CN110927001A - Humidity sensitive element and preparation process thereof - Google Patents
Humidity sensitive element and preparation process thereof Download PDFInfo
- Publication number
- CN110927001A CN110927001A CN201911070795.2A CN201911070795A CN110927001A CN 110927001 A CN110927001 A CN 110927001A CN 201911070795 A CN201911070795 A CN 201911070795A CN 110927001 A CN110927001 A CN 110927001A
- Authority
- CN
- China
- Prior art keywords
- humidity
- crystal oscillator
- sensitive element
- candle ash
- candle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
- G01N5/025—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content for determining moisture content
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
Abstract
The invention discloses a humidity sensitive element and a preparation process thereof. The humidity sensitive element in the present invention comprises: the crystal oscillator piece is arranged on the humidity sensitive material layer on the surface layer of one side surface of the crystal oscillator piece; the humidity sensitive material layer is formed by a candle ash nanoparticle structure formed by depositing at the top part of flame in the fuel combustion process, and the surface layer of the candle ash nanoparticle structure is subjected to hydrophilic treatment. The product of the invention has simple preparation and low cost; the sensor prepared by the process has the advantages of short response time, high sensitivity and the like.
Description
Technical Field
The invention relates to the field of sensors, in particular to a humidity sensitive element and a preparation process thereof.
Background
Humidity sensors are closely related to the fields of atmospheric monitoring, industrial production, biomedical science and the like. With the continuous development of science and technology, the demand of people on high-performance humidity sensors is continuously increased, the high-efficiency and reliable humidity sensors have higher and higher application values, and the development of high-performance humidity-sensitive materials playing a key role in the humidity sensors is particularly important. In recent years, metal oxides, metal oxide/polymer composite materials, novel nano materials and the like are widely applied to the field of humidity sensors, and gradually become the main development direction and research focus of humidity sensitive materials. Meanwhile, compared with the traditional resistance type or capacitance type humidity sensor, the micro-balance type humidity sensor has the characteristic of high precision.
The humidity sensitive material of most existing crystal vibration type humidity sensors adopts metal oxide, for example, a quartz crystal microbalance humidity sensor and a preparation method thereof are disclosed in CN 109507059A, wherein a ZnO catalyst layer is firstly deposited on the surface of a quartz crystal, a Cu seed layer is deposited on the surface of the ZnO catalyst layer, then the quartz crystal microbalance humidity sensor is put into a mixed solution, and under the action of the ZnO catalyst layer, ultra-compact ultra-hydrophilic Cu (OH) is grown2Nanowires to obtain a quartz crystal microbalance humidity sensor. For another example: the preparation method of the high-sensitivity zinc oxide humidity-sensitive material disclosed in CN 102689919A specifically comprises the following steps: (1) mixing zinc salt and an organic solvent in proportion, slowly heating to 120-200 ℃ while stirring, and preserving heat for 0.5-2 hours; (2) carrying out centrifugal separation on the solution obtained in the step (1), and taking supernatant liquor for later use; (3) repeating the step (1), heating to 120-200 ℃, adding a proper amount of supernatant obtained in the step (2), continuously raising the temperature to 120-200 ℃, and preserving the temperature for 0.5-6 hours to obtain a milky colloidal solution, wherein the adding amount of the supernatant can be changed within the range of 0.5-50 mL according to specific requirements; (4) and uniformly dropwise adding the obtained milky colloidal solution onto a crystal oscillator, and drying for 1-6 hours at the temperature of 60-200 ℃ in vacuum to obtain the zinc oxide humidity sensitive material.
From the above, when the metal oxide is used as the humidity sensitive layer in the prior art, the preparation process thereof requires the reaction of the raw materials in the mixed solution, and the drying operation of the solution, etc.; and the raw material cost is also relatively high. In summary, the existing method using metal oxide as the humidity sensitive layer of the crystal oscillator wafer has the disadvantages of complex process, high cost and possible pollution.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the existing method for using metal oxide as the humidity sensitive layer of the crystal oscillator wafer has the disadvantages of complex process, high cost and pollution; the invention provides a humidity sensitive element, a preparation process thereof and a corresponding test method, which solve the problems.
