (the relative humidity is 0-100%, the resistance of a device is reduced by 10%5Magnitude), the two properties are superior to most of materials reported in the literature, and MoO3The performance is stable, and the humidity response performance of the device is not obviously changed after the device is exposed in the air for more than 1 month;
(3)MoO3ITO (indium tin oxide) and PET (polyethylene terephthalate) have high transmittance for visible light, so MoO is used in the present invention3The nano-sheet is used as a humidity sensitive material, the ITO is used as an electrode, and the PET is used as a substrateThe prepared humidity sensor array has very high transmittance to visible light, and the transmittance of the array to the visible light is more than 80% through experimental determination, so that the humidity sensor array has the potential of being used as a non-contact control screen;
(4) the non-contact control screen or the control switch in the market at present mainly takes capacitance type or infrared sensing and mainly takes a rigid screen, but the transparent flexible non-contact control screen based on the humidity sensor array is constructed by utilizing the humidity sensor with lower manufacturing cost and excellent performance and the flexible PET substrate for the first time, so that the application potential and the application range of the non-contact control screen are expanded;
(5) the ITO electrode of the flexible intelligent non-contact control screen based on the ultrahigh sensitive humidity sensor array is connected with the lead, so that the information input and the mobile phone screen unlocking functions of the smart mobile phone can be realized.
Drawings
FIG. 1 is MoO in an embodiment of the present invention3An X-ray diffraction pattern of the nanoplates;
FIG. 2 is a schematic diagram of a flexible non-contact control screen, a schematic diagram of an ITO electrode structure and a real object diagram of the control screen in the embodiment of the invention;
FIG. 3 is a graph illustrating the current response of a humidity sensor at different relative humidities according to an embodiment of the present invention;
FIG. 4 is a graph of response and recovery time characteristics of a humidity sensor in accordance with an embodiment of the present invention;
FIG. 5 is a graph illustrating the response of a single humidity sensor unit to a fingertip positioned 5mm above a screen in accordance with an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating an implementation of inputting a letter signal in a finger non-contact manner through a flexible non-contact control screen according to an embodiment of the present invention;
fig. 7 is a schematic diagram illustrating a function of unlocking a screen of a smart phone by using a flexible non-contact control screen in the embodiment of the present invention.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
One purpose of the invention is to provide a preparation method of a flexible non-contact control screen based on an ultrahigh-sensitivity humidity sensor array, and MoO on the flexible control screen3Humidity sensor array has fast (on the order of hundred milliseconds), high on-off ratio response (10) to human fingertip humidity5Magnitude), non-contact information input within 5mm of the vertical distance from the control screen can be achieved. By connecting the display screen with the wire, unlocking and signal input of the smart phone can be realized.
The invention constructs the metal oxide MoO3The humidity sensor array is flexible, transparent and high in sensitivity, takes flexible PET as a substrate and ITO as an electrode, and takes nano sheets as detection materials. The humidity sensor array can realize non-contact information input, the response speed is in the order of hundred milliseconds, and the response on-off ratio is 105Magnitude. Meanwhile, based on the characteristics of flexibility, transparency, high response on-off ratio and high response speed, the flexible non-contact control screen capable of realizing signal input of intelligent equipment (such as a smart phone) is prepared. The control screen can be used as a control screen of the intelligent non-contact device.
The invention discloses a preparation method of a humidity sensor, which comprises the following steps:
preparing interdigital electrodes on a substrate;
and preparing a humidity sensitive material on the substrate with the interdigital electrode to obtain the humidity sensor.
In some embodiments of the invention, the moisture sensitive material comprises molybdenum trioxide nanoplates.
In some embodiments of the present invention, the method for preparing molybdenum trioxide nanosheets comprises:
dissolving ammonium heptamolybdate tetrahydrate in deionized water, then adding a nitric acid solution to carry out hydrothermal reaction, and annealing the obtained white powder after the hydrothermal reaction is finished to obtain the molybdenum trioxide nanosheet.
In some embodiments of the invention, the concentration of ammonium heptamolybdate tetrahydrate is from 0.7 to 1.1 g/mL;
in some embodiments of the invention, the concentration of the nitric acid solution is 4 to 5 mol/L;
in some embodiments of the invention, the reaction temperature of the hydrothermal reaction is 150 to 200 ℃;
in some embodiments of the invention, the reaction time of the hydrothermal reaction is 150 to 210 minutes;
in some embodiments of the invention, the annealing step has an annealing temperature of 430 to 500 ℃ and an annealing time of 20 to 40 minutes;
in some embodiments of the present invention, before the annealing step, the obtained white powder is cleaned, dried, and then annealed.
