CN110926692A - High-temperature particle scouring resistant pressure sensitive element, preparation method thereof and sputtering film pressure sensor - Google Patents
High-temperature particle scouring resistant pressure sensitive element, preparation method thereof and sputtering film pressure sensor Download PDFInfo
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Abstract
The invention discloses a high-temperature particle erosion resistant pressure sensitive element, a preparation method thereof and a film sputtering pressure sensor, wherein the pressure sensitive element comprises an elastic base material, is in a flaring convex elastomer structure and comprises a pressurizing cavity, a body and an installation part; the installation part is sequentially provided with a transition layer, an insulating layer, a resistance film layer, a passivation layer and a metal layer. The preparation method comprises the steps of sequentially preparing a transition layer, an insulating layer, a resistance thin film layer, a passivation layer and a metal layer on the elastic substrate material. The pressure sensitive element has the advantages of good high temperature resistance, strong scouring/impact resistance, long service life, wide application range, good reliability, high strain sensitivity and the like, the preparation method has the advantages of simple preparation process, convenient operation, low production cost, short production period and the like, and the pressure sensitive element can be widely used for preparing a sputtering film pressure sensor and has high use value and good application prospect.
Description
Technical Field
The invention belongs to the technical field of pressure sensor preparation, and relates to a high-temperature particle erosion resistant pressure sensitive element, a preparation method thereof and a sputtering film pressure sensor.
Background
Sputtered thin film pressure sensor technology is generally limited to use at common temperatures. Different designs are desirable for different applications. In some occasions, high-temperature fuel gas is required to be used for pressure measurement, and the high-temperature fuel gas often contains solid particles which scour and impact sensitive elements at a very high speed. The common pressure sensor is difficult to resist the scouring and impact under the high temperature condition, for example, the silicon piezoresistive pressure sensor with the isolation diaphragm has the diaphragm of only 0.03mm, the diaphragm is easy to deform or break down under the scouring of high-temperature particles, and the thick film ceramic pressure sensor cannot resist the high temperature; the maximum temperature of the sapphire pressure sensor is 250 ℃, and the measurement of high temperature of fuel gas cannot be met. Obviously, the following problems still exist in the existing common pressure sensor: (1) the method is not suitable for measuring high-temperature fuel gas and high-temperature melt; (2) does not have the capability of resisting the scouring and the impact of solid particles. In addition, the pressure sensitive element of the existing sputtering film pressure sensor has the following problems: with SiO being used2As an insulating layer, due to SiO2Coefficient of thermal expansion of 0.5X 10-6The result of the large difference between the thermal expansion coefficients of the metal substrate and the metal substrate is that the service temperature range is narrow, and the thin film on the metal substrate bursts at high temperature, thereby losing the pressure measuring function, namely the pressure sensitive element fails. The pressure sensitive element of the existing sputtering film high-temperature pressure sensor takes high-temperature alloy as an elastic membrane, and although the design solves the problem of high-temperature resistance measurement, the thermal expansion coefficient of the high-temperature alloy is not matched with that of an insulating layer material, so that the sputtering film high-temperature pressure sensor still has defects in temperature impact resistance and service life; meanwhile, the pressure sensitive element in the sputtering film high-temperature pressure sensor is positioned in the pressurizing channel, and the pressurizing channel is deeper, so that a concave surface with a vertical dead angle is formed between the pressure sensitive element and the pressurizing channel, when the burning solid particles impact the concave surface, the solid particles are easy to accumulate, the pressurizing channel is blocked, and the detection accuracy of the sensor is reduced after long-term use. The existence of the above problems greatly limitsSputtered thin film pressure sensors are widely used. Therefore, the pressure sensing element with good high temperature resistance, strong anti-scouring/impact capability, long service life, wide application range, good reliability and high strain sensitivity and the sputtered film pressure sensor which is not easy to block are obtained, and the method has very important significance for improving the application range of the sputtered film pressure sensor technology.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides a pressure sensing element with good high-temperature resistance, strong scouring/impact resistance, long service life, wide application range, good reliability and high strain sensitivity, a preparation method thereof and a sputtered film pressure sensor which is not easy to block.
