CN110890257A - In-situ transmission electron microscope optical sample rod - Google Patents
In-situ transmission electron microscope optical sample rod Download PDFInfo
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- CN110890257A CN110890257A CN201911337515.XA CN201911337515A CN110890257A CN 110890257 A CN110890257 A CN 110890257A CN 201911337515 A CN201911337515 A CN 201911337515A CN 110890257 A CN110890257 A CN 110890257A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 32
- 230000005540 biological transmission Effects 0.000 title claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims description 20
- 239000000835 fiber Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 2
- 238000011160 research Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000001748 luminescence spectrum Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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Abstract
The embodiment of the invention discloses an in-situ transmission electron microscope optical sample rod, which comprises a sample rod body and a sample rod head which are coaxially arranged and mutually connected, wherein a three-dimensional adjusting sample table for carrying a sample is arranged in the sample rod head; parallel light beams in the embodiment of the invention pass through the optical interface and a vacuum channel in the rod body of the sample rod to irradiate the condenser lens, the condenser lens focuses the light and irradiates the light to the position near the three-dimensional adjusting sample table, and the light source can be focused to a specified micro-area of the sample by adjusting the position of the three-dimensional adjusting sample table, so that the in-situ observation is facilitated.
Description
Technical Field
The embodiment of the invention relates to the technical field of transmission electron microscopes, in particular to an in-situ transmission electron microscope optical sample rod.
Background
The transmission electron microscope is an electron microscope instrument with high resolution and high magnification. With the progress of science and technology, the most advanced transmission electron microscope can realize image observation at the picometer level and capture clear atomic images. People are gradually unable to satisfy the requirement of only taking transmission electron microscope pictures, but begin to research how to capture the dynamic process in situ while applying other stimuli to the sample in the transmission electron microscope. Therefore, a series of in-situ transmission electron microscope sample rods are born to realize the function. In-situ optical research is always an important research direction in-situ transmission electron microscope technology, and the scheme is that a light source is introduced to a transmission electron microscope sample, the structural change of the sample along with the change of laser wavelength or power is shot in situ, or a spectral signal reflected or scattered by the sample is collected in situ.
The prior in-situ transmission electron microscope optical sample rod has two types, one type is the in-situ optical rod which adopts an LED lamp as a light source, integrates the LED lamp into the end of the sample rod, and irradiates a sample after the LED lamp is lightened. The disadvantage of this solution is that the wavelength and power of the light source cannot be changed, and in addition, the illumination is not focused and no signal can be acquired. The other is a fiber-optic in-situ optical sample rod, which uses an optical fiber to introduce and irradiate light on a sample. Although the wavelength and the power of light can be changed, the optical fiber cannot focus light, so that many researches requiring high-power irradiation cannot be carried out, such as in-situ fused sample researches or in-situ researches requiring high-power irradiation to cause structural changes, and the like.
Disclosure of Invention
Therefore, the embodiment of the invention provides an in-situ transmission electron microscope optical sample rod to solve the problem that in the prior art, an in-situ optical rod adopting an LED lamp as a light source cannot change the wavelength of light, and the power of an optical fiber type in-situ optical sample rod cannot realize optical fiber focusing.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
the utility model provides an normal position transmission electron microscope optics sample pole, includes coaxial setting and interconnect's sample pole body and sample pole head, the three-dimensional regulation sample platform that is used for carrying on the sample is installed to the inside of sample pole head, the afterbody of sample pole body has parallel light beam generator through optical interface connection, the vacuum passage that supplies parallel light beam to pass through is seted up to the inside of sample pole body, the inside of sample pole head just is just right the end of vacuum passage be provided with be used for receiving light beam and with projecting after the light beam focus the three-dimensional collection lens who adjusts sample bench.
The embodiment of the invention is further characterized in that the three-dimensional adjusting sample stage comprises a fixed frame, a universal adjusting ball and a sample loading stage, a sample fixing groove is formed in the front surface of the sample loading stage, the universal adjusting ball is connected with the bottom surface of the sample loading stage through a connecting column, the fixed frame is vertically installed on the sample rod head, and an X-axis adjusting mechanism for driving the universal adjusting ball to horizontally rotate and a Y-axis adjusting mechanism for driving the universal adjusting ball to vertically rotate are arranged on the fixed frame.
