CN110954013B - Detection method and detection system thereof - Google Patents

Detection method and detection system thereof Download PDF

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CN110954013B
CN110954013B CN201811122751.5A CN201811122751A CN110954013B CN 110954013 B CN110954013 B CN 110954013B CN 201811122751 A CN201811122751 A CN 201811122751A CN 110954013 B CN110954013 B CN 110954013B
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detection
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directions
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CN110954013A (en
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陈鲁
吕肃
李青格乐
张嵩
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Feice Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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Abstract

There is provided a detection method comprising the steps of: providing an object, and dividing a region to be measured of the object into a plurality of sub-regions; acquiring a feature vector of each subregion; setting a plurality of measuring directions; distributing the measuring direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measuring direction; providing a detection device; and carrying out partition measurement on the sub-regions in one or more measurement directions through the detection equipment to obtain corresponding detection information, wherein the measurement direction for carrying out partition measurement on any sub-region is the measurement direction distributed to the sub-region. The invention also relates to a detection system for implementing the detection method.

Description

Detection method and detection system thereof
Technical Field
The invention relates to a detection method, in particular to a three-dimensional shape detection method capable of carrying out partition measurement on a region to be detected of an object. The invention also relates to a detection system for implementing the detection method.
Background
The three-dimensional topography detection method mainly comprises the following steps: contact (e.g., three-coordinate measurement) and non-contact (primarily optical measurement methods such as dispersive confocal, binocular, and structured light). The non-contact measurement method does not need to be in contact with the object to be measured, and therefore damage to the object to be measured in the measurement process can be reduced. In the binocular vision measurement process, images of an object to be measured are photographed from different directions by two cameras, and three-dimensional geometric information of the object is acquired according to position deviation between corresponding points in the images photographed from the different directions. The binocular vision measurement method is difficult to measure the three-dimensional appearance of the transparent object because the binocular vision measurement process needs to obtain the pixel information of the object to be measured, and the camera cannot obtain the pixel information of the transparent object. Structured light detection devices have high requirements for light sources and are relatively costly. The chromatic dispersion confocal measurement method has the advantages of high measurement precision, low equipment cost and the like, and has a good application prospect in three-dimensional morphology measurement.
However, due to the angular range of the dispersive confocal device (e.g., dispersive confocal spectrometer) or other limitations, when the object to be measured has a large inclination or has multiple surfaces with large angular differences, the complete topography of the object cannot be measured at one angle, and multiple topography measurements need to be spliced together after measuring the object at multiple angles. In the process, how to partition the region to be measured of the object and assign the measurement direction significantly affects the accuracy and efficiency of the whole detection process.
There is a need for a new detection method that enables a rational partitioning of the area to be measured of an object and an allocation of measurement directions.
Disclosure of Invention
In order to solve the above problems, the present invention provides a new detection method. According to the detection method, a region to be detected of an object is divided into a plurality of sub-regions, the sub-regions to be measured by detection equipment in different measurement directions are determined according to normal vectors of the sub-regions and angle ranges of the detection equipment, the sub-regions are measured in the corresponding measurement directions, measurement data are obtained, and three-dimensional splicing is carried out.
According to a first aspect of the present invention, there is provided a detection method comprising the steps of: providing an object, and dividing a region to be measured of the object into a plurality of sub-regions; acquiring a feature vector of each subregion; setting a plurality of measuring directions; distributing the measuring direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measuring direction; providing a detection device; and carrying out partition measurement on the sub-regions in one or more measurement directions through the detection equipment to obtain corresponding detection information, wherein the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region.
According to a second aspect of the present invention, there is provided a detection system for measuring an object, the detection system comprising: the device comprises a sub-region dividing module, a detecting module and a judging module, wherein the sub-region dividing module is used for dividing a region to be detected of an object into a plurality of sub-regions; the characteristic vector acquisition module is used for acquiring the characteristic vectors of all the sub-regions; a measurement direction setting module for setting a plurality of measurement directions; the measurement direction distribution module is used for distributing the measurement direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measurement direction; the detection device is used for carrying out partition measurement on the sub-regions in one or more measurement directions to obtain corresponding detection information, and the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region.
