CN110813936A - Quartz furnace tube immersion cleaning method - Google Patents
Quartz furnace tube immersion cleaning method Download PDFInfo
- Publication number
- CN110813936A CN110813936A CN201911061467.6A CN201911061467A CN110813936A CN 110813936 A CN110813936 A CN 110813936A CN 201911061467 A CN201911061467 A CN 201911061467A CN 110813936 A CN110813936 A CN 110813936A
- Authority
- CN
- China
- Prior art keywords
- furnace tube
- quartz furnace
- cleaning
- quartz
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 156
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 238000004140 cleaning Methods 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000007654 immersion Methods 0.000 title claims abstract description 30
- 239000007788 liquid Substances 0.000 claims abstract description 32
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000002791 soaking Methods 0.000 claims description 6
- 238000007605 air drying Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 230000009471 action Effects 0.000 abstract description 16
- 230000007246 mechanism Effects 0.000 abstract description 4
- 238000009792 diffusion process Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
The application relates to a quartz furnace tube immersion cleaning method, which changes the direction of an opening for controlling a quartz furnace tube to enter cleaning liquid, so that the cleaning liquid fully flows into the quartz furnace tube, and the problem that the inner wall of the quartz furnace tube cannot be completely cleaned due to bubbles generated when the quartz furnace tube is directly immersed is prevented. Meanwhile, when the quartz furnace tube is subjected to immersion cleaning, the opening orientation of the quartz furnace tube is adjusted only through the action of the fixing arms on the two sides, the action amplitude of the quartz furnace tube is small, the whole action mechanism is simple, and the risk of damage to the quartz furnace tube during action is reduced.
Description
Technical Field
The application belongs to the technical field of semiconductor cleaning equipment, and particularly relates to a quartz furnace tube immersion cleaning method.
Background
The quartz furnace tube is usually used together with a diffusion furnace (the temperature of the diffusion furnace reaches 800 ℃) and is commonly used for carrying out high-temperature diffusion on silicon wafers in semiconductor processing. When the high-temperature diffusion process is carried out, the silicon wafer and the silicon wafer bracket are put into a quartz furnace tube together for carrying out the process. In order to make the diffusion more stable and the distribution of PN junctions more uniform, it is necessary to ensure stable pressure and good gas tightness in the quartz tube. The quartz furnace tube can generate scale in a long-term diffusion process, the requirement of the diffusion process on the cleanliness of the quartz furnace tube is very strict, and the tube wall of the quartz 1 furnace tube is not allowed to have other metal impurities or ions. Since the cleanliness of the surface of the quartz tube directly affects the yield of silicon wafers, the quartz furnace tube needs to be cleaned periodically.
The cleaning of the quartz furnace tube is divided into a soaking type and a spraying type, wherein the soaking type is to put the quartz furnace tube into cleaning liquid for soaking and cleaning, and the spraying type is to spray the cleaning liquid into the quartz furnace tube for cleaning. Both the immersion cleaning type and the spray cleaning type require complicated action mechanisms, and the quartz furnace tube is easy to damage once accidents happen when various actions are performed on the quartz furnace tube.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the quartz furnace tube immersion cleaning method is provided, which can reduce the action of the quartz furnace tube as much as possible and prevent the quartz furnace tube from being damaged.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a quartz furnace tube immersion cleaning method comprises the following steps:
s1: placing the quartz furnace tube to be cleaned on fixed arms with height difference and positioned at two sides of the quartz furnace tube, and enabling the opening of the quartz furnace tube to face downwards;
s2: the quartz furnace tube and the cleaning tank filled with the cleaning liquid are moved relatively, the quartz furnace tube is close to the cleaning liquid in the cleaning tank, and when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning liquid, the positions of the fixed arms at two sides are adjusted, so that the opening of the quartz furnace tube is gradually upward;
s3: when the quartz furnace tube is completely immersed, the opening of the quartz furnace tube faces upwards;
s4: after soaking and washing for a period of time, keeping the quartz furnace tube away from the cleaning solution in the cleaning tank, and adjusting the positions of the fixed arms at the two sides when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning solution, so that the opening of the quartz furnace tube gradually faces downwards until the quartz furnace tube returns to the state that the opening of the quartz furnace tube faces downwards in the step S1;
s5: the quartz furnace tube completely leaves the cleaning solution;
s6: and finishing cleaning.