In order to solve the technical problems, the invention adopts the following technical scheme:
a pressure sensitive element resistant to high temperature particle erosion, the pressure sensitive element comprising an elastomeric base material; the elastic base material is of a flaring convex elastic body structure and comprises a pressurizing cavity, a body and a mounting part; the mounting part is sequentially provided with a transition layer, an insulating layer, a resistance film layer, a passivation layer and a metal layer; the elastic base material has a linear expansion coefficient of 6.9 x 10 at-60 deg.C to 600 deg.C-6/K～8.3×10-6A high temperature alloy of/K; the insulating layer is Al2O3。
In the pressure sensitive element, the included angle theta 1 between the top surface and the side surface of the pressurizing cavity is 115-155 degrees; the depth H1 of the pressurizing cavity is 3-5 mm.
In the pressure sensitive element, the elastic base material is 4J33 alloy.
In the pressure sensitive element, the transition layer is a NiSiALY alloy; the thickness of the transition layer is 10-20 μm.
In the pressure sensitive element, the thickness of the insulating layer is 3-4 μm.
In the pressure sensitive element, the resistance film layer is made of NiCr alloy or TaN alloy.
In the pressure sensitive element, the passivation layer is Al2O3。
In the above pressure sensitive element, the metal layer is at least one of Pt, Ti and Ni.
In the pressure sensitive element, the metal layer is connected with a lead wire, and the joint of the lead wire and the metal layer is coated with a protective layer; the lead is sleeved with an insulating sleeve.
In the pressure sensitive element, the lead is an AuPt alloy; the diameter of the lead is 250 micrometers +/-50 micrometers; the protective layer is ceramic glaze; the insulating sleeve is a high-temperature-resistant glass fiber sleeve.
As a general technical concept, the present invention also provides a method for preparing the pressure sensitive element resistant to high temperature particle erosion, comprising the following steps:
s1, annealing the elastic substrate material, grinding and polishing;
s2, depositing a transition layer on the polished mounting part of the elastic base material in the step S1, and polishing;
s3, depositing an insulating layer on the polished transition layer in the step S2;
s4, sputtering a resistance thin film layer on the polished insulating layer in the step S3, and carrying out heat treatment on the resistance thin film layer;
s5, depositing a passivation layer on the resistance thin film layer after the heat treatment in the step S4;
and S6, sputtering a metal layer on the passivation layer in the step S5 to finish the preparation of the pressure sensitive element.
The preparation method is further improved, and further comprises the step S7: and connecting the lead sheathed with the insulating sleeve with the metal layer, and coating a protective layer at the joint.
In a further improvement of the above preparation method, in step S1, the temperature of the annealing treatment is 470-540 ℃; the time of the annealing treatment is 1-2 h; the polishing is to polish the surface roughness of the elastic base material to less than 0.5 μm;
in step S2, depositing a transition layer by an electron beam evaporation process; the polishing is to polish the surface roughness of the transition layer to be less than 0.5 μm;
in the step S3, an electron beam sputtering process is used to deposit an insulating layer;
in step S4, preparing the resistance thin film layer into a grid resistance line; the temperature of the heat treatment is 800 ℃; the time of the heat treatment is 2 h.
As a general technical concept, the invention also provides a sputtering film pressure sensor resistant to high-temperature particle washing, which comprises a hollow shell and the pressure sensitive element.
In a further improvement of the above sputtering film pressure sensor, the sputtering film pressure sensor further comprises a hollow shell; the hollow shell is fixed with the pressure sensitive element through an installation part, a transition layer, an insulation layer, a resistance film layer, a passivation layer and a metal layer on the installation part are arranged in the hollow shell, the main body is positioned outside the hollow shell, and the lead is led out from the inside of the hollow shell; the mounting part and the hollow shell are fixed through threaded connection or welding; the welding is laser welding, argon arc welding or electron beam welding.
