CN110926396A - Calibration method and calibration device for machine tool measuring head or coordinate machine measuring head - Google Patents

Calibration method and calibration device for machine tool measuring head or coordinate machine measuring head Download PDF

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Publication number
CN110926396A
CN110926396A CN201911281142.9A CN201911281142A CN110926396A CN 110926396 A CN110926396 A CN 110926396A CN 201911281142 A CN201911281142 A CN 201911281142A CN 110926396 A CN110926396 A CN 110926396A
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measuring head
trigger
delta
measured
axis direction
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任国营
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National Institute of Metrology
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National Institute of Metrology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

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  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

The invention discloses a calibration method and a calibration device for a machine tool measuring head or a coordinate machine measuring head. The method comprises the following steps: acquiring at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction, and acquiring measuring head trigger precision delta Lx of the measuring head in the X-axis direction according to the trigger displacement values delta Lxi; acquiring at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and acquiring measuring head trigger precision delta Ly of the measuring head in the Y-axis direction according to the trigger displacement values delta Lyi; acquiring at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction, and acquiring measuring head trigger precision delta Lz of the measuring head in the Z-axis direction according to the trigger displacement values delta Lzi; and carrying out space precision calibration on the measuring head to be measured according to the delta Lx, the delta Ly and the delta Lz. The apparatus includes a reference displacement generator and a signal conditioning unit. The beneficial effects of the invention include: the machine tool measuring head or the coordinate machine measuring head can be accurately calibrated.

Description

Calibration method and calibration device for machine tool measuring head or coordinate machine measuring head
Technical Field
The invention relates to the technical field of measurement, in particular to a calibration method and a calibration device for measuring head detection precision.
Background
With the increasing push toward tight control of manufacturing quality and industrial 4.0 implementation, more and more businesses recognize that: the online processing and online measurement can greatly improve the manufacturing efficiency and the product precision, and can realize energy conservation, consumption reduction and green manufacturing.
The most advanced manufacturing technologies in the world have made it possible to carry out measurements while working, which is a trend in the manufacturing industry. And the measuring probe is the core for ensuring the processing quality. Because the measuring head realizes the measurement of three-dimensional dynamic displacement, the integral precision of the measuring head cannot be ensured by utilizing the existing one-dimensional length calibration technology.
Disclosure of Invention
In view of the deficiencies in the prior art, it is an object of the present invention to address one or more of the problems in the prior art as set forth above. For example, an object of the present invention is to provide a calibration method and a calibration apparatus for a machine tool stylus or a coordinate machine stylus, which can perform precision calibration of a stylus that realizes three-dimensional dynamic displacement.
The invention provides a calibration method for a machine tool measuring head or a coordinate machine measuring head. The calibration method may comprise the steps of: acquiring at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction, and acquiring measuring head trigger precision delta Lx of the measuring head to be measured in the X-axis direction according to the at least two trigger displacement values delta Lxi in the X-axis direction; acquiring at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and acquiring measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction according to the at least two trigger displacement values delta Lyi in the Y-axis direction; acquiring at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction, and acquiring measuring head trigger precision delta Lz of the measuring head to be measured in the Z-axis direction according to the at least two trigger displacement values delta Lzi in the Z-axis direction; carrying out space precision calibration on the measuring head to be measured according to the delta Lx, the delta Ly and the delta Lz; the X, Y, Z axis comprises a three-dimensional coordinate axis of the measuring head to be measured on the workbench of the machine tool or the coordinate machine, and the trigger displacement value is the distance of the measuring head to be measured in the direction of the coordinate axis to be measured when the output voltage reaches the trigger critical point from the beginning.
In an exemplary embodiment of the calibration method for a machine tool stylus or a coordinate machine stylus of the present invention, Δ Lx ═ max { Δ Lxi }, Δ Ly ═ max { Δ Lyi }, and Δ Lz ═ max { Δ Lzi }.