The embodiment of the invention is further characterized in that the X-axis adjusting mechanism comprises a first L-shaped connecting plate, a horizontal support is arranged in the middle of the fixing frame, one end of the first L-shaped connecting plate is connected with a first rotating shaft, the first rotating shaft longitudinally penetrates through the horizontal support and is connected with a first power end used for driving the first rotating shaft to rotate, the other end of the first L-shaped connecting plate is rotatably connected with a transmission rod, and the transmission rod is fixedly connected with the universal adjusting ball.
The embodiment of the invention is further characterized in that the Y-axis adjusting mechanism comprises a second L-shaped connecting plate, one end of the second L-shaped connecting plate is rotatably sleeved on the connecting column, the other end of the second L-shaped connecting plate is connected with a second rotating shaft, and the second rotating shaft transversely penetrates through the top of the fixing frame and is connected with a second power end for driving the second rotating shaft.
The embodiment of the invention is also characterized in that the first power end and the second power end are both rotating motors.
The embodiment of the invention is also characterized in that the first power end and the second power end are both rotation stop handles arranged outside the sample rod head, and the first rotating shaft and the second rotating shaft respectively penetrate through the side surface and the bottom of the sample rod head and are connected with the rotation stop handles outside.
The embodiment of the invention is also characterized in that the rotation stopping handle comprises a stopping angle scale fixedly connected with the head of the sample rod and a positioning rotating handle arranged at the circle center of the stopping angle scale, the positioning rotating handle comprises a fixed section fixedly connected with one end of the sample rod and the first rotating shaft and the second rotating shaft and an expansion section vertically connected with the other end of the fixed section, the end part of the expansion section is connected with a pressing ejection section, the stopping angle scale is provided with a plurality of ring grooves from outside to inside, and a plurality of positioning holes matched with the ejection ends of the pressing ejection sections are equidistantly arranged in each ring groove.
The embodiment of the invention is further characterized in that the parallel light beam generator is a fiber laser, and the output end of the fiber laser is provided with a collimating lens.
The embodiment of the invention is further characterized in that the sample rod body is connected with the sample rod head through bolts, screws, locking jackscrews or miniature sealing flanges.
An embodiment of the invention is further characterized in that the largest cross-sectional diameter of the condenser lens is larger than the diameter of the vacuum channel.
The embodiment of the invention has the following advantages:
according to the embodiment of the invention, the parallel light beam generator is used as a light source, the parallel light beam passes through the optical interface and passes through the vacuum channel in the sample rod body to irradiate the condenser lens, the condenser lens focuses light and irradiates the light to the position near the three-dimensional adjusting sample table, and the light source can be focused to the specified micro-area of the sample by adjusting the position of the three-dimensional adjusting sample table, so that the in-situ observation is facilitated.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structures, ratios, sizes, and the like shown in the present specification are only used for matching with the contents disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions that the present invention can be implemented, so that the present invention has no technical significance, and any structural modifications, changes in the ratio relationship, or adjustments of the sizes, without affecting the effects and the achievable by the present invention, should still fall within the range that the technical contents disclosed in the present invention can cover.
FIG. 1 is a schematic diagram of an overall structure of an optical sample rod according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a three-dimensional adjustable sample stage in an optical sample rod according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a rotation stop handle in an optical sample rod according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a positioning stem in an optical sample rod according to an embodiment of the present invention.
In the figure:
1-a sample stem body; 2-sample club head; 3-three-dimensional adjustment of the sample stage; 4-an optical interface; 5-a parallel beam generator; 6-a vacuum channel; 7-a condenser lens;
31-a fixing frame; 32-universal adjusting ball; 33-a sample loading station; 34-X axis adjustment mechanism; a 35-Y axis adjustment mechanism; 36-a connecting column;
331-sample fixation groove;
341-first L connecting plate; 342-a horizontal support; 343-a first rotating shaft; 344-a transmission rod; 345-a first power end;
351-a second L-web; 352-second axis of rotation; 353-a second power end;
81-stop angle scale; 82-a fixed segment; 83-a telescoping section; 84-pressing the ejection segment; 85-ring groove; 86-positioning holes.