A moisture sensitive element comprising: the crystal oscillator piece is arranged on the humidity sensitive material layer on the surface layer of one side surface of the crystal oscillator piece; the moisture-sensitive material layer is formed by a candle ash nanoparticle structure formed by flame deposition in the fuel combustion process, and the surface layer of the candle ash nanoparticle structure is subjected to hydrophilic treatment.
The thickness of the humidity sensitive material layer is 1-8 mu m.
The crystal oscillator is a quartz crystal oscillator with the reference frequency of 5-10 MHz. Namely, the crystal oscillator plate is a quartz crystal oscillator plate, and the reference frequency of the quartz crystal oscillator plate is 5-10 MHz.
A process for preparing a humidity sensitive element comprising:
placing a crystal oscillator sheet above flame of fuel combustion, fumigating and plating candle ash nano particles formed in the combustion process on the crystal oscillator sheet in a fumigating and plating mode to form a candle ash nano particle structure, and then carrying out hydrophilic treatment on the surface of the candle ash nano particle structure to form a humidity sensitive element;
or after the candle ash nano particles formed in the combustion process are collected, the candle ash nano particles are attached to a crystal oscillator piece in a spraying mode to form a candle ash nano particle structure, and then the surface of the candle ash nano particle structure is subjected to hydrophilic treatment to form the humidity sensitive element.
The distance between the crystal oscillation piece and the top end of the inner flame of the flame is 0.5 cm-1.5 cm, and the crystal oscillation piece is moved at a constant speed in the fumigating and plating process.
The thickness of the candle ash nano particle structure is 1-8 mu m.
The hydrophilic treatment is carried out by oxygen plasma bombardment.
The oxygen flow in the oxygen plasma bombardment is 1-5L/min, and the power is 50-500W.
The bombardment time of the oxygen plasma is less than 70s, and the preferred bombardment time is 30-60 s.
The fuel is wax, alcohol or oil.
The crystal oscillator is a quartz crystal oscillator with the reference frequency of 5-10 MHz. Namely, the crystal oscillator plate is a quartz crystal oscillator plate, and the reference frequency of the quartz crystal oscillator plate is 5-10 MHz.
A method of using a moisture sensitive element comprising:
the humidity sensitive element is connected with a frequency meter through a lead,
and (3) placing the humidity sensitive element in an environment to be detected for detection, reading the numerical value of the frequency meter, and converting the numerical value into humidity.
The technical scheme of the invention has the following advantages:
1. the humidity-sensitive material layer is formed by a candle ash nanoparticle structure formed by flame deposition in the fuel combustion process, and the surface layer of the humidity-sensitive material layer is subjected to hydrophilic treatment; the candle ash nano particle structure comprises a loose porous structure, hydrophilic groups such as hydroxyl and carboxyl can be better introduced into the surface of the candle ash nano particle structure through hydrophilic treatment, so that the surface of the candle ash nano particle structure is changed from hydrophobic to hydrophilic, and then the candle ash nano particle structure has good adsorption effect on water molecules in the air, improves the hydrophilic performance, further improves the detection sensitivity, and meets the requirement of a humidity sensitive material serving as a humidity sensitive element; compared with the metal oxide in the prior art, the cost of the candle ash nanoparticle structure on the humidity sensitive element is lower, and the preparation is simpler, so that the candle ash nanoparticle structure has the advantage of lower cost when being used as a humidity sensitive material.
2. In the preparation process, a series of steps of reacting raw materials in a solution, drying and the like are not needed, and the humidity-sensitive material only needs to carry out hydrophilic treatment on the surface of the crystal oscillator after fumigating and plating the crystal oscillator or collect candle ash nanoparticles and spray the candle ash nanoparticles on the crystal oscillator and then carry out hydrophilic treatment on the surface of the crystal oscillator, so that the overall operation of preparing the structure of the candle ash nanoparticles on the crystal oscillator is very simple, and the cost is low; namely, the humidity sensitive element prepared by adopting the candle ash nanoparticle structure has the advantages of simple preparation, low cost, rich sources and the like, and the candle ash nanoparticles which are originally environmental pollutants are converted into excellent humidity sensitive materials.