Compared with the prior art, the invention has the advantages that:
(1) the invention provides a high-temperature particle scouring resistant pressure sensitive element, which comprises an elastic base material, wherein the elastic base material has a linear expansion coefficient of 6.9 multiplied by 10 at the temperature of-60-600 DEG C-6/K～8.3×10-6The high-temperature alloy of/K, regard this high-temperature alloy as the elastic substrate material, make the pressure sensitive component have wider application temperature range, can be suitable for the measurement to the high-temperature fuel gas, high-temperature melt especially; at the same time, the thermal expansion coefficient of the elastic base material can be matched with that of Al2O3The insulating layers are matched, and the difference between the thermal expansion coefficients of the insulating layers and the thermal expansion coefficient of the insulating layers is small, so that the pressure sensitive element has strong scouring/impact resistance, and particularly shows strong impact resistance under high temperature conditionsThe brush/impact capability can effectively overcome the problem of damage to the stress sensitive element caused by solid particle scouring and impact, and is beneficial to improving the reliability and the service life of the pressure sensitive element. When the pressure sensitive element is used, the transition layer, the insulating layer, the resistance film layer, the passivation layer and the metal layer on the installation part are fixed in the sensor, so that the pressure sensitive element can be prevented from being directly washed and impacted under severe external conditions, and the pressure sensitive element can be further ensured to have better reliability and service life; more importantly, the pressure sensing surface (main body part) of the elastic substrate material is exposed in a detection environment, the pressure sensing surface with the preposed structure design has no vertical dead angle, and solid particles cannot stay and accumulate when impacting the pressure sensing surface, so that the blockage cannot be caused, the accumulation of the solid particles can be prevented and the blockage of an air inlet can be prevented by optimizing the structure of the pressure interface, and the pressure sensitive element disclosed by the invention is further ensured to have better high temperature resistance, stronger scouring/impact resistance, longer service life, wider application range, better reliability and higher sensitivity. The pressure sensitive element has the advantages of good high temperature resistance, strong scouring/impact resistance, long service life, wide application range, good reliability, high strain sensitivity and the like, can be widely used for preparing a sputtering film pressure sensor, and has high use value and good application prospect.
(2) In the high-temperature particle scouring resistant pressure sensitive element, the included angle theta 1 between the top surface and the side surface of the pressurizing cavity (10) is optimized to be 115-155 degrees, and the depth H1 of the pressurizing cavity (10) is optimized to be 3-5 mm, so that solid particles can be more effectively prevented from being accumulated and blocking an air inlet.
(3) In the pressure sensitive element resisting the high-temperature particle scouring, the 4J33 alloy is an alloy with a fixed expansion coefficient and is used as an elastic base material of the pressure sensitive element, so that the problem of mismatch of the expansion coefficient can be solved, and the thickness of the elastic base material used as an elastic membrane is thicker than that of a common membrane due to the small elastic modulus of the 4J33 alloy, so that the pressure sensitive element has stronger solid particle scouring resistance. According to the invention, TaN is used as a strain resistance material of the resistance thin film layer, so that the pressure sensitive element not only can obtain proper high temperature resistance, but also can obtain higher strain sensitivity.
(4) The invention also provides a preparation method of the high-temperature particle erosion resistant pressure sensitive element, which has the advantages of simple preparation process, convenient operation, low production cost, short production period and the like, is suitable for large-scale preparation, and is beneficial to industrial application.
(5) The invention also provides a sputtering film pressure sensor resistant to high-temperature particle erosion, which comprises a hollow shell and a pressure sensitive element, wherein the pressure sensitive element has the advantages of good high-temperature resistance, strong erosion/impact resistance, good reliability, high strain sensitivity and the like; in addition, because the elastic substrate material in the adopted pressure sensitive element is in a flaring convex elastomer structure and comprises a pressurizing cavity, a body and an installation part connected with a lead, wherein the installation part is fixed in the hollow shell through threaded connection or welding, the body (a pressure sensing surface) is directly exposed in a detection environment, the pressure sensing surface of the preposed structural design has no vertical dead angle, and solid particles cannot stay and accumulate when impacting the pressure sensing surface, so that blockage cannot be caused, therefore, the structure of the pressure interface is optimized, the accumulation of the solid particles can be prevented, the blockage of an air inlet is prevented, and the sputtering film pressure sensor has the advantages of good high temperature resistance, strong scouring/impact resistance, high strain sensitivity and the like, can be widely used for measuring high-temperature gas or high-temperature melt, and obtains high-precision and high-sensitivity measurement results, the method has very important significance for improving the application range of the sputtering film pressure sensor technology.