Detailed Description
The present invention is described in terms of particular embodiments, other advantages and features of the invention will become apparent to those skilled in the art from the following disclosure, and it is to be understood that the described embodiments are merely exemplary of the invention and that it is not intended to limit the invention to the particular embodiments disclosed. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the invention provides an in-situ transmission electron microscope optical sample rod, which comprises a sample rod body 1 and a sample rod head 2 which are coaxially arranged and connected with each other, wherein a three-dimensional adjusting sample table 3 for carrying a sample is arranged inside the sample rod head 2, the tail part of the sample rod body 1 is connected with a parallel light beam generator 5 through an optical interface 4, a vacuum channel 6 for the parallel light beam to pass through is arranged inside the sample rod body 1, and a condenser lens 7 for receiving the light beam and focusing the light beam and projecting the light beam onto the three-dimensional adjusting sample table 3 is arranged at the end of the sample rod head 2, which is opposite to the vacuum channel 6.
The working process of the embodiment of the invention for in-situ observation of the sample comprises the following steps:
firstly, a sample is loaded on a three-dimensional adjusting sample table 3, a parallel light beam generator 5 is started to work, parallel light beams emitted by the parallel light beam generator pass through an optical interface 4 and pass through a vacuum channel 6 in a sample rod body 1 to be irradiated on a condenser lens 7, and the condenser lens 7 focuses light and irradiates the light to the vicinity of the sample. The position of the three-dimensional adjusting sample table 3 is adjusted, so that a light source can be focused on a specified micro-area of a sample, and in-situ observation is facilitated.
In the above process, the parallel light beam generator 5 is a light source capable of emitting parallel light beams, and the specific structure thereof may be free space parallel light, such as sunlight, or a fiber laser, and a collimating lens is installed at the output end of the fiber laser.
The optical interface 4 is a mainstream interface compatible with the world, such as SMA, FC and the like.
The three-dimensional adjustment sample stage 3 refers to a sample stage capable of realizing tilting in the X-axis and Y-axis directions, and in the embodiment of the present invention, as shown in fig. 2, the specific structure of the three-dimensional adjustment sample stage 3 is: the three-dimensional adjusting sample table 3 comprises a fixing frame 31, a universal adjusting ball 32 and a sample loading table 33, a sample fixing groove 331 is formed in the front face of the sample loading table 33, the universal adjusting ball 32 is connected with the bottom face of the sample loading table 33 through a connecting column 36, the fixing frame 31 is perpendicularly installed on the sample rod head 2, and the fixing frame 31 is provided with an X-axis adjusting mechanism 34 used for driving the universal adjusting ball 32 to rotate horizontally and a Y-axis adjusting mechanism 35 used for driving the universal adjusting ball 32 to rotate vertically.
The X-axis tilting (i.e., the left-right turning of the sample loading platform shown in fig. 2) of one surface of the sample fixing groove 331 on the sample loading platform 33 can be realized by the horizontal rotation of the universal adjusting ball 32 driven by the X-axis adjusting mechanism 34, and the Y-axis tilting (i.e., the front-back turning of the sample loading platform shown in fig. 2) of one surface of the sample fixing groove 331 on the sample loading platform 33 can be realized by the vertical rotation of the universal adjusting ball 32 driven by the Y-axis adjusting mechanism 35.
Further, the X-axis adjusting mechanism 34 includes a first L-shaped connecting plate 341, a horizontal bracket 342 is disposed in the middle of the fixing frame 31, a first rotating shaft 343 is connected to one end of the first L-shaped connecting plate 341, the first rotating shaft 343 longitudinally penetrates through the horizontal bracket 342 and is connected to a first power end 345 for driving the first rotating shaft 343 to rotate, a transmission rod 344 is rotatably connected to the other end of the first L-shaped connecting plate 341, and the transmission rod 344 is fixedly connected to the universal adjusting ball 32.
