CN110943644A - In-plane traveling wave type linear ultrasonic motor and platform feeding device - Google Patents
In-plane traveling wave type linear ultrasonic motor and platform feeding device Download PDFInfo
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
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Abstract
The invention relates to an in-plane traveling wave type linear ultrasonic motor and a platform feeding device, wherein the ultrasonic motor comprises a stator component and a rotor, the stator component is integrally of a cylindrical structure and comprises a circular cylindrical stator, a plurality of racks are uniformly distributed on the circumferential surface of the circular cylindrical stator, and two symmetrical thin-sheet circular-ring-shaped elastic substrates are respectively arranged on two end surfaces of the circular cylindrical stator; the piezoelectric ceramic plate group is symmetrically arranged by taking the circular cylindrical stator as a center, one side of each group of piezoelectric ceramic plates is connected with the thin circular elastic substrate, the other side of each group of piezoelectric ceramic plates is provided with a conductive film, and the thin circular elastic substrate is positioned between the circular cylindrical stator and the piezoelectric ceramic plate group; the rotor is arranged in a strip shape and is suspended on the circumferential surface of the circular cylindrical stator; the invention ensures that the frequency consistency is easy to adjust when the size of the stator is changed, has simple structure and easy miniaturization, and can keep high precision.
Description
Technical Field
The invention relates to an in-plane traveling wave type linear ultrasonic motor and a platform feeding device, and belongs to the technical field of ultrasonic motors.
Background
The linear ultrasonic motor is a classification of the ultrasonic motor, and utilizes the inverse piezoelectric effect of a piezoelectric element and the ultrasonic vibration of an elastic body to convert the micro-amplitude vibration of the elastic body into macroscopic linear motion of a rotor through the friction action between a stator and the rotor so as to directly push a load; the device has the advantages of direct generation of linear motion and traction force, high positioning and speed control precision, compact structure, flexible design, light weight, miniaturization and the like; heretofore, there have been a large variety of linear ultrasonic motors classified into standing wave types and traveling wave types according to the difference in the form of wave motion, wherein the standing wave type is classified into a single-leg type and a multi-leg type according to the number of driving legs on a stator; traveling wave modes can be further divided into straight beam and ring beam. The linear type ultrasonic motor is classified into two types of out-of-plane vibration and in-plane vibration according to whether the vibration displacement direction utilized by the linear type ultrasonic motor is perpendicular to the surface of the stator or in the plane of the stator.
In 1983, on the basis of research on a traveling wave type rotary ultrasonic motor, a japanese scholars Sashida proposed two traveling wave type linear ultrasonic motors, one is a ring beam type and the other is a straight beam type; in 1998, Hermann and schinkotte et al, Schinkothe, et al, developed a ring beam type traveling wave linear ultrasonic motor, which evolved from a rotary ultrasonic motor, in order to prevent reflection of waves, a guide rail was made into a closed ring beam, a traveling wave on the surface of the ring beam was excited by a piezoelectric ceramic bonded to the inside of the ring beam, and when a mover was pressed on a straight line section of the ring beam, the mover was linearly moved; in 1998, various electronics companies in japan have introduced a thin type linear ultrasonic motor which uses a triangular piezoelectric ceramic plate as a piezoelectric vibrator and is driven on one side, and thereafter, german PI company has also developed a similar linear ultrasonic motor. The traveling-wave linear ultrasonic motor proposed in chinese patent 201110039747.4 to kangson et al utilizes the out-of-plane mode of the annular elastic matrix to form traveling waves and uses the outer edge of the stator to drive the axial motion of the rail.
In recent years, a plurality of novel linear ultrasonic motors emerge, and no matter the standing wave linear ultrasonic motor or the traveling wave linear ultrasonic motor, the problems that the frequency consistency adjustment is greatly influenced by the size change of the stator (when the size of the stator becomes smaller, the frequency consistency adjustment is difficult) and the fixation is difficult exist, so that the motor miniaturization is limited to a certain extent, and meanwhile, because of the reason of poor frequency consistency, the control of the motor can be correspondingly influenced, so that a novel ultrasonic motor is urgently needed, and the problems that the frequency consistency adjustment is difficult and the fixation is difficult can be solved.
