CN110933169A - Remote group control system for semiconductor device - Google Patents
Remote group control system for semiconductor device Download PDFInfo
- Publication number
- CN110933169A CN110933169A CN201911198868.6A CN201911198868A CN110933169A CN 110933169 A CN110933169 A CN 110933169A CN 201911198868 A CN201911198868 A CN 201911198868A CN 110933169 A CN110933169 A CN 110933169A
- Authority
- CN
- China
- Prior art keywords
- client
- instruction
- server
- management
- result
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/01—Protocols
- H04L67/02—Protocols based on web technology, e.g. hypertext transfer protocol [HTTP]
- H04L67/025—Protocols based on web technology, e.g. hypertext transfer protocol [HTTP] for remote control or remote monitoring of applications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L41/00—Arrangements for maintenance, administration or management of data switching networks, e.g. of packet switching networks
- H04L41/06—Management of faults, events, alarms or notifications
- H04L41/0631—Management of faults, events, alarms or notifications using root cause analysis; using analysis of correlation between notifications, alarms or events based on decision criteria, e.g. hierarchy, tree or time analysis
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L41/00—Arrangements for maintenance, administration or management of data switching networks, e.g. of packet switching networks
- H04L41/06—Management of faults, events, alarms or notifications
- H04L41/069—Management of faults, events, alarms or notifications using logs of notifications; Post-processing of notifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L63/00—Network architectures or network communication protocols for network security
- H04L63/10—Network architectures or network communication protocols for network security for controlling access to devices or network resources
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/01—Protocols
- H04L67/12—Protocols specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks
- H04L67/125—Protocols specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks involving control of end-device applications over a network
Abstract
The present invention provides a remote group control system of a semiconductor device, the group control system comprising: the system comprises a server and at least one client, wherein the client is in communication connection with the server through a first preset protocol, the server is in communication connection with at least one semiconductor equipment group through a second preset protocol, and the semiconductor equipment group comprises at least one semiconductor equipment; the server is used for acquiring the operating state parameters of each semiconductor device in the semiconductor device group and sending the operating state parameters to the client; the client is used for displaying the running state parameters. The remote group control system can independently realize the monitoring and management functions of the semiconductor equipment based on the framework of the semiconductor equipment group, improves the production efficiency of a semiconductor manufacturing factory, improves the production line balance and timely delivery capacity of the semiconductor manufacturing factory, and reduces the production cost of the semiconductor manufacturing factory.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a remote group control system of semiconductor equipment.
Background
In a semiconductor manufacturing facility, seamless integration between production planning and scheduling, manufacturing execution, and material control is typically achieved by centrally managing the overall processes, materials, and menus of the semiconductor devices.
Currently, an engineer generally performs centralized management of the whole process, material, and menu (which may be referred to as data information) of a semiconductor device before the semiconductor device. In order to improve the production efficiency of a manufacturing plant, the number of machines is continuously increased in semiconductor enterprises, and as the number of semiconductor devices is gradually increased, if data information of the semiconductor devices is still managed in a centralized manner by an engineer operating in front of the semiconductor devices, the workload of the engineer is increased sharply, and the work efficiency is also greatly reduced.
Disclosure of Invention
The present invention is directed to solve at least one of the problems of the prior art, and provides a remote group control system for semiconductor devices.
To achieve the object of the present invention, there is provided in one aspect a remote group control system of a semiconductor device, including: a server, at least one client, wherein,
the at least one client is in communication connection with the server through a first preset protocol, the server is in communication connection with at least one semiconductor device group through a second preset protocol, and the semiconductor device group comprises at least one semiconductor device;
the server is used for acquiring the operation state parameters of each semiconductor device in the at least one semiconductor device group and sending the operation state parameters to the at least one client;
the at least one client is used for displaying the operation state parameters.
Optionally, the operating state parameter includes at least one of: equipment name, equipment model, current running state, name of currently executed process menu, process flow state, process flow time information and process parameter information.
Optionally, the at least one client is further configured to send a data management instruction to the server in response to a user operation, where the data management instruction includes at least one of: data record configuration instructions, data graph analysis instructions and data comparison instructions;
the server is further configured to receive the data management instruction, perform corresponding data management operation on the stored running state parameter according to the data management instruction, generate a first result, and send the first result to the at least one client, where the data management operation includes at least one of: configuring the recording mode of the running state parameters, converting the running state parameters into graphs or tables, and comparing part of the running state parameters with the other part of the running state parameters;
the at least one client is further used for performing at least one operation of storage, query and display on the first result.