Technical solution 1. A detection method, comprising the steps of:
providing an object, and dividing a region to be measured of the object into a plurality of sub-regions;
acquiring a feature vector of each subregion;
setting a plurality of measuring directions;
distributing the measuring direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measuring direction;
providing a detection device;
and performing partition measurement on the sub-regions in one or more measurement directions by the detection equipment to obtain corresponding detection information, wherein the measurement direction for performing partition measurement on any sub-region is the measurement direction allocated to the sub-region.
Technical means 2. The detection method according to technical means 1, wherein the feature vector is a normal vector of each sub-region.
Technical solution 3 the detection method according to technical solution 1, characterized in that each sub-area is assigned only one measurement direction; one or more sub-areas are assigned the same measurement direction.
Technical means 4. The detection method according to technical means 1, wherein the step of assigning a measurement direction to each sub-region includes: and allocating the measuring direction with the minimum included angle with the characteristic vector of each sub-area to the sub-area.
Technical means 5 the detection method according to claim 1, wherein the step of assigning a measurement direction to each of the sub-regions comprises: and sequentially carrying out allocation processing on the measurement directions, and determining sub-regions allocated to the measurement directions.
The detection method according to claim 6 or 5, wherein the step of performing the assignment process for the measurement direction includes: determining a characteristic vector with an included angle smaller than a set threshold value with the measurement direction subjected to allocation processing from a sub-region to which the measurement direction is not allocated as a vector to be allocated; and allocating the sub-area corresponding to the vector to be allocated to the measurement direction for the allocation processing.
The invention according to claim 7 is the detection method according to claim 6, characterized in that the set threshold is less than or equal to the angular measurement range of the detection device.
Technical means 8 the detection method according to claim 1, wherein a plurality of measurement directions are set according to the feature vector of each sub-region and the angular measurement range of the detection device, so that the angular range in the plurality of measurement directions covers the region to be measured.
The detection method according to claim 9. The detection method according to claim 8, wherein each of the eigenvectors includes a plurality of first eigenvectors perpendicular to the first direction; the maximum value of an included angle between any two first characteristic vectors is a reference angle; the plurality of measurement directions comprises a first set of measurement directions, each measurement direction of the first set of measurement directions being perpendicular to the first direction; the product of the number of the measuring directions in the first group of measuring directions and the angle range of the detecting equipment is larger than or equal to the reference angle, and the included angle between the adjacent measuring directions is smaller than or equal to the angle range of the detecting equipment.
Technical solution 10 the detection method according to claim 1, wherein the detection information includes three-dimensional topography information of the sub-region; the detection method further comprises the following steps: and splicing the three-dimensional shape information to obtain the complete three-dimensional shape of the area to be detected.
Technical solution 11. The detection method according to technical solution 1, wherein the detection device includes a chromatic dispersion confocal device, a binocular vision device, a digital holography device, a structure illumination device, or a 3D microscope device.
The detection method according to claim 1, characterized in that the detection device includes: the object placing table is used for placing the object; a detection module for measuring the object; the first rotating platform comprises a first rotating shaft perpendicular to the arrangement direction of the detection module and the object, and the first rotating platform is used for driving the detection module or the object to rotate around the first rotating shaft.
The detection method according to claim 12, characterized in that the detection device further includes: the second rotating platform comprises a second rotating shaft parallel to the arrangement direction of the detection module and the object, and the second rotating platform is used for driving the detection module or the object to rotate around the second rotating shaft; the first translation stage comprises a first translation direction perpendicular to the arrangement direction of the detection modules and the object, and the first translation stage is used for driving the detection modules or the object to move along the first translation direction; the second translation stage comprises a second translation direction perpendicular to the arrangement direction of the detection module and the object, and the second translation stage is used for driving the detection module or the object to move along the second translation direction.
A detection system according to claim 14, for measuring an object, the detection system comprising:
a sub-region dividing module for dividing a region to be measured of the object into a plurality of sub-regions;
the characteristic vector acquisition module is used for acquiring the characteristic vectors of all the sub-regions;
a measurement direction setting module for setting a plurality of measurement directions;
the measurement direction distribution module is used for distributing the measurement direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measurement direction;
the detection device is used for carrying out partition measurement on the sub-regions in one or more measurement directions to obtain corresponding detection information, and the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region.