Disclosure of Invention
The invention provides an in-plane traveling wave type linear ultrasonic motor and a platform feeding device, which ensure that the frequency consistency is easy to adjust when the size of a stator changes, have simple structure and easy miniaturization, and can keep high precision.
The technical scheme adopted by the invention for solving the technical problems is as follows:
an in-plane traveling wave type linear ultrasonic motor comprises a stator assembly and a rotor, wherein the stator assembly is integrally of a cylindrical structure and comprises a circular cylindrical stator, a plurality of racks are uniformly distributed on the circumferential surface of the circular cylindrical stator, and two symmetrical thin-sheet circular-ring-shaped elastic matrixes are respectively arranged on two end surfaces of the circular cylindrical stator;
the piezoelectric ceramic plate group is symmetrically arranged by taking the circular cylindrical stator as a center, one side of each group of piezoelectric ceramic plates is connected with the thin circular elastic substrate, the other side of each group of piezoelectric ceramic plates is provided with a conductive film, and the thin circular elastic substrate is positioned between the circular cylindrical stator and the piezoelectric ceramic plate group;
polarization is carried out on the surface of the piezoelectric ceramic piece in a partition mode;
the rotor is arranged in a long strip shape and is suspended on the circumferential surface of the circular cylindrical stator, the part of the rotor, which is contacted with the circular cylindrical stator, is in a T shape, and the transverse part of the T shape is contacted with the circumferential surface of the circular cylindrical stator;
as a further preferable aspect of the present invention, a weight structure for positioning the annular cylindrical stator is installed in the thin sheet annular elastic base structure;
a flexible web is arranged in a space between the counterweight structure and the sheet annular elastic base body structure, and the counterweight structure, the flexible web and the sheet annular elastic base body are positioned in the same plane;
as a further preferred aspect of the present invention, a plurality of racks are uniformly arranged on the circumferential surface of the annular cylindrical stator, each rack is arranged in a zigzag structure, and the opening portion of the rack faces the center of the annular cylindrical stator;
sticking friction materials on the tooth surface of one of the racks;
as a further preferred aspect of the present invention, the piezoelectric ceramic sheet group includes a plurality of piezoelectric ceramic sheets connected in sequence, and each group of piezoelectric ceramic sheet group is in a ring shape matching with the sheet ring-shaped elastic base structure;
one side of each piezoelectric ceramic piece is adhered to the thin circular ring-shaped elastic substrate adjacent to the piezoelectric ceramic piece, and the piezoelectric ceramic pieces are divided into a plurality of subareas for polarization;
a platform feeding device based on an in-plane traveling wave type linear ultrasonic motor comprises a machine cover, a supporting piece, a base, a sliding rail assembly and a working platform, wherein the supporting piece is arranged in a U-shaped structure;
a slide bar is arranged on one outward side of the vertical part of the supporting piece, the slide bar is parallel to the radial direction of the circular cylindrical stator in the stator assembly, the base is also in a U-shaped structure and can be movably sleeved on the supporting piece, sliding grooves are respectively formed in the inner sides of the vertical part of the base, and the sliding grooves are matched with the slide bar;
a sliding rail assembly is arranged at the transverse part of the base, and the bottom of the working platform is movably connected to the transverse part of the base through the sliding rail assembly;
the rotor is arranged on one side of the working platform opposite to the stator component, the part of the rotor, which is in contact with the circular cylindrical stator, is in a T shape, and the transverse part of the T shape is in contact with the circumferential surface of the circular cylindrical stator;
as a further preferred aspect of the present invention, a preliminary pressure adjusting shim is provided at a joint of the closed end of the support member and the cover.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