Preferably, in the quartz furnace tube immersion cleaning method, the cleaning liquid is hydrofluoric acid, concentrated acid or clear water;
the quartz furnace tube firstly enters the cleaning tank with hydrofluoric acid and concentrated acid as cleaning liquid for more than one time, and then enters the cleaning tank with clean water as cleaning liquid for more than one time.
Preferably, in the immersion cleaning method for the quartz furnace tube, the cleaning tank is vertically moved close to or away from the quartz furnace tube.
Preferably, the quartz furnace tube immersion cleaning method of the invention,
the cleaning tank is arranged on the track and can move horizontally, and the cleaning tank with different cleaning liquids transferred can reach the lower part of the quartz furnace tube along the track.
Preferably, in the quartz furnace tube immersion cleaning method, a stirring blade and/or an ultrasonic generator for stirring the liquid flow is arranged in the cleaning tank.
Preferably, in the immersion cleaning method for the quartz furnace tube, when the opening of the quartz furnace tube faces downward in the step S1, an included angle between a central axis of the quartz furnace tube and a horizontal plane is 20 to 30 °, and an included angle between the central axis of the quartz furnace tube and the horizontal plane, when the opening of the quartz furnace tube faces upward in the step S3, is 20 to 30 °.
Preferably, the quartz furnace tube immersion cleaning method of the invention,
when the opening direction of the quartz furnace tube is changed, the quartz furnace tube is operated at the speed of 5-10 degrees per minute.
Preferably, the quartz furnace tube immersion cleaning method of the invention repeats S2-S5 several times before the cleaning is completed in the step S6.
Preferably, in the immersion cleaning method for the quartz furnace tube of the present invention, a blower is further disposed at the position where the quartz furnace tube is disposed in the step S1, for air drying the quartz furnace tube.
Preferably, in the quartz furnace tube immersion cleaning method, the fan blows hot air at 60-80 ℃.
The invention has the beneficial effects that:
the invention provides a quartz furnace tube immersion cleaning method, which changes the direction of an opening of a quartz furnace tube, which enters a cleaning solution, so that the cleaning solution fully flows into the quartz furnace tube, and prevents the inner wall of the quartz furnace tube from generating bubbles when the quartz furnace tube is directly immersed so as not to be completely cleaned. Meanwhile, when the quartz furnace tube is subjected to immersion cleaning, the opening orientation of the quartz furnace tube is adjusted only through the action of the fixing arms on the two sides, the action amplitude of the quartz furnace tube is small, the whole action mechanism is simple, and the risk of damage to the quartz furnace tube during action is reduced.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a schematic structural diagram of a quartz furnace tube to be cleaned according to an embodiment of the present disclosure, which is placed on a fixed arm;
FIG. 2 is a schematic structural view of the quartz furnace tube in contact with the liquid level of the cleaning solution in the embodiment of the present application;
FIG. 3 is a schematic structural view of a quartz furnace tube during the process of entering a cleaning solution in the embodiment of the present application;
FIG. 4 is a schematic structural view of the quartz furnace tube completely below the liquid level of the cleaning solution in the embodiment of the present application;
the reference numbers in the figures are:
1-a stationary arm; 2-a cleaning tank; 9-quartz furnace tube.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Examples
The embodiment provides a quartz furnace tube immersion cleaning method, which comprises the following steps:
s1: placing the quartz furnace tube to be cleaned on a fixed arm with height difference and positioned at two sides of the quartz furnace tube, and enabling the opening of the quartz furnace tube to face downwards, wherein the included angle between the central axis of the quartz furnace tube and the horizontal plane is 20-30 degrees, for example: 20 °, 25 °, 30 °; a corrosion-resistant silicone rubber pad is arranged on the fixed arm for protecting the quartz furnace tube;
s2: the quartz furnace tube and the cleaning tank filled with the cleaning solution are moved relatively, the quartz furnace tube is close to the cleaning solution in the cleaning tank, and when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning solution, the positions of the fixed arms at two sides are adjusted, so that the opening of the quartz furnace tube is gradually upward, and when the opening direction of the quartz furnace tube is changed, the quartz furnace tube usually moves at the speed of 5-10 degrees per minute, and the whole movement process is about 4-12 min;
s3: when the quartz furnace tube is completely immersed, the opening of the quartz furnace tube faces upwards, and the included angle between the central axis of the quartz furnace tube and the horizontal plane, which faces upwards, is 20-30 degrees, for example: 20 °, 25 °, 30 °; the whole process for adjusting the opening direction of the quartz furnace tube is shown in FIGS. 1-4;
s4: after soaking and washing for a period of time, keeping the quartz furnace tube away from the cleaning solution in the cleaning tank, and adjusting the positions of the fixed arms at the two sides when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning solution, so that the opening of the quartz furnace tube gradually faces downwards until the quartz furnace tube returns to the state that the opening of the quartz furnace tube faces downwards in the step S1;
s5: the quartz furnace tube completely leaves the cleaning solution;
s6: and finishing cleaning.