The detection method realizes reasonable partition of the region to be detected of the object and correspondingly determines the measurement direction and the measurement times. Compared with the prior art, the invention has the following beneficial technical effects: according to the spatial distribution of the area to be detected of the object and the angle range of the detection equipment, the area to be detected is conveniently, quickly and automatically partitioned, and the measurement direction is distributed to each sub-area, so that the precision and the efficiency of the whole detection process are maximized.
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Advantages and realisations of the invention will be apparent from the following detailed description, taken in conjunction with the accompanying drawings, which are given by way of illustration only, and not by way of limitation, of the invention, and which are given by way of illustration only, and are not drawn to scale. The same reference numbers will be used throughout the drawings to refer to the same or like parts, wherein:
FIG. 1 shows the steps of a detection method according to the invention;
FIG. 2 shows an embodiment of a detection method according to the invention; and
fig. 3 shows another embodiment of the detection method according to the invention.
Detailed Description
One or more specific embodiments of the present invention will be described below. In an effort to provide a concise description of these embodiments, all features of an actual implementation may not be described in the specification. It should be appreciated that in the development of any such actual implementation, as in any engineering or design project, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which may vary from one implementation to another. Moreover, it should be appreciated that such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking of design, fabrication, and manufacture for those of ordinary skill having the benefit of this disclosure.
The invention relates to a detection method and a detection system for realizing the detection method. By using the detection method and the detection system, the region to be detected of the object can be conveniently, quickly and automatically partitioned, and the measurement direction is allocated to each sub-region for splicing after measurement. Exemplary embodiments according to the present invention will now be explained with reference to the drawings.
Fig. 1 shows the steps of a detection method according to an embodiment of the invention. Referring to fig. 1, the present invention provides a detection method, which includes the steps of: step 101, providing an object, and dividing a region to be measured of the object into a plurality of sub-regions; 102, acquiring a feature vector of each sub-region; step 103, setting a plurality of measuring directions; 104, distributing the measuring direction to each subarea according to the included angle between the characteristic vector of each subarea and each measuring direction; step 105, providing a detection device; and 106, performing partition measurement on the sub-regions in one or more measurement directions through the detection equipment to obtain corresponding detection information, wherein the measurement direction for performing partition measurement on any sub-region is the measurement direction allocated to the sub-region.
The detection equipment comprises dispersion confocal equipment, binocular vision equipment, digital holographic equipment, structural illumination equipment or 3D microscope equipment and the like. In other embodiments, the detection device comprises: the object placing table is used for placing objects; the detection module is used for measuring the object; the first rotating platform comprises a first rotating shaft perpendicular to the arrangement direction of the detection module and the object, and the first rotating platform is used for driving the detection module or the object to rotate around the first rotating shaft. In a further embodiment, the detection device further comprises: the second rotating platform comprises a second rotating shaft parallel to the arrangement direction of the detection module and the object, and the second rotating platform is used for driving the detection module or the object to rotate around the second rotating shaft; the first translation stage comprises a first translation direction perpendicular to the arrangement direction of the detection modules and the object, and the first translation stage is used for driving the detection modules or the object to move along the first translation direction; and the second translation platform comprises a second translation direction perpendicular to the arrangement direction of the detection module and the object, and is used for driving the detection module or the object to move along the second translation direction.
In one embodiment, the feature vector is a normal vector for each sub-region. Optionally, each sub-region is assigned only one measurement direction; one or more sub-areas are assigned the same measurement direction. Since measurements of one or more sub-regions assigned to the same measurement direction can be performed in the same measurement direction, fewer measurement directions represent a fewer total number of measurements needed to perform the measurement.
The measurement direction actually represents the positional relationship of the detection module of the detection device with respect to the object during measurement, which is adjusted by one or more of the above first and second rotary platforms. The method for setting the measuring direction is to set a plurality of measuring directions according to the feature vector of each sub-region and the angle range of the detection device, so that the angle ranges in the plurality of measuring directions cover the region to be measured. The angular range of the detection device refers to the maximum angle between the normal of the surface of the object that the detection device is capable of measuring.
