CN110864814A - Automatic alignment device, alignment method and reaction chamber - Google Patents
Automatic alignment device, alignment method and reaction chamber Download PDFInfo
- Publication number
- CN110864814A CN110864814A CN201810981299.1A CN201810981299A CN110864814A CN 110864814 A CN110864814 A CN 110864814A CN 201810981299 A CN201810981299 A CN 201810981299A CN 110864814 A CN110864814 A CN 110864814A
- Authority
- CN
- China
- Prior art keywords
- unit
- distance
- distance measuring
- observation hole
- ranging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 230000009191 jumping Effects 0.000 claims description 19
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- 238000004321 preservation Methods 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 238000009529 body temperature measurement Methods 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides an automatic alignment device, an alignment method and a reaction chamber, which comprise a distance measuring unit, a control unit and a driving unit, wherein the distance measuring unit is arranged on a temperature measuring element and used for emitting a distance measuring light beam towards the direction of an observation hole, carrying out real-time distance detection and sending a detected distance value to the control unit; the driving unit is used for driving the temperature measuring element to move on a plane parallel to the cross section of the observation hole; the control unit is used for judging whether the distance measuring unit jumps in the moving process according to the change of the distance value, and acquiring the target position of the distance measuring unit according to the position where the distance measuring unit jumps so as to control the driving unit to drive the distance measuring unit to move to the target position. The infrared thermometer can be aligned at normal temperature, so that resources and time are saved, and the operation is safe and convenient.
Description
Technical Field
The invention relates to the technical field of microelectronic manufacturing, in particular to an automatic alignment device, an alignment method and a reaction chamber.
Background
Physical Vapor Transport (PVT) is one of the mainstream methods for preparing silicon carbide (SiC) crystals, and generally, a silicon carbide seed crystal and a silicon carbide material source are placed on a graphite crucible in a furnace body in a layered manner, and the furnace body is heated and has a temperature gradient inside, so that the temperature of the seed crystal is low, the temperature of the material source is high, and thus the material source is sublimated and crystallized on the seed crystal with low temperature, and a silicon carbide single crystal is obtained.
In the prior art, an infrared thermometer is usually arranged at the top end of a furnace body of silicon carbide equipment to collect real-time temperature inside the furnace body, the infrared thermometer is also provided with an alignment eyepiece with a datum point and used for performing alignment setting on the infrared thermometer, in the alignment setting, the inside of the furnace body is firstly heated to more than 1000 ℃, a graphite crucible is red at high temperature, a worker installs the alignment eyepiece at the top of the infrared thermometer, the datum point in the alignment eyepiece and a red bright position which is exposed from an observation hole arranged above the graphite crucible are observed through naked eyes, the position of the infrared thermometer is manually adjusted, and the infrared thermometer is fixed at the position after the datum point and the red bright coincide, namely the alignment setting of the infrared thermometer is completed.
However, in the above method, after each silicon carbide single crystal growth is completed, the graphite crucible needs to be taken out, and then put into the furnace body after seed crystals and material sources are filled, the position of the graphite crucible changes, and the alignment setting needs to be performed again, and the interior of the furnace body is heated to over 1000 ℃, which takes 0.5-1 hour, wastes resources and time, and the worker needs to climb to the top end of the silicon carbide device at high temperature to observe and adjust the charged infrared thermometer, which is neither safe nor convenient.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides an automatic alignment device, an alignment method and a reaction chamber, which can be used for carrying out alignment setting on an infrared thermometer at normal temperature, thereby saving resources and time and being safe and convenient to operate.
To achieve the object of the present invention, an automatic aligning apparatus is provided, which comprises a distance measuring unit, a control unit, and a driving unit, wherein,
the distance measuring unit is arranged on the temperature measuring element and used for emitting distance measuring beams towards the direction of the observation hole, carrying out real-time distance detection and sending the detected distance value to the control unit;
the driving unit is used for driving the temperature measuring element to move on a plane parallel to the cross section of the observation hole;
the control unit is used for judging whether the distance measuring unit jumps in the moving process according to the change of the distance value, and acquiring the target position of the distance measuring unit according to the position where the distance measuring unit jumps so as to control the driving unit to drive the distance measuring unit to move to the target position.
Preferably, the distance measuring unit comprises at least three distance measuring sensors, and on the plane where the cross section of the observation hole is located, at least three distance measuring light spots emitted by the distance measuring sensors can form a regular polygon, and the center of a circle circumscribing the regular polygon is located on the axis of the temperature measuring element.
Preferably, on the plane of the cross section of the observation hole, the sum of the diameter of the circumscribed circle and the diameter of the ranging light spot is equal to the diameter of the observation hole.
Preferably, the control unit is configured to determine whether each of the ranging sensors first jumps during a moving process according to the change in the distance value,
when each ranging sensor jumps for the first time, the control unit is further configured to record coordinates of ranging spots emitted by each ranging sensor when jumping for the first time, and calculate and obtain coordinates of a target position of the ranging unit according to the coordinates.
Preferably, a two-dimensional coordinate system is established on a plane where the cross section of the observation hole is located, and the two-dimensional coordinate system comprises an X axis and a Y axis which are perpendicular to each other;
the control unit is used for controlling the driving unit to drive the temperature measuring element to move for a preset distance respectively along the positive direction and the negative direction of the X axis and return to an initial position;
the control unit is used for controlling the driving unit to drive the temperature measuring element to move for a preset distance respectively along the positive direction and the negative direction of the Y axis and return to an initial position;
in the moving process, the control unit is used for recording the coordinates of the ranging light spots emitted by the ranging sensors during the first jumping; the control unit selects any three different coordinates to calculate and obtain the coordinates of the target position of the ranging unit.