In the immersion cleaning method for the quartz furnace tube, the direction of the opening of the quartz furnace tube, which enters the cleaning solution, is controlled to change, so that the cleaning solution fully flows into the quartz furnace tube, and the problem that the inner wall of the quartz furnace tube is completely cleaned due to bubbles generated when the quartz furnace tube is directly immersed is solved. Meanwhile, when the quartz furnace tube is subjected to immersion cleaning, the opening orientation of the quartz furnace tube is adjusted only through the action of the fixing arms on the two sides, the action amplitude of the quartz furnace tube is small, the whole action mechanism is simple, and the risk of damage to the quartz furnace tube during action is reduced.
As an improvement, the cleaning solution is hydrofluoric acid, concentrated acid or clear water; hydrofluoric acid, concentrated acid, is typically used to wash away metal impurities or ions in the quartz furnace tube, and clear water is used to wash away residual acid.
In order to further facilitate cleaning, the quartz furnace tube can enter the cleaning tank for cleaning for multiple times, but the orientation needs to be adjusted every time, the quartz furnace tube firstly enters the cleaning tank with the cleaning solution of hydrofluoric acid and concentrated acid for more than one time, and then enters the cleaning tank with the cleaning solution of clear water for more than one time.
As the action of further reducing the quartz furnace tube, the cleaning tank moves vertically to be close to or far away from the quartz furnace tube. The cleaning tank is arranged on the track and can move horizontally, and the cleaning tank with different cleaning liquids transferred can reach the lower part of the quartz furnace tube along the track. Therefore, when different cleaning procedures are carried out, the quartz furnace tube only needs to be immersed into different cleaning tanks.
As a further improvement, a stirring blade and/or an ultrasonic generator for stirring the liquid to flow is arranged in the cleaning tank. The stirring blades and the ultrasonic generator can stir the cleaning liquid, and when the quartz furnace tube is completely positioned in the cleaning liquid, the cleaning effect can be improved.
As a further improvement, before the completion of the cleaning at step S6, S2-S5 are repeated several times. Namely, the quartz furnace tube enters the same cleaning tank for many times.
And a fan is further arranged at the placing position of the quartz furnace tube in the step S1 and used for air-drying the quartz furnace tube. The fan blows hot air at 60-80 ℃. The drying of the quartz furnace tube can be accelerated by the fan, and the fan is usually started to be used when the quartz furnace tube is washed by clean water for the last time.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A quartz furnace tube immersion cleaning method is characterized by comprising the following steps:
s1: placing the quartz furnace tube to be cleaned on fixed arms with height difference and positioned at two sides of the quartz furnace tube, and enabling the opening of the quartz furnace tube to face downwards;
s2: the quartz furnace tube and the cleaning tank filled with the cleaning liquid are moved relatively, the quartz furnace tube is close to the cleaning liquid in the cleaning tank, and when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning liquid, the positions of the fixed arms at two sides are adjusted, so that the opening of the quartz furnace tube is gradually upward;
s3: when the quartz furnace tube is completely immersed, the opening of the quartz furnace tube faces upwards;
s4: after soaking and washing for a period of time, keeping the quartz furnace tube away from the cleaning solution in the cleaning tank, and adjusting the positions of the fixed arms at the two sides when the inner wall of the quartz furnace tube is contacted with the liquid level of the cleaning solution, so that the opening of the quartz furnace tube gradually faces downwards until the quartz furnace tube returns to the state that the opening of the quartz furnace tube faces downwards in the step S1;
s5: the quartz furnace tube completely leaves the cleaning solution;
s6: and finishing cleaning.
2. The quartz furnace tube immersion cleaning method according to claim 1, wherein the cleaning liquid is hydrofluoric acid, concentrated acid or clear water;
the quartz furnace tube firstly enters the cleaning tank with hydrofluoric acid and concentrated acid as cleaning liquid for more than one time, and then enters the cleaning tank with clean water as cleaning liquid for more than one time.
3. The method of claim 1 or 2, wherein the cleaning bath is moved vertically closer to or farther away from the quartz furnace tube.