The Y-axis adjusting mechanism 35 includes a second L-shaped connecting plate 351, one end of the second L-shaped connecting plate 351 is rotatably sleeved on the connecting column 36, the other end of the second L-shaped connecting plate 351 is connected to a second rotating shaft 352, and the second rotating shaft 352 transversely penetrates through the top of the fixing frame 31 and is connected to a second power end 353 for driving the second rotating shaft 352 to rotate.
The first power end 345 and the second power end 353 can be electrically controlled rotating devices or manually driven rotating devices, when the first power end 345 and the second power end 353 are rotating motors, the first power end 345 and the second power end 353 can be connected with an external PLC system, the first rotating shaft 343 is driven to rotate by controlling the rotation of the first power end 345, so that the first L connecting plate 341 connected with the first rotating shaft 343 drives the transmission rod 344 to horizontally rotate, and the transmission rod 344 is fixedly connected with the universal adjusting ball 32, so that the universal adjusting ball 32 drives the sample fixing groove 331 of the sample loading platform 33 to realize X-axis tilting; similarly, the second power end 353 is controlled to rotate to drive the second rotating shaft 352 to rotate, so that the second L connecting plate 351 connected with the second rotating shaft 352 rotates, and the sample fixing groove 331 of the sample loading platform 33 is further driven to realize Y-axis tilting.
In the embodiment of the present invention, when the first power end 345 and the second power end 353 are manually controlled, as shown in fig. 3 and 4, the first power end 345 and the second power end 353 are preferably rotation stopping handles disposed outside the sample rod head 2, and the first rotating shaft 343 and the second rotating shaft 352 respectively penetrate through the side surface and the bottom of the sample rod head 2 and are connected to the external rotation stopping handles.
The rotation stopping handle drives the rotating shaft to rotate through manual rotation and can realize self position locking without rotation when rotating to a certain position.
The concrete structure is as follows: rotatory end stop handle includes fixed connection and is in the end stop angle scale 81 and the setting of sample pole head 2 are in the location turning handle of end stop angle scale 81 centre of a circle department, the location turning handle include with one end with first axis of rotation 343 and second axis of rotation 352 fixed connection's canned paragraph 82 and with the perpendicular flexible section 83 of connecting of the other end of canned paragraph 82, the end connection of flexible section 83 has presses and pops out the section 84, end stop angle scale 81 is provided with a plurality of rings annular 85 from outer to inner, each circle annular 85 in the equidistance seted up a plurality of with press the locating hole 86 that pops out the end and match of popping out the section 84.
Because the positioning rotating handle is directly connected with the first rotating shaft 343 and the second rotating shaft 352, the self rotating angle of the positioning rotating handle is equal to the rotating angle of the first rotating shaft 343 and the second rotating shaft 352, the section of a common cylindrical single handle is smaller, and the control on a tiny angle is unchanged, so that the positioning rotating handle is designed into an L-shaped structure in the embodiment of the invention, and the rotating area of the positioning rotating handle is increased.
The design of the telescopic section 83 can be a simple telescopic sleeve structure, the length adjustment of the positioning rotating handle can be realized, the rotating area can be changed, the specific structure of the pressing ejecting section 84 is the structure of an automatic ball-point pen which is common in the prior art, the internal pen core is ejected by one-time pressing, the retraction of the pen core is realized by pressing again, the ejecting end of the pressing ejecting section 84 is in a cylindrical shape matched with the positioning hole 86, and when the ejecting end extends into one positioning hole 86, the position locking of the positioning rotating handle is realized.
The multi-turn design of the stop angle scale 81 enables the number of the positioning holes 86 on the outer ring to be large, the included angle between two adjacent positioning holes 86 is a fixed value and is small, the number of the positioning holes 86 on the inner ring is relatively small, and the included angle between two adjacent positioning holes 86 is also a fixed value and is large, so that the stop angle scale is suitable for adjustment and locking of different rotation angles.