In some embodiments of the present invention, the material of the interdigital electrode includes at least one of indium tin oxide, Au, Ag, and Cu;
in some embodiments of the present invention, the substrate is made of a material including at least one of flexible PET, PI, and PEN;
in some embodiments of the invention, the substrate is a transparent substrate.
In some embodiments of the present invention, the step of preparing the interdigitated electrodes on a substrate comprises:
depositing a bottom layer interdigitated electrode on a substrate;
depositing an insulating layer on the bottom interdigital electrode;
depositing a top interdigital electrode on the insulating layer;
in some embodiments of the present invention, the insulating layer is made of a material including aluminum oxide;
in some embodiments of the invention, the insulating layer has a thickness of 40 to 60 nm;
in some embodiments of the invention, the bottom interdigitated electrodes and the top interdigitated electrodes are each 40 to 60nm thick.
The invention also discloses a humidity sensor which is obtained by adopting the preparation method.
The invention also discloses a non-contact control screen which internally comprises the humidity sensor.
In some embodiments of the present invention, the response time of the touchless control screen is 0.4 to 0.6 seconds;
in some embodiments of the present invention, the resistance of the non-contact control panel decreases by at least 10% when the relative humidity of the non-contact control panel changes from 0% to 100%5Magnitude;
in some embodiments of the present invention, the non-contact control screen has a transmittance of 80% or more.
The invention also discloses application of the humidity sensor or the non-contact control screen in the field of flexible electronic devices.
In one exemplary embodiment, the invention provides a preparation method and application of a flexible non-contact control screen based on an ultrahigh-sensitivity humidity sensor array. The ultrahigh-sensitivity humidity sensor is constructed by taking molybdenum trioxide nanosheets as humidity detection materials, ITO as electrodes and flexible PET as transparent substrates. In the preparation process, firstly, molybdenum trioxide nanosheet powder is prepared by a hydrothermal method, then the powder is uniformly dispersed in ethanol, and the powder is spin-coated on a flexible PET substrate with an ITO electrode array. The prepared ultra-high sensitive humidity sensor array has ultra-high sensitivity to humidity, when the relative humidity is changed from 0% to 100%, the resistance of the array device unit is changed by 5 orders of magnitude, the response speed is about 0.4 second, and the sensitivity of the array is still basically unchanged after the array is bent for 1500 times. The array is also very sensitive to the humidity of human fingertips and responds quickly, a flexible transparent control screen for realizing non-contact human-computer interaction is prepared on the basis, the control screen has high transmissivity to visible light, and can be used for realizing non-contact information input of intelligent equipment or non-contact human-computer interaction in high-risk and toxic environments. In the method for preparing the flexible non-contact control screen based on the ultrahigh-sensitivity humidity sensor array, a sensing unit in the humidity sensor array is composed of a molybdenum trioxide nanosheet serving as a humidity detection sensitive material, ITO serving as an electrode and flexible PET serving as a substrate.
The preparation method comprises the following steps:
(1) preparing molybdenum trioxide nanosheets by a hydrothermal method, cleaning, drying and annealing;
(2) uniformly and ultrasonically dispersing the molybdenum trioxide nanosheets obtained in the step (1) in a volatile solvent, such as ethanol;
(3) sputtering ITO on a flexible PET substrate according to a specific pattern to be used as an interdigital electrode array;
(4) uniformly spin-coating the molybdenum trioxide nanosheet dispersion liquid obtained in the step (2) on the PET substrate with the ITO electrode array obtained in the step (3) through a spin coater, and forming a thin film after drying, namely, completing the preparation of the humidity sensor;
(5) and connecting each electrode on the array by using a lead to obtain the flexible intelligent non-contact control screen.