For example, in one embodiment, each feature vector comprises a plurality of first feature vectors perpendicular to the first direction; the maximum value of an included angle between any two first characteristic vectors is a reference angle; the plurality of measurement directions includes a first set of measurement directions, each measurement direction of the first set of measurement directions being perpendicular to the first direction; the product of the number of the measuring directions in the first group of measuring directions and the angle range of the detecting equipment is larger than or equal to the reference angle, and the included angle between the adjacent measuring directions is smaller than or equal to the angle range of the detecting equipment. In another embodiment, each eigenvector further comprises a plurality of second eigenvectors perpendicular to the second direction, the first direction being non-parallel to the second direction; the maximum value of an included angle between any two second characteristic vectors is a second reference angle; the plurality of measurement directions further includes a second set of measurement directions, each measurement direction of the second set of measurement directions being perpendicular to the second direction; the product of the number of the measuring directions in the second group of measuring directions and the angle range of the detection equipment is larger than or equal to the second reference angle, and the included angle between the adjacent measuring directions is smaller than or equal to the angle range of the detection equipment.
Specifically, in the present embodiment, the first direction and the second direction are perpendicular. In other embodiments, the first direction may not be perpendicular to the second direction. The first set of measurement directions and the second set of measurement directions may comprise the same measurement directions. According to the method for setting the measuring direction, the area to be measured of the object is guaranteed to be measured efficiently with the least measuring times and in a reasonable measuring direction.
In one embodiment, the step of assigning a measurement direction to each sub-area comprises: the measurement direction having the smallest angle with the feature vector of the respective sub-region is assigned to this sub-region. In another embodiment, the step of assigning a measurement direction to each sub-region comprises: and sequentially carrying out allocation processing on the measurement directions to determine sub-regions allocated to each measurement direction. In this embodiment, the step of performing assignment processing on the measurement direction includes: determining a characteristic vector with an included angle smaller than a set threshold value with the measurement direction subjected to allocation processing from a sub-region to which the measurement direction is not allocated as a vector to be allocated; the sub-region corresponding to the vector to be allocated is allocated a measurement direction for the allocation process. Optionally, the set threshold is less than or equal to the angular range of the detection device.
In one embodiment, the detection information includes three-dimensional topography information of the sub-region. On the basis of carrying out partition measurement on each sub-area, the detection method further comprises the following steps: and splicing the three-dimensional shape information to obtain the complete three-dimensional shape of the area to be detected.
An exemplary procedure of the detection method according to the invention will now be described taking as an example a mobile phone case with a rectangular outline. Fig. 2 shows an embodiment of the detection method according to the invention. In this embodiment, the measuring path is a transversal 12 of the surface of the mobile phone casing, and the steps of the detection method include:
step 101, dividing a region to be measured of an object into a plurality of sub-regions, wherein each sub-region can be regarded as a plane;
step 102, obtaining a feature vector of each sub-region, specifically, in this embodiment, the feature vector is a normal vector of the sub-region;
103, setting a plurality of measuring directions, namely a first group of measuring directions, taking the first group of measuring directions comprising three measuring directions as an example, wherein the three measuring directions comprise a first measuring direction n1, a second measuring direction n2 and a third measuring direction n3;
104, distributing the measuring direction to each subarea according to the included angle between the characteristic vector of each subarea and each measuring direction;
specifically, in this embodiment, the step of allocating the measurement direction to each sub-area includes: step one, calculating a first included angle between the normal vector and a first measurement direction, if the first included angle is within the angle range of the detection equipment, the sub-region is a first sub-region 1 corresponding to the first measurement direction n1, and repeating the step one; if the first included angle exceeds the angle range of the detection equipment, executing a second step;
secondly, calculating a second included angle between the normal vector and the second measurement direction, if the second included angle is within the angle range of the detection equipment, the sub-region is a second sub-region 2 corresponding to the second measurement direction n2, and repeating the second step; if the second included angle exceeds the angle range of the detection equipment, the sub-region is a third sub-region 3 corresponding to a third measurement direction n3;
step 105, providing a detection device;
step 106, carrying out partition measurement on the sub-regions in one or more measurement directions through the detection equipment to obtain corresponding detection information, wherein the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region;
specifically, the step of zone measurement comprises: measuring the first sub-area in a first measuring direction to obtain a first point cloud; measuring a second sub-area in a second measuring direction to obtain a second point cloud; and measuring the third sub-area in a third measuring direction to obtain a third point cloud.