For example, the number of the positioning holes 86 of the outer ring is designed to be 72, the included angle between every two adjacent positioning holes 86 is 5 degrees, the number of the positioning holes 86 of the inner ring is designed to be 18, the included angle between every two adjacent positioning holes 86 is 20 degrees, when the positioning rotating handle needs to rotate by a large angle, for example, 60 degrees, the end of the pressing ejecting section 84 can be ejected and inserted through 3 positioning holes directly corresponding to the rotation of the positioning holes 86 of the inner ring, and when the positioning rotating handle needs to adjust by a small angle, for example, 10 degrees, the extensible section 83 can be pulled to rotate corresponding to the positioning holes 86 of the outer ring, and the end of the pressing ejecting section 84 can be inserted through 2 positioning holes 86.
To sum up, the tilting angle of the sample fixing groove 331 in the X-axis or Y-axis direction can be controlled by controlling the rotation angles of the first power end 345 and the second power end 353, and when the X-axis adjusting mechanism or the Y-axis adjusting mechanism operates alone, the X-axis adjusting mechanism 34 and the Y-axis adjusting mechanism 35 operate alone without interference due to the rotational connection of the second L-connecting plate 351 and the connecting column 36 and the rotational connection of the driving rod 344 and the first L-connecting plate 341.
And the three-dimensional angle of the sample table 3 is adjusted in a three-dimensional way through a controller until the sample fixing groove 331 is positioned at the focus of the condenser lens 7, so that a light source is focused on a sample to be observed.
Meanwhile, the maximum sectional diameter of the condenser lens 7 is larger than that of the vacuum passage 6, so that the parallel light beams passing through the vacuum passage 6 can be all received and focused by the condenser lens 7.
The connection of sample pole body 1 and sample pole head 2 will guarantee the leakproofness, avoids light to reveal, therefore sample pole body 1 and sample pole head 2 can be through bolt, screw, locking jackscrew or miniature sealed flange joint.
In addition, in the embodiment of the invention, besides the high-power irradiation function, the sample rod can also realize the study of cathode luminescence spectrum and other spectrograms (CL). In the study of CL spectrum, a sample is fixed on a three-dimensional adjusting sample table 3, an electron beam light source carried by a transmission electron microscope serves as an excitation source, the sample emits light after being irradiated on the sample, the light source irradiates on a condenser lens 7, and an optical signal passes through a vacuum channel 6 in a sample rod body 1, passes through an optical interface 4, and is received by an external spectrometer and other equipment and is analyzed.
Although the invention has been described in detail above with reference to a general description and specific examples, it will be apparent to one skilled in the art that modifications or improvements may be made thereto based on the invention. Accordingly, such modifications and improvements are intended to be within the scope of the invention as claimed.
Claims (10)
1. The utility model provides an normal position transmission electron microscope optics sample pole, includes coaxial setting and interconnect's sample pole body (1) and sample pole head (2), its characterized in that, the inside of sample pole head (2) is installed and is used for carrying three-dimensional regulation sample platform (3) of sample, the afterbody of sample pole body (1) is connected with parallel light beam generator (5) through optical interface (4), vacuum channel (6) that supply parallel light beam to pass through are seted up to the inside of sample pole body (1), it is just right to go up of sample pole head (2) the extreme of vacuum channel (6) is provided with and is used for receiving light beam and projects after focusing light beam focusing condenser lens (7) on three-dimensional regulation sample platform (3).
2. The in-situ TEM optical sample rod as claimed in claim 1, wherein the three-dimensional adjusting sample stage (3) comprises a fixing frame (31), a universal adjusting ball (32) and a sample loading stage (33), a sample fixing groove (331) is formed in the front surface of the sample loading stage (33), the universal adjusting ball (32) is connected with the bottom surface of the sample loading stage (33) through a connecting column (36), the fixing frame (31) is vertically installed on the sample rod head (2), and an X-axis adjusting mechanism (34) for driving the universal adjusting ball (32) to horizontally rotate and a Y-axis adjusting mechanism (35) for driving the universal adjusting ball (32) to vertically rotate are arranged on the fixing frame (31).