As another technical solution, the present invention further provides a method for alignment based on the above automatic alignment apparatus, including:
the distance measuring unit emits distance measuring light beams towards the direction of the observation hole, carries out real-time distance detection and sends the detected distance value to the control unit;
the control unit controls the driving unit to drive the temperature measuring element to move on a plane parallel to the cross section of the observation hole, and whether the distance measuring unit jumps in the moving process is judged according to the change of the distance value;
the control unit calculates and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps, and controls the driving unit to drive the distance measuring unit to move to the target position.
Preferably, in the step that the control unit calculates and obtains a target position of the ranging unit according to a position where the ranging unit jumps, and controls the driving unit to drive the ranging unit to move to the target position,
if the distance value sent by each distance measuring sensor jumps, the coordinates of the distance measuring light spot emitted by each distance measuring sensor during jumping are recorded, and the coordinates of the target position of the distance measuring unit are obtained through calculation according to the coordinates.
Preferably, in the step that the control unit controls the driving unit to drive the temperature measuring element to move on a plane parallel to the cross section of the observation hole and judges whether the distance measuring unit jumps or not in the moving process according to the change of the distance value,
establishing a two-dimensional coordinate system on a plane where the cross section of the observation hole is located, wherein the two-dimensional coordinate system comprises an X axis and a Y axis which are perpendicular to each other;
the driving unit drives the temperature measuring element to move a preset distance along the positive direction of the X axis and returns to an initial position;
the driving unit drives the temperature measuring element to move for a preset distance along the opposite direction of the X axis and returns to the initial position;
the driving unit drives the temperature measuring element to move a preset distance along the positive direction of the Y axis and return to an initial position;
the driving unit drives the temperature measuring element to move for a preset distance along the opposite direction of the Y axis and returns to the initial position;
and in the moving process, the control unit records the coordinates of the ranging light spots emitted by the ranging sensors when jumping for the first time.
Preferably, the distance measuring unit jumps to change the distance value from a first preset range to a second preset range;
the preset distance is the diameter of the observation hole.
As another technical solution, the present invention further provides a reaction chamber, which includes a chamber body, wherein an observation hole is formed above the chamber body, and the automatic alignment device is located above the chamber body, and is used for aligning the temperature measuring element with the observation hole.
The invention has the following beneficial effects:
according to the technical scheme of the automatic alignment device, the alignment method and the reaction chamber, the driving unit is used for driving the temperature measuring element to move on a plane parallel to the cross section of the observation hole, the distance measuring unit arranged on the temperature measuring element can move synchronously with the temperature measuring element, in the moving process, the distance measuring unit emits distance measuring light beams towards the direction of the observation hole and carries out real-time distance detection, and the detected distance value is sent to the control unit. Based on the above, the control unit judges whether the distance measuring unit jumps in the moving process according to the change of the distance value, and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps, so as to control the driving unit to drive the distance measuring unit to move to the target position, and the temperature measuring element is aligned with the observation hole of the reaction chamber. Therefore, by means of the automatic alignment device, the alignment of the temperature measuring element can be completed at normal temperature in the reaction chamber, the reaction chamber does not need to be heated first, so that resources and time are saved, and a worker does not need to climb onto the reaction chamber to manually align the temperature measuring element, so that the operation is safe and convenient.
Drawings
FIG. 1 is a schematic structural view of an automatic alignment apparatus and a reaction chamber according to the present invention;
FIG. 2 is a schematic diagram showing the position of the thermometric element after the alignment of the observation hole is completed;
FIG. 3 is a schematic view of the structure of a viewing port according to the present invention;
FIG. 4 is a schematic position diagram of a first relative position of a ranging spot and a view port of the present invention;
FIG. 5 is a schematic position diagram of a second relative position of the ranging spot and the viewport of the present invention;
FIG. 6 is a schematic diagram of the position of a third relative position of the ranging spot and the viewport of the present invention;
FIG. 7 is a schematic view of the position of a fourth relative position of the ranging spot and the viewport of the present invention;
FIG. 8 is a schematic diagram of the alignment process of the ranging spot and the observation hole at a third relative position according to the present invention;
FIG. 9 is a schematic diagram of the alignment process when the ranging spot and the observation hole are at the second relative position according to the present invention;
FIG. 10 is a schematic diagram of the alignment process of the ranging spot and the observation hole in a fourth relative position according to the present invention;
FIG. 11 is a block flow diagram illustrating a detailed process of the alignment method of the present invention;
FIG. 12 is a block flow diagram illustrating another embodiment of the alignment method of the present invention;
fig. 13 is a flow chart of another specific process of the alignment method provided by the present invention.