3. According to the invention, through optimization of parameters in the preparation process, including the structural thickness of the candle ash nanoparticles, the processing mode of oxygen plasma bombardment and the setting of parameters of the oxygen plasma bombardment, the humidity-sensitive element with the advantages of short response time, high sensitivity, good stability and the like can be prepared, and the advantages can be effectively proved through experimental results of the embodiment. Such as: in the humidity response test, the humidity sensitive element of the invention carries out a plurality of cycle measurements in an environment with relative humidity of 30% RH and 60% RH, after the plurality of cycle measurements, each humidity change causes the frequency change, and the signals are very consistent; in the stability test, the change of the curve in the test result shows that the performance of the microbalance humidity sensitive element is basically kept consistent in the continuous seven-day experiment; in conclusion, the humidity sensitive element prepared by the invention has the advantages of short response time, high sensitivity, good stability and the like.
Drawings
In order to show the structure of the present invention more clearly, the present invention also provides the following drawings.
FIG. 1 is a process flow chart for the preparation of the humidity sensitive element in example 1 of the present invention.
FIG. 2 is a graph showing the performance of the humidity sensor formed after different oxygen plasma bombardment treatment times.
FIG. 3 is a humidity response test graph of the humidity sensor obtained when the oxygen plasma bombardment treatment time was 60s in the present invention.
FIG. 4 is a graph showing a hysteresis test of the humidity sensitive element obtained when the oxygen plasma bombardment treatment time was 60s in the present invention.
FIG. 5 is a graph showing a stability test of the humidity sensor obtained when the oxygen plasma bombardment treatment time is 60s in the present invention.
FIG. 6 is a graph of the performance of the humidity sensitive element made after different deposition time treatments.
FIG. 7 is a graph showing the performance of the humidity sensor manufactured in example 3.
Description of reference numerals:
1-crystal oscillation sheet, 2-candle ash nanoparticle structure, 3-hydrophilic treatment and 4-fuel.
Detailed Description
The following examples are provided to further understand the present invention, not to limit the scope of the present invention, but to provide the best mode, not to limit the content and the protection scope of the present invention, and any product similar or similar to the present invention, which is obtained by combining the present invention with other prior art features, falls within the protection scope of the present invention.
The examples do not show the specific experimental steps or conditions, and can be performed according to the conventional experimental steps described in the literature in the field. The reagents and other instruments used are not indicated by manufacturers, and are all conventional reagent products which can be obtained commercially.
Example 1
A humidity sensitive element comprises a crystal oscillator plate 1 and a humidity sensitive material layer arranged on the surface layer of one side face of the crystal oscillator plate 1, wherein the humidity sensitive material layer is composed of a candle ash nanoparticle structure 2 formed by flame deposition in the combustion process of fuel 4, and the surface layer of the candle ash nanoparticle structure 2 is subjected to hydrophilic treatment 3.
The preparation process of the humidity sensitive element disclosed by the invention is specifically set as follows as shown in figure 1:
step one, preparing a crystal oscillator wafer 1, wherein the crystal oscillator wafer 1 is preferably a quartz crystal oscillator wafer, and the reference frequency of the quartz crystal oscillator wafer is 5 MHz.
Step two, preparing a candle ash nanoparticle structure 2; in order to be used as a humidity sensor, the thickness of the candle ash nanoparticle structure 2 in this embodiment is preferably 1 μm to 8 μm, and the specific preparation process is as follows:
the crystal oscillator plate 1 is directly placed above the flame of burning the fuel 4, the type of the fuel 4 in the invention can be various, such as wax, alcohol or oil, etc., candle ash nano-particles can be generated above the flame generated by burning, and wax is used as the fuel 4 in the embodiment. As shown in FIG. 1, candle ash nanoparticles generated above the flame of the candle can be directly fumed on the crystal plate 1 to form a candle ash nanoparticle structure 2. In the fumigating and plating process, in order to form uniformly distributed candle ash nanoparticle structures 2, the crystal oscillation piece 1 is arranged 0.5 cm-1.5 cm away from the top end of flame inside flame of the ignited candle 4, and the crystal oscillation piece 1 is moved at a constant speed in the fumigating and plating process. In the embodiment, the distance between the crystal oscillator piece 1 and the flame top end of the candle 4 is set to be 1cm, the crystal oscillator piece 1 is transversely moved at a constant speed for 10 seconds, and then the candle ash nanoparticle structure 2 can be formed on the crystal oscillator piece 1.
