CN110887511A - Hall displacement sensor - Google Patents

Hall displacement sensor Download PDF

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Publication number
CN110887511A
CN110887511A CN201911118096.0A CN201911118096A CN110887511A CN 110887511 A CN110887511 A CN 110887511A CN 201911118096 A CN201911118096 A CN 201911118096A CN 110887511 A CN110887511 A CN 110887511A
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China
Prior art keywords
slider
sliding block
hall
displacement sensor
sliding
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CN201911118096.0A
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CN110887511B (en
Inventor
尹华林
谭书伟
周园
库舜
褚世杰
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Accelink Technologies Co Ltd
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Accelink Technologies Co Ltd
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Priority to CN201911118096.0A priority Critical patent/CN110887511B/en
Priority to PCT/CN2019/125379 priority patent/WO2021093078A1/en
Publication of CN110887511A publication Critical patent/CN110887511A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The invention provides a Hall displacement sensor which comprises a first sliding block, a second sliding block and an elastic piece, wherein the first sliding block is connected with the second sliding block in a sliding mode, a gap is formed between the first sliding block and the second sliding block in the sliding direction, the elastic piece is positioned in the gap, and the elastic piece exerts acting force on the first sliding block along the sliding direction to enable the first sliding block to be abutted against the second sliding block; the magnetic component is arranged on the first sliding block, and the Hall chip is arranged on the second sliding block. The Hall displacement sensor is characterized in that a Hall chip is arranged in a magnetic field generated by a magnetic part, and a first coupling device is coupled with a second coupling device under the driving of a motor in an automatic coupling procedure; the Hall chip moves in the magnetic field, and the relation between the displacement of the Hall chip in the magnetic field and the induction signal is established based on the Hall effect, so that displacement measurement is realized.

Description

Hall displacement sensor
Technical Field
The invention relates to the technical field of sensors, in particular to a Hall displacement sensor.
Background
With the development of modern instruments and equipment towards intellectualization, new requirements on the accuracy, speed and the like of measurement are provided in the measurement occasion of small distance. For example, in the automatic coupling process of a collimator passive device, a parallel narrow gap of 0-50 μm is formed between the end faces of two coupling devices to fill ultraviolet glue and cure the ultraviolet glue. In the above process, the displacement detection and elastic displacement processes need to be implemented. Therefore, it is urgently needed to develop a hall displacement sensor which can realize the automatic coupling process and has a simple structure and easy operation.
Disclosure of Invention
The invention aims to provide a Hall displacement sensor, which aims to solve the technical problem that the automatic coupling process of a collimator passive device in the prior art is difficult to realize.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the invention provides a Hall displacement sensor which comprises a first sliding block, a second sliding block and an elastic piece, wherein the first sliding block is connected with the second sliding block in a sliding mode, a gap is formed between the first sliding block and the second sliding block in the sliding direction, the elastic piece is located in the gap, and the elastic piece exerts acting force on the first sliding block along the sliding direction to enable the first sliding block to be abutted to the second sliding block; the Hall displacement sensor further comprises a magnetic part, a Hall chip and a circuit board electrically connected with the Hall chip, wherein one of the magnetic part and the Hall chip is arranged on the first sliding block, and the other one of the magnetic part and the Hall chip is arranged on the second sliding block.
Furthermore, the magnetic part and the Hall chip are oppositely arranged and respectively positioned at two sides of the gap.
Further, the magnetic part is a cylindrical permanent magnet, and the hall chip moves in the axial direction of the magnetic part.
Further, the diameter of the cylindrical permanent magnet is 1-4 mm; and/or the size of the gap along the sliding direction is 1 mm-2 mm.
Furthermore, the hall displacement sensor further comprises a lock rod arranged on the first sliding block or the second sliding block, and the lock rod is used for locking or unlocking the relative position between the first sliding block and the second sliding block.
Further, the hall displacement sensor further comprises a sliding mechanism arranged between the first sliding block and the second sliding block, the sliding mechanism comprises a base and a sliding part which slide relatively, the sliding part is fixedly connected with the first sliding block, the base is fixedly connected with the second sliding block, and the first sliding block is abutted to the base.
Furthermore, the first sliding block is provided with a concave cavity, the sliding mechanism is positioned in the concave cavity, one end of the base is abutted against the side wall of the concave cavity, and the magnetic part is installed on the side wall of the concave cavity; the second sliding block comprises a bottom plate and a side plate connected with the bottom plate, the bottom plate is connected with the base, and the Hall chip is installed on the side plate.
