CN110813633B - Coating tool - Google Patents
Coating tool Download PDFInfo
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- CN110813633B CN110813633B CN201910725185.5A CN201910725185A CN110813633B CN 110813633 B CN110813633 B CN 110813633B CN 201910725185 A CN201910725185 A CN 201910725185A CN 110813633 B CN110813633 B CN 110813633B
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- rod
- manifold
- longitudinal direction
- coating
- tapered portion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/0813—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line characterised by means for supplying liquid or other fluent material to the roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- Coating Apparatus (AREA)
Abstract
The invention provides a coating tool, which can restrain the fluctuation of the flow rate of the coating liquid for the coating liquid with various characteristics. In the coating tool (10), a stirring rod (3) is disposed in a manifold (17). The stirring rod (3) is provided with a tapered portion which changes the size of a gap between the stirring rod (3) through which the coating liquid passes and the inner wall of the manifold (17) according to the position of the stirring rod in the longitudinal direction.
Description
Technical Field
The present invention relates to a coating tool.
Background
There is known a coating tool called a die coater for applying a coating liquid to a substrate and forming a coating film on the surface of the substrate. The coating apparatus includes a block (block), an elongated hollow space called a manifold (manifold) is formed inside the block, and a slit-shaped discharge port communicating with the manifold is formed on a surface of the block. The coating liquid accumulated in the manifold is applied to the substrate with a coating width corresponding to the length of the slit-shaped discharge port. The coating film can be formed on a predetermined region of the surface of the substrate by moving the substrate relative to the coating tool.
Patent document 1 discloses a coating tool for realizing formation of a uniform coating film thickness in the width direction when a coating liquid containing an organic solvent is applied to a substrate by die coating (die coat). Patent document 1 discloses a coating tool in which the width and interval of slits as discharge ports and the size of manifolds are varied to optimize these values by experiments.
Patent document
Patent document 1: japanese laid-open patent publication No. 2010-5616
Disclosure of Invention
However, the technique described in patent document 1 cannot sufficiently suppress fluctuations in the flow rate of the coating liquid that vary depending on the position of the discharge port.
In particular, in the case of using a fluid having a property called thixotropy (thixotropic properties), that is, a property in which viscosity is decreased if force is applied by stirring or vibrational mixing, as a coating liquid, the viscosity increases with a decrease in the speed of the coating liquid, resulting in a further decrease in the speed, and thus further increasing fluctuations in the flow rate of the coating liquid. As a result, problems such as sedimentation of solid components contained in the coating liquid (slurry) in the retention portion in the manifold, gelation due to thickening of the coating liquid, and the like are likely to occur. Further, if the flow velocity of the coating liquid fluctuates in the longitudinal direction of the discharge port, a pressure gradient corresponding to the fluctuation occurs, and the discharge amount fluctuates, so that it is difficult to form a coating film having a uniform film thickness on the substrate.
In order to suppress the fluctuation of the flow velocity, it is also conceivable to change the shape and cross-sectional area of the manifold in the longitudinal direction. However, in this method, it is necessary to prepare different blocks depending on the characteristics of the coating liquid.
Accordingly, an object of the present invention is to provide a coating tool capable of suppressing fluctuation in flow rate of a coating liquid with respect to coating liquids having various characteristics.
An application tool according to one aspect of the present invention includes a body block having a supply port and a discharge port formed on a surface thereof, and a rod supported in a manifold, the manifold communicating with the supply port and the discharge port being formed inside the body block. The coating tool coats the coating liquid supplied from the supply port, passed through the gap between the rod and the inner wall of the manifold in the body block, and discharged from the discharge port. The rod is provided with a tapered portion that changes the size of a gap between the rod through which the coating liquid passes and the inner wall of the manifold, according to the position of the rod in the longitudinal direction.
In addition, a coating tool according to another aspect of the present invention includes a body block having a supply port and an exhaust port formed on a surface thereof, and a manifold formed inside the body block and communicating with the supply port and the exhaust port, and a rod supported inside the manifold, the coating tool being configured to apply a coating liquid supplied from the supply port, passing through a gap between the rod and an inner wall of the manifold inside the body block, and being discharged from the exhaust port to a substrate, the rod including a tapered portion that changes a size of the gap between the rod through which the coating liquid passes and the inner wall of the manifold according to a speed of the coating liquid discharged from the exhaust port in a longitudinal direction of the rod.