1. the invention solves the problem that the frequency consistency is difficult to adjust when the size of the stator of the existing linear ultrasonic motor is changed, and simultaneously, compared with the existing traveling wave linear ultrasonic motor and other partial standing wave linear ultrasonic motors, the invention is easier to fix, easier to miniaturize and higher in control precision;
2. the invention can be used for feeding a precision platform and has wide application prospect in the aspects of biological medicine, robots and the like;
3. the invention can amplify the radial amplitude and the circumferential amplitude of the circular cylindrical stator, so that the excited ellipse for driving is better, and the output capacity of the motor is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of an in-plane traveling wave type linear ultrasonic motor according to the present invention;
FIG. 2 is an exploded schematic view of the stator assembly of a preferred embodiment of the in-plane traveling wave linear ultrasonic motor of the present invention;
fig. 3 is a schematic structural view of a circular ring cylindrical stator of a preferred embodiment of the in-plane traveling wave type linear ultrasonic motor of the present invention, wherein 3a is a three-dimensional schematic view and 3b is a sectional schematic view;
fig. 4 is a schematic diagram of the mode shape after polarization of the in-plane traveling wave type linear ultrasonic motor of the present invention, and 4a and 4b are schematic diagrams of two orthogonal mode shapes at the same frequency in example 2, respectively;
fig. 5 is a schematic view of a partition manner and a polarization manner of a piezoelectric ceramic plate according to a preferred embodiment of the in-plane traveling wave type linear ultrasonic motor of the present invention, in which 5a is a partition polarization manner of one group of piezoelectric ceramic plate sets in embodiment 2, and 5b is a partition polarization manner of another group of piezoelectric ceramic plate sets;
FIG. 6 is a schematic structural diagram of a platform feeding device based on an in-plane traveling wave type linear ultrasonic motor according to the present invention;
FIG. 7 illustrates a preferred embodiment of the present invention in which a straight tooth stator configuration was selected for comparative testing;
FIG. 8 is a schematic graph comparing radial and circumferential amplitudes of a straight tooth stator at 100V voltage and three thousandths of the damping ratio;
FIG. 9 is a schematic diagram showing the comparison of radial and circumferential amplitudes of the preferred embodiment 1 of the present invention at a voltage of 100V and a damping ratio of three thousandths;
fig. 10 is a comparison of the ellipses formed on the stator teeth in the radial and circumferential planes for the stator structure of the present application and the straight-tooth stator structure under respective optimal conditions.
In the figure: the device comprises a rotor 1, a stator component 2, a support 3, a prepressing adjustment gasket 4, a cover 5, a base 6, a sliding rail component 7, a working platform 8, a conductive film 2-1a, a conductive film 2-1b, a piezoelectric ceramic sheet 2-2a, a piezoelectric ceramic sheet 2-2b, a friction material 2-3, a circular cylindrical stator 2-4, a counterweight structure 2-4-1, a flexible web 2-4-2, a sheet circular elastic base 2-4-3, and a rack 2-4-4.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
In the existing linear ultrasonic motor, no matter the standing wave linear ultrasonic motor or the traveling wave linear ultrasonic motor, because the structure of the motor is not the characteristic of central symmetry like a standard circular ring, the adjustment of the modal frequency consistency is greatly influenced by the change of the size of the stator, namely, the adjustment of the frequency consistency needs a lot of time and energy under the condition of the change of the size of the stator, and meanwhile, the clamping and fixing are difficult, so that the mechanical performance of the motor and the miniaturization of the motor are seriously influenced; therefore, based on the current situation, the application provides a novel in-plane traveling wave type linear ultrasonic motor, as shown in fig. 1, as seen from the whole, the stator assembly 2 of the application is a highly symmetrical circular ring column structure, the rotor 1 is suspended on the circumferential surface of the stator assembly, the stator assembly 2 is set to be a highly symmetrical structure, and the problem that the frequency consistency is difficult to adjust when the size of the determinant is changed can be solved to a certain extent.
