CN110926693A - Ionization vacuum gauge based on field ionization emission - Google Patents
Ionization vacuum gauge based on field ionization emission Download PDFInfo
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- CN110926693A CN110926693A CN201811093729.2A CN201811093729A CN110926693A CN 110926693 A CN110926693 A CN 110926693A CN 201811093729 A CN201811093729 A CN 201811093729A CN 110926693 A CN110926693 A CN 110926693A
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- power supply
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
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Abstract
The invention discloses an ionization vacuum gauge based on field ionization emission, which comprises a vacuum tube, a magnetic field generating device, a high-voltage generator, a control circuit and a direct-current power supply, wherein a cathode and an anode are arranged in the vacuum tube, a vacuum detection port is arranged at the upper end part of the vacuum tube, and the magnetic field generating device is arranged at the periphery of the vacuum tube; the anode output end of the high-voltage generator is electrically connected with the anode through an anode output cable, and the cathode output end of the high-voltage generator is electrically connected with the cathode through a cathode output cable; the output end of the control circuit is electrically connected with the negative input end of the high-voltage generator through a power supply output lead of the control circuit, and the positive input end of the power supply of the control circuit is electrically connected with the positive output end of the direct-current power supply through a cable; and the negative output end of the direct current power supply is electrically connected with the negative input end of the control circuit power supply through a power supply negative cable. The ionization vacuum gauge has the advantages of simple structure and lower manufacturing cost.
Description
Technical Field
The invention belongs to the field of measuring instrument equipment, and particularly relates to an ionization vacuum gauge based on field ionization emission.
Background
The high vacuum acquisition and measurement technology has important and wide application in production, scientific research and experimental teaching. Ionization vacuum gauges are vacuum gauges used to measure high vacuum, and are widely used in society and colleges. The known ionization vacuum gauge has a complex structure and high cost.
Disclosure of Invention
It is an object of the present invention to provide an ionization gauge based on field ionization emission that effectively overcomes the above-mentioned deficiencies of the prior art.
In order to achieve the purpose, the invention adopts the technical scheme that: an ionization vacuum gauge based on field ionization emission comprises a vacuum tube, a magnetic field generating device, a high-voltage generator, a control circuit and a direct-current power supply, wherein a cathode and an anode are arranged in the vacuum tube, a vacuum detection port is formed in the upper end of the vacuum tube, and the magnetic field generating device is arranged on the periphery of the vacuum tube; the anode output end of the high-voltage generator is electrically connected with the anode through an anode output cable, and the cathode output end of the high-voltage generator is electrically connected with the cathode through a cathode output cable; the output end of the control circuit is electrically connected with the negative input end of the high-voltage generator through a power supply output lead of the control circuit, and the positive input end of the power supply of the control circuit is electrically connected with the positive output end of the direct-current power supply through a cable; the negative output end of the direct current power supply is electrically connected with the negative input end of the control circuit power supply through a power supply negative cable, and the positive output end of the direct current power supply is electrically connected with the positive input end of the high-voltage generator through a power supply positive cable.
Preferably, the cathode and the anode are respectively in a U shape and a rod shape, and a lower portion of the anode is inserted into the cathode.
Furthermore, a voltmeter is connected in parallel in the control circuit.
Furthermore, an ammeter is arranged in the power supply positive cable in series.
The invention utilizes the characteristic of the ionization current of gas molecules under low pressure related to pressure, uses discharge current as the measurement of vacuum degree, uses a voltmeter as a vacuum degree indicator, and generally uses the measuring range of 0-10 v for indication. The ionization vacuum gauge is based on a small amount of initial free electrons generated by field ionization emission, which move to the anode under the action of an electric field, but due to the existence of an orthogonal magnetic field, force is also applied to the moving electrons, so that the moving track of the electrons is changed. Under the combined action of electricity and a magnetic field, electrons fly to the anode along a spiral track in a roundabout manner, so that the distance from the electrons to the anode is greatly prolonged, and the chances of colliding gas molecules are increased; meanwhile, because the anode is a hollow ring, electrons moving near the central axis of the anode can also pass through the anode ring to continue to advance by the original kinetic energy and then are repelled by the cathode with negative potential to turn back, so that the electrons in flight can oscillate back and forth between the two cathodes until being finally absorbed by the anode, the actual path of the electrons reaching the anode is far longer than the geometric dimension between the two cathodes, and the collision probability is greatly increased. When the electrons collide with gas molecules, a part of the electrons are ionization collision, and secondary electrons ejected from positive ions formed after ionization on a cathode are also subjected to the combined action of an electric field and a magnetic field to participate in the motion, so that the ionization process is carried out in a linkage manner, a large number of electrons and ions are produced in an avalanche mode in a short time, and self-sustaining gas discharge is formed.
By adopting the technical scheme, the invention has the beneficial effects that: the ionization vacuum gauge has the advantages of simple structure and lower manufacturing cost. The ionization vacuum gauge of the invention has the advantages that: the system can be directly started under the atmospheric pressure, and does not need preheating to wait instantly; the cost performance of the vacuum measurement product is only one fifth of the cost of the similar foreign products; the volume is small, the installation is convenient, and the power consumption is low; 24V low voltage power supply, no need of high voltage cable, and safe and reliable use.