Wherein the chemical formula of the molybdenum trioxide nanosheet in the step (1) is MoO3The preparation method comprises the following steps:
s1, completely dissolving a reaction precursor ammonium heptamolybdate tetrahydrate in a proper amount of deionized water at room temperature;
s2, dropwise adding a nitric acid solution with proper concentration and volume into the ammonium heptamolybdate tetrahydrate solution, and fully stirring the mixture;
s3, transferring the mixed solution obtained in the step S2 into a reaction kettle, and carrying out hydrothermal growth to obtain a white precipitate;
s4, centrifugally cleaning the precipitate, and putting the precipitate into a dryer to be completely dried;
s5, annealing the powder in a high-temperature tube furnace, and naturally cooling the powder to room temperature to obtain MoO3Nanosheet powder.
Wherein, the concentration of the precursor ammonium heptamolybdate tetrahydrate used in the reaction in the step S1 is 0.7-1.1g/mL, such as 0.7g/mL, 0.9g/mL, 1.1 g/mL.
Wherein the concentration of the nitric acid solution in the step S2 is 4.0-5.0mol/L, for example, 4.5 mol/L.
Wherein the hydrothermal growth time in step S3 is 150-210 min, such as 180 min, and the temperature is maintained at 150-200 deg.C, such as 180 deg.C during the growth process.
Wherein the annealing temperature in step S5 is 430-500 deg.C, such as 450 deg.C, and the annealing time is 20-40 minutes, such as 30 minutes.
The PET substrate engraved with the ITO electrode array pattern adopts an ITO upper electrode and lower electrode interdigital structure, and an aluminum oxide layer is used for insulation between the ITO upper electrode and the ITO lower electrode, and the preparation method comprises the following steps:
1. depositing an ITO electrode array on a PET substrate to be used as a bottom layer interdigital electrode;
2. depositing aluminum oxide on the bottom electrode as an insulating layer;
3. and depositing an ITO electrode array as a top interdigital electrode, and forming an interdigital electrode array on the PET substrate.
Wherein, the bottom layer interdigital electrode and the top layer interdigital electrode are both 40-60nm, such as 50 nm.
Wherein the thickness of the aluminum oxide insulating layer is 40-60nm, such as 50 nm.
The technical solution of the present invention is further illustrated by the following specific embodiments in conjunction with the accompanying drawings. It should be noted that the following specific examples are given by way of illustration only and the scope of the present invention is not limited thereto.
The chemicals and raw materials used in the following examples were either commercially available or self-prepared by a known preparation method.
Example 1
Preparation of MoO by hydrothermal method3Nanosheets. The method comprises the following specific steps:
(1) 0.88g of ammonium heptamolybdate tetrahydrate was dissolved in 10mL of deionized water by mass and stirred well.
(2) Dropwise adding a nitric acid solution with the concentration of 4.5mol/L into the ammonium heptamolybdate tetrahydrate solution in the step (1), and fully stirring.
(3) Transferring the mixed solution into a reaction kettle, keeping the heating temperature at 180 ℃ for 180 minutes, and collecting the generated white powder.
(4) Placing white powder synthesized by hydrothermal method at high temperatureAnnealing in a tube furnace at 450 ℃ for 30 minutes, cooling the tube furnace to room temperature, and collecting annealed powder, namely MoO3XRD of the nano-sheet powder is shown in figure 1 and is α phase MoO3。
(5) Adding MoO3The nano-sheet powder is ultrasonically dispersed in ethanol, and the concentration of the dispersion liquid is 0.04 g/mL.
(6) An ITO electrode array is prepared on a flexible PET substrate with the thickness of 50 mu m by a magnetron sputtering method, and the method comprises the following specific steps: firstly, an ITO electrode array with the thickness of 50nm is deposited as a bottom electrode, then an aluminum oxide insulating layer with the thickness of 50nm is evaporated at the crossing position of the bottom electrode and the top electrode, and finally an ITO top electrode with the thickness of 50nm is deposited. The specific structure and distribution of the ITO electrodes on the flexible PET substrate are shown in FIG. 2.
(7) Adding MoO3And spin-coating the nanosheet dispersion on the PET substrate engraved with the ITO electrode array in a spin coater at a rotating speed of 500 revolutions per minute.