Step three, preparing a humidity sensitive element; and (3) performing hydrophilic treatment on the crystal oscillator plate 1 with the candle ash nanoparticle structure 2 prepared in the step (II), wherein the hydrophilic treatment 3 is performed in various manners, and an oxygen plasma bombardment treatment manner is selected in the embodiment, and the specific treatment process is as follows: putting one side of the candle ash nano particle structure 2 upwards into an oxygen plasma cleaning machine, and processing for a certain time under the conditions that the cavity temperature is room temperature, the oxygen flow is 2.5L/min and the power is 300W to prepare the humidity sensitive element.
When the mode of the hydrophilic treatment 3 is selected as the mode of oxygen plasma bombardment in the invention, because the adhesion degree of the candle ash nano particles and the crystal oscillator plate 1 is not high, the candle ash nano particles can be cleaned by the oxygen plasma treatment for a long time to influence the signal of the humidity sensitive element, and therefore, the treatment time of the oxygen plasma bombardment is less than 70 s. In this example, five types of humidity sensors were prepared, in which the treatment time of oxygen plasma bombardment was 0s, 10s, 20s, 30s, and 60s, respectively.
The test method and test results of the humidity sensitive element of the present invention are as follows:
the invention adopts the humidity sensitive element, and the frequency meter is connected with the two connecting terminals on the crystal oscillator plate 1 of the humidity sensitive element through the conducting wires. Then, the performance of the humidity sensitive element is tested, and the working principle of the humidity sensitive element is as follows: the moisture sensitive material layer of flame deposit is loose porous structure, and because through oxygen plasma processing back, the moisture sensitive material layer surface is rich in a large amount of hydrophilic groups, like hydroxyl and carboxyl, and then makes its surface change into hydrophilic by hydrophobic, then has good adsorption to the hydrone in the air, when the hydrone adsorbs on candle ash nano particle layer, can increase the quality on quartz crystal oscillator surface to arouse the change of crystal oscillator frequency, and then reach the function of moisture sensitive material.
1. Performance testing of different moisture sensitive elements
The humidity sensor of this example was tested using a rapid humidity change box model SDJS 701B. The humidity sensitive element obtained in the embodiment is placed in the rapid humidity change box, the frequency meter is connected with the two connecting terminals on the humidity sensitive element through the conducting wires, and after the frequency meter reading is stable, the relative humidity in the rapid humidity change box is adjusted from 30% RH to 90% RH in 10% RH step length. Recording the frequency readings in real time to obtain a humidity response test graph of the humidity sensitive element as shown in fig. 2, and it can be seen that: the oxygen plasma treatment time affects the performance of the humidity sensitive element, and the performance is best when the treatment time is 60 s.
2. Hysteresis test of moisture sensitive elements
The humidity-sensitive element treated by oxygen plasma for 60s in this embodiment is continuously tested in the rapid humidity change chamber, when the relative humidity reaches 90% RH and is stable, the humidity is gradually reduced by 10% RH each time until the relative humidity is 30% RH, and then the indication of the frequency meter is recorded to obtain the hysteresis test curve of the humidity-sensitive element, as shown in fig. 4.
3. Humidity response test of humidity sensitive element
The humidity-sensitive element with the oxygen plasma processing time of 60s in the embodiment is used for testing, the relative humidity in the test environment is 30% RH, the relative humidity in the SDJS701B type rapid humidity change box is set to be 60% RH, after the frequency of the humidity-sensitive element in the environment is kept stable, the humidity-sensitive element is quickly transferred to the humidity change box, the operation is repeated for several times and data is recorded, and a humidity response test curve graph of the humidity-sensitive element is obtained, as shown in fig. 3, it can be seen from fig. 3 that each humidity change can cause the frequency change, the signals are very consistent, and the performance of the humidity-sensitive element is still kept stable after a plurality of cycles.
4. Stability test of moisture sensitive elements
The humidity sensor in this embodiment is tested by using the humidity sensor with the oxygen plasma processing time of 60s, the humidity sensor is respectively placed in the environment with the relative humidity of 30% RH, 60% RH and 90% RH, and is continuously placed for seven days, and the detection data of the humidity sensor in this embodiment is continuously recorded, so as to obtain the stability test curve of the humidity sensor, as shown in fig. 5, it can be known from fig. 5 that: the performance of the humidity sensitive element of the invention is basically kept consistent and the performance is stable.