Optionally, the at least one client is further configured to send, in response to a user operation, a process menu management instruction to the server, where the process menu management instruction includes at least one of: a process menu editing instruction, a process menu adding instruction, a process menu deleting instruction, a process menu comparison instruction, a process menu backup instruction and a process menu restoring instruction;
the server is further configured to receive the process menu management instruction, perform corresponding process menu management operation on the stored process menu according to the process menu management instruction, generate a second result, and send the second result to the at least one client, where the process menu management operation includes at least one of: editing a process menu, adding a process menu, deleting the process menu, comparing at least two process menus, backing up the process menu, and restoring the process menu based on the backed up process menu;
the at least one client is further used for performing at least one operation of storage, query and display on the second result.
Optionally, the server is further configured to monitor and store alarm information generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending an alarm management instruction to the server, wherein the alarm management instruction comprises at least one of the following: an alarm query instruction, an alarm analysis instruction and an alarm processing instruction;
the server is further configured to receive the alarm management instruction, perform a corresponding alarm management operation on the alarm information according to the alarm management instruction, generate a third result, and send the third result to the at least one client, where the alarm management operation includes at least one of: inquiring an alarm instruction, analyzing alarm information to determine the reason of alarm generation, and eliminating the alarm according to the alarm generation;
and the at least one client is used for performing at least one operation of storage, query and display on the third result.
Optionally, the server is further configured to record and store event information generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending an event management instruction to the server, wherein the event management instruction comprises at least one of the following: an event classification instruction, an event query instruction and an event analysis instruction;
the server is further configured to receive the event management instruction, perform a corresponding event management operation on the event information according to the event management instruction, generate a fourth result, and send the fourth result to the at least one client, where the event management operation includes at least one of: classifying the event information, inquiring the event information, and analyzing the reason of the event based on the event information;
and the at least one client is used for performing at least one operation of storage, query and display on the fourth result.
Optionally, the server is further configured to obtain and store a log generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending log management instructions to the server, and the log management instructions comprise at least one of the following: a log query instruction and a log backup instruction;
the server is further configured to receive the log management instruction, perform a corresponding log management operation on the log according to the log management instruction, generate a fifth result, and send the fifth result to the at least one client, where the log management operation includes at least one of: inquiring the log and backing up the log;
and the at least one client is used for performing at least one operation of storage, query and display on the fifth result.
Optionally, the at least one client is further configured to store user information of a user who has logged in the at least one client, all instructions issued by each user through the at least one client, and execution results of the instructions;
the at least one client is also used for responding to the operation of the user and displaying the user information of the user logged in the at least one client, all instructions issued by the users through the at least one client and the execution results of the instructions.
Optionally, the server is further configured to store user right information;
the at least one client is further used for responding to user operation and sending a permission management instruction to the server, wherein the permission management instruction comprises at least one of the following: a group user permission setting instruction, an individual user permission setting instruction and an operation permission setting instruction;
the server is further configured to perform, according to the received right management instruction and according to the right management instruction, a corresponding right management operation on the user right information, generate a sixth result, and send the sixth result to the at least one client, where the right management operation includes at least one of: setting group user authority, setting individual user authority and setting operation authority;
and the at least one client is used for performing at least one operation of storage, query and display on the sixth result.
Optionally, the first preset protocol includes a Web Service protocol, and the second preset protocol includes an HSMS protocol and/or an SECS-II protocol.
The invention has the following beneficial effects:
the invention provides a remote group control system of semiconductor equipment, which comprises a server and at least one client, the server is connected with at least one semiconductor equipment group and at least one client in a communication way, so that the running state parameters of the semiconductor equipment group and each semiconductor equipment can be directly acquired, and can send the acquired operation state parameters to at least one client and display the operation state parameters on the at least one client, the remote group control system can independently realize remote monitoring on the semiconductor equipment group and each semiconductor equipment based on the semiconductor equipment group architecture, is convenient for uniformly dispatching each semiconductor equipment based on the semiconductor equipment group, further realizes real-time performance, synchronism and the like of automatic control on the semiconductor equipment group, and greatly improves the efficiency of a semiconductor manufacturing plant. If a plurality of clients are adopted, distributed remote monitoring can be carried out on the semiconductor equipment group, and fine-grained monitoring on the semiconductor equipment group and the operation parameters of each semiconductor equipment can be realized.