(8) Coating the above with MoO3PET substrate of nanosheet dispersion on hot plate to MoO3And (3) completely drying, completing the preparation of the humidity sensor, and connecting electrodes on the humidity sensor, namely completing the preparation of the flexible non-contact control screen, as shown in figure 2. As shown in the inset of fig. 2, the transmittance of the flexible non-contact control screen for visible light is high. The current responses of the sensor units on the flexible non-contact control screen under different relative humidities are shown in fig. 3, and the results show that the current change of the sensor exceeds 10 when the relative humidity is increased from 0% to 100%5And times show that the humidity sensor has good sensitivity in different humidity environments. Fig. 4 shows response and recovery time properties of the sensor unit on the flexible non-contact control screen, which shows that the sensor has quick response and recovery performance to external relative humidity changes. Fig. 5 is a graph showing the response property of a single humidity sensor unit on a flexible non-contact control screen to the humidity of a finger 5mm above the screen, and the result shows that the sensor has good stability and quick response capability to the humidity of the fingertip.
Example 2
(1) 0.95g of ammonium heptamolybdate tetrahydrate was dissolved in 8mL of deionized water by mass and stirred well.
(2) Dropwise adding a nitric acid solution with the concentration of 5mol/L into the ammonium heptamolybdate tetrahydrate solution in the step (1), and fully stirring.
(3) Transferring the mixed solution into a reaction kettle, keeping the heating temperature at 170 ℃ for 210 minutes, and collecting the generated white powder.
(4) Placing white powder synthesized by a hydrothermal method in a high-temperature tube furnace, annealing at 500 ℃ for 40 minutes, cooling the tube furnace to room temperature, and collecting annealed powder, namely MoO3Nanosheet powder.
(5) Adding MoO3The nano-sheet powder is ultrasonically dispersed in ethanol, and the concentration of the dispersion liquid is 0.05 g/mL.
(6) An ITO electrode array is prepared on a flexible PET substrate with the thickness of 60 mu m by a magnetron sputtering method, and the method comprises the following specific steps: firstly, an ITO electrode array with the thickness of 60nm is deposited to be used as a bottom electrode, then an aluminum oxide insulating layer with the thickness of 60nm is evaporated at the crossing position of the bottom electrode and the top electrode, and finally an ITO top electrode with the thickness of 60nm is deposited. The specific structure and distribution of the ITO electrodes on the flexible PET substrate are shown in FIG. 2.
(7) Adding MoO3And spin-coating the nanosheet dispersion on the PET substrate engraved with the ITO electrode array in a spin coater at a rotating speed of 550 revolutions per minute.
(8) Coating the above with MoO3The PET substrate of the nanoplatelet dispersion is heated on a hot plate at 70 ℃ for 1.25 minutes to MoO3And (3) completely drying, completing the preparation of the humidity sensor, and connecting electrodes on the humidity sensor, namely completing the preparation of the flexible non-contact control screen, as shown in figure 2.
(9) And connecting a lead on the PET substrate of the flexible non-contact control screen with an external control circuit, and connecting the external control circuit with the smart phone through a Bluetooth system. The fingertip is close to the control screen without contacting, the humidity sensor on the control screen can detect the humidity change caused by sweat evaporation on the fingertip sharply, the change can be transmitted to the APP on the mobile phone through the circuit control system of the control screen external connection through the Bluetooth and converted into signal input, as shown in fig. 6, through the spaced sliding of the fingertip near the screen, the character or graphic signal input to the smart phone can be realized, such as the English letter 'E' in the embodiment. Because of the flexibility of the PET substrate, the control panel can perform this function in both a bent and a flat state.
Example 3
(1) 0.85g of ammonium heptamolybdate tetrahydrate was dissolved in 11mL of deionized water by mass and stirred well.
(2) Dropwise adding a nitric acid solution with the concentration of 4mol/L into the ammonium heptamolybdate tetrahydrate solution in the step (1), and fully stirring.
(3) Transferring the mixed solution into a reaction kettle, keeping the heating temperature at 160 ℃ for 150 minutes, and collecting the generated white powder.
(4) Placing white powder synthesized by a hydrothermal method in a high-temperature tube furnace, annealing at 430 ℃ for 25 minutes, cooling the tube furnace to room temperature, and collecting annealed powder, namely MoO3Nanosheet powder.
(5) Adding MoO3The nano-sheet powder is ultrasonically dispersed in ethanol, and the concentration of the dispersion liquid is 0.03 g/mL.
(6) An ITO electrode array is prepared on a flexible PET substrate with the thickness of 40 mu m by a magnetron sputtering method, and the method comprises the following specific steps: firstly, depositing an ITO electrode array with the thickness of 40nm as a bottom electrode, then evaporating an aluminum oxide insulating layer with the thickness of 40nm at the crossed position of the bottom electrode and the top electrode, and finally depositing an ITO top electrode with the thickness of 40 nm. The specific structure and distribution of the ITO electrodes on the flexible PET substrate are shown in FIG. 2.