Furthermore, the Hall displacement sensor further comprises a lock rod used for locking or unlocking the relative position between the first sliding block and the second sliding block, and the lock rod is installed on the side plate.
Further, the elastic part is a compression spring or a tension spring.
Further, the sensitivity of the Hall chip is higher than or equal to 3.125 mV/Gauss.
According to the Hall displacement sensor provided by the invention, a Hall chip is placed in a magnetic field generated by a magnetic part, in an automatic coupling procedure, a first slide block is connected with a first coupling device, a second slide block is connected with a motor, and the first coupling device is coupled with a second coupling device under the driving of the motor; in the coupling process, the Hall chip moves in the magnetic field, and the relation between the displacement of the Hall chip in the magnetic field (namely the relative displacement between the first slider and the second slider) and the induction signal is established based on the Hall effect, so that the displacement measurement is realized. The Hall displacement sensor has a simple structure and is easy to operate.
Drawings
Fig. 1 is an exploded view of a hall displacement sensor according to an embodiment of the present invention;
fig. 2 is a top view of a hall displacement sensor provided in an embodiment of the present invention, wherein the first slider is not shown;
FIG. 3 is a cross-sectional view A-A of the Hall displacement sensor shown in FIG. 2;
fig. 4 is a graph illustrating a relationship between an induced signal in the hall displacement sensor and a relative displacement between the first slider and the second slider according to an embodiment of the present invention.
Description of reference numerals:
10. a first slider; 11. a concave cavity; 20. a second slider; 21. a base plate; 22. a side plate; 30. a sliding mechanism; 31. a base; 32. a slider; 40. a magnetic member; 50. a Hall chip; 60. a circuit board; 70. an elastic member; 80. a cylinder; 81. a piston rod.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The descriptions of "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number or order of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Referring to fig. 1 to 3, an embodiment of the present application provides a hall displacement sensor, including a first slider 10, a second slider 20, and an elastic element 70, where the first slider 10 is slidably connected to the second slider 20, the first slider 10 and the second slider 20 have a gap in a sliding direction, the elastic element 70 is located in the gap, and the elastic element 70 applies a force to the first slider 10 in the sliding direction to abut the first slider 10 against the second slider 20. The hall displacement sensor further comprises a magnetic part 40, a hall chip 50 and a circuit board 60 electrically connected with the hall chip 50, wherein one of the magnetic part 40 and the hall chip 50 is arranged on the first slider 10, and the other one is arranged on the second slider 20.
It will be appreciated that the first slider 10 is slidably connected to the second slider 20. Sliding connections, such as between the guide rail and the slide, sliding connections between the ball sets, and sliding connections between the sleeve and the sleeve, may be used. An elastic member 70 is provided in a gap between the first slider 10 and the second slider 20, and the elastic member 70 causes the first slider 10 to abut against the second slider 20. The urging force of the elastic member 70 against the first slider 10 and the urging force between the first slider 10 and the second slider 20 can make the first slider 10 and the second slider 20 in a stable equilibrium state. Further, the elastic member 70 is a compression spring or a tension spring. The number of the elastic members 70 is at least one. In a balanced state, the compression spring is in a compression state, the tension spring is in a tension state, and the first slide block 10 and the second slide block 20 do not move relatively.
In addition, one of the magnetic member 40 and the hall chip 50 is disposed on the first slider 10, and the other is disposed on the second slider 20, at this time, the relative movement between the first slider 10 and the second slider 20 can make the hall chip 50 move relatively in the magnetic field generated by the magnetic member 40, even if the position of the hall chip 50 in the magnetic field changes, so that the hall chip 50 senses the change of the magnetic field strength and generates different sensing signals. The sensing signal can be transmitted to the controller through the circuit board 60, so that the relationship between the sensing signal of the hall chip 50 and the relative displacement of the first slider 10 and the second slider 20 is established, and displacement measurement is realized.