In one exemplary embodiment of the calibration method for a machine tool stylus or a coordinate machine stylus of the present invention, the method may further comprise the steps of:
acquiring at least two trigger times delta Txi corresponding to the at least two trigger displacement values delta Lxi, and acquiring a measuring head trigger time delta Tx in the X-axis direction of a measuring head to be measured according to the at least two trigger times delta Txi;
acquiring at least two trigger times delta Tyi corresponding to the at least two trigger displacement values delta Lyi, and acquiring the measuring head trigger time delta Ty in the Y-axis direction of the measuring head to be measured according to the at least two trigger times delta Tyi;
acquiring at least two trigger times delta Tzi corresponding to at least two trigger displacement values delta Lzi, and acquiring the measuring head trigger time delta Tz in the Z-axis direction of the measuring head to be measured according to the at least two trigger times delta Tzi;
and according to the delta Tx, the delta Ty and the delta Tz, performing time precision calibration on the measuring head to be measured.
In an exemplary embodiment of the calibration method for a machine tool stylus or a coordinate machine stylus of the present invention, the Δ Tx ═ max { Δ Txi }, the Δ Ty ═ max { Δ Tyi }, and the Δ Tz ═ max { Δ Tzi }.
In another aspect the invention provides a calibration apparatus for a machine tool stylus or a co-ordinate machine stylus. The apparatus may include a standard displacement generator and a signal conditioning unit. The signal conditioning unit is connected with the measuring head to be measured so as to obtain the working state of the measuring head to be measured; the standard displacement generator is used for generating displacement in the X-axis direction so that the measuring head to be measured generates displacement in the X-axis direction, so that at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction are obtained, and measuring head trigger precision delta Lx of the measuring head to be measured in the X-axis direction is obtained according to the at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction; the standard displacement generator is used for generating displacement in the Y-axis direction so that the measuring head to be measured generates displacement in the Y-axis direction, so that at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction are obtained, and measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction is obtained according to the at least two trigger displacement values delta Lyi of the Y-axis direction; the standard displacement generator is used for generating displacement in the Z-axis direction so that the measuring head to be measured generates displacement in the Z-axis direction, so that at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction are obtained, and measuring head trigger precision delta Lz of the measuring head to be measured in the Z-axis direction is obtained according to the at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction; carrying out space precision calibration on the measuring head to be measured according to the delta Lx, the delta Ly and the delta Lz; the X, Y, Z axis comprises a three-dimensional coordinate axis of the measuring head to be measured on the workbench of the machine tool or the coordinate machine, and the trigger displacement value is the distance of the measuring head to be measured in the direction of the coordinate axis to be measured from the beginning of outputting voltage to the trigger critical point.
In an exemplary embodiment of the calibration device for a machine tool stylus or a coordinate machine stylus according to the present invention, Δ Lx ═ max { Δ Lxi }, Δ Ly ═ max { Δ Lyi }, and Δ Lz ═ max { Δ Lzi }.
In an exemplary embodiment of the calibration device for a machine tool measuring head or a coordinate machine measuring head according to the present invention, the signal conditioning unit is further configured to obtain at least two trigger times Δ Txi corresponding to at least two trigger displacement values Δ Lxi, and obtain a measuring head trigger time Δ Tx in an X-axis direction of the measuring head to be measured according to the at least two trigger times Δ Txi;
the signal conditioning unit is further configured to acquire at least two trigger times Δ Tyi corresponding to the at least two trigger displacement values Δ Lyi, and obtain a probe trigger time Δ Ty in the Y-axis direction of the probe to be tested according to the at least two trigger times Δ Tyi;
the signal conditioning unit is further configured to obtain at least two trigger times Δ Tzi corresponding to the at least two trigger displacement values Δ Lzi, and obtain a probe trigger time Δ Tz in the Z-axis direction of the probe to be tested according to the at least two trigger times Δ Tzi;
and carrying out trigger time precision calibration on the measuring head to be measured according to the delta Tx, the delta Ty and the delta Tz.
In an exemplary embodiment of the calibration device for a machine tool stylus or a coordinate machine stylus of the present invention, Δ Tx ═ max { Δ Txi }, Δ Ty ═ max { Δ Tyi }, and Δ Tz ═ max { Δ Tzi }.