Drawings
FIG. 1 is an electrical schematic of the present invention;
reference numbers in the figures: 10. a vacuum tube; 11. a cathode; 12. an anode; 13. a vacuum detection port; 20. a magnetic field generating device; 30. a high voltage generator; 31. a positive output cable; 32. a negative output cable; 40. a control circuit; 41. a control circuit power supply output lead; 50. a direct current power supply; 51. a power supply negative cable; 52. and a power supply anode cable.
Detailed Description
The invention will be further explained with reference to the drawings.
Referring to fig. 1, the ionization gauge of the present invention comprises a vacuum tube 10, a magnetic field generating device 20, a high voltage generator 30, a control circuit 40 and a dc power supply 50, wherein a cathode 11 and an anode 12 are arranged in the vacuum tube 10, a vacuum detection port 13 is arranged at the upper end of the vacuum tube 10, and the magnetic field generating device 20 is arranged at the periphery of the vacuum tube 10; the positive output end of the high voltage generator 30 is electrically connected with the anode 12 through a positive output cable 31, and the negative output end of the high voltage generator 30 is electrically connected with the cathode 11 through a negative output cable 32; the output end of the control circuit 40 is electrically connected with the negative input end of the high voltage generator 30 through a control circuit power supply output lead 41, and the positive input end of the power supply of the control circuit 40 is electrically connected with the positive output end of the direct current power supply 50 through a cable; the negative output end of the direct current power supply 50 is electrically connected with the negative input end of the power supply of the control circuit 40 through a power supply negative cable 51, and the positive output end of the direct current power supply 50 is electrically connected with the positive input end of the high voltage generator 30 through a power supply positive cable 52. The cathode 11 and the anode 12 are respectively in a U shape and a rod shape, and the lower part of the anode 12 is inserted into the cathode 11. A voltmeter is connected in parallel in the control circuit 40. An ammeter is connected in series in the power supply positive cable 52.
In practical use, the magnetic field generating device 20 may be a permanent magnet, a helmholtz coil, a solenoid, or an electromagnet.
The above description is only an example of the present invention and should not be construed as limiting the present invention, and any modification, equivalent replacement and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The utility model provides an ionization vacuum gauge based on field ionization emission, includes vacuum tube, magnetic field generating device, high voltage generator, control circuit and DC power supply, its characterized in that: the vacuum tube is internally provided with a cathode and an anode, the upper end part of the vacuum tube is provided with a vacuum detection port, and the periphery of the vacuum tube is provided with a magnetic field generating device; the anode output end of the high-voltage generator is electrically connected with the anode through an anode output cable, and the cathode output end of the high-voltage generator is electrically connected with the cathode through a cathode output cable; the output end of the control circuit is electrically connected with the negative input end of the high-voltage generator through a power supply output lead of the control circuit, and the positive input end of the power supply of the control circuit is electrically connected with the positive output end of the direct-current power supply through a cable; the negative output end of the direct current power supply is electrically connected with the negative input end of the control circuit power supply through a power supply negative cable, and the positive output end of the direct current power supply is electrically connected with the positive input end of the high-voltage generator through a power supply positive cable.
2. The field ionization emission based ionization gauge of claim 1, wherein: the cathode and the anode are respectively in a U shape and a rod shape, and the lower part of the anode is inserted into the cathode.
3. The field ionization emission based ionization gauge of claim 1, wherein: a voltmeter is connected in parallel in the control circuit.
4. The field ionization emission based ionization gauge of claim 1, wherein: an ammeter is arranged in the power supply positive cable in series.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811093729.2A CN110926693A (en) | 2018-09-19 | 2018-09-19 | Ionization vacuum gauge based on field ionization emission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811093729.2A CN110926693A (en) | 2018-09-19 | 2018-09-19 | Ionization vacuum gauge based on field ionization emission |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110926693A true CN110926693A (en) | 2020-03-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811093729.2A Pending CN110926693A (en) | 2018-09-19 | 2018-09-19 | Ionization vacuum gauge based on field ionization emission |
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| Country | Link |
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| CN (1) | CN110926693A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024033655A1 (en) * | 2022-08-12 | 2024-02-15 | Edwards Limited | Pressure gauge power supply unit |
| WO2024033656A1 (en) * | 2022-08-12 | 2024-02-15 | Edwards Limited | Pressure gauge power supply unit |
-
2018
- 2018-09-19 CN CN201811093729.2A patent/CN110926693A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024033655A1 (en) * | 2022-08-12 | 2024-02-15 | Edwards Limited | Pressure gauge power supply unit |
| WO2024033656A1 (en) * | 2022-08-12 | 2024-02-15 | Edwards Limited | Pressure gauge power supply unit |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200327 |
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| WD01 | Invention patent application deemed withdrawn after publication |