Example 1:
the scheme provided by the application is optimized, and as shown in fig. 2, the stator assembly 2 which is preferably selected is of a cylindrical structure as a whole and comprises a circular cylindrical stator 2-4, a plurality of racks 2-4-4 are uniformly distributed on the circumferential surface of the circular cylindrical stator 2-4, and two symmetrical thin-sheet circular-ring-shaped elastic matrixes 2-4-3 are respectively arranged on two end surfaces of the circular cylindrical stator 2-4;
two groups of piezoelectric ceramic pieces 2-2a and 2-2b are symmetrically arranged by taking a circular cylindrical stator 2-4 as a center, one side of each group of piezoelectric ceramic pieces 2-2a and 2-2b is connected with a thin circular ring-shaped elastic matrix 2-4-3, the other side of each group of piezoelectric ceramic pieces 2-2a and 2-2b is provided with conductive films 2-1a and 2-1b, and the thin circular ring-shaped elastic matrix 2-4-3 is positioned between the circular cylindrical stator 2-4 and the groups of piezoelectric ceramic pieces 2-2a and 2-2 b;
3a in FIG. 3 clearly shows that a plurality of racks 2-4-4 are uniformly distributed on the circumferential surface of the circular cylindrical stator 2-4, each rack 2-4-4 is arranged in a concave structure, and the opening part of the rack faces to the center of the circular cylindrical stator 2-4; the concave structure can amplify the radial amplitude and the transverse amplitude of the annular cylindrical stator 2-4 to a great extent, and meanwhile, the amplitude of the rack 2-4-4 in the axial direction of the annular cylindrical stator 2-4 can be ensured to be small, so that the excited ellipse for driving can improve the output capacity of the motor.
Comparing the structure of the preferred embodiment 1 of the present application with the straight-tooth stator structure shown in figure 7, in fig. 7, a stator having a diameter of 30mm and a height of 14mm was selected, and a circular cylindrical stator having a rack in a zigzag structure according to example 1 of the present application was similarly selected, and the diameter thereof was defined as 30mm and the height thereof was defined as 14mm, modal analysis and harmonic response analysis are carried out in Workbench finite element software, and after preliminary optimization and improvement, under the conditions of 100V voltage and three thousandth damping ratio, as shown in FIG. 8, the transverse axis is frequency, the longitudinal axis is amplitude, the maximum radial amplitude and the maximum circumferential amplitude of the straight tooth stator structure are respectively 1.9 μm and 1.5 μm, while the stator structure in the preferred embodiment is under the condition of 100V voltage and three thousandths of damping ratio, FIG. 9 shows the frequency along the transverse axis and the amplitude along the longitudinal axis, with maximum radial and circumferential amplitudes of 2.2 μm and 4 μm, respectively;
in order to more intuitively see the difference between the stator structure and the straight-tooth stator structure, the radial direction formed on the stator teeth and the ellipse on the circumferential plane are compared under respective optimal conditions of the stator structure and the straight-tooth stator structure, as shown in fig. 10, it can be obviously seen that the amplitude of the circular cylindrical stator with the concave-shaped racks in the radial direction and the circumferential direction is amplified to a certain extent.
As can also be seen in FIG. 3, a counterweight structure 2-4-1 for positioning the annular cylindrical stator 2-4 is arranged in the thin-sheet annular elastic matrix 2-4-3 structure; a flexible web 2-4-2 is arranged in a space between the counterweight structure 2-4-1 and the sheet annular elastic matrix 2-4-3 structure, and the counterweight structure 2-4-1, the flexible web 2-4-2 and the sheet annular elastic matrix 2-4-3 are positioned in the same plane;
it should be noted that the counterweight structure 2-4-1 is a fixed mounting structure, and is integrated with the annular cylindrical stator 2-4 and the flexible web 2-4-2, and the counterweight structure 2-4-1 and the flexible web 2-4-2 are integrated to better fix the annular cylindrical stator 2-4; meanwhile, the flexible web 2-4-2 is positioned in a space between the counterweight structure 2-4-1 and the thin-sheet circular-ring-shaped elastic base body 2-4-3 structure, so that the fixing mode of the in-plane traveling-wave linear ultrasonic motor is more convenient, the flexible web 2-4-2 also plays a role in isolation, the trend of traveling waves on the circular-ring-shaped cylindrical stator 2-4 is not influenced, and the driving effect is better.