Example 2
A humidity sensitive element comprises a crystal oscillator plate 1 and a humidity sensitive material layer arranged on the surface layer of one side face of the crystal oscillator plate 1, wherein the humidity sensitive material layer is composed of a candle ash nanoparticle structure 2 formed by flame deposition in the combustion process of fuel 4, and the surface layer of the candle ash nanoparticle structure 2 is subjected to hydrophilic treatment 3.
The preparation process of the humidity sensitive element disclosed by the invention is specifically set as follows as shown in figure 1:
step one, preparing a crystal oscillator wafer 1, wherein the crystal oscillator wafer 1 is preferably a quartz crystal oscillator wafer, and the reference frequency of the quartz crystal oscillator wafer is 5 MHz.
Step two, preparing a candle ash nanoparticle structure 2; in order to be used as a humidity sensor, the thickness of the candle ash nanoparticle structure 2 in this embodiment is preferably 1 μm to 8 μm, and the specific preparation process is as follows:
the crystal oscillator plate 1 is directly placed above the flame of burning the fuel 4, the type of the fuel 4 in the invention can be various, such as wax, alcohol or oil, etc., candle ash nano-particles can be generated above the flame generated by burning, and wax is used as the fuel 4 in the embodiment. As shown in FIG. 1, candle ash nanoparticles generated above the flame of the candle can be directly fumed on the crystal plate 1 to form a candle ash nanoparticle structure 2. In the fumigating and plating process, in order to form uniformly distributed candle ash nanoparticle structures 2, the crystal oscillation piece 1 is arranged 0.5 cm-1.5 cm away from the top end of flame inside flame of the ignited candle 4, and the crystal oscillation piece 1 is moved at a constant speed in the fumigating and plating process. In the embodiment, the distance between the crystal oscillator piece 1 and the flame top end of the candle 4 is set to be 1cm, the crystal oscillator piece 1 is transversely moved at a constant speed for 5s, 10s and 15s continuously, and then the candle ash nanoparticle structure 2 can be formed on the crystal oscillator piece 1.
Step three, preparing a humidity sensitive element; and (3) performing hydrophilic treatment on the crystal oscillator plate 1 with the candle ash nanoparticle structure 2 prepared in the step (II), wherein the hydrophilic treatment 3 is performed in various manners, and an oxygen plasma bombardment treatment manner is selected in the embodiment, and the specific treatment process is as follows: putting one side of the candle ash nano particle structure 2 upwards into an oxygen plasma cleaning machine, and processing for 60s under the conditions that the cavity temperature is room temperature, the oxygen flow is 2.5L/min and the power is 300W to prepare the humidity sensitive element.
The humidity sensor in this example was subjected to the performance tests in example 1, and the results are shown in FIG. 6. In the preparation process of the invention, the longer the deposition time, the thicker the candle ash nanoparticle structure thickness, as can be seen from fig. 6, for the crystal oscillator plate, the deposition time in this embodiment is within 15s, which can achieve the purpose of detection, and when the deposition time is preferably 5-10 s, the humidity sensitive element with better performance can be prepared. Through detection, the thickness of the candle ash nano particle structure is 1-8 μm within the deposition time of the invention. That is, a humidity sensor capable of humidity detection can be obtained in the range of 1 μm to 8 μm in thickness of the candelilla nanoparticle structure.
Example 3
A preparation process of a humidity sensitive element specifically comprises the following steps:
collecting candle ash nanoparticles formed in a combustion process; preparing a crystal oscillator wafer 1, wherein the crystal oscillator wafer 1 is preferably a quartz crystal oscillator wafer, and the reference frequency of the quartz crystal oscillator wafer is 5 MHz;
step two, spraying the collected candle ash nanoparticles on the crystal oscillator plate 1 to form a candle ash nanoparticle structure 2, wherein the thickness of the candle ash nanoparticle spraying is set to be 6 μm in the embodiment, namely the thickness of the candle ash nanoparticle structure is 6 μm;
performing hydrophilic treatment 3 on the surface of the candle ash nanoparticle structure 2, wherein the hydrophilic treatment 3 is selected as an oxygen plasma bombardment treatment mode in the embodiment, and the specific treatment process comprises the following steps: putting one side of the candle ash nanoparticle structure 2 upwards into an oxygen plasma cleaning machine, processing for 60s under the conditions of room temperature, oxygen flow of 1.5L/min and power of 100W to prepare a first humidity sensitive element, processing for 60s under the conditions of room temperature, oxygen flow of 4L/min and power of 400W to prepare a second humidity sensitive element, and processing for 60s under the conditions of room temperature, oxygen flow of 2.5L/min and power of 300W to prepare a third humidity sensitive element.