Description of reference numerals:
1-a temperature measuring element; 11-measuring the temperature of the light beam; 12-measuring temperature light spots; 2-a reaction chamber; 21-a viewing aperture; 31-a ranging sensor; 311-a ranging beam; 312-a ranging spot; 4-a drive unit; 51-a heat preservation device; 52-an induction coil; 53-observation window.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the automatic alignment apparatus, the alignment method and the reaction chamber provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 1, in this embodiment, a reactant is placed in a reaction chamber 2, the reactant includes a seed crystal and a source material, a heat preservation device 51 is wrapped outside an outer peripheral wall of the reaction chamber 2, an induction coil 52 is disposed outside the outer peripheral wall of the heat preservation device 51 and is used for heating the reaction chamber 2, the reaction chamber 2 is red at a high temperature, an observation hole 21 is disposed at the top of the reaction chamber 2, an observation hole 21 is also disposed on an upper surface of the heat preservation device 51, red light is visible inside the reaction chamber 2 through the observation hole 21 of the heat preservation device 51, a temperature measuring element 1 is disposed in an automatic alignment device above the reaction chamber 2, the temperature measuring element 1 can emit a temperature measuring beam 11 from a central point thereof, and alignment between the temperature measuring beam 11 and a red light spot in the observation hole 21 of the reaction chamber 2 is completed by aligning the temperature measuring beam 1 and the red light, therefore, the temperature in the reaction chamber 2 is detected, the temperature measuring light beam 11 needs to enter the reaction chamber 2 through the two observation holes 21, the two observation holes 21 are coaxially arranged, and the inner diameter of the observation hole 21 on the heat preservation device 51 is larger, so that the temperature measuring light beam 11 emitted by the temperature measuring element 1 can simultaneously pass through the two observation holes 21, and the temperature measuring light beam 11 can also certainly pass through the observation hole 21 of the heat preservation device 51 if the temperature measuring light beam 11 can pass through the observation hole 21 of the reaction chamber 2 and enter the reaction chamber 2, in addition, the top of the reaction chamber 2 is also provided with the observation window 53, the temperature measuring light beam 11 and the distance measuring light beam 311 can enter the reaction chamber 2 through the observation window 53, and the automatic alignment device provided by the embodiment is described below only by taking as an example that the temperature measuring light beam 11 emitted by the temperature measuring element 1 can pass through the observation hole.
As shown in fig. 1-10, the automatic alignment apparatus provided in this embodiment includes a distance measuring unit, a control unit and a driving unit 4, wherein the distance measuring unit is disposed on the temperature measuring element 1, and is configured to emit a distance measuring beam 311 toward the observation hole 21 and perform real-time distance detection, and send a detected distance value to the control unit; the driving unit 4 drives the temperature measuring element 1 to move on a plane parallel to the cross section of the observation hole 21; then, the control unit judges whether the distance measuring unit jumps in the moving process according to the change of the distance value, and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps so as to control the driving unit 4 to drive the distance measuring unit to move to the target position.
It removes on the plane that is on a parallel with the cross section of observation hole 21 with the help of drive unit 4 drive temperature measurement element 1, the range unit that sets up on temperature measurement element 1 can be along with temperature measurement element 1 synchronous motion, in the removal process, the range unit is towards the direction transmission range finding light beam 311 of observation hole 21 and carry out distance detection, and send the distance value that detects to the control unit, because the distance difference between the inboard and the outside of range unit and the edge of observation hole 21 is great, when the range unit passes through the edge of observation hole, the jump can take place for the distance value that its detected. Based on this, the control unit judges whether the distance measuring unit jumps in the moving process according to the change of the distance value, and calculates and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps, so as to control the driving unit 4 to drive the distance measuring unit to move to the target position, so that the center point of the temperature measuring element 1 is aligned with the target light spot in the observation hole 21 of the reaction chamber 2, and the alignment of the temperature measuring element 1 and the reaction chamber 2 is completed. From this, with the help of above-mentioned automatic alignment device, can be in the counterpoint of temperature element 1 under the normal atmospheric temperature at reaction chamber 2, need not heat reaction chamber 2 earlier to save resource and time, and the staff need not to climb and carry out manual counterpoint to temperature element 1 on reaction chamber 2, thereby make the operation safe convenient.
In this embodiment, the central point of the temperature measuring element 1 is used for emitting the temperature measuring beam 11, the target light spot is a red light spot that is emitted from the observation hole 21 after the reaction chamber 2 is heated at a high temperature, and the temperature measuring element 1 is an infrared thermometer, but the temperature measuring element 1 is not limited thereto, and may be other non-contact temperature measuring devices.
In this embodiment, the distance measuring unit includes at least three distance measuring sensors 31, and on the plane of the cross section of the observation hole 21, the distance measuring spots 312 emitted by the at least three distance measuring sensors 31 can form a regular polygon, and the center of the circumscribed circle of the regular polygon is on the axis of the temperature measuring element 1.
The following is to specifically describe three ranging sensors, three ranging sensors 31 are installed on the lower surface of one side wall of the temperature measuring element 1 facing the reaction chamber 2, a transmitting window is further arranged at the center of the side wall, the temperature measuring light beam 11 emitted by the temperature measuring element 1 is emitted through the transmitting window, the three ranging sensors 31 are arranged around the transmitting window, the ranging light beam 311 emitted by each ranging sensor 31 forms a circular ranging light spot 312 on the cross section of the observation hole 21, so that the ranging light spots 312 emitted by the three ranging sensors 31 are arranged at intervals around the temperature measuring light spots 12 emitted by the temperature measuring element 1 on the cross section of the observation hole 21, the centers of the ranging light spots 312 emitted by the three ranging sensors 31 are connected in pairs to form an equilateral triangle, the centers of the three ranging light spots 312 are located on the axis of the temperature measuring element 1, and the positions of the temperature measuring light spots 12 can be determined according to the positions of, the position of the temperature measuring element 1 can be determined by the positions of the three distance measuring sensors 31, so that the center point of the temperature measuring element 1 can be aligned with the target light spot in the observation hole 21 of the reaction chamber 2 by moving the three distance measuring sensors 31 to the target position, and the alignment of the temperature measuring element 1 and the reaction chamber 2 is completed.
