CN110849914B - Multifunctional sensor based on Kapton200HN and microfluid - Google Patents
Multifunctional sensor based on Kapton200HN and microfluid Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
- G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
- G01N22/04—Investigating moisture content
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
Abstract
The invention discloses a multifunctional sensor based on Kapton200HN and microfluid, which comprises a metal sheet with two etched CSRR at the bottom layer, a middle dielectric plate Kapton200HN and a top microstrip line; the right angle of the opening of the second grooving CSRR groove ring is aligned with the right angle and bent towards the inside of the ring, so that the maximum fringe electric field effect is realized, the area is an area with the strongest electric field intensity, and a sample to be measured is placed in the area and is used for measuring the dielectric constant of the magnetic medium material; the 90 ° inward vertical area of the first engraved CSRR groove ring is the area where the electric field intensity is maximum, and distilled water can be placed in this area to measure the temperature of the surrounding environment. Therefore, the sensor has the functions of simultaneously measuring the temperature and the humidity of the environment and the dielectric constant of the magnetic medium material, has the excellent performances of high sensitivity and high precision, and has the advantages of simple structure, miniaturization, wide measurement range and strong practicability.
Description
Technical Field
The invention belongs to the technical field of microwaves, relates to a microstrip line excited sensor, and particularly relates to a miniaturized microwave sensor for measuring humidity, temperature and dielectric constant of a magnetic medium material based on an eighth Mode Substrate integrated waveguide-EMSIW.
Background
In recent years, with the continuous pursuit of comfort and safety in the industrial field and home life, various environmental sensor technologies such as temperature, humidity and air quality sensors have been widely used, and besides, magnetic medium materials have been widely used in the fields of radar, electronic countermeasure, remote sensing and remote sensing, microwave communication, satellite communication, missile guidance and the like, in which the dielectric constant is an important microwave parameter of the magnetic medium material. Therefore, how to measure the temperature, humidity and dielectric constant quickly and accurately has been paid attention to the related fields of electronics, communications and the like.
Among conventional humidity sensors, fiber optic humidity sensors have advantages of small size, high sensitivity, and anti-electromagnetic interference, but these humidity sensors are either expensive to manufacture or easily interfered by the intensity of the light source.
In the traditional temperature sensor, electronic temperature sensing equipment such as a thermocouple, a thermopile or a thermistor is often used, although the thermistor is favored by people due to the characteristics of low cost and low power consumption, the range of the thermistor can be only-100-500 ℃, and the range of the thermistor is limited; although the thermocouples can be operated at temperatures above 2300 ℃, their sensitivity is rather low, which is prone to cause unnecessary errors in the experiment.
In the aspect of electrical property characterization of magnetic dielectric materials, a resonance-based method is often favored due to its advantages of high precision, high sensitivity, low cost, etc., in such a method, a measured sample is loaded on a resonator to cause a change in the resonant frequency of the resonator, thereby providing a reliable basis for measuring the dielectric constant of the magnetic dielectric materials. However, the sensors often have single functions and cannot meet the requirements of miniaturization and integration of circuits.
Therefore, in order to solve the above mentioned problems, the Kapton200HN and microfluid based multifunctional sensor of this application can be used for measuring the temperature and humidity of the environment, and can also simultaneously measure the dielectric constant of the magnetic medium material, and the multifunctional integration of the temperature, humidity and sample dielectric constant measurement not only improves the practicability of the miniaturized sensor, but also embodies a great innovation.
Disclosure of Invention
The invention aims to provide a microwave sensor which is simple in structure, high in sensitivity, high in Q value, wide in measurement range and capable of simultaneously measuring temperature, humidity and dielectric constant, and mainly aims at overcoming the defects of the prior art. The sensor is designed by adopting microstrip line excitation on the basis of the structure of an eighth-mode substrate integrated waveguide (EMSIW).