The method for testing the performance of the different humidity-sensitive elements in example 1 was performed by using the humidity-sensitive element one, the humidity-sensitive element two, and the humidity-sensitive element three in this example, and the test results are shown in fig. 7. As can be seen from FIG. 7, the crystal oscillator plate can produce a humidity sensor with better performance within the preferred parameter range of the present invention.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. A moisture sensitive element, comprising: the crystal oscillator piece (1) is arranged on a humidity-sensitive material layer on the surface layer of one side face of the crystal oscillator piece (1), the humidity-sensitive material layer is formed by candle ash nano particle structures (2) formed by flame deposition in the combustion process of fuel (4), and the surface layer of the candle ash nano particle structures (2) is subjected to hydrophilic treatment (3).
2. The moisture sensitive element according to claim 1, wherein the thickness of the layer of moisture sensitive material is between 1 μm and 8 μm.
3. The humidity sensor according to claim 1 or 2, wherein the quartz crystal plate (1) is a quartz crystal plate with a reference frequency of 5 to 10 MHz.
4. A process for preparing a humidity sensitive element comprising:
placing the crystal oscillator sheet (1) above the flame of burning fuel (4), fumigating and plating candle ash nano particles formed in the burning process on the crystal oscillator sheet (1) in a fumigating and plating mode to form a candle ash nano particle structure (2), and then carrying out hydrophilic treatment (3) on the surface of the candle ash nano particle structure (2) to form a humidity sensitive element;
or after collecting candle ash nano particles formed in the combustion process, attaching the candle ash nano particles to the crystal oscillator plate (1) in a spraying mode to form a candle ash nano particle structure (2), and then carrying out hydrophilic treatment (3) on the surface of the candle ash nano particle structure (2) to form the humidity sensitive element.
5. The process for preparing the humidity sensitive element according to claim 4, wherein the distance between the crystal oscillator plate (1) and the top end of the inner flame of the flame is 0.5 cm-1.5 cm, and the crystal oscillator plate (1) is moved at a constant speed in the fumigating and plating process.
6. Process for the preparation of a humidity sensitive element according to claim 4 or 5 wherein the thickness of the candle ash nanoparticle structure (2) is between 1 μm and 8 μm.
7. Process for the preparation of a humidity sensor according to any of claims 4 to 6, characterized in that the hydrophilic treatment (3) is carried out by oxygen plasma bombardment.
8. The process for preparing the humidity sensor according to claim 7, wherein the oxygen flow rate in the oxygen plasma bombardment is 1-5L/min, and the power is 50-500W.
9. The process for preparing a humidity sensor according to claim 7 or 8, wherein the oxygen plasma bombardment is carried out for a period of 30 to 60 seconds.