The discharge port may be formed of a slit having a long side parallel to the longitudinal direction of the rod.
Further, the long sides of the slits need not be parallel to the longitudinal direction, but may be inclined with respect to the longitudinal direction. In addition, the curve may be used.
Further, a plurality of discharge ports may be formed in the longitudinal direction, and a circular discharge port or the like may be formed at a special position such as an end portion, in addition to the slit-shaped discharge port.
The surface of the tapered portion may be a conical surface having the longitudinal direction of the rod as an axis.
A coating tool according to another aspect of the present invention includes a body block having a supply port and an exhaust port formed on a surface thereof, and a rod having a manifold formed inside thereof and communicating with the supply port and the exhaust port, the rod being supported in the manifold, the coating tool applying a coating liquid supplied from the supply port, passing through a gap between the rod and an inner wall of the manifold in the body block, and discharged from the exhaust port to a substrate. The discharge port is formed by an opening extending in the longitudinal direction of the body block, and the manifold is formed by a space extending in the longitudinal direction of the body block. The rod is supported in the manifold in such a manner that the longitudinal direction thereof is parallel to the longitudinal direction of the body block. Further, the rod is provided with a tapered portion that changes the size of a gap between the rod through which the coating liquid passes and the inner wall of the manifold, according to the position of the rod in the longitudinal direction.
Drawings
Fig. 1 is a front view, a top view, a bottom view, a left side view, and a right side view of the coating tool 10.
Fig. 2 is an exploded perspective view of the coating tool 10.
Fig. 3 is a cross-sectional view of the coating tool 10 through side 3 13.
Fig. 4 is a sectional perspective view through the center of the stirring rod 3.
Fig. 5 is a perspective view showing a modification of the stirring rod 3.
Detailed Description
Next, an application tool 10 according to an embodiment of the present invention will be described with reference to the drawings.
Fig. 1(a) to (e) are a front view, a top view, a bottom view, a left view, and a right view of the coating tool 10, respectively. Fig. 2 is an exploded perspective view of the coating tool 10.
As shown in these figures, the application tool 10 includes a 1 st block 1, a 2 nd block 2, a rod 3, two side sealing bodies 4, two oil seals, and two oil seal-sealed bodies. The 1 st block 1 and the 2 nd block 2 constitute a main body block of the coating tool 10.
The 1 st block 1 has a 1 st side surface 11, a 2 nd side surface 12, a 3 rd side surface 13, a 4 th side surface 14, a 5 th side surface 15, and a 6 th side surface 16, the 2 nd side surface 12 faces the 1 st side surface 11, the 3 rd side surface 13 is connected to each of the short sides of the 1 st side surface 11 and the 2 nd side surface 12, the 4 th side surface 14 is connected to each of the long sides of the 1 st side surface 11 and the 2 nd side surface 12, the 5 th side surface 15 faces the 3 rd side surface 13 and is connected to each of the short sides of the other sides of the 1 st side surface 11 and the 2 nd side surface 12, and the 6 th side surface 16 is connected to each of the long sides of the other sides of the 1 st side surface 11 and the 2 nd side surface 12, the 3 rd side surface 13, and the 5 th side surface 15.
The 1 st side surface 11 (fig. 2) is a surface facing the 2 nd block 2. The 1 st side 11 is formed into a rectangular shape elongated in the length direction when viewed from the direction facing the 1 st side 11. As described later in detail, the 1 st side surface 11 is formed of two flat surfaces formed by a rectangular shape elongated in the longitudinal direction, and a curved surface sandwiched between the two flat surfaces and having a semi-cylindrical surface with the longitudinal direction as an axis.