Compared with the prior art, the beneficial effects of the invention can include: the machine tool measuring head or the coordinate machine measuring head can be accurately calibrated, so that the manufacturing efficiency and the product precision are improved, the energy conservation and the consumption reduction can be realized, and the green manufacturing can be realized.
Drawings
The above and other objects and features of the present invention will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:
figure 1 shows a schematic flow diagram of a calibration method for a machine tool stylus or a co-ordinate machine stylus in an example embodiment of the invention;
figure 2 shows a schematic connection of a calibration arrangement for a machine tool stylus or a co-ordinate machine stylus in an example embodiment of the invention;
description of the main reference numerals:
1. a standard displacement generator 2, a signal conditioning unit 3, and a probe to be tested.
Detailed Description
Hereinafter, a calibration method and a calibration apparatus for a machine tool stylus or a coordinate machine stylus of the present invention will be described in detail with reference to the accompanying drawings and exemplary embodiments.
Because the machine tool or the coordinate measuring machine can be provided with measuring heads with different sizes before measurement, and parameters of different measuring heads are different, compensation parameters required to be set by different measuring heads are different during measurement, and therefore the measuring heads of the machine tool or the coordinate measuring machine need to be calibrated to ensure measurement accuracy.
The invention provides a calibration method for a machine tool measuring head or a coordinate machine measuring head.
In an exemplary embodiment of the present invention, as shown in fig. 1, the calibration method may include the steps of:
(1) and acquiring at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction, and obtaining the measuring head trigger precision delta Lx of the measuring head to be measured in the X-axis direction according to the at least two trigger displacement values delta Lxi in the X-axis direction.
In this embodiment, when the probe to be measured starts to generate displacement in the X-axis direction, the output voltage of the probe is not zero or changes from a certain null voltage, the displacement Lx0 when the probe voltage starts not to be zero or changes from a certain null voltage is recorded, and when the probe to be measured reaches a trigger critical point, the displacement Lx1 at that point is recorded, so that Δ Lx1 is ═ Lx1-Lx0, Δ lxx is recorded as the trigger displacement of the probe on the X-axis, and when at least two Δ Lxi are measured in the left and right directions, Δ Lx is ═ max { Δ Lx } -min { Lx0}, and Δ Lx is the trigger precision of the probe in the X-axis direction.
(2) And acquiring at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and acquiring the measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction according to the at least two trigger displacement values delta Lyi in the Y-axis direction.
In this embodiment, when the probe to be measured starts to generate displacement in the Y axis direction, the output voltage of the probe is not zero or changes from a certain null voltage, the displacement Ly0 when the probe voltage starts not zero or changes from a certain null voltage is recorded, when the probe to be measured reaches a trigger critical point, the displacement Ly1 at that point is recorded, so that Δ Ly1 is Ly1-Ly0, Δ Ly is recorded as trigger displacement of the probe on the Y axis, and when at least two Δ Ly are measured in both the left and right directions, Δ Ly is max { Δ Ly } -min { Ly0}, and Δ Ly is trigger accuracy of the probe in the Y axis direction.
(3) And acquiring at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction, and acquiring measuring head trigger precision delta Lz of the measuring head to be measured in the Z-axis direction according to the at least two trigger displacement values delta Lzi in the Z-axis direction.
In this embodiment, when the probe to be measured starts to generate displacement in the Z-axis direction, the output voltage of the probe is not zero or changes from a certain null voltage, the displacement Lz0 when the probe voltage starts not zero or changes from a certain null voltage is recorded, when the probe to be measured reaches a trigger critical point, the displacement Lz1 at that point is recorded, then Δ Lz1 is equal to Lz1-Lz0, Δ Lzi is recorded as trigger displacement of the probe on the Z-axis, when at least two Δ Lzi are measured in the left and right directions, then Δ Lz is equal to max { Δ Lzi } -min { Lz0}, and Δ Lz is the trigger precision of the probe in the Z-axis direction.
(4) And according to the delta Lx, the delta Ly and the delta Lz, calibrating the space precision of the measuring head to be measured by adopting a conventional method.