In the present embodiment, on the cross section of the observation hole 21, the center of the circumscribed circle of the equilateral triangle coincides with the center of the temperature measuring spot 12 emitted by the temperature measuring element 1. Specifically, the temperature measuring light beam 11 emitted by the temperature measuring element 1 forms a circular temperature measuring light spot 12 on the cross section of the observation hole 21, and the center of the temperature measuring light spot 12 coincides with the center of an equilateral triangle circumscribed circle.
In the present embodiment, on the cross section of the observation hole 21, the ranging light spot 312 and the observation hole 21 are both circular, the sum of the diameter of the circumscribed circle of the equilateral triangle and the diameter of the ranging light spot 312 is equal to the diameter of the observation hole 21, that is, on the cross section of the observation hole 21, the center of the circumscribed circle coincides with the center of the circle formed by the projection of the observation hole 21, and the three ranging light spots 312 can be simultaneously tangent to the inner side of the circle formed by the projection of the observation hole 21.
In the present embodiment, on the plane of the cross section of the observation hole 21, the sum of the diameter of the circumscribed circle and the diameter of the ranging spot 312 is equal to the diameter of the observation hole 21.
In this embodiment, the control unit is configured to determine whether each of the ranging sensors 31 has a first jump in the moving process according to a change in the distance value, and further configured to record coordinates of the ranging spot 312 emitted by each of the ranging sensors 31 when the ranging spot first jumps, and obtain coordinates of a target position of the ranging unit according to the coordinates, during the moving process of the temperature measuring element 1, each of the ranging sensors 31 fixed on the temperature measuring element 1 is also driven to move, and when the ranging spot 312 emitted by any one of the ranging sensors 31 moves out of or into the observation hole 21 on the cross section of the observation hole 21, a jump in the distance value detected by the ranging sensor 31 occurs.
In the present embodiment, for example, how the distance value detected by the distance measuring sensor 31 jumps, the distance value detected by the distance measuring sensor 31 when the distance measuring beam 311 irradiates inside the observation hole 21 is greatly different from the distance value detected when the distance measuring beam irradiates outside the observation hole 21, and the distance value irradiated inside the observation hole 21 is detected as H in cm, and the distance value irradiated outside the observation hole 21 is detected as H in cm, and it is determined whether the distance measuring beam 311 irradiated by the distance measuring sensor 31 irradiates inside the observation hole 21 or outside the observation hole 21 according to whether the distance value detected by the distance measuring sensor 31 is H ± 0.2cm or H ± 0.2 cm. Specifically, if the distance value detected by the distance measuring sensor 31 jumps from H ± 0.2cm to H ± 0.2cm, it indicates that the distance measuring spot 312 of the distance measuring beam 311 emitted by the distance measuring sensor 31 on the cross section of the observation hole 21 moves out of the observation hole 21, and if the distance value detected by the distance measuring sensor 31 jumps from H ± 0.2cm to H ± 0.2cm, it indicates that the distance measuring spot 312 of the distance measuring beam 311 emitted by the distance measuring sensor 31 on the cross section of the observation hole 21 moves in from the outside of the observation hole 21.
In the moving process of the temperature measuring element 1, the control unit judges whether the distance value sent by each distance measuring sensor 31 jumps or not, if so, the control unit records the coordinates of the distance measuring light spots 312 sent by each distance measuring sensor 31 when jumping, and because the positions where the distance values jump are all positioned on the circular circumference formed by the projection of the observation hole 21 on the cross section of the observation hole, namely the circle is drawn by the coordinates where all the distance values jump, namely the projection of the observation hole 21 on the cross section of the observation hole, the circle center coordinates of the target position of each distance measuring sensor 31 can be obtained according to the coordinate calculation, and the target position is the circle center coordinates of the observation hole 21. Then, the control unit controls the driving unit 4 to drive the temperature measuring element 1 to move until the center of the circle of each distance measuring sensor 31 moves to the center coordinate, and at this time, the temperature measuring element 1 is located above the observation hole 21, so that the temperature measuring light beam 11 emitted by the temperature measuring element 1 can pass through the observation hole 21 of the reaction chamber 2 to enter the reaction chamber 2.
In the present embodiment, a two-dimensional coordinate system including an X axis and a Y axis perpendicular to each other is established on a plane in which the cross section of the observation hole 21 is present. The control unit is used for controlling the driving unit 4 to drive the temperature measuring element 1 to move for preset distances along the positive direction and the negative direction of the X axis respectively and return to the initial position, and the control unit is used for controlling the driving unit 4 to drive the temperature measuring element 1 to move for preset distances along the positive direction and the negative direction of the Y axis respectively and return to the initial position. Specifically, the control unit firstly controls the driving unit 4 to drive the temperature measuring element 1 to move for a preset distance along the positive direction of the X axis, after the preset distance is reached, the control unit controls the driving unit 4 to drive the temperature measuring element 1 to return to the initial position, then the control unit controls the driving unit 4 to drive the temperature measuring element 1 to move for the preset distance along the positive direction of the Y axis, after the preset distance is reached, the control unit controls the driving unit 4 to drive the temperature measuring element 1 to return to the initial position, then the control unit controls the driving unit 4 to drive the temperature measuring element 1 to return to the initial position after the preset distance is reached.