The 2 nd side surface 12 (fig. 1 a) is a surface facing the outside of the 1 st side surface 11 in the opposite direction. The 2 nd side 12 is formed into a rectangular shape elongated in the length direction when viewed from the direction facing the 2 nd side 12. The 2 nd side surface 12 is parallel to the two planes constituting the 1 st side surface 11. However, the length of the 2 nd side surface 12 in the width direction is smaller than the length of the 1 st side surface 11 in the width direction.
The 3 rd side surface 13 is a surface facing the outer side in the longitudinal direction of the 1 st block 1. The 3 rd side surface 13 is formed to be connected to each short side of the 1 st side surface 11 and the 2 nd side surface 12 at the end of the 1 st block 1.
The 4 th side surface 14 forms the bottom surface of the 1 st block 1, and is formed in a rectangular shape elongated in the longitudinal direction when viewed from the direction facing the 4 th side surface 14. The 4 th side surface 14 is connected to the respective long sides of the 1 st side surface 11 and the 2 nd side surface 12, and the 3 rd side surface 13 and the 5 th side surface 15.
The 5 th side surface 15 is a surface facing the longitudinal direction outer side of the 1 st block 1 in the direction opposite to the 3 rd side surface 13. The 5 th side surface 15 is formed to be connected to the other short side of the 1 st side surface 11 and the 2 nd side surface 12 at the other end portion of the 1 st block 1.
The 6 th side surface 16 forms an upper surface of the 1 st block 1, and is formed in a rectangular shape elongated in the longitudinal direction when viewed from a direction facing the 6 th side surface 16. The 6 th side surface 16 is connected to the other long sides of the 1 st side surface 11 and the 2 nd side surface 12, and the 3 rd side surface 13 and the 5 th side surface 15. However, the 6 th side surface 16 is inclined with respect to the 4 th side surface 14 so that the distance from the 4 th side surface 14 becomes larger as the distance from the longer side of the 2 nd side surface 12 becomes larger.
The two planes of the 1 st side 11 and the 2 nd side 12 are perpendicular to the 3 rd side 13, the 4 th side 14 and the 5 th side 15, respectively. The 3 rd side surface 13 and the 5 th side surface 15 are perpendicular to the 4 th side surface 14, respectively. The 6 th side surface 16 is perpendicular to the 3 rd side surface 13 and the 5 th side surface 15, and is inclined to the other surfaces.
Fig. 3 is a cross-sectional view of the coating tool 10 through side 3 13. As shown in the figure, the 1 st side surface 11 is formed with a curved surface 11c extending from the 3 rd side surface 13 to the 5 th side surface 15, and the curved surface 11c is formed by a semi-cylindrical surface having the longitudinal direction of the 1 st block 1 as an axis.
For convenience, one of the connecting curved surface 11c and the 4 th side surface 14 in the two planes forming the rectangle of the 1 st side surface 11 is referred to as a lower portion 11b, and one of the connecting curved surface 11c and the 6 th side surface 16 is referred to as an upper portion 11 a.
As described above, the upper side portion 11a and the lower side portion 11b are two planes parallel to each other. However, the upper portion 11a and the lower portion 11b are not formed on the same plane, but are slightly displaced in the normal direction. As a result, the distance between the upper portion 11a and the 2 nd side surface 12 is smaller than the distance between the lower portion 11b and the 2 nd side surface 12. In the cross section, the arc formed by the curved surface 11c is not a perfect semicircle, but is formed by a slightly shorter arc than the arc of the semicircle by a slight displacement of the upper portion 11a to the outside of the 1 st block 1. Further, the axis of the curved surface 11c forming the semi-cylindrical surface exists on a plane including the lower portion 11 b. The amount of displacement of the upper portion 11a and the lower portion 11b is an amount that defines the length in the width direction when the coating liquid is discharged, and therefore can be appropriately set based on specifications such as the characteristics of the coating liquid, the material of the substrate to be coated, and the thickness of the coating film.