Drawings
Fig. 1 is a schematic diagram of a remote group control system of a semiconductor device according to an embodiment of the present invention;
fig. 2 is a functional structure diagram of a remote group control system of a semiconductor device according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
The following describes the technical solutions of the present application and how to solve the above technical problems in specific embodiments with reference to the accompanying drawings.
The present embodiment provides a remote group control system for semiconductor devices, as shown in fig. 1, the group control system may include a server and at least one client (three are shown in the figure), wherein the client is communicatively connected to the server through a first preset protocol, the server is communicatively connected to at least one group of semiconductor devices through a second preset protocol, and the group of semiconductor devices includes at least one semiconductor device (three are shown in the figure); the server is used for acquiring the operating state parameters of each semiconductor device in the semiconductor device group and sending the operating state parameters to the client; the client is used for displaying the running state parameters.
The semiconductor device group may be understood as a device group (specific type may be a device model, a process type performed, and the like) composed of a plurality of semiconductor devices of the same type, at least one client may be understood as one or more clients (in this embodiment, a plurality of clients are described in this embodiment), and one or more servers (in this embodiment, a plurality of servers are described in this embodiment), each semiconductor device and each client in each semiconductor device group are usually connected to only one server, but each semiconductor device and/or each client may also be connected to a plurality of servers according to actual needs, which is not specifically limited in this embodiment.
The remote group control system for the semiconductor equipment provided by the embodiment comprises a server and at least one client, wherein the server is in communication connection with at least one semiconductor equipment group and at least one client, the operating state parameters of the semiconductor equipment group and each semiconductor equipment can be directly acquired independently based on the framework of the semiconductor equipment group, the acquired operating state parameters can be sent to the client, and the operating state parameters are displayed on the client, so that the remote monitoring on the semiconductor equipment group and each semiconductor equipment is realized, the unified scheduling on each semiconductor equipment based on the semiconductor equipment group is facilitated, the real-time performance, the synchronization performance and the like of the automatic control on the semiconductor equipment group are realized, and the efficiency of a semiconductor manufacturing plant is greatly improved. If a plurality of clients are adopted, distributed remote monitoring can be carried out on the semiconductor equipment group, and fine-grained monitoring on the semiconductor equipment group and the operation parameters of each semiconductor equipment can be realized.
In one embodiment, the first predetermined protocol includes a Web Service protocol, and the second predetermined protocol includes an HSMS (High-Speed SECS Message Services) protocol and/or an SECS-II protocol.
In this embodiment, the client is in communication connection with the server through a Web Service technology, and may specifically adopt an HTTP protocol to transmit data, where the transmitted data is encapsulated in an XML (a subset under a standard universal markup language) format. Web Service is a platform-independent, low-coupling, self-contained, programmable Web-based application that can be described, published, discovered, coordinated, and configured using the open XML standard for developing distributed, interoperable applications. The Web Service technology can ensure that different applications running on different machines can exchange data or be integrated with each other without additional and special third-party software or hardware. Applications implemented according to the Web Service specification may exchange data with each other regardless of the language, platform, or internal protocol used by them. WebService is a self-describing, self-contained, available network module that can perform specific business functions. Web services are also easy to deploy because they reduce the cost of application interfaces based on some conventional industry standards and some existing technologies, such as subset XML, HTTP under a standard generic markup language, and provide a generic mechanism for the integration of business processes across an entire enterprise and even across multiple organizations.
The server and the semiconductor device may be connected through a local area network of a semiconductor manufacturing plant (in an actual use process, if the semiconductor device is connected to the internet, the server may also be connected to the semiconductor device through the internet), and communicate with the group of semiconductor devices through the HSMS protocol and/or the SECS-II protocol.
The HSMS protocol is an important component of a SECS/GEM protocol (Semiconductor Equipment Standard/Generic Equipment Model), and the SECS/GEM protocol comprises a SECS-1 protocol, an HSMS protocol, a SECS-II protocol and a GEM protocol, wherein the SECS-I protocol specifies information such as an electrical specification, a transmission speed and a message header when Equipment and a host transmit. The HSMS protocol adopts a TCP/IP protocol to transmit information, and mainly aims to replace a slow SECS-I protocol. The SECS-II protocol specifies a standard structure for transmitting data. The GEM protocol may be understood as a subset of the SECS-II protocol, only requiring the implementation of the most common functions within SECS-II.