The Hall displacement sensor of the embodiment of the application can be used in the displacement measurement occasion with small distance, taking the automatic coupling process of a collimator passive device as an example, the process comprises the following steps:
first, the first coupling device is elastically connected to the motor, that is, the first coupling device is fixed to the first slider 10, and the motor is fixed to the second slider 20. In the initial state, the first slider 10, the second slider 20 and the elastic member 70 are kept in a relatively stable state, i.e. the first coupling device and the motor are kept relatively stationary. The motor drives the first coupling device to approach the second coupling device, and in the approach process, the first slider 10 and the second slider 20 do not move relatively until the end faces of the two coupling devices touch, and the touch enables the first slider 10 to compress the elastic part 70 and move relatively to the second slider 20. At this time, the relative position of the hall chip 50 in the magnetic field changes, so that the hall chip senses the change of the magnetic field strength and generates a sensing signal, the sensing signal is transmitted to the controller through the circuit board 60, the controller determines that the touch occurs, and determines the relative displacement generated between the first coupling device and the motor, that is, the relative displacement between the first slider 10 and the second slider 20, so as to control the motor to stop working, and at the same time, acquire the displacement.
Then, the motor rotates according to the obtained displacement, so that the elastic part 70 returns to the initial state, the two coupling devices are separated from touching, the first slider 10, the second slider 20 and the elastic part 70 return to the balanced state, and the first slider 10 and the second slider 20 are also changed into a relatively static state; and then the controller controls the motor to drive the first slide block 10, the second slide block 20 and the first coupling device to continuously move for 0-50 microns, so that a required narrow gap is formed between the first coupling device and the second coupling device. And (4) introducing ultraviolet glue into the narrow gap and curing the ultraviolet glue to finish the automatic coupling process.
In the hall displacement sensor of the embodiment of the application, the hall chip 50 is placed in the magnetic field generated by the magnetic member 40, in the automatic coupling procedure, the first slider 10 is connected with the first coupling device, the second slider 20 is connected with the motor, and the first coupling device is coupled with the second coupling device under the driving of the motor; in the above coupling process, the hall chip 50 moves in the magnetic field, and a relationship between a displacement amount of the hall chip 50 in the magnetic field (i.e., a relative displacement amount between the first slider 10 and the second slider 20) and the induction signal is established based on the hall effect, thereby implementing displacement measurement. The Hall displacement sensor of the embodiment of the application is simple in structure and easy to operate.
In some embodiments, the magnetic member 40 is disposed opposite to the hall chip 50 and respectively located at two sides of the gap. It can be understood that, the magnetic member 40 is disposed opposite to the hall chip 50, so that the magnetic field in which the hall chip 50 is located can be closer to the gradient magnetic field, the relative displacement of the hall chip 50 in the magnetic field and the potential of the induction signal are closer to a linear relationship, and the displacement detection accuracy is higher.
In some embodiments, the magnetic member 40 is a cylindrical permanent magnet, and the hall chip 50 moves in the axial direction of the magnetic member 40. There is a constant magnetic field of approximately gradient distribution in the axial direction of the cylindrical permanent magnet. In the constant magnetic field with gradient distribution, the axial displacement of the hall chip 50 relative to the permanent magnet and the induction signal generated by the hall chip 50 are approximately in a linear relationship, referring to fig. 4, the displacement induction precision can reach 10 μm, and the displacement measurement precision is high. The magnetic field intensity of the constant magnetic field of the cylindrical permanent magnet in the axial direction is distributed in an approximate gradient manner only in a small range, so that the Hall displacement sensor is suitable for application scenes of small measuring ranges.
The diameters of the cylindrical permanent magnets are different, the constant magnetic fields with the axial magnetic field intensity approximately distributed in a gradient manner are also different, and the distances between the gradient magnetic fields and the end faces of the magnetic parts 40 are also different, so that the precision of the Hall displacement sensor is different. Further, the diameter of the cylindrical permanent magnet is 1 mm-4 mm. The cylindrical permanent magnet with the diameter range is selected, so that the precision of the Hall displacement sensor can be higher. Further, the size of the gap in the sliding direction is 1mm to 2 mm. When the distance between the Hall chip 50 and the end face of the magnetic part 40 is 1 mm-2 mm, the displacement induction precision is highest. In order to detect the micro displacement generated after the automatic coupling devices in the collimator passive devices touch and the narrow gap of 0-50 mu m formed between the two last coupling devices, a cylindrical permanent magnet with the diameter of 2mm is preferably selected, theoretical derivation and experimental verification are carried out, a constant magnetic field with the magnetic field intensity approximately distributed in a gradient manner exists at the position 1.5mm away from the end face of the magnet in the axial direction, and the displacement detection precision is highest at the position.
In some embodiments, the sensitivity of the Hall chip 50 is greater than or equal to 3.125 mV/Gauss. The high sensitivity of the hall chip 50 makes the generated sensing signal more accurate, and can further improve the precision of displacement measurement.