As shown in fig. 1(a) and 2, the 1 st block 1 is provided with a supply passage 18 and a passage 19 for discharging air, the supply passage 18 penetrating the 2 nd side surface 12 and the curved surface 11c, and the passage 19 for discharging impurities and air which may be contained in the manifold. The supply channel 18 is a cylindrical channel having a circular cross section, and has one end serving as a supply port and opening to the outside and the other end opening to the curved surface 11 c. The supply channel 18 is formed perpendicular to the 2 nd side surface 12 and at the same height as the rod 3 with respect to the 4 th side surface 14. Thereby, the coating liquid supplied from the supply channel 18 advances toward the rod 3 and flows into the manifold 17. In the present embodiment, since the coating liquid is supplied from the longitudinal end of the 1 st block 1, the supply channel 18 is formed in the vicinity of the 3 rd side surface 13. The flow path 19 for discharging the impurities is formed at the other end portion in the longitudinal direction on the opposite side to the supply flow path 18.
As shown in fig. 3, the 2 nd block 2 has almost the same shape as the 1 st block 1. Hereinafter, the side surfaces of the 2 nd block 2 corresponding to the 1 st side surface 11 to the 6 th side surface 16 of the 1 st block 1 are referred to as a 1 st side surface 21 to a 6 th side surface 26. The 2 nd to 6 th side surfaces 22 to 26 are substantially the same as the 2 nd to 6 th side surfaces 12 to 16 of the 1 st block 1, and therefore, description thereof is omitted.
The 2 nd side surface 21 is composed of an upper portion 21a, a lower portion 21b, and a curved surface 21c, the upper portion 21a being opposed to the upper portion 11a, the lower portion 21b being opposed to the lower portion 11b, and the curved surface 21c being opposed to the curved surface 11 c.
The upper portion 21a and the lower portion 21b are formed on the same plane so as to share the same plane with each other. This is different from the 1 st block 1 in which the upper side portion 11a and the lower side portion 11b are slightly displaced in the direction perpendicular to the plane. The curved surface 21c extends from the 3 rd side surface 23 to the 5 th side surface 25 so as to connect the upper portion 21a and the lower portion 21b, and is formed by a semi-cylindrical surface having the longitudinal direction of the 2 nd block 2 as an axis. The axis of the curved surface 21c is present on a plane including the upper portion 21a, the lower portion 21b, and the lower portion 11 b. That is, the curved surface 11c and the curved surface 21c form a part of the same cylindrical surface. With the above-described structure, as shown in the figure, the manifold 17 has a circular cross-sectional shape in the longitudinal direction, in which a part of the circular arc thereof communicates with the liquid outflow portion 7.
As shown in fig. 1, the rod 3 is formed in an elongated rod shape. However, the portion of the rod 3 that exists in the manifold 17 when supported has a side surface formed by a conical surface having a straight line passing through the center of the rod 3 as an axis. In the present embodiment, the rod 3 has a circular cross section such that the diameter increases as the rod 3 is supported in the manifold 17 and the diameter decreases as the rod approaches the 5 th side surface 15 and the 3 rd side surface 13. The portion where the side surface is tapered in this manner is referred to as a tapered portion. The rod 3 includes both ends of the rod 3 and is formed in a cylindrical shape having a constant diameter in the longitudinal direction at a portion existing outside the manifold 17. Therefore, as described later, even if the rod 3 is replaced with another rod having a different taper angle, it is not necessary to replace a member such as a bearing for supporting the rod. In the present embodiment, the rod 3 is rotatably supported by a bearing so as to be disposed inside the manifold 17, but is not actively rotated by an external drive source such as a motor. However, as described later, the rod 3 protruding from the oil seal enclosing body 6 may be connected at one end thereof to a driving source (not shown) such as a motor to be rotated around the axis, thereby having a function of stirring the coating liquid, and therefore, in the present invention, the rod 3 may be referred to as a stirring rod 3 for convenience.
As shown in fig. 2, the application tool 10 according to the present embodiment is formed so as to be separable into respective members. The members can be fixed to each other by a known technique such as bolts (not shown). For example, the 1 st block 1 and the 2 nd block 2 may be fixed to each other by providing a plurality of bolts that penetrate the 2 nd side surface 12 and the 1 st side surface 11 in the longitudinal direction and are screwed into internal threads formed to open to the 1 st side surface 21 of the 2 nd block 2, and bolts that penetrate the 2 nd side surface 22 and the 1 st side surface 21 and are screwed into internal threads formed to open to the 1 st side surface 11 of the 1 st block 1.