In this embodiment, in the measurement process, the measurement is performed at the position of the maximum diameter of the probe to be measured, where the number of the trigger displacement values on each axis may be 6 times, 8 times, or 10 times, and meanwhile, any number of times of measurement and calibration may be performed, and the repeated data of the calibration result is observed to perform the calibration after the deviation analysis. The spatial precision of the measuring head to be measured is calibrated, the acquired numerical value can be processed through software operation, and then a synthetic graph is fitted, so that the error of the measuring head on the spatial position is obtained for calibration. Optionally, the calibration of the probe to be measured is performed by acquiring the center of the sphere of the probe to be measured, and observing the spatial position change of the center of the sphere through Δ Lx, Δ Ly, and Δ Lz. Optionally, the measuring head to be measured is calibrated according to the change of the surface point of the measuring head to be measured on the spatial position under the conditions of the Δ Lx, the Δ Ly and the Δ Lz.
In this embodiment, the X, Y, Z axis includes a three-dimensional coordinate axis of the probe to be measured on the workbench of the machine tool or the coordinate machine, and therefore, before step (1), the calibration method may further include the steps of:
a base coordinate axis is determined.
Specifically, a plane may be found and defined as a "reference plane", that is, a positive direction of a Z axis of a basic coordinate axis is established, then a straight line is found and defined as an "X axis" or a "Y axis", and finally a point is selected and defined as a "coordinate origin", where the determination of the coordinate axis may be selected as follows: facing to a measuring head to be measured, the direction of the index finger of the right hand is the positive direction of an X axis, the direction of the middle finger of the right hand is the positive direction of a Y axis, and the direction of the thumb of the right hand is the positive direction of a Z axis.
In this embodiment, the basic coordinate axis may also include a three-dimensional coordinate axis of the measurement head on the coordinate machine or the machine tool.
In this embodiment, the calibration method may further include the steps of:
(1) and acquiring at least two measuring head trigger times delta Txi corresponding to at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction, and obtaining measuring head time precision delta Tx of the measuring head to be measured in the X-axis direction.
In this embodiment, when the stylus starts to generate displacement in the X-axis direction, the output voltage of the stylus is not zero, the time Tx0 at that point is recorded, and when the stylus to be measured reaches the trigger critical point, the time Tx1 at that point is recorded, then Δ Tx1 is Tx1-Tx0, Δ Txi is recorded as the stylus trigger time of the stylus on the X-axis, at least two Δ Txi are measured, then Δ Tx is max { Δ Tx1- Δ Tx0}, and Δ Lx is the time trigger accuracy in the X-axis direction.
(2) And acquiring at least two measuring head trigger times delta Tyi corresponding to at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and acquiring measuring head time precision delta Ty of the measuring head to be measured in the Y-axis direction.
In this embodiment, when the stylus starts to generate displacement in the Y-axis direction, the output voltage of the stylus is not zero, the time Ty0 at that point is recorded, and when the stylus to be measured reaches the trigger threshold point, the time Ty1 at that point is recorded, so that Δ Ty1 is Ty1-Ty0, Δ Tyi is recorded as the stylus trigger time of the stylus on the Y-axis, and at least two Δ Tyi are measured, so that Δ Ty is max { Δ Ty1- Δ Ty0}, and Δ Ly is the time trigger accuracy in the Y-axis direction.
(3) And acquiring at least two measuring head trigger times delta Tzi corresponding to at least two trigger displacements delta Lzi of the measuring head to be measured in the Z-axis direction, and acquiring measuring head time precision delta Tz of the measuring head to be measured in the Z-axis direction.
In this embodiment, when the probe starts to generate displacement in the Z-axis direction, the output voltage of the probe is not zero, the time Tz0 of the point is recorded, and when the probe to be measured reaches the trigger critical point, the time Tz1 of the point is recorded, so that Δ Tz1 is equal to Tz1-Tz0, Δ Tzi is equal to the trigger time of the probe in the Z-axis, at least two Δ Tzi are measured, so that Δ Tz is equal to max { Δ Tz1- Δ Tz0}, and Δ Lz is the time trigger accuracy in the Z-axis direction.