10. The process for the preparation of a humidity sensor according to any of claims 4 to 9, wherein the fuel (4) is a wax, alcohol or oil; the crystal oscillator plate (1) is a quartz crystal oscillator plate with the reference frequency of 5-10 MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911070795.2A CN110927001A (en) | 2019-11-05 | 2019-11-05 | Humidity sensitive element and preparation process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911070795.2A CN110927001A (en) | 2019-11-05 | 2019-11-05 | Humidity sensitive element and preparation process thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110927001A true CN110927001A (en) | 2020-03-27 |
Family
ID=69852361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911070795.2A Pending CN110927001A (en) | 2019-11-05 | 2019-11-05 | Humidity sensitive element and preparation process thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110927001A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112756336A (en) * | 2020-12-29 | 2021-05-07 | 深圳群芯微电子有限责任公司 | Automatic monitoring plasma cleaning system |
| CN114656741A (en) * | 2022-02-09 | 2022-06-24 | 宁波大学 | Humidity-sensitive composite material and preparation method and application thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102689919A (en) * | 2012-06-27 | 2012-09-26 | 西南石油大学 | Method for preparing high-sensitivity zinc oxide humidity-sensing material |
| CN110376253A (en) * | 2019-07-26 | 2019-10-25 | 华中科技大学 | A kind of humidity sensor, preparation method and wet sensitive type switch trigger |
-
2019
- 2019-11-05 CN CN201911070795.2A patent/CN110927001A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102689919A (en) * | 2012-06-27 | 2012-09-26 | 西南石油大学 | Method for preparing high-sensitivity zinc oxide humidity-sensing material |
| CN110376253A (en) * | 2019-07-26 | 2019-10-25 | 华中科技大学 | A kind of humidity sensor, preparation method and wet sensitive type switch trigger |
Non-Patent Citations (1)
| Title |
|---|
| GUIDONG CHEN 等: ""A FLEXIBLE HUMIDITY SENSOR USING CANDLE SOOT AS SENSITIVE MATERIAL"", 《TRANSDUCERS & EUROSENSORS XXXIII》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112756336A (en) * | 2020-12-29 | 2021-05-07 | 深圳群芯微电子有限责任公司 | Automatic monitoring plasma cleaning system |
| CN114656741A (en) * | 2022-02-09 | 2022-06-24 | 宁波大学 | Humidity-sensitive composite material and preparation method and application thereof |
| CN114656741B (en) * | 2022-02-09 | 2023-05-16 | 宁波大学 | Humidity-sensitive composite material and preparation method and application thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Roto et al. | Quartz crystal microbalances functionalized with citric acid-doped polyvinyl acetate nanofibers for ammonia sensing | |
| CN101226161B (en) | Preparation method of polymethyl methacrylate/polyaniline nano fibre composite resistor type film gas sensor | |
| JP2001524668A (en) | Material method and apparatus for detecting and monitoring chemical species | |
| CN110887874B (en) | Moisture-sensitive sensor based on perovskite and preparation method and application thereof | |
| CN110927001A (en) | Humidity sensitive element and preparation process thereof | |
| CN108398468A (en) | A kind of preparation method based on covalent organic framework material decorating carbon paste electrode | |
| CN102928474A (en) | Moisture-sensitive sensor based on titanium-containing organic framework material and preparation method thereof | |
| CN108680615A (en) | A kind of preparation method of paper substrate flexible humidity sensor | |
| CN101893604B (en) | Method for manufacturing surface acoustic wave humidity-dependent sensor | |
| Wang et al. | Humidity sensing properties of Pd2+-doped ZnO nanotetrapods | |
| CN107091860B (en) | Moisture sensor and its preparation and use based on the sour cyanines polymer in golden doping side | |
| CN105928995B (en) | A kind of moisture sensor based on the sour cyanines polymer in side and its production and use | |
| CN111060560A (en) | Ru-WO3 nano material and preparation method and application thereof | |
| CN102297895A (en) | Nanometer polyaniline composite surface acoustic wave humidity sensor and production method thereof | |
| CN110054791B (en) | MOFs-noble metal ordered composite material and preparation method and application thereof | |
| CN106770546A (en) | For the preparation method of the catalysis type gas sensor of methane gas detection | |
| Buono-Core et al. | Characterization of amorphous Pt/ZnO films grown on silicon (1 0 0) substrates by a photochemical metal organic deposition and their potential use as gas sensors | |
| CN111189887A (en) | Humidity sensor and manufacturing method and application thereof | |
| CN110849941B (en) | Preparation method of resistance-type humidity sensing device based on loose carbon structure and hydrophilic polymer material composition | |
| CN110702747B (en) | Diaminoanthraquinone squaramide polymer, humidity-sensitive sensor based on squaramide polymer and preparation method of humidity-sensitive sensor | |
| CN110702746B (en) | Condensed ring squaramide polymer, humidity-sensitive sensor based on condensed ring squaramide polymer and preparation method of humidity-sensitive sensor | |
| CN116165253A (en) | Humidity sensor based on nickel cobalt phosphorus hollow nano material | |
| CN105651813B (en) | A kind of novel aniline gas sensor and preparation method thereof | |
| CN110320281B (en) | Surface acoustic wave biosensor for depositing oxide nanoparticle/polyacrylamide composite sensitive film and preparation method thereof | |
| US20230031936A1 (en) | Odor sensor, odor measurement system, and method for producing odor sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200327 |