Next, the positional relationship between the manifold 17 and the rod 3 when the 1 st block 1 and the 2 nd block 2 are fixed will be described with reference to fig. 3.
As shown in the drawing, when the 1 st block 1 and the 2 nd block 2 have been fixed, the lower side portion 11b formed as a flat surface and the lower side portion 21b formed as a flat surface are in contact with each other. Further, the upper portion 11a formed in a plane and the upper portion 21a formed in a plane are opposed in parallel with a slight distance. Further, between the curved surface 11c recessed toward the inside of the 1 st block 1 and the curved surface 21c recessed toward the inside of the 2 nd block 2, a space called a manifold 17 is formed. That is, the manifold 17 is a region surrounded by the curved surface 11c and the curved surface 21c facing thereto, of the 1 st side surface 11 of the 1 st block 1 and the 1 st side surface 21 of the 2 nd block 2 facing thereto.
As shown in fig. 1, the axis of the rod 3 is parallel to and coincident with the central axes of the curved surface 11c and the curved surface 21c formed by the cylindrical surfaces. For this reason, as shown in fig. 3, the rod 3 is held at a distance from the inner wall of the block body forming the manifold 17, that is, the curved surface 11c of the 1 st block 1 and the curved surface 21c of the 2 nd block 2. As described above, the center axis of the rod 3 and the center axes of the curved surfaces 11c and 21c are set at the same height with respect to the 4 th side surfaces 14 and 24.
Fig. 4 is a sectional perspective view cut in a plane parallel to the 4 th sides 14 and 24 and passing through the central axis of the rod 3. However, for ease of understanding of the description, the oil seal 5, the oil seal enclosing body 6, and the like are omitted from the drawings, and the rod 3 is modified so as to be supported near the center in the width direction of the main body block. As shown in the figure, the tapered portion of the rod 3 is formed so that the diameter is smaller, i.e., thinner, as it approaches the 3 rd side surfaces 13 and 23, and the diameter is larger, i.e., thicker, as it approaches the 5 th side surfaces 15 and 25. On the other hand, the 1 st side surfaces 11 and 21 forming the manifold 17 are parallel line segments in cross section. Thus, the distance between the surface of the rod 3 and the 1 st side 11, which is the inner wall of the manifold 17 adjacent to the surface, is larger as it approaches the 3 rd side 13 and smaller as it approaches the 5 th side 15. In fig. 4, it is shown that the distance D1 of both in the position near the 3 rd side 13 is greater than the distance D2 of both in the position near the 5 th side 15. Similarly, the distance between the surface of the rod 3 and the inner wall of the manifold 17 near the surface, i.e., the 1 st side 21, is greater toward the 3 rd side 23 and smaller toward the 5 th side 25. In addition, in a cross section perpendicular to the longitudinal direction, the gap between the inner wall surface of the manifold 17 and the surface of the rod 3 is fixed.
Further, since the supply channel 18 also passes through the cross section of fig. 4, fig. 4 also shows the supply channel 18 and the opening to the curved surface 11 c.
As shown in fig. 3, a liquid outflow portion 7 formed of an elongated slit-like gap is formed between the upper portion 11a and the upper portion 21 a. That is, in a cross section perpendicular to the advancing direction of the coating liquid, the liquid outflow portion 7 has an elongated rectangular flow path cross section surrounded by two parallel long sides having the same length as the longitudinal direction of the body block and two parallel short sides having a distance in the normal direction between the upper side portion 11a and the lower side portion 11 b. The liquid outflow portion 7 having such a rectangular flow path cross section opens to the surface of the main block.
As shown in fig. 2, the 1 st block 1 and the 2 nd block 2 are integrated by the side surface sealing body 4 attached to the 3 rd side surfaces 13 and 23 and the 5 th side surfaces 15 and 25. The side seal 4 has a through hole 41, and the rod 3 passes through the through hole 41.