(4) The trigger time accuracy calibration of the measurement target is evaluated by a maximum value method based on Δ Tx, Δ Ty, and Δ Tz, and the trigger time Δ T of the measurement target becomes max (Δ Tx, Δ Ty, Δ Tz).
In this embodiment, during the measurement, the measurement is performed at the position of the largest diameter of the measuring head to be measured, wherein the number of the trigger time on each axis may be 6 times, 8 times or 10 times.
In this embodiment, it may be selected that, at the same time, the spatial precision of the probe to be measured is calibrated according to Δ Lx, Δ Ly, Δ Lz, and the time precision of the probe to be measured is calibrated according to Δ Tx, Δ Ty, Δ Tz, which not only can achieve the calibration of the spatial position of the probe to be measured, but also can achieve the calibration of the error generated by the signal transmission of the probe to be measured, so as to achieve the calibration of the probe to be measured according to the three-dimensional dynamic displacement data.
In another aspect the invention provides a calibration apparatus for a machine tool stylus or a co-ordinate machine stylus.
In another exemplary embodiment of the present invention, as shown in fig. 2, the apparatus may include a standard displacement generator 1, a signal conditioning unit 2, and a probe 3 to be measured.
In this embodiment, the standard displacement generator is configured to generate displacement in the X-axis direction, so that the measurement head to be measured generates displacement in the X-axis direction, and the signal conditioning unit obtains at least two trigger displacement values Δ Lxi of the measurement head to be measured 3 in the X-axis direction, and obtains the measurement head trigger precision Δ Lx of the measurement head to be measured in the X-axis direction according to the at least two trigger displacement values Δ Lxi in the X-axis direction.
The standard displacement generator is further used for generating displacement in the Y-axis direction so that the measuring head to be measured generates displacement in the Y-axis direction, the signal conditioning unit is further used for obtaining at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction is obtained according to the at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction.
The standard displacement generator is further configured to generate displacement in the Z-axis direction, so that the measuring head to be measured generates displacement in the Z-axis direction, and thus the signal conditioning unit obtains at least two trigger displacement values Δ Lzi of the measuring head to be measured in the Z-axis direction, and obtains a measuring head trigger precision Δ Lz of the measuring head to be measured in the Z-axis direction according to the at least two trigger displacement values Δ Lzi in the Z-axis direction.
The signal conditioning unit 2 unit is connected with the output end of the measuring head 3 to be measured so as to obtain the working state of the measuring head to be measured.
In the present embodiment, the at least two trigger displacement values Δ Lxi and the stylus trigger accuracy Δ Lx, the at least two trigger displacement values Δ Lyi and the stylus trigger accuracy Δ Ly, the at least one trigger displacement value Δ Lzi and the stylus trigger accuracy Δ Lz are used. Here, Δ Lx, Δ Lyi, Δ Ly, Δ Lzi, Δ Lz may be the same as in the previous exemplary embodiment.
And calibrating the space trigger precision of the measuring head to be measured by adopting a maximum value method according to the delta Lx, the delta Ly and the delta Lz, wherein the space trigger precision delta L of the measuring head to be measured is max (delta Lx, delta Ly and delta Lz).
In this embodiment, the signal conditioning unit is further configured to obtain at least two trigger times Δ Txi and a time trigger precision Δ Tx, at least two trigger times Δ Tyi and a trigger time precision Δ Ty, at least two trigger times Δ Tzi and a trigger time precision Δ Tz. Here, Δ Txi, Δ Tx, Δ Tyi, Δ Tzi, and Δ Tz may be the same as in the previous exemplary embodiment.
The trigger time accuracy calibration of the measurement target is evaluated by a maximum value method based on Δ Tx, Δ Ty, and Δ Tz, and the trigger time Δ T of the measurement target becomes max (Δ Tx, Δ Ty, Δ Tz).
In this embodiment, before the device is used to calibrate the probe, the probe needs to be installed firmly, a tool can be selected for installation, and it is ensured that the probe to be measured is clean and is not damaged.