In the figure 1, it can also be clearly seen that the whole rotor 1 is in an I-shaped long strip structure, the contact part of the rotor 1 and the circular cylindrical stator 2-4 is in a T shape, and the transverse part of the T shape is in contact with the rack 2-4-4 on the circumferential surface of the circular cylindrical stator 2-4; after the racks 2-4-4 are pre-stressed, slight bending deformation occurs, if the contact surface of the mover 1 and the stator is a plane with relatively high rigidity, the middle part of the mover 1 cannot be in close contact with the racks 2-4-4, so that the contact between the middle part of the mover 1 and the racks 2-4-4 is not uniform, but in the embodiment, the contact part of the mover 1 and the stator is set to be in a T shape with certain flexibility, so that when the mover 1 is in contact with the stator, along with the slight bending deformation of the racks 2-4-4, the T-shaped transverse part of the mover 1 can be adjusted according to the shapes of the racks 2-4-4, and also slightly deformed and tightly attached to the racks 2-4-4, so that the contact is more uniform, and the.
In the embodiment, two groups of piezoelectric ceramic pieces 2-2a and 2-2b are symmetrically arranged by taking a circular cylindrical stator 2-4 as a center, one side of each of the piezoelectric ceramic pieces 2-2a and 2-2b is adhered to a thin circular elastic substrate 2-4-3 adjacent to the piezoelectric ceramic piece 2-2a and 2-2b, each group of piezoelectric ceramic pieces 2-2a and 2-2b comprises a plurality of piezoelectric ceramic pieces 2-2a and 2-2b which are sequentially connected, and each group of piezoelectric ceramic pieces 2-2a and 2-2b is in a circular ring shape which is structurally matched with the thin circular elastic substrate 2-4-3; preferably, 22 piezoelectric ceramic pieces 2-2a and 2-2b are provided, 11 piezoelectric ceramic pieces 2-2a and 2-2b are provided in each group, and the surfaces of the piezoelectric ceramic pieces 2-2a and 2-2b are polarized in a subarea manner;
FIG. 5 is a schematic diagram of polarization of two groups of piezoelectric ceramic plates 2-2a, 2-2b, taking polarization of one group of piezoelectric ceramic plates 2-2a, 2-2b as an example, one piezoelectric ceramic plate 2-2a, 2-2b is selected as a quarter-wavelength partition in the first group of piezoelectric ceramic plates 2-2a, 2-2b, and the partition is not polarized, meanwhile, two piezoelectric ceramic plates 2-2a, 2-2b opposite to the partition are used as a three-eighths wavelength partition, two piezoelectric ceramic plates 2-2a, 2-2b of the three-eighths wavelength partition are adjacent, four piezoelectric ceramic plates 2-2a, 2-2b of the one-quarter wavelength partition and four piezoelectric ceramic plates 2-2a, 2-2b of the two-half-wavelength partition are arranged between the piezoelectric ceramic plates 2-2a, 2-2b of the three-eighths wavelength partition and each piezoelectric ceramic plate 2-2a, 2-, 2-2b, removing the piezoelectric ceramic pieces 2-2a and 2-2b of the unpolarized quarter-wavelength subareas, and alternately performing positive and negative polarization on the other piezoelectric ceramic pieces 2-2a and 2-2 b;
similarly, the other group of piezoceramics sheets 2-2a and 2-2b adopts the same polarization mode, as shown in 5b in fig. 5;
in the above polarization mode, so-called positive and negative alternate polarization, the positive sign indicates that the direction of polarization is perpendicular to the annular torus and is simultaneously outward in the axial direction, i.e., toward the adjacent conductive films 2-1a, 2-1b, and the negative sign indicates that the direction of polarization is perpendicular to the annular torus and is simultaneously inward in the axial direction, i.e., toward the annular cylindrical stator 2-4.