The oil seal 5 has a disk shape, and a through hole 51 is formed in the center portion thereof, and the rod 3 passes through the through hole 51. The oil seal 5 is assembled into an oil seal enclosing body 6 described later, and is fixed to the side seal body 4 together with the oil seal enclosing body 6.
The oil seal enclosing body 6 is plate-shaped and joined to the side seal body 4. One side surface of the oil seal-enclosing body 6 has a recess having the same shape as the oil seal 5, and the oil seal 5 is accommodated in the recess when the oil seal-enclosing body 6 is joined to the side seal body 4. A bearing is provided in the oil seal enclosing body 6 so as to be continuous with the recess, and the rod 3 is supported by the bearing. The rod 3 is disposed inside the manifold 17 and is mounted so as to be freely rotatable about its central axis. Both ends of the rod 3 shown in fig. 4 protrude from the oil seal-enclosing body 6.
(working method of coating tool 10)
Next, an operation method of the coating tool 10 according to the above embodiment will be described. First, a pump (not shown) is connected to the supply flow path 18 to start supplying the coating liquid to the coating tool 10. If the supply of the coating liquid is continued, the manifold 17, the supply flow path 18 for supplying the coating liquid to the manifold 17, and the liquid outflow portion 7 for discharging the coating liquid from the manifold 17 will be filled with the coating liquid after a while. Further, the air filled in the manifold 17 and the impurities remaining in the manifold 17 are discharged from the flow path 19 for discharging air together with the coating liquid. Then, the flow path 19 is closed by a valve or a plug (plug). The supply amount (liquid supply amount) of the coating liquid from the pump is set based on conditions such as the moving speed (m/min) of the substrate relative to the coating tool 10 and the film thickness (μm) of the coating film. However, in principle, the coating time is kept constant.
The coating liquid supplied from the supply channel 18 by the pump flows into the manifold 17 from the arc portion of the manifold 17. When stable, the coating liquid flowing into the manifold 17 advances about 90 degrees around the center axis of the rod 3 in the counterclockwise direction in fig. 3, enters the liquid outflow portion 7, advances in the direction of low pressure, i.e., upward in the paper plane in fig. 3 in the liquid outflow portion 7, is discharged from the discharge port to the outside, and is applied to the substrate. As described later, the coating liquid flowing into the manifold 17 may be advanced by about 270 degrees around the center axis of the rod 3 in the clockwise direction in fig. 3 by rotating the rod 3 in the clockwise direction in fig. 3 or the like, and then may enter the liquid outflow portion 7, advance in the liquid outflow portion 7 in the upward direction of the sheet in fig. 3, and be discharged from the discharge port to the outside.
Specifically, the coating liquid first advances along the cylindrical surface of the curved surface 11c in a direction away from the liquid outflow portion 7 (upward direction of the paper surface in fig. 3), enters the liquid outflow portion 7 in the vicinity of the boundary between the upper portions 11a and 21a, and is discharged (when the coating liquid moves in the clockwise direction in fig. 3, the coating liquid first advances along the cylindrical surface of the curved surface 11c in a direction away from the liquid outflow portion 7 or in a direction opposite to the advancing direction in the liquid outflow portion 7 (downward direction of the paper surface in fig. 3), passes through the vicinity of the boundary between the lower portions 11b and 21b, then advances along the cylindrical surface of the curved surface 21c in a direction toward the liquid outflow portion 7 or in the same direction as the advancing direction in the liquid outflow portion 7 (upward direction of the paper surface in fig. 3), enters the liquid outflow portion 7 in the vicinity of the boundary between the upper portions 11a and 21a, and thus discharged). Here, the manifold 17 and the main portion of the liquid outflow portion 7 according to the present embodiment have the same shape regardless of the position in the longitudinal direction of the main block body, and the cross-sectional shape of the rod 3 has the same circular shape except for the change in diameter. Therefore, the coating liquid can be prevented from moving in the longitudinal direction or the pressure can be prevented from varying in the range in the longitudinal direction. Further, in the cross section of fig. 3, the gap between the inner wall surface of the manifold 17 and the surface of the rod 3 is fixed or almost fixed, and therefore, the pressure variation in the advancing direction of the coating liquid can also be suppressed.