4. The quartz furnace tube immersion cleaning method of claim 3,
the cleaning tank is arranged on the track and can move horizontally, and the cleaning tank with different cleaning liquids transferred can reach the lower part of the quartz furnace tube along the track.
5. The quartz furnace tube immersion cleaning method according to any one of claims 1-4, wherein a stirring blade and/or an ultrasonic generator for stirring liquid flow is provided in the cleaning tank.
6. The method for immersion cleaning of a quartz furnace tube according to any one of claims 1 to 5, wherein the angle between the central axis of the quartz furnace tube and the horizontal plane is 20 to 30 ° when the opening of the quartz furnace tube faces downward in the step S1, and the angle between the central axis of the quartz furnace tube and the horizontal plane when the opening of the quartz furnace tube faces upward in the step S3 is 20 to 30 °.
7. The method of claim 6, wherein the quartz furnace tube is operated at a rate of 5-10 ° per minute while the opening orientation of the quartz furnace tube is changed.
8. The method for immersion cleaning of quartz furnace tubes according to any of claims 1-7, wherein S2-S5 are repeated several times before the cleaning is completed in S6.
9. The quartz furnace tube immersion cleaning method according to any one of claims 1-8, wherein a blower is further disposed at the position where the quartz furnace tube is disposed in step S1 for air drying the quartz furnace tube.
10. The quartz furnace tube immersion cleaning method according to claim 9, wherein the hot air blown by the fan is 60-80 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911061467.6A CN110813936B (en) | 2019-11-01 | 2019-11-01 | Quartz furnace tube immersion cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911061467.6A CN110813936B (en) | 2019-11-01 | 2019-11-01 | Quartz furnace tube immersion cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110813936A true CN110813936A (en) | 2020-02-21 |
| CN110813936B CN110813936B (en) | 2021-05-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911061467.6A Active CN110813936B (en) | 2019-11-01 | 2019-11-01 | Quartz furnace tube immersion cleaning method |
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| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3868960A (en) * | 1971-09-16 | 1975-03-04 | Anthony Raymond Cove | Machines for washing bottles and like containers and removing labels therefrom |
| JPH0596260A (en) * | 1991-10-04 | 1993-04-20 | Matsushita Electron Corp | Cleaning device for quartz tube |
| CN102825036A (en) * | 2012-08-23 | 2012-12-19 | 英利能源（中国）有限公司 | Cleaning method for furnace tube for diffusion |
| CN202667202U (en) * | 2012-06-19 | 2013-01-16 | 无锡市瑞达电子有限公司 | Furnace tube washing machine |
| CN107685055A (en) * | 2017-09-18 | 2018-02-13 | 上海申第实业有限公司 | A kind of test tube cleaning device with outboard sidewalls while cleaning function |
| CN107685045A (en) * | 2017-10-24 | 2018-02-13 | 无锡智谷锐拓技术服务有限公司 | A kind of ultrasonic wave hydrocarbon cleaning machine |
-
2019
- 2019-11-01 CN CN201911061467.6A patent/CN110813936B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3868960A (en) * | 1971-09-16 | 1975-03-04 | Anthony Raymond Cove | Machines for washing bottles and like containers and removing labels therefrom |
| JPH0596260A (en) * | 1991-10-04 | 1993-04-20 | Matsushita Electron Corp | Cleaning device for quartz tube |
| CN202667202U (en) * | 2012-06-19 | 2013-01-16 | 无锡市瑞达电子有限公司 | Furnace tube washing machine |
| CN102825036A (en) * | 2012-08-23 | 2012-12-19 | 英利能源（中国）有限公司 | Cleaning method for furnace tube for diffusion |
| CN107685055A (en) * | 2017-09-18 | 2018-02-13 | 上海申第实业有限公司 | A kind of test tube cleaning device with outboard sidewalls while cleaning function |
| CN107685045A (en) * | 2017-10-24 | 2018-02-13 | 无锡智谷锐拓技术服务有限公司 | A kind of ultrasonic wave hydrocarbon cleaning machine |
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| Publication number | Publication date |
|---|---|
| CN110813936B (en) | 2021-05-04 |
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Address after: 225500 No. 151, Keji Avenue, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Patentee after: Jiangsu Yadian Technology Co.,Ltd. Address before: 225300 No.199, Keji Road, Sanshui street, Jiangyan District, Taizhou City, Jiangsu Province Patentee before: Jiangsu Yadian Technology Co.,Ltd. |