Then two excitation signals with a time difference of pi/2 are respectively conducted on the polarized piezoelectric ceramic pieces 2-2a and 2-2b, so that two mode vibration modes with a time difference of pi/2 and a space difference of pi/2 can be excited to form two mode vibration modes;
FIG. 5 shows that each group of piezoceramic wafers 2-2a and 2-2B is divided into an A phase and a B phase, the A phase in the first group is 2-2a-A, the B phase is 2-2a-B, the A phase in the second group is 2-2B-A, the B phase is 2-2B-B, the same sin (wt) electric signals are applied to the 2-2a-A and 2-2B-A, and cos (wt) electric signals which have the same time difference of pi/2 with the A signals are applied to the 2-2a-B and 2-2B-B, so that two modal vibration patterns are formed, as shown in FIG. 4, and an in-plane wave which moves along the circumference can be formed by coupling on the racks 2-4-4 which are uniformly distributed on the circumference surface of the cylindrical stator 2-4, as the tooth surface of one rack 2-4-4 is adhered with the friction material 2-3, the rack 2-4-4 adhered with the friction material 2-3 forms an elliptical motion in a radial and circumferential plane, and the rotor 1 is driven to move.
Example 2:
the in-plane traveling wave type linear ultrasonic motor in embodiment 1 has high versatility, and can be used for not only precision platform feeding and miniaturization structures, but also optical lenses, and preferably, taking the use of the in-platform feeding as an example, a platform feeding device based on the in-plane traveling wave type linear ultrasonic motor is provided, which comprises a machine cover 5, a support member 3, a base 6, a sliding rail assembly 7 and a working platform 8, wherein the support member 3 is arranged in a U-shaped structure, a stator assembly 2 is fixed in the U-shaped structure formed by the support member 3, and the closed end of the support member 3 is installed on the machine cover 5; a slide bar is arranged on one outward side of the vertical part of the support member 3, the slide bar is parallel to the radial direction of the inner circular cylindrical stator 2-4 in the stator assembly 2, the base 6 is also in a U-shaped structure and can be movably sleeved on the support member 3, sliding grooves are respectively arranged on the inner sides of the vertical part of the base 6, and the sliding grooves are matched with the slide bar; a slide rail assembly 7 is arranged at the transverse part of the base 6, and the bottom of the working platform 8 is movably connected with the transverse part of the base 6 through the slide rail assembly 7; the rotor 1 is arranged on one side of the working platform 8 opposite to the stator component 2, the contact part of the rotor 1 and the circular cylindrical stator 2-4 is in a T shape, and the transverse part of the T shape is in contact with the circumferential surface of the circular cylindrical stator 2-4;
the prepressing adjusting gasket 4 is arranged at the joint of the closed end of the support member 3 and the cover 5, so that the problem of uneven prepressing force application can be avoided, the prepressing force can be changed by changing the thickness of the prepressing adjusting gasket 4, the closed end of the support member 3 is made into a flexible structure, and the prepressing force applied on the flexible structure is similar to the prepressing force applied by a spring, so that the driving performance of the whole motor is better.
The cover 5 is fixedly connected with the base 6 through screws;
when the embodiment 1 is applied to the embodiment 2, the rotor 1 drives the working platform 8 to move after moving, and when the phase difference of the phase electric signals is-90 degrees, the working platform 8 slides reversely.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The meaning of "and/or" as used herein is intended to include both the individual components or both.