The invention is realized according to the following technical scheme:
a microwave sensor is a single-port device and is divided into three layers;
the top layer comprises a metal patch, a microstrip line and an SMA connector;
the middle layer adopts a humidity sensitive medium plate Kapton200 HN; kapton200HN is a generic name of polyimide, a dielectric plate whose dielectric constant is linearly varied with humidity, and whose thickness is 50 μm;
the bottom layer comprises a metal sheet, two grooved CSRR structures and a microfluidic channel;
the metal patch is provided with a plurality of metal through holes which are arranged at equal intervals and used for coupling the metal sheets; an eighth-mode substrate integrated waveguide (EMSIW) is formed by a metal patch, a microstrip line, a dielectric slab Kapton200HN, a metal sheet and a metal through hole;
the electric wall of the metal patch is connected with a microstrip line, and the two sides of the microstrip line of the metal patch are provided with axisymmetric L-shaped gaps (the left L-shaped gap is of an L structure which is clockwise rotated by 180 degrees, and the right L-shaped gap and the left L-shaped gap are axisymmetric with respect to the microstrip line);
the microstrip line structure comprises an input port, the port is used for connecting an SMA connector, and the SMA connector is communicated with a vector network analyzer; the input port is connected with a section of microstrip line, and the width of the microstrip line is 2.9 mm;
the metal sheet is etched with two groove ring CSRR structures; both slot rings CSRR are coupled to the top layer metal patch, respectively. The first grooved metal CSRR structure is composed of a grooved ring with an opening, wherein the length of the grooved ring is 6.3mm, the width b of the grooved ring is 5.905mm, and the groove width g of the groove is 0.3 mm. In addition, the right angle of the opening of the groove ring is aligned and bent towards the inside of the ring, and the structure can realize the maximum fringe electric field effect, so that the electric field intensity in the region is strongest, and the structure is used for measuring the dielectric constant of the magnetic medium material. Between two inward-bent right angles are formed several U-shaped structures and connecting plate for connecting two adjacent U-shaped structures. Wherein the length of U-shaped structure is 2mm, and the width is 0.9 mm. In addition, the openings of the groove rings extend outwards respectively, so that the contact area of the sensitive medium plate Kapton200HN and the outside air is increased, and the reaction time required for measuring the humidity during the experiment is shortened.
The opening of the first grooved metal CSRR is in the same direction as the SMA connector.
The second groove ring CSRR is constructed of a groove ring with an opening, wherein the length l of the groove ring37.0mm, width l2Is 6.7mm, wherein the groove width f of the engraved groove is 0.7 mm. The area of the "u" structure opposite the slot ring opening and located on the slot ring rotated 90 deg. clockwise is the highest electric field strength and therefore the change of the resonance frequency of the resonator is also evident, so that distilled water is placed in this area to measure the temperature of the surrounding environment.
The opening of the second slot ring CSRR faces the long side of the sensor and faces the area without the metal patch;
the distance l between the opening of the first grooved metal CSRR and the opening of the second grooved ring CSRR in the X-axis direction5Is 8.6 mm.
The distance l between the first slot ring CSRR and the second slot ring CSRR4Is 1.9 mm. The reasonable distance setting not only meets the miniaturization requirement of the structure, but also ensures that the functions of the two groove rings are not influenced,only if the spacing l between two groove rings is satisfied41.9mm, the object of the present application can be achieved.
A polyphenyl film (Pp) is laid right above the second groove ring CSRR structure and is used for preventing the situation that the liquid in the microfluidic channel is carelessly leaked out to change the dielectric constant of the sensitive medium plate;
a microfluid channel is arranged above the film, a channel for placing liquid is arranged in the microfluid channel, and the channel is opposite to the CSRR structure of the second groove ring, so that the liquid in the channel is influenced most by electric field radiation, the maximized frequency deviation is caused, and the measurement accuracy of the outdoor temperature is improved.
The sensitivity of the sensor determines the resolution of the dielectric constant measurement; the quality factor determines the accuracy of the measurement; the ultra-large measuring range and the miniaturization of the structure determine the practicability of the sensor.
Compared with the existing microwave sensor, the microwave sensor overcomes the defect that the existing sensor can only measure temperature, humidity or dielectric constant singly, can simultaneously measure the temperature, the humidity and the dielectric constant in the same sensor, and ensures the measurement accuracy because of higher sensitivity and Q value. Therefore, the method is very suitable for measuring the temperature, the humidity and the dielectric constant of the magnetic medium material.