The detection information comprises a first point cloud, a second point cloud and a third point cloud. On the basis of the detection method, the first point cloud, the second point cloud and the third point cloud are spliced to form the complete three-dimensional shape of the area to be detected.
In this embodiment, the method of acquiring the respective measurement directions is as follows. The sectional line 12 of the mobile phone shell is a region to be measured, and the maximum included angle between the top surface of the sectional line 12 and the normal of the side surface is ± 50 °, so that the reference angle (i.e., the included angle between the two normal of the side surface) is 100 °. The normal vectors of the sub-regions through which the sectional line 12 passes are all perpendicular to the first direction, taking the coordinate system shown in fig. 2 as an example, the coordinate system includes two perpendicular x-axis, y-axis and z-axis; the x axis and the y axis are respectively parallel to the two edges of the object, and the z axis points to the outside of the object from the surface to be measured of the object; the first direction is (0, 1, 0). If the top surface of the mobile phone shell is measured in the first measurement direction, the first measurement direction n1= (0, 1), and the first point cloud obtained in the first measurement direction can be used as a standard for subsequent splicing, so that the splicing accuracy is improved. The first set of measurement directions is required so that the sub-regions traversed by the section line 12 can all be measured by the detection device. If the angular range of the detection device is 60 °, the number of measurement directions in the first set of measurement directions is chosen to be 3, which satisfies the requirement that the product of the number of measurement directions in the first set of measurement directions (i.e. 3) and the angular range of the detection device (i.e. 60 °) is greater than or equal to the reference angle (i.e. 100 °). In order to satisfy the requirement that the included angle between adjacent measurement directions is smaller than or equal to the angular measurement range of the detection device, the included angle between the second measurement direction and the first measurement direction may be set to 30 ° (toward the positive x-axis), and the included angle between the third measurement direction and the first measurement direction may be set to 30 ° (toward the negative x-axis), that is, the second measurement direction is n2= (1, 0,
Figure DEST_PATH_IMAGE002
) The third measurement direction is n3= (-1, 0,
Figure 405972DEST_PATH_IMAGE002
) The first measuring direction, the second measuring direction and the third measuring direction jointly form a first group of measuring directions which are all vertical to the first direction. In this embodiment, the second measurementThe angle between the measuring direction and the first measuring direction may also be 45 ° or 55 ° (towards the positive x-axis), and the angle between the third measuring direction and the first measuring direction may also be 45 ° or 55 ° (towards the negative x-axis).
Optionally, after the above normal vectors are obtained, the maximum value of the included angle between the normal vectors at each point of the region to be measured may be determined according to the included angle between the normal vectors. Alternatively, the position with the largest included angle of the normal vector of the surface of the region to be detected can be determined by visual inspection, and the maximum included angle can be determined by combining design information.
Fig. 3 shows a further embodiment of the detection method according to the invention. In this embodiment, the measurement path further comprises a stub 11 and a stub 13. In this embodiment, the detection method may be performed in a similar manner to the embodiment in fig. 2, but requiring more measurement directions. For the sectional line 11 a second set of measurement directions is required. The normal vectors of the sub-regions through which the sectional line 11 passes are all perpendicular to the second direction, and take the coordinate system shown in fig. 3 as an example, the coordinate system includes two perpendicular x-axis, y-axis and z-axis; the x axis and the y axis are respectively parallel to the two edges of the object, and the z axis points to the outside of the object from the surface to be measured of the object; the second direction is (1, 0). The second set of measurement directions also includes the first measurement direction; in order to carry out the measurement of the two sides through which the section line 11 passes, the second set of measurement directions also comprises, according to the same principle: a fourth measurement direction and a fifth measurement direction, for example, a fourth measurement direction n4= (0, 1,
Figure 323112DEST_PATH_IMAGE002
) And a fifth measurement direction n5= (0, -1,
Figure 102849DEST_PATH_IMAGE002
) Both perpendicular to the second direction. No further measuring directions are required, since the first and second set of measuring directions already make it possible to carry out a complete measurement of the surface through which the stub 13 passes. The detection method further comprises the following steps: the three-dimensional topography at the stubs 13 and 11 is obtained according to the above detection method.