In the present embodiment, the preset distance is the diameter of the observation hole 21, and each ranging sensor 31 can pass through the entire observation hole 21 in the radial direction of the observation hole 21, so that the distance value detected by the ranging sensor 311 can jump.
During the movement, the control unit is used for recording the coordinates of the emitted ranging light spots 312 of each ranging sensor 31 when jumping; the control unit selects any three different coordinates to calculate and obtain the coordinates of the target position of the ranging unit.
In practical application, in the moving process of the temperature measuring element 1, the distance value sent by each distance measuring sensor 31 to the control unit will jump many times, and the control unit only needs to record the coordinates of the distance measuring light spot 312 formed by the distance measuring light beam 311 emitted by each distance measuring sensor 31 on the cross section of the observation hole 21 when the distance measuring unit moves in the positive direction of the X axis and the negative direction respectively, and when the distance measuring unit moves in the negative direction of the positive direction of the Y axis, the distance measuring light spot 312 moves in or out of the observation hole 21 for the first time.
As another technical solution, as shown in fig. 11-13, this embodiment further provides an alignment method, which uses the above-mentioned automatic alignment apparatus to move the temperature measuring device 1, so that the temperature measuring beam 11 emitted by the temperature measuring device 1 can pass through the observation hole 21 of the reaction chamber 2 and enter the reaction chamber 2, and includes the following steps:
s1, the distance measuring unit emits the distance measuring beam 311 towards the direction of the observation hole 21 and performs real-time distance detection, and sends the detected distance value to the control unit, and then the step S2 is performed;
s2, the control unit controls the driving unit 4 to drive the temperature measuring element 1 to move on a plane parallel to the cross section of the observation hole 21, and simultaneously, the step S3 is carried out;
s3, the control unit judges whether the distance measuring unit jumps during moving according to the change of the distance value, and then the step S4 is carried out;
and S4, the control unit calculates and obtains the target position of the ranging unit according to the position where the ranging unit jumps, and controls the driving unit 4 to drive the ranging unit to move to the target position.
It removes on the plane that is on a parallel with the cross section of observation hole 21 with the help of drive unit 4 drive temperature measurement element 1, the range unit that sets up on temperature measurement element 1 can be along with temperature measurement element 1 synchronous motion, in the removal process, the range unit is towards the direction transmission range finding light beam 311 of observation hole 21 and carry out distance detection, and send the distance value that detects to the control unit, because the distance difference between the inboard and the outside of range unit and the edge of observation hole 21 is great, when the range unit passes through the edge of observation hole, the jump can take place for the distance value that its detected. Based on this, the control unit judges whether the distance measuring unit jumps in the moving process according to the change of the distance value, and calculates and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps, so as to control the driving unit 4 to drive the distance measuring unit to move to the target position, so that the center point of the temperature measuring element 1 is aligned with the target light spot in the observation hole 21 of the reaction chamber 2, and the alignment of the temperature measuring element 1 and the reaction chamber 2 is completed. From this, with the help of above-mentioned automatic alignment device, can be in the counterpoint of temperature element 1 under the normal atmospheric temperature at reaction chamber 2, need not heat reaction chamber 2 earlier to save resource and time, and the staff need not to climb and carry out manual counterpoint to temperature element 1 on reaction chamber 2, thereby make the operation safe convenient.
In this embodiment, in the step in which the control unit calculates and obtains the target position of the ranging unit according to the position where the ranging unit jumps, and controls the driving unit 4 to drive the ranging unit to move to the target position,
s41, if the distance value sent by each distance measuring sensor 31 jumps, the coordinates of the distance measuring light spot 312 emitted by each distance measuring sensor 31 when jumping are recorded, and the coordinates of the target position of the distance measuring unit are obtained according to the coordinate calculation.
In this embodiment, in the step that the control unit controls the driving unit 4 to drive the temperature measuring element 1 to move on the plane parallel to the cross section of the observation hole 21, and judges whether the distance measuring unit jumps during the movement according to the change of the distance value,
s20, establishing a two-dimensional coordinate system on the plane of the cross section of the observation hole 21, the two-dimensional coordinate system including an X axis and a Y axis perpendicular to each other, and then performing step S211;
s211, driving the temperature measuring element 1 to move a preset distance along the positive direction of the X axis, recording the coordinates of the ranging light spots 312 emitted by each ranging sensor 31 during jumping, returning to the initial position, and then performing the step S212;
s212, driving the temperature measuring element 1 to move a preset distance along the opposite direction of the X axis, recording the coordinates of the ranging light spots 312 emitted by each ranging sensor 31 during jumping, returning to the initial position, and simultaneously performing the step S213;
s213, driving the temperature measuring element 1 to move a preset distance along the positive direction of the Y axis, recording the coordinates of the ranging light spots 312 emitted by each ranging sensor 31 during jumping, returning to the initial position, and simultaneously performing the step S214;
s214, driving the temperature measuring element 1 to move a preset distance along the opposite direction of the Y axis, recording the coordinates of the ranging light spots 312 emitted by each ranging sensor 31 during jumping, returning to the initial position, and then performing the step S411;
s411, the control unit records the coordinates of the ranging light spots 312 emitted by the ranging sensors 31 when jumping for the first time.