The HSMS protocol is adopted for communication, which is equivalent to providing a uniform service interface for the semiconductor equipment, so that if the semiconductor equipment meets the HSMS protocol, the semiconductor equipment can be connected with any one or more semiconductor equipment (meeting the HSMS protocol) after network connection information such as IP (Internet protocol) and port number of the corresponding semiconductor equipment is configured on the server, and the group control system can cover almost all the semiconductor equipment (because most of the semiconductor equipment meet the HSMS protocol). And because the server communicates with the semiconductor by adopting the HSMS protocol, the data stored in the semiconductor equipment can be directly acquired without accessing the operation control system of the semiconductor equipment, so that the group control system can independently operate from the control system of the semiconductor equipment, the integration level of the semiconductor equipment and the production efficiency of a semiconductor manufacturing factory are greatly improved, the production line balance and the timely delivery capacity of the semiconductor manufacturing factory are improved, and the production cost of the semiconductor manufacturing factory is reduced.
In one embodiment, the group control system may further include an adapter, which may be connected to the semiconductor group and the server, and is configured to provide an application interface for each semiconductor device, so that the semiconductor device can be connected to the server and a control device for controlling the operation of the semiconductor device by using the HSMS protocol.
In this embodiment, as shown in fig. 2, the group control system includes not only the server and the client, but also an adapter, and during the operation of the system, the adapter may manage and distribute data through the HSMS protocol, and may send various operating parameters of the semiconductor device to the operation control system of the semiconductor device (specifically, to the operation control server performing operation control) and the group control system, respectively, and the server of the group control system may automatically obtain the various operating state parameters through the HSMS protocol in a workflow manner, and send the various operating state parameters to the client through the Web Service protocol, and may display on a display interface of the client, so as to implement remote monitoring on the semiconductor device group and each semiconductor device. In addition, the server also has the functions of data management, equipment management, authority management, historical data management and the like, can correspondingly manage various operation state parameters when receiving a management command, and sends a result generated after management to the client. The client has the functions of storage, display, simple graph analysis and the like, and can store, inquire, display, graph analysis and the like on the result generated by the server.
More specifically, since the server and the semiconductor device communicate with each other by using the HSMS protocol, the data transmission format may use a standard structure for transmitting data specified by the SECS-II protocol to perform data transmission, for example, data transmission is performed between the server and the client by using an SxFy message format, where the x value and the y value may respectively represent the information type and the active content, specifically, referring to the E5 standard of SEMI, the client may send an instruction to the server to obtain a message with the SxFy message format, and different instructions may be used to obtain different data (different instructions may be implemented by changing the x and y values).
After the server acquires the operating state parameters of each semiconductor device, the server may directly process and store the acquired operating state parameters, or may store the operating state parameters (or the processed data) to a plurality of clients (which may store the operating state parameters in a message subscription manner), thereby implementing remote distributed monitoring and management of semiconductor device groups. It should be noted that, according to actual needs, the data may also be stored in only one client, which is not specifically limited in this embodiment.
In the present embodiment, the Web Service protocol and the HSMS protocol are not limited as long as the server and the client and the server and the semiconductor device can be connected in communication.
In another embodiment, the operating condition parameters include, but are not limited to: the group control system is used for remotely monitoring each semiconductor device and performing various management operations on the operation state parameters aiming at different semiconductor devices or different processes, such as data management, process menu management, alarm management, event management, log management, tracking management, authority management and the like.
Optionally, the client may send data management instructions to the server in response to a user operation, the data management instructions including but not limited to at least one of: data record configuration instructions, data graph analysis instructions and data comparison instructions. Correspondingly, the server may receive the data management instruction sent by the client, perform corresponding data management operation on the stored operating state parameter according to the data management instruction, generate a first result (such as a data record configuration result, a data graph analysis result, a data comparison result, and the like), and send the first result to the client, where the data management operation includes at least one of the following: configuring the recording mode of the operation state parameters, converting the operation state parameters into graphs or tables, and comparing part of the operation state parameters with the other part of the operation state parameters. The client may then at least one of store, query, and display the first result. Therefore, a user can conveniently analyze and arrange data generated in the technological process through the client to determine the technological effect, and meanwhile, the abnormity of the technology can be rapidly found through comparison and graph display, so that the technological parameters are timely adjusted to obtain the optimal technological effect and the like.