In summary, the advantages of the calibration method and the calibration apparatus for measuring head detection accuracy according to the present invention include: the calibration of the measuring head to be measured according to the three-dimensional dynamic displacement data is realized on line, so that the manufacturing efficiency and the product precision are improved, the energy conservation and the consumption reduction can be realized, and the green manufacturing can be realized.
Although the present invention has been described above in connection with exemplary embodiments, it will be apparent to those skilled in the art that various modifications and changes may be made to the exemplary embodiments of the present invention without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (8)

1. A calibration method for a machine tool stylus or a coordinate machine stylus, the calibration method comprising the steps of:
acquiring at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction, and acquiring measuring head trigger precision delta Lx of the measuring head to be measured in the X-axis direction according to the at least two trigger displacement values delta Lxi in the X-axis direction;
acquiring at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction, and acquiring measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction according to the at least two trigger displacement values delta Lyi in the Y-axis direction;
acquiring at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction, and acquiring measuring head trigger precision delta Lz of the measuring head to be measured in the Z-axis direction according to the at least two trigger displacement values delta Lzi in the Z-axis direction;
carrying out space precision calibration on the measuring head to be measured according to the delta Lx, the delta Ly and the delta Lz;
the X, Y, Z axis comprises a three-dimensional coordinate axis of the measuring head to be measured on the workbench of the machine tool or the coordinate machine, and the trigger displacement value is the distance of the measuring head to be measured in the direction of the coordinate axis to be measured from the beginning of outputting voltage to the trigger critical point.
2. A calibration method for a machine tool stylus or a coordinate machine stylus according to claim 1 wherein Δ Lx ═ max { Δ lxxi }, Δ Ly ═ max { Δ Lyi }, and Δ Lz ═ max { Δ Lzi }.
3. A calibration method for a machine tool stylus or a coordinate machine stylus according to claim 1, wherein the method further comprises the steps of:
acquiring at least two trigger times delta Txi corresponding to the at least two trigger displacement values delta Lxi, and acquiring a measuring head trigger time delta Tx in the X-axis direction of a measuring head to be measured according to the at least two trigger times delta Txi;
acquiring at least two trigger times delta Tyi corresponding to the at least two trigger displacement values delta Lyi, and acquiring the measuring head trigger time delta Ty in the Y-axis direction of the measuring head to be measured according to the at least two trigger times delta Tyi;
acquiring at least two trigger times delta Tzi corresponding to at least two trigger displacement values delta Lzi, and acquiring the measuring head trigger time delta Tz in the Z-axis direction of the measuring head to be measured according to the at least two trigger times delta Tzi;
and carrying out trigger time precision calibration on the measuring head to be measured according to the delta Tx, the delta Ty and the delta Tz.
4. A calibration method for a probe detection accuracy according to claim 3, wherein said Δ Tx ═ max { Δ Txi }, said Δ Ty ═ max { Δ Tyi }, and said Δ Tz ═ max { Δ Tzi }.
5. Calibration device for a machine tool measuring head or a coordinate machine measuring head, characterized in that it comprises a standard displacement generator and a signal conditioning unit, wherein,
the signal conditioning unit is connected with the measuring head to be measured so as to obtain the working state of the measuring head to be measured;
the standard displacement generator is used for generating displacement in the X-axis direction so that the measuring head to be measured generates displacement in the X-axis direction, so that at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction are obtained, and measuring head trigger precision delta Lx of the measuring head to be measured in the X-axis direction is obtained according to the at least two trigger displacement values delta Lxi of the measuring head to be measured in the X-axis direction;
the standard displacement generator is used for generating displacement in the Y-axis direction so that the measuring head to be measured generates displacement in the Y-axis direction, so that at least two trigger displacement values delta Lyi of the measuring head to be measured in the Y-axis direction are obtained, and measuring head trigger precision delta Ly of the measuring head to be measured in the Y-axis direction is obtained according to the at least two trigger displacement values delta Lyi of the Y-axis direction;
the standard displacement generator is used for generating displacement in the Z-axis direction so that the measuring head to be measured generates displacement in the Z-axis direction, so that at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction are obtained, and measuring head trigger precision delta Lz of the measuring head to be measured in the Z-axis direction is obtained according to the at least two trigger displacement values delta Lzi of the measuring head to be measured in the Z-axis direction;
carrying out space precision calibration on the measuring head to be measured according to the delta Lx, the delta Ly and the delta Lz;
the X, Y, Z axis comprises a three-dimensional coordinate axis of the measuring head to be measured on the workbench of the machine tool or the coordinate machine, and the trigger displacement value is the distance of the measuring head to be measured in the direction of the coordinate axis to be measured when the output voltage reaches the trigger critical point from the beginning.