The alignment method is specifically described below with reference to fig. 8 as an example:
firstly, the three distance measuring sensors 31 are numbered as A, B and C, a two-dimensional coordinate system is established on the plane of the cross section of the observation hole 21, the two-dimensional coordinate system comprises an X axis and a Y axis which are perpendicular to each other, the initial position of the temperature measuring element 1 is the origin of coordinates, namely the initial position of the circle center of the temperature measuring light spot 12 emitted by the temperature measuring element 1 on the plane of the cross section of the observation hole 21 is the origin of coordinates.
The control driving unit 4 drives the temperature measuring element 1 to move the diameter length of the observation hole 21 along the positive direction of the X axis, the C ranging sensor 31 moves to the position C' in the moving process, the distance value sent by the C ranging sensor 31 jumps, and the coordinate of the ranging light spot 312 emitted by the C ranging sensor 31 is recorded as (X)X3，YX3) Then returning to the initial position and controlling the driveThe movable unit 4 drives the temperature measuring element 1 to move along the diameter length of the observation hole 21 along the X-axis direction, the B ranging sensor 31 moves to the position B' in the moving process, the distance value sent by the B ranging sensor 31 jumps, and the coordinate of the ranging light spot 312 emitted by the B ranging sensor 31 is recorded as (X)X2，YX2) And then returns to the original position. And recording the coordinates of the ranging light spots 312 emitted by the ranging sensors 31B and C when the ranging light spots jump for the first time.
The control driving unit 4 drives the temperature measuring element 1 to move the diameter length of the observation hole 21 along the positive direction of the Y axis, the C distance measuring sensor 31 moves to the position C' in the moving process, the distance value sent by the C distance measuring sensor 31 jumps, and the coordinate of the distance measuring light spot 312 emitted by the C distance measuring sensor 31 is recorded as (X)Y3，YY3) Then returning to the initial position, controlling the driving unit 4 to drive the temperature measuring element 1 to move along the Y axis in the opposite direction to the diameter length of the observation hole 21, moving the A distance measuring sensor 31 to the A' position in the moving process, jumping the distance value sent by the A distance measuring sensor 31, and recording the coordinate (X) of the distance measuring spot 312 emitted by the A distance measuring sensor 31 asY1，YY1) And then returns to the original position.
In practical application, in the process of the temperature measuring element 1 along the positive direction and the negative direction of the X axis, the ranging light spot 312 emitted by each ranging sensor 31 may jump many times, and only the coordinate of the ranging light spot 312 emitted by each ranging sensor 31 when jumping for the first time needs to be recorded, and in the process of moving along the positive direction and the negative direction of the Y axis, the ranging light spot 312 emitted by each ranging sensor 31 may jump many times, and similarly, only the coordinate of the ranging light spot 312 emitted by each ranging sensor 31 when jumping for the first time needs to be recorded.
After the temperature measuring element 1 is moved, four-point coordinates (X) are obtainedX2，YX2)，(XX3，YX3)，(XY1，YY1)，(XY3，YY3) Selecting any three different coordinates as (a)1，b1)，(a2，b2)，(a3，b3) Observations are obtained by solving the following simultaneous equationsThe projection of the hole 21 on its cross section forms the coordinate O (R) of the center of the circleX，RY) The following were used:
RX＝v-(u-v)*k2/(k1-k2)；
RY＝(u-v)/(k1-k2)；
wherein:
u＝(a1 2-a2 2+b1 2-b2 2)/(2a1-2a2)；
v＝(a1 2-a3 2+b1 2-b3 2)/(2a1-2a3)；
k1＝(b1-b2)/(a1-a2)；
k2＝(b1-b3)/(a1-a3)；
the control drive unit 4 drives the temperature measuring element 1 to move the center of the temperature measuring light spot 12 emitted by the temperature measuring element 1 from the initial position to the coordinate O (R)X，RY) Thus, the alignment of the temperature measuring element 1 and the observation hole 21 is completed, and the temperature measuring beam 11 emitted by the temperature measuring element 1 can pass through the observation hole 21 of the reaction chamber 2 and enter the reaction chamber 2.
According to the alignment method provided by the embodiment, by adopting the automatic alignment device provided by the embodiment, the infrared thermometer can be aligned at normal temperature, so that resources and time are saved, and the operation is safe and convenient.
In this embodiment, the distance measuring unit jumps to change the distance value from a first preset range to a second preset range; the predetermined distance is the diameter of the observation hole 21.
As shown in fig. 1, as another technical solution, the embodiment further provides a reaction chamber 2, which includes a chamber body, wherein an observation hole 53 is formed above the chamber body, and the automatic alignment device is located above the chamber body, and is configured to align a central point of the temperature measuring element with a target light spot in the observation hole, so as to complete alignment between the temperature measuring element 1 and the reaction chamber 2.
As shown in FIGS. 4-7, in practical application, the reaction chamber 2 is manually placed, the error between the centers of the observation hole 21 and the temperature measuring spot 12 on the cross section of the observation hole 21 is within 1cm, and the difference between the inner diameters of the observation hole 21 of the reaction chamber 2 and the observation hole 21 of the temperature keeping device 51 is greater than 1cm, so that the relative positions of the distance measuring spot 312 and the two observation holes 21 on the cross section are only four cases when the temperature measuring element 1 is in the initial position.