Optionally, the client, in response to a user operation, may further send a process menu management instruction to the server, where the process menu management instruction may include, but is not limited to, at least one of the following: a process menu editing instruction, a process menu adding instruction, a process menu deleting instruction, a process menu comparison instruction, a process menu backup instruction and a process menu restoring instruction. Correspondingly, the server may receive the process menu management instruction, perform corresponding process menu management operation on the stored process menu according to the process menu management instruction, and generate a second result (such as a process menu editing result, a process menu adding result, a process menu deleting result, a process menu comparing result, a process menu backup result, a process menu restoring result, and the like) to send to the client, where the process menu management operation includes at least one of the following: editing a process menu, adding a process menu, deleting a process menu, comparing at least two process menus, backing up the process menu, and restoring the process menu based on the backed up process menu. The client may then at least one of store, query, and display the second result. Therefore, the user can compare the process menu through the client conveniently, particularly the backup and the reduction of the process menu, and the method can play an important role in tracking and processing the process data abnormity.
Optionally, the server may also monitor and store alarm information generated by each semiconductor device in the semiconductor device group. The client may send alert management instructions to the server in response to user operations, which may include, but are not limited to, at least one of: alarm query instruction, alarm analysis instruction and alarm processing instruction. Correspondingly, the server may receive the alarm management instruction, perform a corresponding alarm management operation on the alarm information according to the alarm management instruction, generate a third result (such as an alarm query result, an alarm analysis result, an alarm processing result, and the like), and send the third result to the client, where the alarm management operation includes at least one of the following: inquiring the alarm instruction, analyzing the alarm information to determine the reason of the alarm, and eliminating the alarm according to the alarm. The client may then at least one of store, query, and display the third result. Therefore, a user can monitor, record, analyze and process (such as eliminating the alarm) the alarm generated by the semiconductor equipment in the process through the client so as to find the alarm in time, determine the reason of the alarm generation, and eliminate and prevent the alarm.
Optionally, the server may also record and store event information generated by each semiconductor device in the semiconductor device group. The client may send event management instructions to the server in response to a user operation, and the event management instructions may include, but are not limited to, at least one of: an event classification instruction, an event query instruction and an event analysis instruction. Correspondingly, the server is further configured to receive an event management instruction, perform a corresponding event management operation on the event information according to the event management instruction, generate a fourth result (such as a classification result, a query result, an analysis result, and the like), and send the fourth result to the client, where the event management operation includes at least one of the following: the event information is classified, the event information is inquired, and the reason of the event occurrence is analyzed based on the event information. Then, the client may perform at least one of storage, query, and display on the fourth result. Therefore, the management of the event information can be realized, and the remote monitoring and management of the event information of the semiconductor equipment by a user through the client side are facilitated.
Optionally, the server may further obtain and save logs generated by the respective semiconductor devices in the semiconductor device group. The client may also send log management instructions to the server in response to user operations, which may include, but are not limited to, at least one of: a log query instruction and a log backup instruction. Correspondingly, the server may receive the log management instruction, perform a corresponding log management operation on the log according to the log management instruction, generate a fifth result (such as a log query result, a log backup result, and the like), and send the fifth result to the client, where the log management operation may include at least one of the following: query logs and backup logs. Then, the client may perform at least one of storage, query, and display on the fifth result. Therefore, the management of the log information can be realized, and the remote monitoring and management of the log information of the semiconductor equipment by a user through the client side are facilitated.
Optionally, the client may further store user information of users who log in the client, all instructions issued by the users through the client, and execution results of the instructions. Correspondingly, the client can also respond to the operation of the user and display the user information of the user logged in the client, all instructions issued by each user through the client and the execution results of the instructions. Therefore, tracking management can be realized, a user can quickly find out who and when the user performs what operation in the process, and a better tracking query effect is achieved for checking the reasons of abnormal conditions.