Drawings
FIG. 1 is a schematic diagram of the structure and the parameter labeling diagram of the present invention: wherein (a) a schematic top sensor layer, (b) a schematic bottom sensor layer;
FIG. 2 is a schematic diagram of the electric field intensity distribution of the present invention;
FIG. 3 is a schematic diagram of the structure of a microfluidic channel for measuring temperature according to the present invention;
FIG. 4 is a simulation of transmittance versus ambient humidity for the present invention;
FIG. 5 is a diagram of transmission coefficient versus ambient humidity simulated frequency offset of the present invention;
FIG. 6 is a graph showing the relationship between the transmittance and the dielectric constant of a sample to be measured according to the present invention;
FIG. 7 is a schematic representation of a temperature simulation of the present invention;
wherein, 1, Kapton200HN medium plate; 2. a metal patch; 3. a through hole; 4. a microstrip line; 5, SMA connector; 6. a second CSRR slot ring; 7. the area with the maximum electric field intensity; 8. a first CSRR slot ring; 9. a metal foil.
Detailed Description
The present invention will be described in further detail with reference to the following examples in conjunction with the accompanying drawings.
As shown in fig. 1, which is a schematic structural diagram of the present invention, the sensor of the present invention includes a top layer including a metal patch 2, a microstrip line 4 and an SMA connector 5; a second CSRR groove ring 6 and a first CSRR groove ring 8 of which the bottom metal sheet 9 is etched; the middle layer is a Kapton200HN dielectric slab 1; the metal patch is provided with a plurality of metal through holes 3 which are arranged at equal intervals and used for coupling the metal sheets; the Kapton200HN dielectric plate 1 is a humidity sensitive material, the dielectric constant of which is linearly changed along with the humidity of the surrounding environment, so that the dielectric constant of the dielectric plate can be changed by changing the humidity of the surrounding environment, thereby causing frequency offset, and fitting a relational expression between the humidity and the frequency offset, thereby achieving the purpose of measuring the humidity of the surrounding environment; the top microstrip line 4 extends out of a feed long pin to be connected with the SMA connector 5, and the microstrip line 4 is coupled with the second CSRR slot ring 6 and the first CSRR slot ring 8 on the bottom layer. The first CSRR groove ring 8 is provided with a sensitive area, and the area between the right-angle alignment of the groove ring opening and the inward bending of the groove ring is the area 7 with the maximum electric field intensity, and the area is used for placing a sample to be measured so as to measure the dielectric constant of the sample. A microfluid channel made of PDMS is placed on the second CSRR groove ring 6, distilled water is introduced into the channel, the dielectric constant of the distilled water changes and the resonant frequency of the obtained transmission coefficient changes in a temperature-adjustable closed space, so that the purpose of measuring the temperature of the surrounding environment is achieved.
The sensor design of the invention was carried out in a three-dimensional electromagnetic simulation software Ansys HFSS environment, with relevant dimensions obtained by the software, as shown in the following table:
wherein the size of the interlayer dielectric plate is 23.5 multiplied by 17.42 multiplied by 0.05mm3Humidity sensitive material Kapton200HN (dielectric constant ε)r(RH) ═ 3.05+0.08 × RH (humidity of ambient environment), dielectric loss 0.004, and permeability loss 0)
As shown in fig. 2, which is a schematic diagram of the field intensity distribution of the electric field of the present invention, the region between the slots of the bottom CSRR slot ring 8 that are connected at an inflection angle in the slot ring is the largest in the field intensity, and thus the region is very sensitive to the change of the dielectric constant of the magnetoelectric sample, and the dielectric constant of the sample can be measured by placing the sample to be measured in the region, and in addition, the region that is 90 ° inward and vertical to the slot ring in the CSRR slot ring 6 is the largest in the field intensity, and thus the region is also obvious in the change of the resonant frequency of the resonator, so we place distilled water in the region to measure the temperature of the surrounding environment.
As shown in fig. 3, which is a schematic diagram of the microfluidic channel of the present invention, Kapton200HN is a temperature insensitive medium plate of the chip, a microfluidic channel designed before is dug in PDMS, and liquid flows in from a water inlet and flows out from a water outlet through a steel needle inserted in advance, wherein a polyphenylene (Pp) film is attached between the CSRR groove ring 6 and the PDMS to eliminate the influence of the liquid leaking out from the PDMS channel on the change of the dielectric constant of the medium plate generated by the Kapton200HN, thereby achieving the accuracy of the experiment.