3. The in-situ TEM optical sample rod as claimed in claim 2, wherein the X-axis adjusting mechanism (34) comprises a first L-shaped connecting plate (341), a horizontal bracket (342) is disposed in the middle of the fixing frame (31), a first rotating shaft (343) is connected to one end of the first L-shaped connecting plate (341), the first rotating shaft (343) longitudinally penetrates through the horizontal bracket (342) and is connected with a first power end (345) for driving the first rotating shaft (343) to rotate, a transmission rod (344) is rotatably connected to the other end of the first L-shaped connecting plate (341), and the transmission rod (344) is fixedly connected with the universal adjusting ball (32).
4. An in-situ TEM optical sample holder as claimed in claim 3, wherein the Y-axis adjusting mechanism (35) comprises a second L-shaped connecting plate (351), one end of the second L-shaped connecting plate (351) is rotatably sleeved on the connecting column (36), the other end of the second L-shaped connecting plate (351) is connected with a second rotating shaft (352), and the second rotating shaft (352) transversely penetrates through the top of the fixing frame (31) and is connected with a second power end (353) for driving the second rotating shaft (352).
5. The in-situ TEM optical sample rod as claimed in claim 4, wherein the first power end (345) and the second power end (353) are both rotating motors.
6. The in-situ TEM optical sample rod as claimed in claim 4, wherein the first power end (345) and the second power end (353) are both rotation stopping handles disposed outside the sample rod head (2), and the first rotating shaft (343) and the second rotating shaft (352) respectively penetrate through the side and the bottom of the sample rod head (2) and are connected with the external rotation stopping handles.
7. The in-situ TEM optical sample rod as claimed in claim 6, wherein the rotation stopping handle comprises a stopping angle scale (81) fixedly connected to the sample rod head (2) and a positioning rotating handle arranged at the center of the stopping angle scale (81), the positioning rotating handle comprises a fixed section (82) fixedly connected with one end of the fixed section (82) and the first rotating shaft (343) and the second rotating shaft (352) and a telescopic section (83) perpendicularly connected with the other end of the fixed section (82), the end of the telescopic section (83) is connected with a pressing section (84), the stopping angle scale (81) is provided with a plurality of ring grooves (85) from outside to inside, and each ring of the ring grooves (85) is provided with a plurality of positioning holes (86) at equal intervals and matched with the pressing end of the pressing section (84).
8. The in-situ TEM optical sample rod as claimed in claim 1, wherein the parallel beam generator (5) is a fiber laser, and the output end of the fiber laser is provided with a collimating lens.
9. The in-situ TEM optical sample rod as claimed in claim 1, wherein the sample rod body (1) and the sample rod head (2) are connected by bolts, screws, locking screws or micro-sealing flanges.
10. An in-situ TEM optical sample rod according to claim 1, characterized in that the largest cross-sectional diameter of the condenser lens (7) is larger than the diameter of the vacuum channel (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201911337515.XA CN110890257A (en) | 2019-12-23 | 2019-12-23 | In-situ transmission electron microscope optical sample rod |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911337515.XA CN110890257A (en) | 2019-12-23 | 2019-12-23 | In-situ transmission electron microscope optical sample rod |
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| CN110890257A true CN110890257A (en) | 2020-03-17 |
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| CN210778478U (en) * | 2019-12-23 | 2020-06-16 | 安徽泽攸科技有限公司 | In-situ transmission electron microscope optical sample rod |
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2019
- 2019-12-23 CN CN201911337515.XA patent/CN110890257A/en active Pending
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| JP2010003617A (en) * | 2008-06-23 | 2010-01-07 | Hitachi High-Technologies Corp | Sample stand, sample rotating holder, construction method of sample stand, and sample stand construction method, and test piece analyzing method |
| CN102543637A (en) * | 2012-01-10 | 2012-07-04 | 青岛大学 | Preparation method of in situ double-tilt electronic microscope sample rod |
| CN207502092U (en) * | 2017-12-14 | 2018-06-15 | 华北电力科学研究院有限责任公司 | The sample stage of adjustable-angle |
| CN108375598A (en) * | 2018-01-17 | 2018-08-07 | 华东理工大学 | A kind of electron microscope novel optical fiber coupling in-situ liquid sample system and application method |
| CN210778478U (en) * | 2019-12-23 | 2020-06-16 | 安徽泽攸科技有限公司 | In-situ transmission electron microscope optical sample rod |
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