Optionally, the server may also store user rights information. The client may also send a rights management instruction to the server in response to a user operation, and the rights management instruction may include, but is not limited to, at least one of: the system comprises a group user permission setting instruction, an individual user permission setting instruction and an operation permission setting instruction. Correspondingly, the server may receive the authority management instruction, perform corresponding authority management operation on the user authority information according to the authority management instruction, generate a sixth result (such as a group user authority setting result, an individual user authority setting result, an operation authority result, and the like), and send the sixth result to the client, where the authority management operation includes at least one of the following: the method comprises the steps of setting group user permission, setting individual user permission and setting operation permission. Then, the client may perform at least one of storage, query, and display on the sixth result. Therefore, the management of the user authority information can be realized, and the user can conveniently carry out remote monitoring and management on the user authority information of the semiconductor equipment through the client.
Further, the device names, device models, etc. of all semiconductor devices connected to the server may be displayed and confirmed through an interface of the server or the client, the alarm occurrence state or connection error may be displayed and confirmed through a graphic, and the networking state of the semiconductor devices may be confirmed through a beacon. Wherein the alarm display can be set to red and the process running display to green. The name of the currently running process file and the running state of the process (such as initial, idle, pause, preparation and execution) can be displayed and confirmed on the interface. Therefore, a user can judge the running state of the current process through the indicator lamp of the running state of the current process, and can check the execution result according to the starting time, the ending time and the current running time, check the on-off state of the current process step and the previous and next process steps, and running data, such as MFC (mass flow controller) flow setting data and other information.
It should be noted that management of operating state parameters of semiconductor devices may be divided into two layers, one layer is management of a group consisting of a plurality of identical semiconductor devices, and the other layer is management of individual semiconductor devices under the group. That is, the monitoring end can also be a group of other different semiconductor devices, because the group control system provides a management mechanism capable of performing distributed and remote monitoring, and the group control system further realizes real-time performance, synchronization and unified scheduling of automatic control through the management mechanism.
In addition, before the server communicates with the semiconductor device and the client, the server may be initialized, an initialization program may be installed on the server, a user may select a server to be initialized as needed, specifically, a server to be connected with the semiconductor device to be remotely monitored and managed, that is, a target server to be initialized actually needs to be selected according to the authority of the server, and then after receiving a load instruction sent by the user, the target server may run the initialization program, load a menu corresponding to a preset service authority, and configure a display interface for the server to display the configured semiconductor device and the connection state of the configured semiconductor device included in the menu.
After the initialization process is completed, the server can connect and communicate with the corresponding configured semiconductor device according to actual needs. Wherein the menu includes the configured semiconductor device and a connection state of the configured semiconductor device. The preset service authority may include which semiconductor devices the server corresponds to, which services (such as data management, authority management, and the like) can be performed on each semiconductor device, and in the actual application process, a technician may configure the information on the server in advance. The loading instruction can be understood as an instruction for the server to load the menu; the menu may be understood as a list of semiconductor devices and related information to be serviced by the server; the configured semiconductor device may be understood as a semiconductor device in which network connection information such as an IP and a port number has been configured on a server; the connection state includes connected and disconnected of the semiconductor device and the server.
Similarly, the client may initialize before communicating with the server, and accordingly, before sending a management instruction to the server, the database corresponding to the server may be connected first, all the semiconductor devices corresponding to the server are obtained from the database, and an initial value of data of each semiconductor device is configured, where the initial value may be 0 or a certain specified value, and initializing the data of the semiconductor device is equivalent to periodically cleaning the data, so that the operation and processing speed of the client may be increased, and the influence of previous data on the current data monitoring and management may be prevented.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A remote group control system for semiconductor devices, comprising: a server, at least one client, wherein,
the at least one client is in communication connection with the server through a first preset protocol, the server is in communication connection with at least one semiconductor device group through a second preset protocol, and the semiconductor device group comprises at least one semiconductor device;
the server is used for acquiring the operation state parameters of each semiconductor device in the at least one semiconductor device group and sending the operation state parameters to the at least one client;
the at least one client is used for displaying the operation state parameters.
2. The system of claim 1, wherein the operating condition parameters include at least one of: equipment name, equipment model, current running state, name of currently executed process menu, process flow state, process flow time information and process parameter information.
3. The system according to claim 1 or 2,
the at least one client is further used for responding to user operation and sending data management instructions to the server, and the data management instructions comprise at least one of the following: data record configuration instructions, data graph analysis instructions and data comparison instructions;
the server is further configured to receive the data management instruction, perform corresponding data management operation on the stored running state parameter according to the data management instruction, generate a first result, and send the first result to the at least one client, where the data management operation includes at least one of: configuring the recording mode of the running state parameters, converting the running state parameters into graphs or tables, and comparing part of the running state parameters with the other part of the running state parameters;
the at least one client is further used for performing at least one operation of storage, query and display on the first result.