In the first case, fig. 4 shows that three ranging spots 312 simultaneously fall into the observation hole 21 of the reaction chamber 2 and are inscribed in a circle formed by the projection of the observation hole 21 of the reaction chamber 2 on the cross section thereof, in this case, the temperature measuring element 1 is aligned with the observation hole 21. In the second case shown in fig. 5, one of the three distance-measuring spots 312 is partially located in the observation hole 21 of the reaction chamber 2, i.e. on the circumference of a circle formed by the projection of the observation hole 21 of the reaction chamber 2 on its cross section, and the other one is located in the observation hole 21 of the reaction chamber 2, and the other one is located outside the observation hole 21 of the reaction chamber 2 and in the observation hole 21 of the temperature keeping means 51. In the third case of fig. 6, one of the three ranging spots 312 falls within the observation hole 21 of the reaction chamber 2, and the other two fall outside the observation hole 21 of the reaction chamber 2 and are within the observation hole 21 of the temperature keeping means 51. Fig. 7 shows a fourth case where two of the three ranging spots 312 fall within the observation hole 21 of the reaction chamber 2, and the other falls outside the observation hole 21 of the reaction chamber 2 and is located within the observation hole 21 of the temperature maintenance device 51.
In the second and fourth cases, the alignment of the thermometric element 1 with the viewing aperture 21 is performed in accordance with the alignment procedure of the third case, which can be seen in FIG. 9, and the alignment procedure of the fourth case can be seen in FIG. 10.
The reaction chamber 2 provided by this embodiment, through adopting the above-mentioned automatic alignment device provided by this embodiment, can align the infrared thermometer at normal temperature, thereby saving resources and time, and the operation is safe and convenient.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. An automatic alignment device is characterized by comprising a distance measuring unit, a control unit and a driving unit,
the distance measuring unit is arranged on the temperature measuring element and used for emitting distance measuring beams towards the direction of the observation hole, carrying out real-time distance detection and sending the detected distance value to the control unit;
the driving unit is used for driving the temperature measuring element to move on a plane parallel to the cross section of the observation hole;
the control unit is used for judging whether the distance measuring unit jumps in the moving process according to the change of the distance value, and acquiring the target position of the distance measuring unit according to the position where the distance measuring unit jumps so as to control the driving unit to drive the distance measuring unit to move to the target position.
2. The automatic aligning device of claim 1, wherein the distance measuring unit comprises at least three distance measuring sensors, and on the plane of the cross section of the observation hole, distance measuring spots emitted by the at least three distance measuring sensors can form a regular polygon, and the center of a circle circumscribed by the regular polygon is on the axis of the temperature measuring element.
3. The automatic aligning apparatus of claim 2, wherein the sum of the diameter of the circumscribed circle and the diameter of the ranging spot is equal to the diameter of the observation hole on the plane of the cross section of the observation hole.
4. The automatic aligning apparatus of claim 3, wherein the control unit is configured to determine whether each of the distance measuring sensors first jumps during moving according to the change of the distance value,
when each ranging sensor jumps for the first time, the control unit is further configured to record coordinates of ranging spots emitted by each ranging sensor when jumping for the first time, and calculate and obtain coordinates of a target position of the ranging unit according to the coordinates.
5. The automatic aligning device of claim 4, wherein a two-dimensional coordinate system is established on a plane of a cross section of the observation hole, the two-dimensional coordinate system comprises an X axis and a Y axis which are perpendicular to each other;
the control unit is used for controlling the driving unit to drive the temperature measuring element to move for a preset distance respectively along the positive direction and the negative direction of the X axis and return to an initial position;
the control unit is used for controlling the driving unit to drive the temperature measuring element to move for a preset distance respectively along the positive direction and the negative direction of the Y axis and return to an initial position;
in the moving process, the control unit is used for recording the coordinates of the ranging light spots emitted by the ranging sensors during the first jumping; the control unit selects any three different coordinates to calculate and obtain the coordinates of the target position of the ranging unit.
6. An alignment method based on the automatic alignment device according to any one of claims 1 to 5, comprising:
the distance measuring unit emits distance measuring light beams towards the direction of the observation hole, carries out real-time distance detection and sends the detected distance value to the control unit;
the control unit controls the driving unit to drive the temperature measuring element to move on a plane parallel to the cross section of the observation hole, and whether the distance measuring unit jumps in the moving process is judged according to the change of the distance value;
the control unit calculates and obtains the target position of the distance measuring unit according to the position where the distance measuring unit jumps, and controls the driving unit to drive the distance measuring unit to move to the target position.
7. The alignment method as claimed in claim 6, wherein in the step of calculating by the control unit a target position of the ranging unit according to a position at which the ranging unit makes a jump and controlling the driving unit to drive the ranging unit to move to the target position,
if the distance value sent by each distance measuring sensor jumps, the coordinates of the distance measuring light spot emitted by each distance measuring sensor during jumping are recorded, and the coordinates of the target position of the distance measuring unit are obtained through calculation according to the coordinates.