By using such a coating tool 10, for example, a slurry of a mixture containing an active material, a conductive agent, and a binder (binder) is applied to an aluminum foil current collector, and dried and pressed, whereby an electrode in a secondary battery such as a lithium secondary battery can be formed. The step of forming a film by applying the coating liquid using the coating tool according to the present invention may be applied to a process for producing a thin film in a liquid crystal panel, an OLED, a laminated ceramic capacitor, or the like.
The inventors of the present application have focused on the following aspects: even if the body block is formed to have a certain flow path cross section in the longitudinal direction, the advancing speed of the coating liquid in the longitudinal direction of the body block changes with time in each position in the longitudinal direction, resulting in a velocity gradient in the longitudinal direction. It is obvious from the experiments of the inventors that, assuming that the bar 3 is not provided, the speed of the coating liquid is the same regardless of the distance from the liquid supply side corresponding to the supply flow path at the time of initial start of supply, but depending on the flow path shape, even if the flow path is a flow path in which the speed of the coating liquid is faster as it is farther from the liquid supply side, the speed of the coating liquid gradually decreases as it is farther from the liquid supply side as time passes from the start of supply, and there is a speed gradient in which the speed becomes relatively smaller than the speed of the coating liquid closer to the liquid supply side. Such a phenomenon may be caused because the retention is more likely to occur as the distance from the liquid feeding side becomes longer.
Therefore, based on the fact that the value obtained by multiplying the supply flow rate by the effective cross-sectional area of the flow path is the flow velocity, the effective cross-sectional area of the flow path in the region away from the liquid feed side, in which the velocity is reduced when the rod 3 is not provided or when a rod having a fixed diameter is provided, is made smaller than the effective cross-sectional area of the flow path in the region close to the liquid feed side, and a tapered portion is formed in the rod 3. That is, in the opening portion of the supply flow path in which the coating liquid flows into the manifold 17, the gap between the rod 3 and the inner wall of the manifold 17 is increased to increase the effective cross-sectional area of the flow path, and the gap between the rod 3 and the inner wall of the manifold 17 is decreased as being away from the opening portion in which the coating liquid is supplied in the longitudinal direction to decrease the effective cross-sectional area of the flow path. As a result, the speed drop in the region away from the opening is corrected, and the fluctuation of the speed in the longitudinal direction can be suppressed.
The angle of the taper of the rod 3 may be set as appropriate based on the characteristics of the coating liquid, other technical requirements, and the results of experiments or simulation experiments. For example, the inventors of the present application measured the discharge amount from each slit when the coating liquid was supplied from the end in the longitudinal direction of the main body block in which a plurality of slits having long sides in the longitudinal direction were formed over the longitudinal direction, and measured the variation in the discharge amount for each slit, that is, for each position in the longitudinal direction, to derive the position where the tapered portion was provided and the angle of the taper, without mounting the rod 3. For example, the variation of the discharge amount in the longitudinal direction is 5% or less, and the taper angle of the tapered portion is preferably 10% or less, that is, 10 degrees in height in the longitudinal direction in the cross section and an angle of 1 or less at the bottom side thereof.
Depending on the shape of the flow path, a pressure distribution and a velocity distribution may occur regardless of the distance from the supply flow path. For example, in a portion where retention is likely to occur, a speed may be reduced even at a position closer to the supply flow path. Therefore, in a state where the cross section of the flow path in the longitudinal direction is constant, such as when no rod 3 is mounted or when a rod having a fixed diameter is provided, the distribution of the advance speed of the coating liquid at the time of supplying the coating liquid and the change of the advance speed with the passage of time are measured by a simulation experiment, and one or more tapered portions are provided so that the diameter at the position where the speed is decreased among the positions in the longitudinal direction is increased, that is, the cross-sectional area of the flow path is decreased. In this manner, the size of the gap between the rod and the inner wall of the manifold can be changed according to the speed of the coating liquid discharged from the discharge port in the longitudinal direction of the rod.