4. The system according to claim 1 or 2,
the at least one client is further used for responding to user operation and sending a process menu management instruction to the server, wherein the process menu management instruction comprises at least one of the following: a process menu editing instruction, a process menu adding instruction, a process menu deleting instruction, a process menu comparison instruction, a process menu backup instruction and a process menu restoring instruction;
the server is further configured to receive the process menu management instruction, perform corresponding process menu management operation on the stored process menu according to the process menu management instruction, generate a second result, and send the second result to the at least one client, where the process menu management operation includes at least one of: editing a process menu, adding a process menu, deleting the process menu, comparing at least two process menus, backing up the process menu, and restoring the process menu based on the backed up process menu;
the at least one client is further used for performing at least one operation of storage, query and display on the second result.
5. The system according to claim 1 or 2,
the server is also used for monitoring and storing alarm information generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending an alarm management instruction to the server, wherein the alarm management instruction comprises at least one of the following: an alarm query instruction, an alarm analysis instruction and an alarm processing instruction;
the server is further configured to receive the alarm management instruction, perform a corresponding alarm management operation on the alarm information according to the alarm management instruction, generate a third result, and send the third result to the at least one client, where the alarm management operation includes at least one of: inquiring an alarm instruction, analyzing alarm information to determine the reason of alarm generation, and eliminating the alarm according to the alarm generation;
and the at least one client is used for performing at least one operation of storage, query and display on the third result.
6. The system according to claim 1 or 2,
the server is also used for recording and storing event information generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending an event management instruction to the server, wherein the event management instruction comprises at least one of the following: an event classification instruction, an event query instruction and an event analysis instruction;
the server is further configured to receive the event management instruction, perform a corresponding event management operation on the event information according to the event management instruction, generate a fourth result, and send the fourth result to the at least one client, where the event management operation includes at least one of: classifying the event information, inquiring the event information, and analyzing the reason of the event based on the event information;
and the at least one client is used for performing at least one operation of storage, query and display on the fourth result.
7. The system according to claim 1 or 2,
the server is also used for acquiring and storing logs generated by each semiconductor device in the at least one semiconductor device group;
the at least one client is further used for responding to user operation and sending log management instructions to the server, and the log management instructions comprise at least one of the following: a log query instruction and a log backup instruction;
the server is further configured to receive the log management instruction, perform a corresponding log management operation on the log according to the log management instruction, generate a fifth result, and send the fifth result to the at least one client, where the log management operation includes at least one of: inquiring the log and backing up the log;
and the at least one client is used for performing at least one operation of storage, query and display on the fifth result.
8. The system according to claim 1 or 2,
the at least one client is also used for storing the user information of the user who logs in the at least one client, all instructions issued by each user through the at least one client and the execution results of the instructions;
the at least one client is also used for responding to the operation of the user and displaying the user information of the user logged in the at least one client, all instructions issued by the users through the at least one client and the execution results of the instructions.
9. The system according to claim 1 or 2,
the server is also used for storing user authority information;
the at least one client is further used for responding to user operation and sending a permission management instruction to the server, wherein the permission management instruction comprises at least one of the following: a group user permission setting instruction, an individual user permission setting instruction and an operation permission setting instruction;
the server is further configured to perform, according to the received right management instruction and according to the right management instruction, a corresponding right management operation on the user right information, generate a sixth result, and send the sixth result to the at least one client, where the right management operation includes at least one of: setting group user authority, setting individual user authority and setting operation authority;
and the at least one client is used for performing at least one operation of storage, query and display on the sixth result.