8. The alignment method as claimed in claim 7, wherein in the step of controlling the driving unit to drive the temperature measuring element to move on a plane parallel to the cross section of the observation hole by the control unit and determining whether the distance measuring unit jumps during the movement according to the change of the distance value,
establishing a two-dimensional coordinate system on a plane where the cross section of the observation hole is located, wherein the two-dimensional coordinate system comprises an X axis and a Y axis which are perpendicular to each other;
the driving unit drives the temperature measuring element to move a preset distance along the positive direction of the X axis and returns to an initial position;
the driving unit drives the temperature measuring element to move for a preset distance along the opposite direction of the X axis and returns to the initial position;
the driving unit drives the temperature measuring element to move a preset distance along the positive direction of the Y axis and return to an initial position;
the driving unit drives the temperature measuring element to move for a preset distance along the opposite direction of the Y axis and returns to the initial position;
and in the moving process, the control unit records the coordinates of the ranging light spots emitted by the ranging sensors when jumping for the first time.
9. The alignment method as claimed in claim 8, wherein the range finding unit changes the range value from a first preset range to a second preset range;
the preset distance is the diameter of the observation hole.
10. A reaction chamber, comprising a chamber body, wherein a viewing hole is arranged above the chamber body, and the reaction chamber is characterized by further comprising an automatic aligning device according to any one of claims 1 to 5, wherein the automatic aligning device is arranged above the chamber body and is used for aligning a temperature measuring element with the viewing hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810981299.1A CN110864814B (en) | 2018-08-27 | 2018-08-27 | Automatic alignment device, alignment method and reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810981299.1A CN110864814B (en) | 2018-08-27 | 2018-08-27 | Automatic alignment device, alignment method and reaction chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110864814A true CN110864814A (en) | 2020-03-06 |
| CN110864814B CN110864814B (en) | 2021-08-13 |
Family
ID=69651033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810981299.1A Active CN110864814B (en) | 2018-08-27 | 2018-08-27 | Automatic alignment device, alignment method and reaction chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110864814B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050134868A1 (en) * | 2003-12-08 | 2005-06-23 | Yusuke Nagai | Method of checking a laser processed deteriorated layer |
| CN101244523A (en) * | 2008-02-27 | 2008-08-20 | 浙江工业大学 | Laser process testing method and special instrument |
| CN104425304A (en) * | 2013-09-09 | 2015-03-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Wafer position detection device |
| CN106872049A (en) * | 2017-01-09 | 2017-06-20 | 电子科技大学 | A kind of turbine blade surface temperature measuring equipment |
| CN206459751U (en) * | 2017-02-21 | 2017-09-01 | 东莞科景电子科技有限公司 | A kind of infrared temperature monitor |
-
2018
- 2018-08-27 CN CN201810981299.1A patent/CN110864814B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050134868A1 (en) * | 2003-12-08 | 2005-06-23 | Yusuke Nagai | Method of checking a laser processed deteriorated layer |
| CN101244523A (en) * | 2008-02-27 | 2008-08-20 | 浙江工业大学 | Laser process testing method and special instrument |
| CN104425304A (en) * | 2013-09-09 | 2015-03-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Wafer position detection device |
| CN106872049A (en) * | 2017-01-09 | 2017-06-20 | 电子科技大学 | A kind of turbine blade surface temperature measuring equipment |
| CN206459751U (en) * | 2017-02-21 | 2017-09-01 | 东莞科景电子科技有限公司 | A kind of infrared temperature monitor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110864814B (en) | 2021-08-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4567667B2 (en) | Method for calibrating a wafer carrying robot | |
| CN1653326B (en) | Vision system | |
| KR20220041171A (en) | Integrated Adaptive Positioning Systems and Routines for Automated Wafer Handling Robot Learning and Health Check (HEALTH CHECK) | |
| EP3407088A1 (en) | Systems and methods for tracking location of movable target object | |
| TWI588304B (en) | Single crystal manufacturing method | |
| JP7161236B2 (en) | Wireless substrate-like teaching sensor for semiconductor processing | |
| JP7377289B2 (en) | Process kit ring wear detector | |
| CN104904002A (en) | Alignment device and alignment method | |
| KR101968439B1 (en) | Shape measuring device and shape measuring method | |
| CN107530877A (en) | The teaching method and robot of robot | |
| CN105762089B (en) | The detection of wafer position deviation and method of adjustment and semiconductor processing equipment | |
| KR101964964B1 (en) | Semiconductor manufafturing equipments with automatic teaching apparatus of wafer transfer robot and method for teaching of the same | |
| JPWO2014069291A1 (en) | Semiconductor substrate position detection apparatus and position detection method | |
| CN102738049A (en) | Substrate transport method, substrate transport apparatus, and coating and developing system | |
| EP2411792B1 (en) | System and auto-alignment method for determining position using a discrete contact probe | |
| JP2011508976A (en) | System and method for calibrating an end effector alignment using at least one light source | |
| JP2018523288A (en) | Apparatus and method for optical calibration of robot wafer placement | |
| US7596425B2 (en) | Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method | |
| CN110864814B (en) | Automatic alignment device, alignment method and reaction chamber | |
| CN104889982A (en) | Teaching jig, teaching system, and teaching method | |
| CN105097591B (en) | A kind of silicon wafer distribution photoelectric image array sweeping method and device | |
| KR20110022023A (en) | Substrate transfer robot and substrate processing system having the same and method for teaching the same | |
| JP6302002B2 (en) | Accelerating tube displacement measuring system and method inside high vacuum vessel using precision alignment device | |
| CN208444814U (en) | Wafer position apparatus for correcting | |
| CN117987781A (en) | Electron beam control method, apparatus, device and medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |