CN110846631A - Device for assisting in replacing magnetron sputtering rotating target - Google Patents
Device for assisting in replacing magnetron sputtering rotating target Download PDFInfo
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- CN110846631A CN110846631A CN201911230674.XA CN201911230674A CN110846631A CN 110846631 A CN110846631 A CN 110846631A CN 201911230674 A CN201911230674 A CN 201911230674A CN 110846631 A CN110846631 A CN 110846631A
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- target
- replacing
- portal frame
- trolley
- assisting
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target replacing trolley, the bottom of the portal frame is placed on the pre-buried tracks on two sides in a sliding manner, the winch is arranged on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target material placing trolley is fixed on one side of the portal frame through the connecting rod and moves along with the portal frame, and the target material placing trolley is used for placing old target materials. According to the device for assisting in replacing the magnetron sputtering rotary target, in the operation process of replacing the rotary target, the phenomenon that a travelling crane needs to be stopped for a long time at a station of a target replacing trolley because the rotary target is replaced is avoided, the target replacing efficiency is greatly improved, the total shutdown maintenance time is shortened by about 50%, the effective production time of a production line is prolonged, and more production values can be created for enterprises.
Description
Technical Field
The invention relates to the technical field of target replacement, in particular to a device for assisting in replacing a magnetron sputtering rotary target.
Background
At present, 125 off-line coated glass production lines in China exist, and coating machines of the coating production lines are required to stop the equipment to maintain and replace targets after each production period. According to different production states, the target material replacing frequency of the coating machine is about 20-40 days/time, and the target material replacing operation is high-frequency repeated work in a life cycle that the coating line is dozens of years. Under the conditions of the existing factory building structure and the layout of the coating line, the operation of replacing the target material is as follows: after the film plating machine has the condition of shutdown maintenance, a cathode cover plate of the film plating machine is hung on the target changing trolley by a travelling crane and fixed, and the target changing trolley is turned over to enable the target to face upwards. The rotary target is heavy, and the target must be pulled by a travelling crane, and after an operator separates the target from the cathode end, the travelling crane lifts the separated old target to a designated area. And the working personnel extracts the magnetic bar in the old target material and replaces the new target material, then the new target material is hung on the cathode by the travelling crane, and then the working personnel fix the target material and the end head of the cathode to complete the target replacement work. In the whole process that the old target material is separated from the cathode end and the new target material is fixed with the cathode end, the whole course of the travelling crane is required to be assisted, the cart of the travelling crane is always fixed right above the target changing trolley, other travelling cranes can not pass through the area when carrying out other transfer work, and other work can only be carried out after the target changing work is finished, so that the working efficiency is extremely low, the shutdown maintenance time of equipment is prolonged, and the production cost is increased indirectly.
Disclosure of Invention
The invention aims to provide a device for assisting in replacing a magnetron sputtering rotary target, which is used for solving the problems in the prior art, improving the target replacement efficiency, shortening the total time of shutdown maintenance and prolonging the effective production time of a production line.
In order to achieve the purpose, the invention provides the following scheme: the invention provides a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target replacing trolley, the bottom of the portal frame is placed on the pre-buried tracks on two sides in a sliding manner, the winch is installed on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target placing trolley is fixed on one side of the portal frame through a connecting rod and moves along with the portal frame, and the target placing trolley is used for placing old targets.
Preferably, the length of the embedded track exceeds the sum of the length of the target changing trolley and the length of a bracket base of the portal frame.
Preferably, the portal frame is driven by a motor through a speed reducer, and the portal frame moves back and forth along the embedded track.
Preferably, the portal frame is a steel structure with four rail wheels connected at the bottom made of I-steel.
Preferably, an output shaft of the speed reducer is in transmission connection with a wheel shaft of the rail wheel, and the other end of the wheel shaft of the rail wheel is fixed with a bottom foot of the portal frame through a bearing seat.
Preferably, the top surface of the target placing trolley is provided with a foam pad with a circular groove.
Preferably, four universal wheels are mounted at the bottom of the target placing trolley.
Compared with the prior art, the invention has the following technical effects:
according to the device for assisting in replacing the magnetron sputtering rotary target, in the operation process of replacing the rotary target, the phenomenon that a travelling crane needs to be stopped for a long time at a station of a target replacing trolley because the rotary target is replaced is avoided, the target replacing efficiency is greatly improved, the total shutdown maintenance time is shortened by about 50%, the effective production time of a production line is prolonged, and more production values can be created for enterprises.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a front view of the working state of the device for assisting in replacing the magnetron sputtering rotary target;
FIG. 2 is a side view of the working state of the apparatus for assisting in the replacement of a magnetron sputtering rotating target;
FIG. 3 is a front view of an apparatus for assisting in replacing a magnetron sputtering rotating target;
FIG. 4 is a side view of an apparatus for assisting in the replacement of a magnetron sputtering rotating target;
wherein, 1 top beam; 2, a winch; 3, lifting a hook; 4, a portal frame; 5, old target material; 6, a foam cushion; 7, placing a trolley for the target material; 8 connecting rods; 9 universal wheels; 10, a motor; 11, a bearing seat; 12 a rail wheel; 13, a speed reducer; 14, pre-burying a track; 15 a cathode terminal; 16 a cathode cover plate; and 17, changing the target trolley.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a device for assisting in replacing a magnetron sputtering rotary target, which is used for solving the problems in the prior art, improving the target replacement efficiency, shortening the total time of shutdown maintenance and prolonging the effective production time of a production line.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1-4, the invention provides a device for assisting in replacing a magnetron sputtering rotating target, which comprises a portal frame 4, a target placing trolley 7 and a winch 2, wherein pre-embedded rails 14 are laid on two sides of a target replacing trolley 17, the bottom of the portal frame 4 is slidably placed on the pre-embedded rails 14 on two sides, the winch 2 is installed on a top beam 1 of the portal frame 4 and can slide along the top beam 1, and a transmission end of the winch 2 is connected with a lifting hook 3 through a hanging strip; the target material placing trolley 7 is fixed on one side of the portal frame 4 through a connecting rod 8 and moves along with the portal frame 4, and the target material placing trolley 7 is used for placing the old target material 5.
The pre-buried tracks 14 are laid on two sides of the target changing trolley 17, and the length of the tracks is more than the sum of the length of the target changing trolley 17 and the length of the support base of the portal frame 4 of the device. A steel structure portal frame 4 which takes I-steel as a top beam 1 and is provided with four rail wheels 12 at the bottom is arranged on the rail. The gantry 4 is driven by a motor 10 through a speed reducer 13 and can move forward or backward in the track direction. A winch 2 capable of walking along the length direction of the I-steel is arranged on the I-steel beam of the portal frame 4 (the maximum hoisting weight is more than or equal to 500 kg). One side of a portal frame 4 support is provided with a target material placing trolley 7 connected with the portal frame, a foam pad 6 with a circular groove is arranged on the trolley, and four universal wheels 9 are arranged below the trolley. The target placing trolley 7 moves forwards or backwards along the track direction on the ground along with the portal frame 4.
The operation of replacing the target material by the device comprises the following steps: after the cathode cover plate 16 is reversed on the target changing trolley 17, the portal frame 4 is moved to the middle position of the target changing trolley 17; the target is pulled by the winch 2 through the hanging strip, the old target 5 is separated from the cathode end head 15 by an operator, the old target 5 is hung by the winch 2 and moves to the upper part of the target placing trolley 7 along the direction of the I-shaped steel beam, and the lifting hook 3 of the winch 2 descends to place the old target 5 on the trolley. The operator pulls out the magnetic rod from the old target 5, removes the old target 5 and places a new target on the cart, and then plugs the magnetic rod. The winch 2 hoists the new target material to the cathode end head 15 through the hanging belt, an operator fixes the target material and the cathode end head 15, and the hanging belt is taken down to complete the operation flow of replacing the rotary target material. The portal frame 4 is moved to a position away from the target changing trolley 17, and the cathode cover plate 16 can be lifted away by a crane to perform other work flows after being reversed.
The device has the advantages that in the operation process of replacing the rotary target, after the travelling crane lifts the cathode cover plate 16 onto the target replacing trolley 17, other transportation work needing the travelling crane can be carried out, the target replacing operation can be completed by the device, and the height (about 3m) of the device is far lower than the clearance height (about 7.5m) below the travelling crane, so that the free travelling of the travelling crane is not influenced. During the shutdown maintenance of the coating line, no traveling crane needs to be stopped for a long time at the station of the target changing trolley 17 for changing the rotary target, the target changing efficiency is greatly improved, the total shutdown maintenance time is shortened by about 50 percent, the effective production time of the production line is prolonged, and more production values can be created for enterprises.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (7)
1. A device for assisting in replacing a magnetron sputtering rotating target is characterized in that: the target changing trolley comprises a portal frame, a target placing trolley and a winch, wherein pre-buried tracks are laid on two sides of the target changing trolley, the bottom of the portal frame is placed on the pre-buried tracks on the two sides in a sliding mode, the winch is installed on a top beam of the portal frame and can slide along the top beam, and a transmission end of the winch is connected with a lifting hook through a hanging strip; the target placing trolley is fixed on one side of the portal frame through a connecting rod and moves along with the portal frame, and the target placing trolley is used for placing old targets.
2. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the length of the pre-buried track exceeds the sum of the length of the target replacing trolley and the length of the support base of the portal frame.
3. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the portal frame is driven by a motor through a speed reducer, and the portal frame moves back and forth along the embedded track.
4. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the portal frame is a steel structure which is made of I-shaped steel and is connected with four rail wheels at the bottom.
5. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 4, wherein: the output shaft of the speed reducer is in transmission connection with the wheel shaft of the track wheel, and the other end of the wheel shaft of the track wheel is fixed with the bottom foot of the portal frame through a bearing seat.
6. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: the top surface of the target placing trolley is provided with a foam pad with a circular groove.
7. The apparatus for assisting in replacing a magnetron sputtering rotary target according to claim 1, wherein: four universal wheels are installed at the bottom of the target placing trolley.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911230674.XA CN110846631B (en) | 2019-12-04 | 2019-12-04 | Device for assisting in replacing magnetron sputtering rotating target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911230674.XA CN110846631B (en) | 2019-12-04 | 2019-12-04 | Device for assisting in replacing magnetron sputtering rotating target |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110846631A true CN110846631A (en) | 2020-02-28 |
| CN110846631B CN110846631B (en) | 2020-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911230674.XA Active CN110846631B (en) | 2019-12-04 | 2019-12-04 | Device for assisting in replacing magnetron sputtering rotating target |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114799163A (en) * | 2022-04-02 | 2022-07-29 | 山东格美钨钼材料股份有限公司 | Low-oxygen molybdenum-niobium alloy target production line and technological process thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114799163A (en) * | 2022-04-02 | 2022-07-29 | 山东格美钨钼材料股份有限公司 | Low-oxygen molybdenum-niobium alloy target production line and technological process thereof |
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| Publication number | Publication date |
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| CN110846631B (en) | 2020-10-16 |
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