6. A calibration device for a machine tool stylus or a coordinate machine stylus according to claim 5, wherein Δ Lx ═ max { Δ Lxi }, Δ Ly ═ max { Δ Lyi }, and Δ Lz ═ max { Δ Lzi }.
7. The calibration device for the machine tool measuring head or the coordinate machine measuring head according to claim 5, wherein the signal conditioning unit is further configured to obtain at least two trigger times Δ Txi corresponding to at least two trigger displacement values Δ Lxi, and obtain a measuring head trigger time Δ Tx in the X-axis direction of the measuring head to be measured according to the at least two trigger times Δ Txi;
the signal conditioning unit is further configured to acquire at least two trigger times Δ Tyi corresponding to the at least two trigger displacement values Δ Lyi, and obtain a probe trigger time Δ Ty in the Y-axis direction of the probe to be tested according to the at least two trigger times Δ Tyi;
the signal conditioning unit is further configured to obtain at least two trigger times Δ Tzi corresponding to the at least two trigger displacement values Δ Lzi, and obtain a probe trigger time Δ Tz in the Z-axis direction of the probe to be tested according to the at least two trigger times Δ Tzi;
and carrying out trigger time precision calibration on the measuring head to be measured according to the delta Tx, the delta Ty and the delta Tz.
8. A calibration device for a machine tool gauge head or coordinate machine gauge head according to claim 7 wherein Δ Tx max { Δ Txi }, Δ Ty max { Δ Tyi }, and Δ Tz max { Δ Tzi }.
CN201911281142.9A 2019-12-11 2019-12-11 Calibration method and calibration device for machine tool measuring head or coordinate machine measuring head Pending CN110926396A (en)

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CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103358230A (en) * 2013-02-22 2013-10-23 南京工业大学 Measurement system and measurement method for honing machine
CN103659466A (en) * 2013-11-15 2014-03-26 西安理工大学 Method and auxiliary tool for calibrating axial touch stroke of touch sensor
CN103659467A (en) * 2013-11-15 2014-03-26 西安理工大学 Method for calibrating axial prestroke of touch-type measuring head
CN106471334A (en) * 2014-04-23 2017-03-01 瑞尼斯豪公司 The calibration of measuring probe
CN106595479A (en) * 2016-12-09 2017-04-26 清华大学深圳研究生院 Optical fiber type three-dimensional trigger probe device and measuring method
WO2018108246A1 (en) * 2016-12-13 2018-06-21 NEC Laboratories Europe GmbH Method and software defined network controller for performing round-trip time determination between a source element and a target element

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103358230A (en) * 2013-02-22 2013-10-23 南京工业大学 Measurement system and measurement method for honing machine
CN103659466A (en) * 2013-11-15 2014-03-26 西安理工大学 Method and auxiliary tool for calibrating axial touch stroke of touch sensor
CN103659467A (en) * 2013-11-15 2014-03-26 西安理工大学 Method for calibrating axial prestroke of touch-type measuring head
CN106471334A (en) * 2014-04-23 2017-03-01 瑞尼斯豪公司 The calibration of measuring probe
CN106595479A (en) * 2016-12-09 2017-04-26 清华大学深圳研究生院 Optical fiber type three-dimensional trigger probe device and measuring method
WO2018108246A1 (en) * 2016-12-13 2018-06-21 NEC Laboratories Europe GmbH Method and software defined network controller for performing round-trip time determination between a source element and a target element

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