Drawings
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.
Fig. 1 is a schematic structural diagram of a pressure sensitive element resistant to high-temperature particle erosion in embodiment 1 of the present invention.
Fig. 2 is a schematic structural diagram of a sputtered film pressure sensor resistant to high-temperature particle erosion in embodiment 2 of the present invention.
Fig. 3 is a schematic structural diagram of a conventional pressure sensor.
The reference numerals in the figures denote:
1. an elastic base material; 10. a pressurization cavity; 11. a body; 12. an installation part; 2. a transition layer; 3. an insulating layer; 4. a resistive thin film layer; 5. a passivation layer; 6. a metal layer; 7. a lead wire; 8. a protective layer; 9. an insulating sleeve.
Detailed Description
The invention is further described below with reference to the drawings and specific preferred embodiments of the description, without thereby limiting the scope of protection of the invention.
Example 1
A pressure sensitive element resistant to high temperature particle erosion, as shown in FIG. 1, comprises an elastic base material 1; the elastic base material 1 is of a flaring convex elastic body structure and comprises a pressurizing cavity 10, a body 11 and a mounting part 12; the mounting part 12 is sequentially provided with a transition layer 2, an insulating layer 3, a resistance thin film layer 4, a passivation layer 5 and a metal layer 6, wherein the elastic substrate material 1 has a linear expansion coefficient of 6.9 multiplied by 10 at-60 ℃ to 600 DEG C-6/K～8.3×10-6A high temperature alloy of/K, the insulating layer is Al2O3。
In this embodiment, the angle θ 1 between the top surface and the side surface of the pressurizing chamber 10 is 135 °, and the depth H1 of the pressurizing chamber 10 is 3.25 mm.
In this example, the elastic base material 1 was a 4J33 alloy (commercially available).
In this example, the transition layer 2 was a NiSiALY alloy (commercially available) with a thickness of 12 μm. The thickness of the insulating layer 3 was 4 μm. The resistance thin film layer 4 is made of TaN alloy and has a thickness of 0.25 μm. The passivation layer 5 is Al2O3The thickness was 2 μm. Gold (Au)The metal layer 6 was Pt, and the thickness of the metal layer 6 was 1 μm.
In this embodiment, the metal layer 6 is connected with a lead 7, and a connection part of the lead 7 and the metal layer 6 is coated with a protective layer 8; the lead 7 is sleeved with an insulating sleeve 9. Specifically, the method comprises the following steps: the lead 7 is an AuPt alloy (wire) with the diameter of 250 μm; the protective layer 8 is ceramic glaze; the insulating sleeve 9 is a high temperature resistant glass fiber sleeve. According to the invention, the metal layer 6 and the lead 7 are welded by a parallel gap welding process, and the ceramic glaze material coated at the joint of the lead 7 and the metal layer 6 can reinforce and protect an electrical node and prevent the lead from falling off at high temperature.
A method for preparing the pressure sensitive element resistant to high temperature particle erosion of the embodiment includes the following steps:
s1, annealing, grinding and polishing the elastic substrate material 1, specifically: turning the 4J33 alloy bar into a hat shape, annealing after the steel hat is processed, eliminating stress, wherein the annealing temperature is 540 ℃, the time is 2h, and furnace cooling or air cooling is carried out. And mechanically grinding and polishing the steel cap, grinding the steel cap to remove a rough mark left in the turning process of the cap top, and polishing the steel cap by using polishing liquid until the surface roughness is less than 0.5 um.