10. The system according to claim 1 or 2, wherein the first predetermined protocol comprises a Web Service protocol, and the second predetermined protocol comprises an HSMS protocol and/or an SECS-II protocol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911198868.6A CN110933169A (en) | 2019-11-25 | 2019-11-25 | Remote group control system for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911198868.6A CN110933169A (en) | 2019-11-25 | 2019-11-25 | Remote group control system for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110933169A true CN110933169A (en) | 2020-03-27 |
Family
ID=69847673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911198868.6A Pending CN110933169A (en) | 2019-11-25 | 2019-11-25 | Remote group control system for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110933169A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115002080A (en) * | 2022-06-27 | 2022-09-02 | 上海轩田工业设备有限公司 | Information distribution method and distributor based on SECS/GEM SECSII transaction |
| CN115022384A (en) * | 2022-05-05 | 2022-09-06 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5086477A (en) * | 1990-08-07 | 1992-02-04 | Northwest Technology Corp. | Automated system for extracting design and layout information from an integrated circuit |
| EP1202525A2 (en) * | 2000-10-25 | 2002-05-02 | Sun Microsystems, Inc. | Remote control device for network devices |
| CN103763401A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Distributed management system of devices in semiconductor plant |
| CN107370823A (en) * | 2017-08-10 | 2017-11-21 | 南京泰治自动化技术有限公司 | Data acquisition and long-range control method, device and computer-readable recording medium |
-
2019
- 2019-11-25 CN CN201911198868.6A patent/CN110933169A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5086477A (en) * | 1990-08-07 | 1992-02-04 | Northwest Technology Corp. | Automated system for extracting design and layout information from an integrated circuit |
| EP1202525A2 (en) * | 2000-10-25 | 2002-05-02 | Sun Microsystems, Inc. | Remote control device for network devices |
| CN103763401A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Distributed management system of devices in semiconductor plant |
| CN107370823A (en) * | 2017-08-10 | 2017-11-21 | 南京泰治自动化技术有限公司 | Data acquisition and long-range control method, device and computer-readable recording medium |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115022384A (en) * | 2022-05-05 | 2022-09-06 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
| CN115022384B (en) * | 2022-05-05 | 2023-10-13 | 北京北方华创微电子装备有限公司 | HSMS communication connection method and device |
| CN115002080A (en) * | 2022-06-27 | 2022-09-02 | 上海轩田工业设备有限公司 | Information distribution method and distributor based on SECS/GEM SECSII transaction |
| CN115002080B (en) * | 2022-06-27 | 2024-04-02 | 上海轩田智能科技股份有限公司 | SECS/GEM SECSII transaction-based information distribution method and distribution device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2924574B1 (en) | Unified data ingestion adapter for migration of industrial data to a cloud platform | |
| US10223327B2 (en) | Collecting and delivering data to a big data machine in a process control system | |
| CN1188761C (en) | Function block apparatus for viewing data in a process control system | |
| US6738388B1 (en) | Shadow function block interface for use in a process control network | |
| CN108388223B (en) | Equipment control system based on data closed loop for intelligent factory | |
| JP3993243B2 (en) | Network accessible interface for process control network | |
| US6728262B1 (en) | System and method for integrating process control and network management | |
| JP2020518921A (en) | Open architecture industrial control system | |
| US20030195934A1 (en) | Web services-based communications for use with process control systems | |
| US20090157835A1 (en) | Presence Enabled Instance Messaging for Distributed Energy Management Solutions | |
| KR20050000345A (en) | Method and apparatus for self-configuring supervisory control and data acquisition(scada) system for distributed control | |
| CN109792442A (en) | Communication device, control device and communication means | |
| US20120310373A1 (en) | Systems and methods for alert capture and transmission | |
| US20050038916A1 (en) | Method for providing real-time production information using in-situ Web services embedded in electronic production equipment | |
| MXPA06013545A (en) | Automatic tool with data interface. | |
| CN110933169A (en) | Remote group control system for semiconductor device | |
| Lee et al. | Implementation of distributed smart factory platform based on edge computing and OPC UA | |
| CN104270432B (en) | Based on drilling well industry Real-time Data Service system and data interactive method | |
| CN112987667B (en) | Equipment remote configuration system and method of flexible manufacturing production line based on OPC UA | |
| CN113848834A (en) | Workshop equipment access system and method based on edge cloud cooperation | |
| KR20130110442A (en) | Method and system for managing centralized programable logic controller using simple network management protocol | |
| CN116261159A (en) | Method for realizing performance management based on NETCONF protocol in 5G open access network | |
| Sait et al. | Novel design of collaborative automation platform using real-time data distribution service middleware for an optimum process control environment | |
| JPH0951335A (en) | Network system | |
| CN116931511A (en) | Centralized management method and device for setting machine process, computer equipment and storage medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200327 |
|
| RJ01 | Rejection of invention patent application after publication |