In some embodiments, the hall displacement sensor further comprises a lock bar mounted on the first slider 10 or the second slider 20, the lock bar being used to lock or unlock the relative position between the first slider 10 and the second slider 20. The number of locking bars is at least one. In the initial state, one end of the lock bar is located in the gap between the first slider 10 and the second slider 20. When the lock lever is extended, the extended end thereof can abut against the first slider 10 or the second slider 20, so that the first slider 10 and the second slider 20 cannot move relative to each other, and the relative positions of the two can be locked. When the lock bar is retracted, the lock bar does not abut against the first slider 10 or the second slider 20, and the first slider 10 and the second slider 20 can return to relative movement, so that the relative positions of the two can be unlocked. After ultraviolet glue is dripped between the first coupling device and the second coupling device, the ultraviolet glue can generate tension in the curing process, and in order to prevent the gap between the two coupling devices from being changed due to the tension, before the ultraviolet glue is dripped, the lock rod is controlled to eject and abut against the end surface of the first sliding block 10 or the second sliding block 20, so that the connection between the first sliding block 10 and the second sliding block 20 is changed into rigid fixed connection. And after the ultraviolet glue is cured, controlling the lock rod to withdraw, and finishing the automatic coupling process.
It will be appreciated that the locking bar may be a piston rod 81 of the air cylinder 80. The installation position of the air cylinder 80 is not required, and the air cylinder can be installed on the first sliding block 10 or the second sliding block 20 alternatively. When the relative positions of the first sliding block 10 and the second sliding block 20 need to be locked, the piston rod 81 of the air cylinder 80 is ejected out, so that the first sliding block 10 and the second sliding block 20 are in a relative static state; when the relative position of the first slider 10 and the second slider 20 needs to be unlocked, the piston rod 81 of the air cylinder 80 retracts, so that the first slider 10 and the second slider 20 are restored to a state of being capable of moving relatively.
In some embodiments, the hall displacement sensor further includes a sliding mechanism 30 disposed between the first slider 10 and the second slider 20, the sliding mechanism 30 includes a base 31 and a slider 32 that slide relative to each other, the slider 32 is fastened to the first slider 10, the base 31 is fastened to the second slider 20, and the first slider 10 abuts on the base 31. The sliding mode is various, and the sliding connection mode of the ball sliding group is utilized in the embodiment of the application. The number of the base 31 and the slider 32 is at least one, respectively, and can be engaged with each other. The slider 32 can slide linearly on the base 31, so that the first slider 10 and the second slider 20 can move relatively. The first slider 10 abuts on a base 31 which is fastened to the second slider 20. The sliding connection mode makes the relative movement between the first slider 10 and the second slider 20 more stable and reliable. Wherein, slider 32 can design for having the notched structure, and the recess cladding of slider 32 is on the both sides of base 31, can not derail when making it slide between with base 31, and is more reliable.
Further, the first slider 10 has a cavity 11, the slide mechanism 30 is located in the cavity 11, one end of the base 31 abuts against a side wall of the cavity 11, and the magnetic member 40 is attached to the side wall of the cavity 11. When the action of the elastic element 70 and the base 31 on the first slider 10 and the second slider 20 reaches a balance, the first slider 10 and the second slider 20 do not move relatively. The sliding mechanism 30 is arranged in the concave cavity 11 of the first sliding block 10, so that the space is saved, and the structure of the Hall displacement sensor is more compact. The second slider 20 includes a bottom plate 21 and a side plate 22 connected to the bottom plate 21, the bottom plate 21 is connected to the base 31, and the hall chip 50 is mounted on the side plate 22. The second sliding block 20 is L-shaped, and the bottom plate 21 is vertically connected with the side plate 22. The base plate 21 is connected to the base 31, and is capable of moving the second slider 20 and the first slider 10 relative to each other when the base 31 and the slider 32 slide relative to each other. The side plate 22 is mounted with a hall chip 50 which is within the magnetic field generated by the magnetic member 40 on the first slider 10. The circuit board 60 and the hall chip 50 are both mounted on the side plate 22 of the second slider 20, and the structure is simple. The circuit board 60 is electrically connected to an external socket, which may be electrically connected to an external transmission line, for continuously transmitting the sensing signal generated by the hall chip 50 to the controller.