In other embodiments, the measurement directions of the whole surface of the mobile phone shell, for example, the first measurement direction, the second measurement direction, the third measurement direction, the fourth measurement direction and the fifth measurement direction, and the corresponding sub-regions in each measurement direction, may also be determined; and then, determining a region to be measured according to the path to be measured, and performing three-dimensional measurement on the region to be measured. In still other embodiments, if the three-dimensional shape of the entire surface of the mobile phone shell needs to be obtained, three-dimensional measurement needs to be performed on corresponding sub-regions of the surface of the mobile phone shell at the above measurement angles, and then the point clouds obtained by the sub-regions are spliced to obtain the three-dimensional shape of the entire surface of the mobile phone shell.
The invention also relates to a detection system for measuring an object, the detection system comprising: the device comprises a sub-region dividing module, a detecting module and a judging module, wherein the sub-region dividing module is used for dividing a region to be detected of an object into a plurality of sub-regions; the characteristic vector acquisition module is used for acquiring the characteristic vectors of all the subregions; a measuring direction setting module for setting a plurality of measuring directions; the measurement direction distribution module is used for distributing the measurement direction to each sub-region according to the included angle between the characteristic vector of each sub-region and each measurement direction; the detection device is used for carrying out partition measurement on the sub-regions in one or more measurement directions to obtain corresponding detection information, and the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region.
According to the above exemplary embodiments of the present invention, at least the following technical effects and advantages may be achieved: according to the spatial distribution of the region to be detected of the object and the angle range of the detection equipment, the region to be detected is conveniently, quickly and automatically partitioned, and the measurement direction is distributed to each sub-region for splicing after measurement, so that the precision and the efficiency of the whole detection process are maximized.
The foregoing description merely refers to preferred embodiments of the present invention. However, the invention is not limited to the specific embodiments described herein. Those skilled in the art will readily appreciate that various obvious modifications, adaptations, and alternatives may be made to the embodiments to adapt them to a particular situation without departing from the spirit of the present invention. Indeed, the scope of the invention is defined by the claims and may include other examples that may occur to those skilled in the art. Such other examples are intended to be within the scope of the claims if they have structural elements that do not differ from the literal language of the claims, or if they include equivalent structural elements with insubstantial differences from the literal languages of the claims.

Claims (14)

1. A method of detection comprising the steps of:
providing an object, and dividing a region to be measured of the object into a plurality of sub-regions;
acquiring a feature vector of each subregion;
setting a plurality of measuring directions;
distributing a measuring direction to each subregion according to an included angle between the characteristic vector of each subregion and each measuring direction;
providing a detection device;
and performing partition measurement on the sub-regions in one or more measurement directions by the detection equipment to obtain corresponding detection information, wherein the measurement direction for performing partition measurement on any sub-region is the measurement direction allocated to the sub-region.
2. The detection method according to claim 1, wherein the feature vector is a normal vector of each sub-region.
3. Detection method according to claim 1, characterized in that each sub-area is assigned only one measurement direction; one or more sub-regions are assigned the same measurement direction.
4. The detection method according to claim 1, wherein the step of assigning a measurement direction to each sub-area comprises: and allocating the measuring direction with the minimum included angle with the characteristic vector of each subarea to the subarea.
5. The detection method according to claim 1, wherein the step of assigning a measurement direction to each sub-area comprises: and sequentially carrying out allocation processing on the measurement directions to determine sub-regions allocated to each measurement direction.