(7) Adding MoO3And spin-coating the nanosheet dispersion on the PET substrate engraved with the ITO electrode array in a spin coater at a rotating speed of 400 revolutions per minute.
(8) Coating the above with MoO3Heating the PET substrate of the nanosheet dispersion on a hot plate at 50 ℃ for 0.75 minutes to MoO3And (3) completely drying, completing the preparation of the humidity sensor, and connecting electrodes on the humidity sensor, namely completing the preparation of the flexible non-contact control screen, as shown in figure 2. As shown in the inset of fig. 2, flexibilityThe non-contact control screen has a high transmittance for visible light.
(9) And connecting a lead on the PET substrate of the flexible non-contact control screen with an external control circuit, and connecting the external control circuit with the smart phone through a Bluetooth system. Be close to the control screen with the fingertip, humidity transducer on the control screen can detect the humidity change that sweat evaporates and brings on the fingertip keenly, the APP on the cell-phone is transmitted through the bluetooth to the circuit control system of this change accessible control screen allies oneself with, convert into signal input, as shown in fig. 7, set up specific unblock pattern in advance and lock the cell-phone screen in cell-phone APP, the accessible separates the sky in the control screen top and removes the finger, to cell-phone input figure, when predetermined figure nonconformity in figure and the APP of input, cell-phone screen unblock is failed, and cell-phone screen unblock is successful when input pattern is unanimous with the cell-phone screen, get into the mobile phone abnormal use state. Because of the flexibility of the PET substrate, the control panel can perform this function in both a bent and a flat state.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method of making a humidity sensor, comprising:
preparing interdigital electrodes on a substrate;
and preparing a humidity sensitive material on the substrate with the interdigital electrode to obtain the humidity sensor.
2. The production method according to claim 1,
the humidity-sensitive material comprises molybdenum trioxide nanosheets.
3. The production method according to claim 2,
the preparation method of the molybdenum trioxide nanosheet comprises the following steps:
dissolving ammonium heptamolybdate tetrahydrate in deionized water, then adding a nitric acid solution to carry out hydrothermal reaction, and annealing the obtained white powder after the hydrothermal reaction is finished to obtain the molybdenum trioxide nanosheet.
4. The production method according to claim 3,
the concentration of the ammonium heptamolybdate tetrahydrate is 0.7 to 1.1 g/mL;
the concentration of the nitric acid solution is 4-5 mol/L;
the reaction temperature of the hydrothermal reaction is 150 to 200 ℃;
the reaction time of the hydrothermal reaction is 150 to 210 minutes;
the annealing temperature of the annealing step is 430 to 500 ℃, and the annealing time is 20 to 40 minutes;
the annealing step also comprises the steps of cleaning the obtained white powder, drying and then annealing.
5. The production method according to claim 1,
the interdigital electrode is made of at least one of indium tin oxide, Au, Ag and Cu;
the substrate is made of at least one of flexible PET, PI and PEN;
the substrate is a transparent substrate.
6. The method of manufacturing according to claim 1,
the step of preparing the interdigitated electrodes on a substrate includes:
depositing a bottom layer interdigitated electrode on a substrate;
depositing an insulating layer on the bottom interdigital electrode;
depositing a top interdigital electrode on the insulating layer;
wherein, the material adopted by the insulating layer comprises aluminum oxide;
the thickness of the insulating layer is 40 to 60 nm;
the thickness of the bottom interdigital electrode and the thickness of the top interdigital electrode are both 40-60 nm.
7. A humidity sensor obtained by the production method according to any one of claims 1 to 6.
8. A non-contact control panel incorporating a humidity sensor as claimed in claim 7.
9. The non-contact control screen of claim 8,
the response time of the non-contact control screen is 0.4-0.6 seconds;
when the relative humidity of the non-contact control screen changes from 0% to 100%, the resistance of the non-contact control screen is reduced by at least 105Magnitude;
the transmissivity of the non-contact control screen is greater than or equal to 80%.
10. Use of a humidity sensor according to claim 7 or a non-contact control screen according to claim 8 or 9 in the field of flexible electronics.
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