Further, the hall displacement sensor further includes a lock lever for locking or unlocking a relative position between the first slider 10 and the second slider 20, and the lock lever is mounted on the side plate 22. It will be appreciated that the locking bar is mounted on the side plate 22 of the second slider 20, which facilitates the mounting and simplifies the overall structure of the sensor, making its structure simpler and more compact.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present invention, and all such changes or substitutions are included in the scope of the present invention. Moreover, the technical solutions in the embodiments of the present invention may be combined with each other, but it is necessary to be able to be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent, and is not within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A Hall displacement sensor is characterized in that: the sliding device comprises a first sliding block, a second sliding block and an elastic piece, wherein the first sliding block is connected with the second sliding block in a sliding mode, a gap is formed between the first sliding block and the second sliding block in the sliding direction, the elastic piece is located in the gap, and the elastic piece exerts acting force on the first sliding block along the sliding direction to enable the first sliding block to be abutted against the second sliding block;
the Hall displacement sensor further comprises a magnetic part, a Hall chip and a circuit board electrically connected with the Hall chip, wherein one of the magnetic part and the Hall chip is arranged on the first sliding block, and the other one of the magnetic part and the Hall chip is arranged on the second sliding block.
2. The Hall displacement sensor according to claim 1, wherein the magnetic member is disposed opposite to the Hall chip and located on both sides of the gap, respectively.
3. The hall displacement sensor of claim 2, wherein the magnetic member is a cylindrical permanent magnet, and the hall chip moves in the axial direction of the magnetic member.
4. The Hall displacement sensor according to claim 3, wherein the diameter of the cylindrical permanent magnet is 1mm to 4 mm; and/or the size of the gap along the sliding direction is 1 mm-2 mm.
5. The Hall displacement sensor according to any one of claims 1 to 4, further comprising a lock bar mounted on the first slider or the second slider, wherein the lock bar is used for locking or unlocking the relative position between the first slider and the second slider.
6. The Hall displacement sensor according to any one of claims 1 to 4, further comprising a sliding mechanism disposed between the first slider and the second slider, wherein the sliding mechanism comprises a base and a sliding member which slide relative to each other, the sliding member is fastened to the first slider, the base is fastened to the second slider, and the first slider abuts against the base.
7. The Hall displacement sensor according to claim 6, wherein the first slider has a cavity, the sliding mechanism is located in the cavity, one end of the base abuts against a side wall of the cavity, and the magnetic member is mounted on the side wall of the cavity; the second sliding block comprises a bottom plate and a side plate connected with the bottom plate, the bottom plate is connected with the base, and the Hall chip is installed on the side plate.
8. The Hall displacement sensor according to claim 7, further comprising a lock bar for locking or unlocking a relative position between the first slider and the second slider, wherein the lock bar is mounted on the side plate.
9. The Hall displacement sensor according to any of claims 1 to 4, wherein the elastic member is a compression spring or a tension spring.
10. The Hall displacement sensor according to any one of claims 1 to 4, wherein the sensitivity of the Hall chip is higher than or equal to 3.125 mV/Gauss.
CN201911118096.0A 2019-11-15 2019-11-15 Hall displacement sensor Active CN110887511B (en)

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CN201911118096.0A CN110887511B (en) 2019-11-15 2019-11-15 Hall displacement sensor
PCT/CN2019/125379 WO2021093078A1 (en) 2019-11-15 2019-12-13 Hall displacement sensor

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Publication number Priority date Publication date Assignee Title
US20110133725A1 (en) * 2009-12-04 2011-06-09 Werner Dengler Hall-type linear-travel sensor for intermediate travel
EP2549235A2 (en) * 2011-07-20 2013-01-23 LG Innotek Co., Ltd. Height sensor module for vehicle
CN103217093A (en) * 2013-04-23 2013-07-24 扬州大学 Hall type straight small displacement sensor
CN207781312U (en) * 2017-12-08 2018-08-28 上海思博机械电气有限公司 A kind of non-contact straight-line displacement potentiometer
CN208739046U (en) * 2018-08-20 2019-04-12 无锡市灵鸿电子有限公司 A kind of stepless speed regulation component based on Hall sensor
CN209366494U (en) * 2018-11-22 2019-09-10 许珂凡 A kind of space flight mechanism tripper
CN109723703A (en) * 2019-01-09 2019-05-07 日立楼宇技术(广州)有限公司 Locking device
CN110058355A (en) * 2019-03-19 2019-07-26 武汉光迅科技股份有限公司 A kind of automatic coupling device and automatic coupling method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021093078A1 (en) * 2019-11-15 2021-05-20 武汉光迅科技股份有限公司 Hall displacement sensor

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