Fig. 4 is a schematic diagram showing the relationship between the transmission coefficient and the ambient humidity, fig. 5 is a schematic diagram showing the relationship between the frequency offset and the ambient humidity, when the ambient humidity is 10% as a scale and changes from 0% to 100%, the dielectric constant of the dielectric slab Kapton200HN changes from 3.05 to 3.85 linearly, the frequency offset generated by the resonant frequency of the sensor is 1319MHz, the humidity sensitivity is 13.19 MHz/%, and the Q value in the curve is 229 at the lowest, so that the accuracy of the sensor is ensured by the ultra-large humidity sensitivity, and the high measurement accuracy of the sensor is ensured by the high Q value.
FIG. 5 shows the transmittance of the present invention and the dielectric constant of the sample to be measuredThe relationship diagram shows that a block with the size of 2.0 multiplied by 3.3 multiplied by 1mm is arranged in the area with the maximum electric field intensity3When the dielectric constant of the sample to be measured is changed from 1 to 10 (the interval is 1), the resonant frequency of the sensor is reduced from 7.961GHz to 7.737GHz, and the dielectric constant of the sample can be calculated through the change of the resonant frequency. The resonance frequency of the sensor has a large variation range, so that the sensitivity is high.
Fig. 6 is a schematic diagram showing a relationship between a transmission coefficient and a dielectric constant simulation of distilled water in a microfluidic channel according to the present invention, in which a previously designed microfluidic channel is dug in PDMS, and a liquid flows in from a water inlet and flows out from a water outlet through a steel needle inserted in advance.
Table one: comparison of the respective humidity Sensors
| Structure of the product | Size (mm) | Humidity sensitive range | Sensitivity of the probe |
| Substrate integrated |
35×35 | 0-80％ | 101kHz/RH |
| Transverse band-stop filter | 76.4×40 | 6.5-93％ | 173kHz/ |
| PVA film | |||
| 10×7.3 | 15-69.4％ | 89.34kHz/RH | |
| Radio frequency interference sensor | 8.1×9.3 | 20-70％ | 142kHz/RH |
| CPW resonator based on Kapton | 33×30 | 60-100％ | 3.88MHz/RH |
| The sensor of the invention (Kapton) | 23.5×17.42 | 0-100％ | 13.19MHz/RH |
A second table: comparison of respective temperature sensors
| Structure of the device | Resonance frequency (GHz) | Temperature range | Sensitivity of the probe |
| LC temperature sensor | 0.105 | 26-1400℃ | 14.3 kHz/degree |
| Double-microstrip micro-fluidic sensor | 2.55 | 21-39℃ | 0.167 MHz/degree |
| Dual-mode micro-fluidic sensor | 2.49 | 23-35℃ | 0.183 MHz/degree |
| The sensor of the invention (microfluid) | 12.08 | 30-95℃ | 0.262 MHz/degree |
A third table: comparison of respective sensors for measuring dielectric constant
From the above three tables, we compare the measurement of the three functions of humidity, temperature and dielectric constant, and it is not difficult to find that the sensor has not only a wider humidity sensitive range but also extremely high sensitivity for the measurement of humidity, so that the measurement accuracy can be greatly improved; for the measurement of temperature, the sensitivity of the sensor is also greater than that of a general sensor; in addition, for the measurement of the dielectric constant, the real part and the imaginary part of the dielectric constant of the sample can be measured, and the extremely high no-load Q value and the large frequency offset can also ensure the large accuracy in the measurement. Most importantly, when the sensor integrates three functions of temperature, humidity and sample dielectric constant measurement, the structure of the sensor is designed as EMSIW, the size of the sensor is reduced to 12.5 percent of the original size, and the size is reduced, so that the requirement of miniaturization of the structure is met. Therefore, the multifunctional integration and the miniaturization of the structure of the sensor are realized, so that the practicability of the sensor is improved, and the innovation can be realized sufficiently.
The invention has been described above with reference to the accompanying drawings, it is obvious that the invention is not limited to the specific implementation in the above-described manner, and it is within the scope of the invention to apply the inventive concept and solution to other applications without substantial modification, or with substantial modification.