S2, depositing the transition layer 2 on the mounting portion 12 of the elastic base material 1 polished in the step S1, and polishing, specifically: the NiSiALY alloy was deposited on the steel cap by electron beam evaporation to a thickness of 50 μm. The adhesive force and the compactness of the film layer are enhanced by sand blasting treatment, the thickness of the transition layer is controlled to be 12 mu m by grinding and polishing, and the surface roughness is less than 0.5 mu m. In the step, NiSiALY alloy is used as a transition layer, so that subsequent Al is facilitated2O3The insulating layer adheres strongly to the metal substrate.
S3, depositing an insulating layer 3 on the polished transition layer 2 in step S2, specifically: 99.9 percent of Al is used, an ion beam sputtering process is adopted, and Ar and O are introduced2Sputtering deposition of Al2O3And the thickness is 4 μm, completing the preparation of the insulating layer. Vacuum heat treatment at 1000 deg.C for 0.5h to separate out Al, and thermal oxidation at 1000 deg.C for 10min to obtain Al2O3At this time, Al2O3And Ni alloys have very strong adhesion.
S4, sputtering the resistance thin film layer 4 on the polished insulating layer 3 in step S3, and performing a heat treatment on the resistance thin film layer 4, specifically: and sputtering a TaN resistance film layer with the thickness of 0.25 mu m on the insulating layer, and manufacturing the grid resistance circuit by using a mask, exposure and etching method. And carrying out heat treatment on the resistance grid bars, wherein the temperature of the heat treatment is 800 ℃, the time is 2 hours, and the temperature is reduced along with the furnace.
S5, depositing a passivation layer 5 on the resistance thin film layer 4 after heat treatment in the step S4, which specifically comprises: 99.9 percent of Al is used, an ion beam sputtering process is adopted, and Ar and O are introduced2Sputtering deposition of Al2O3And the thickness is 2 mu m, and the preparation of the passivation layer is completed.
S6, sputtering the metal layer 6 on the passivation layer 5 in the step S5, specifically: thick glue stripped Al2O3Manufacturing a lead wire hole; and sputtering Pt in the lead hole to finish the manufacture of the ohmic contact hole.
S7, connecting the lead 7 sleeved with the insulating sleeve 9 with the metal layer 6, and coating a protective layer 8 at the joint, specifically: the lead wire is welded by adopting an AuPt wire with the diameter of 250 mu m through a parallel gap welding process, ceramic slurry is used for reinforcement and protection, and the lead wire is sleeved with a high-temperature-resistant glass fiber sleeve to obtain the high-temperature-resistant particle-scour-resistant pressure sensitive element.
In this embodiment, the 4J33 alloy is an elastic base material having a thermal expansion coefficient similar to that of Al2O3The insulating layers are matched, the difference between the thermal expansion coefficients of the insulating layers and the thermal expansion coefficient of the pressure sensitive element is small, so that the working temperature of the pressure sensitive element can reach-60-600 ℃, and the pressure sensitive element can be particularly suitable for measuring high-temperature fuel gas and high-temperature melt and can be used for short-time measurement lasting for 10min at 1020 ℃; the metal elastomer enables the pressure sensitive element to have stronger scouring/impact resistance, especially shows stronger scouring/impact resistance under high temperature conditions, can effectively overcome the problem of damage to the stress sensitive element caused by scouring and impact of solid particles, and is beneficial to improving the reliability and the service life of the pressure sensitive element. In the invention, the elastic base material is in a flaring convex elastomer structure and comprises a body and a mounting partThe mounting part is sequentially provided with a transition layer, an insulating layer, a resistance film layer, a passivation layer and a metal layer, and when the sensor is used, the transition layer, the insulating layer, the resistance film layer, the passivation layer and the metal layer on the mounting part are fixed in the sensor, so that direct washing and impact under severe external conditions can be avoided, and the pressure sensitive element can be further ensured to have better reliability and longer service life; more importantly, the pressure sensing surface (main body part) of the elastic substrate material is exposed in a detection environment, the pressure sensing surface with the preposed structure design has no vertical dead angle, and solid particles cannot stay and accumulate when impacting the pressure sensing surface, so that the blockage cannot be caused, the accumulation of the solid particles can be prevented and the blockage of an air inlet can be prevented by optimizing the structure of the pressure interface, and the pressure sensitive element disclosed by the invention is further ensured to have better high temperature resistance, stronger scouring/impact resistance, longer service life, wider application range, better reliability and higher sensitivity. In addition, the strain resistance material taking TaN as the resistance film layer enables the pressure sensitive element to obtain not only proper high temperature resistance performance, but also higher strain sensitivity. Therefore, the pressure sensitive element in the embodiment has the advantages of good high temperature resistance, strong scouring/impact resistance, long service life, wide application range, good reliability, high strain sensitivity and the like, can be widely used for preparing a sputtering film pressure sensor, and has high use value and good application prospect.