The term "connected" as used herein may mean either a direct connection between components or an indirect connection between components via other components.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (6)
1. The utility model provides an in-plane traveling wave type linear ultrasonic motor, includes stator module and active cell, its characterized in that: the stator assembly is integrally in a cylindrical structure and comprises a circular cylindrical stator, a plurality of racks are uniformly distributed on the circumferential surface of the circular cylindrical stator, and two symmetrical thin-sheet annular elastic matrixes are respectively arranged on two end surfaces of the circular cylindrical stator;
the piezoelectric ceramic plate group is symmetrically arranged by taking the circular cylindrical stator as a center, one side of each group of piezoelectric ceramic plates is connected with the thin circular elastic substrate, the other side of each group of piezoelectric ceramic plates is provided with a conductive film, and the thin circular elastic substrate is positioned between the circular cylindrical stator and the piezoelectric ceramic plate group;
polarization is carried out on the surface of the piezoelectric ceramic piece in a partition mode;
the rotor is arranged in a long strip shape and is suspended on the circumferential surface of the circular cylindrical stator, the contact part of the rotor and the circular cylindrical stator is in a T shape, and the transverse part of the T shape is in contact with the circumferential surface of the circular cylindrical stator.
2. The in-plane traveling wave type linear ultrasonic motor according to claim 1, wherein: a counterweight structure for positioning the circular cylindrical stator is arranged in the sheet circular elastic base body structure;
a flexible web is arranged in a space between the counterweight structure and the sheet circular ring-shaped elastic base body structure, and the counterweight structure, the flexible web and the sheet circular ring-shaped elastic base body are positioned in the same plane.
3. The in-plane traveling wave type linear ultrasonic motor according to claim 1, wherein: a plurality of racks are uniformly distributed on the circumferential surface of the circular cylindrical stator, each rack is arranged in a concave structure, and the opening part of each rack faces to the center of the circular cylindrical stator;
and a friction material is stuck on the tooth surface of one of the racks.
4. The in-plane traveling wave type linear ultrasonic motor according to claim 1, wherein: the piezoelectric ceramic sheet group comprises a plurality of piezoelectric ceramic sheets which are sequentially connected, and each group of piezoelectric ceramic sheet group is in a ring shape matched with the structure of the sheet ring-shaped elastic base body;
one side of each piezoelectric ceramic piece is adhered to the thin circular ring-shaped elastic base body adjacent to the piezoelectric ceramic piece, and the piezoelectric ceramic pieces are divided into a plurality of subareas for polarization.
5. The utility model provides a platform feeding device based on travelling wave type straight line supersound motor in face, includes cover, support piece, base, slide rail set spare and work platform, its characterized in that: the supporting piece is arranged in a U-shaped structure, the stator assembly is fixed in the U-shaped structure formed by the supporting piece, and the closed end of the supporting piece is arranged on the machine cover;
a slide bar is arranged on one outward side of the vertical part of the supporting piece, the slide bar is parallel to the radial direction of the circular cylindrical stator in the stator assembly, the base is also in a U-shaped structure and can be movably sleeved on the supporting piece, sliding grooves are respectively formed in the inner sides of the vertical part of the base, and the sliding grooves are matched with the slide bar;
a sliding rail assembly is arranged at the transverse part of the base, and the bottom of the working platform is movably connected to the transverse part of the base through the sliding rail assembly;
the rotor is arranged on one side of the working platform opposite to the stator assembly, the contact part of the rotor and the circular cylindrical stator is in a T shape, and the transverse part of the T shape is in contact with the circumferential surface of the circular cylindrical stator.
6. The in-plane traveling wave type linear ultrasonic motor-based platform feeding device according to claim 5, wherein: and a pre-pressure adjusting gasket is arranged at the joint of the closed end of the supporting piece and the cover.
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| CN111682795A (en) * | 2020-06-12 | 2020-09-18 | 南京航达超控科技有限公司 | Rotary traveling wave ultrasonic motor with backup function and drive control method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111682795A (en) * | 2020-06-12 | 2020-09-18 | 南京航达超控科技有限公司 | Rotary traveling wave ultrasonic motor with backup function and drive control method thereof |
| CN111682795B (en) * | 2020-06-12 | 2022-09-27 | 南京航达超控科技有限公司 | Rotary traveling wave ultrasonic motor with backup function and drive control method thereof |
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