6. The detection method according to claim 5, wherein the step of assigning a measurement direction comprises: determining a characteristic vector with an included angle smaller than a set threshold value with the measurement direction subjected to allocation processing from a sub-area where the measurement direction is not allocated as a vector to be allocated; and allocating the sub-area corresponding to the vector to be allocated to the measurement direction for the allocation processing.
7. The detection method according to claim 6, wherein the set threshold is less than or equal to an angular range of the detection device.
8. The inspection method according to claim 1, wherein a plurality of measurement directions are set according to the eigenvector of each sub-region and the angular range of the inspection apparatus, so that the angular ranges in the plurality of measurement directions cover the area to be inspected.
9. The detection method according to claim 8, wherein each eigenvector includes a plurality of first eigenvectors perpendicular to the first direction; the maximum value of an included angle between any two first characteristic vectors is a reference angle; the plurality of measurement directions comprises a first set of measurement directions, each measurement direction of the first set of measurement directions being perpendicular to the first direction; the product of the number of the measuring directions in the first group of measuring directions and the angle range of the detecting equipment is larger than or equal to the reference angle, and the included angle between the adjacent measuring directions is smaller than or equal to the angle range of the detecting equipment.
10. The detection method according to claim 1, wherein the detection information comprises three-dimensional topography information of the sub-region; the detection method further comprises the following steps: and splicing the three-dimensional shape information to obtain the complete three-dimensional shape of the area to be detected.
11. The inspection method of claim 1, wherein the inspection device comprises a dispersive confocal device, a binocular vision device, a digital holographic device, a structured illumination device, or a 3D microscopy device.
12. The detection method according to claim 1, characterized in that the detection device comprises: the object placing table is used for placing the object; a detection module for measuring the object; the first rotating platform comprises a first rotating shaft perpendicular to the arrangement direction of the detection module and the object, and the first rotating platform is used for driving the detection module or the object to rotate around the first rotating shaft.
13. The detection method according to claim 12, wherein the detection apparatus further comprises: the second rotating platform comprises a second rotating shaft parallel to the arrangement direction of the detection module and the object, and the second rotating platform is used for driving the detection module or the object to rotate around the second rotating shaft; the first translation stage comprises a first translation direction perpendicular to the arrangement direction of the detection modules and the object, and the first translation stage is used for driving the detection modules or the object to move along the first translation direction; the second translation stage comprises a second translation direction perpendicular to the arrangement direction of the detection module and the object, and the second translation stage is used for driving the detection module or the object to move along the second translation direction.
14. A detection system for measuring an object, the detection system comprising:
a sub-region dividing module for dividing a region to be measured of the object into a plurality of sub-regions;
the characteristic vector acquisition module is used for acquiring the characteristic vectors of all the sub-regions;
a measuring direction setting module for setting a plurality of measuring directions;
the measuring direction distribution module is used for distributing measuring directions to the sub-regions according to included angles between the characteristic vectors of the sub-regions and the measuring directions;
the detection device is used for carrying out partition measurement on the sub-regions in one or more measurement directions to obtain corresponding detection information, and the measurement direction for carrying out partition measurement on any sub-region is the measurement direction allocated to the sub-region.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103267491A (en) * 2012-07-17 2013-08-28 深圳大学 Method and system for automatically acquiring complete three-dimensional data of object surface
CN104657985A (en) * 2015-02-02 2015-05-27 燕山大学 Occlusion avoidance method for static visual target based on depth image occlusion information
CN107957249A (en) * 2016-10-14 2018-04-24 王喆 A kind of method and apparatus for measuring workpiece surface appearance
CN108548485A (en) * 2017-05-18 2018-09-18 金钱猫科技股份有限公司 A kind of image measuring method and system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103267491A (en) * 2012-07-17 2013-08-28 深圳大学 Method and system for automatically acquiring complete three-dimensional data of object surface
CN104657985A (en) * 2015-02-02 2015-05-27 燕山大学 Occlusion avoidance method for static visual target based on depth image occlusion information
CN107957249A (en) * 2016-10-14 2018-04-24 王喆 A kind of method and apparatus for measuring workpiece surface appearance
CN108548485A (en) * 2017-05-18 2018-09-18 金钱猫科技股份有限公司 A kind of image measuring method and system

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