Example 2
A sputtering film pressure sensor resisting high-temperature particle scouring is shown in figure 2 and comprises a hollow shell and a pressure sensitive element in the embodiment 1.
In this embodiment, the hollow housing is fixed to the pressure sensitive element through the mounting portion 12, the transition layer 2, the insulating layer 3, the resistance film layer 4, the passivation layer 5 and the metal layer 6 on the mounting portion 12 are disposed inside the hollow housing, the main body 11 is disposed outside the hollow housing, the lead 7 is led out from the inside of the hollow housing, and the mounting portion 12 and the hollow housing are fixed by welding (laser welding, argon arc welding or electron beam welding).
In the embodiment, the sputtering film pressure sensor resistant to high-temperature particle erosion comprises a hollow shell and a pressure sensitive element, wherein the pressure sensitive element has the advantages of good high-temperature resistance, strong erosion/impact resistance, good reliability, high strain sensitivity and the like, so that the sputtering film pressure sensor comprising the pressure sensitive element also has the advantages of good high-temperature resistance, strong erosion/impact resistance, good reliability, high strain sensitivity and the like; in addition, because the elastic substrate material in the adopted pressure sensitive element is in a flaring convex elastomer structure and comprises a pressurizing cavity, a body and an installation part connected with a lead, wherein the installation part is fixed in the hollow shell through threaded connection or welding, the body (a pressure sensing surface) is directly exposed in a detection environment, the pressure sensing surface of the preposed structural design has no vertical dead angle, and solid particles cannot stay and accumulate when impacting the pressure sensing surface, so that blockage cannot be caused, therefore, the structure of the pressure interface is optimized, the accumulation of the solid particles can be prevented, the blockage of an air inlet is prevented, and the sputtering film pressure sensor has the advantages of good high temperature resistance, strong scouring/impact resistance, high strain sensitivity and the like, can be widely used for measuring high-temperature gas or high-temperature melt, and obtains high-precision and high-sensitivity measurement results, the method has very important significance for improving the application range of the sputtering film pressure sensor technology.
A conventional pressure sensor, as shown in fig. 3, has a pressure sensitive element built therein such that the depth of a pressurizing chamber is as high as 39mm and an angle θ 2 between the top surface and the side surface of the pressurizing chamber is 90 °. Because the pressurizing cavity is deep and dead corners exist in the pressure sensor, particles are easy to accumulate and block the pressurizing cavity, and finally the sensor fails.
The above examples are merely preferred embodiments of the present invention, and the scope of the present invention is not limited to the above examples. All technical schemes belonging to the idea of the invention belong to the protection scope of the invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention, and such modifications and embellishments should also be considered as within the scope of the invention.
Claims (10)
1. A pressure sensitive element resistant to high temperature particle erosion, characterized in that it comprises an elastic base material (1); the elastic base material (1) is of a flaring convex elastic body structure and comprises a pressurizing cavity (10), a body (11) and a mounting part (12); the mounting part (12) is sequentially provided with a transition layer (2), an insulating layer (3), a resistance film layer (4), a passivation layer (5) and a metal layer (6); the elastic base material (1) has a linear expansion coefficient of 6.9 x 10 at-60 ℃ to 600 DEG C-6/K～8.3×10-6A high temperature alloy of/K; the insulating layer (3) is Al2O3。
2. Pressure-sensitive element according to claim 1, characterized in that the angle θ 1 between the top surface and the side surface of the pressurizing chamber (10) is 115 ° to 155 °; the depth H1 of the pressurization cavity (10) is 3-5 mm.