Claims (8)
1. The sensor is based on the Kapton200HN and microfluid and has the functions of measuring temperature, humidity and dielectric constant at the same time, is a single-port device and is divided into three layers; the method is characterized in that:
the top layer comprises a metal patch, a microstrip line and an SMA connector;
the middle layer adopts a humidity sensitive medium plate Kapton200 HN;
the bottom layer comprises a metal sheet, two grooved CSRR structures and a microfluidic channel;
the metal patch is provided with a plurality of metal through holes which are arranged at equal intervals and used for coupling the metal sheets; the substrate integrated waveguide EMSIW with the eighth mode is formed by a metal patch, a microstrip line, a dielectric slab Kapton200HN, a metal sheet and a metal through hole;
the electric wall of the metal patch is connected with a microstrip line, and two sides of the microstrip line of the metal patch are provided with axisymmetric L-shaped gaps;
the microstrip line structure comprises an input port, and the input port is used for connecting the SMA connector;
the metal sheet is etched with two groove ring CSRR structures; the two slot rings CSRR are respectively coupled with the metal patch on the top layer;
the first grooved metal CSRR structure is composed of a groove ring with an opening; the right angle corresponding to the opening of the groove ring is aligned and bent towards the inside of the ring, and the electric field intensity of the area is strongest at the moment and is used for measuring the dielectric constant of the magnetic medium material; the U-shaped structures are connected with the connecting plates by the U-shaped structures; in addition, the openings of the groove rings extend outwards towards the inside of the ring respectively, so that the contact area of the sensitive dielectric plate Kapton200HN and the outside air is increased, and the reaction time required by humidity measurement in the experiment is shortened;
the structure of the second groove ring CSRR is formed by a groove ring with an opening;
the distance l between the first slot ring CSRR and the second slot ring CSRR4Is 1.9 mm;
a film is laid right above the second groove ring CSRR structure and is used for preventing the liquid in the microfluidic channel from being leaked out carelessly so as to change the dielectric constant of the sensitive medium plate;
a micro-fluid channel is arranged above the film, a channel for placing liquid is arranged in the micro-fluid channel, and the channel is opposite to the CSRR structure of the second groove ring, so that the liquid in the channel is influenced by electric field radiation to the maximum extent, the maximum frequency deviation is caused, and the measurement accuracy of the outdoor temperature is improved;
the 90 deg. clockwise U-shaped structure area opposite to the opening of the second CSRR ring has the highest electric field strength, and the liquid flow direction in the micro fluid channel is the same as that in the second CSRR.
2. The Kapton200HN and microfluidic simultaneous temperature, humidity, and dielectric constant function based sensor according to claim 1, wherein the Kapton200HN dielectric plate has a thickness of 50 um.
3. The Kapton200HN and microfluidic function-based sensor for simultaneous measurement of temperature, humidity and dielectric constant according to any one of claims 1-2, wherein the microstrip line has a width of 2.9 mm.
4. The Kapton200HN and microfluidic sensor for simultaneous measurement of temperature, humidity and dielectric constant functions according to any one of claims 1-2, wherein the first grooved metal CSRR structure groove ring has a length of 6.3mm and a width b of 5.905mm, and wherein the groove width g of the groove is 0.3 mm.
5. Sensor based on Kapton200HN and microfluidics with simultaneous temperature, humidity and dielectric constant measurement according to any one of claims 1-2, characterised in that the first engraved metal CSRR structure "u" has a length of 2mm and a width of 0.9 mm.
6. The Kapton200HN and microfluidic sensor for simultaneous measurement of temperature, humidity and dielectric constant functions according to any of claims 1-2, wherein the second grooved metal CSRR structure groove ring has a length l3Is 7.0mm and has a width of l2Is 6.7mm, wherein the groove width f of the engraved groove is 0.7 mm.
7. The Kapton200HN and microfluidic sensor for simultaneously measuring temperature, humidity and dielectric constant as claimed in any one of claims 1-2, wherein the thin film is made of polyphenylene.
8. The Kapton200HN and microfluidic sensor based on a simultaneous temperature, humidity and dielectric constant function according to any one of claims 1-2, wherein the horizontal distance l between the opening of the first grooved metal CSRR and the opening of the second grooved ring CSRR in the direction of the short side of the sensor5Is 8.6 mm.
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