3. Pressure-sensitive element according to claim 2, characterized in that the elastic base material (1) is a 4J33 alloy;
the transition layer (2) is NiSiALY alloy; the thickness of the transition layer (2) is 10-20 μm;
the thickness of the insulating layer (3) is 3-4 μm;
the resistance film layer (4) is made of NiCr alloy and TaN alloy;
the passivation layer (5) is Al2O3；
The metal layer (6) is at least one of Pt, Ti and Ni.
4. The pressure sensitive element according to any one of claims 1 to 3, wherein a lead (7) is connected to the metal layer (6), and a joint of the lead (7) and the metal layer (6) is coated with a protective layer (8); the lead (7) is sleeved with an insulating sleeve (9).
5. Pressure-sensitive element according to claim 4, characterized in that the lead wire (7) is an AuPt alloy; the diameter of the lead (7) is 250 micrometers +/-50 micrometers; the protective layer (8) is ceramic glaze; the insulating sleeve (9) is a high-temperature-resistant glass fiber sleeve.
6. A method for preparing the high-temperature particle washing resistant pressure sensitive element according to any one of claims 1 to 5, which comprises the following steps:
s1, annealing the elastic substrate material (1), grinding and polishing;
s2, depositing a transition layer (2) on the mounting portion (12) of the elastic base material (1) polished in the step S1, and polishing;
s3, depositing an insulating layer (3) on the polished transition layer (2) in the step S2;
s4, sputtering the resistance thin film layer (4) on the polished insulating layer (3) in the step S3, and carrying out heat treatment on the resistance thin film layer (4);
s5, depositing a passivation layer (5) on the resistance thin film layer (4) after the heat treatment in the step S4;
and S6, sputtering a metal layer (6) on the passivation layer (5) in the step S5, and completing the preparation of the pressure sensitive element.
7. The method according to claim 6, further comprising step S7: and connecting the lead (7) sleeved with the insulating sleeve (9) with the metal layer (6), and coating a protective layer (8) at the joint.
8. The manufacturing method according to claim 6 or 7, wherein in the step S1, the temperature of the annealing treatment is 470-540 ℃; the time of the annealing treatment is 1-2 h; the polishing is to polish the surface roughness of the elastic base material (1) to less than 0.5 μm;
in the step S2, depositing a transition layer (2) by adopting an electron beam evaporation process; the polishing is to polish the surface roughness of the transition layer (2) to be less than 0.5 μm;
in the step S3, an electron beam sputtering process is adopted to deposit an insulating layer (3);
in the step S4, preparing the resistance film layer (4) into a grid resistance line; the temperature of the heat treatment is 800 ℃; the time of the heat treatment is 2 h.
9. A high-temperature particle scouring resistant sputtering film pressure sensor comprises a hollow shell, and is characterized by further comprising the pressure sensitive element of any one of claims 1 to 5 or the pressure sensitive element prepared by the preparation method of any one of claims 6 to 8.
10. The sputtered film pressure sensor of claim 9 further comprising a hollow housing; the hollow shell is fixed with the pressure sensitive element through an installation part (12), a transition layer (2), an insulation layer (3), a resistance film layer (4), a passivation layer (5) and a metal layer (6) on the installation part (12) are arranged in the hollow shell, the main body (11) is positioned outside the hollow shell, and the lead (7) is led out from the inside of the hollow shell; the mounting part (12) and the hollow shell are fixed through threaded connection or welding; the welding is laser welding, argon arc welding or electron beam welding.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115711695A (en) * | 2022-10-13 | 2023-02-24 | 无锡盛赛传感科技有限公司 | Metal-based ceramic pressure sensor, and preparation process and preparation tool thereof |
| CN115711695B (en) * | 2022-10-13 | 2023-11-21 | 无锡盛赛传感科技有限公司 | Metal-based ceramic pressure sensor, preparation process and preparation tool thereof |
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