Further, the inventors of the present application have focused on the following phenomena: if the coating liquid is stirred by using a member having a projection such as a blade, pulsation or the like occurs, and therefore, the pressure distribution of the coating liquid in time or position becomes large, which becomes a factor of fluctuation of the coating film thickness. The rod 3 according to the present embodiment is formed to have a circular cross section, and thus does not cause an excessive flow of the coating liquid as compared with the case of using a stirring rod having a projection or the like.
Note that the rod 3 may be rotated clockwise or counterclockwise in fig. 3 while the coating liquid is supplied. For example, if the stirring rod 3 is rotated by an external driving source, stirring of the coating liquid in the manifold 17 can be promoted. This can suppress an increase in viscosity associated with a decrease in velocity, and can suppress liquid from accumulating in the manifold.
In the former case, since the stirring rod 3 rotates clockwise in fig. 3, the coating liquid can be promoted to move clockwise in the same manner even in the manifold 17. In the supply flow path 18, the coating liquid advances toward the center axis of the stirring rod 3, and therefore, the stirring rod 3 can promote the advance of the coating liquid in a direction (downward direction of the paper surface in fig. 3) away from the liquid outflow portion 7 as a rotation wire direction. Then, when the coating liquid passes through the gap between the curved surface 21c of the 2 nd block 2 and the stirring rod 3, the rotation of the stirring rod 3 can promote the progress of the coating liquid in a direction close to the liquid outflow portion 7 (upward direction of the paper surface in fig. 3).
In this way, by rotating the stirring rod 3 using the external drive source, the retention of the coating liquid can be further suppressed. In particular, since the mixed material slurry contains a large amount of solid components (solid matter particles) in the liquid, if a conventional application tool is used, there is a problem that the solid components are separated from the liquid, and the ratio of the solid components in the liquid fluctuates and the viscosity fluctuates at each position in the longitudinal direction of the discharge port. However, according to the coating tool 10 of the present embodiment, even if a slurry containing solid matter particles in a liquid is used as a coating liquid, the coating liquid can be applied from the discharge port having the longitudinal direction while stirring the coating liquid in the manifold using the stirring rod 3, and therefore, fluctuation in viscosity according to the position in the longitudinal direction can be suppressed as compared with the conventional art, and coating with high uniformity can be achieved.
In addition, in the 2 nd block 2 in the above embodiment, a curved surface 21c recessed inward is formed between the upper portion 21a and the lower portion 21 b. However, the side surface 21 may be formed so as to form a single plane including the upper portion 21a and the lower portion 21b without forming the curved surface 21 c. In this case, the rod is formed to have a diameter smaller than the radius of the curved surface 11c forming the cylindrical surface, and needs to be supported so as to be separated from the side surface 21 and the curved surface 11c, respectively, and so that the central axis is present on the 1 st block 1 side.
In the case of such a configuration, although the distance between the surface of the rod and the inside of the manifold 17 fluctuates according to the progress of the coating liquid, when the coating liquid flowing into the manifold 17 is advanced in a direction away from the liquid outflow portion 7 (downward direction of the paper surface in fig. 3) along the arc portion, the coating liquid can be caused to flow in from a position closest to the surface of the stirring rod 3, and therefore, the movement of the coating liquid in the wire direction (downward direction of the paper surface) by the stirring rod 3 can be promoted. Likewise, the rotation line direction of the stirring rod 3 in the position closest to the surface of the 2 nd block 2 coincides with the advancing direction of the coating liquid in the liquid outflow portion 7. That is, when the coating liquid passes through the gap between the 2 nd block 2 and the stirring rod 3, the stirring rod 3 is likely to receive a force in the direction toward the liquid outflow portion 7 (upward force in fig. 3). Then, at least a part of the coating liquid flows into the liquid outflow portion 7, and advances in the liquid outflow portion 7 in parallel with the contact surface. At this time, the liquid outflow portion 7 and the linear portion of the manifold 17 are connected by a flat surface on the same plane as the 2 nd block 2. This can suppress pressure fluctuations associated with obstacles and the like.
When a fluid having a large viscosity increase rate in response to a decrease in speed is used as the coating liquid, the angle of the taper can be increased. Thus, even if the characteristics of the coating liquid change, the fluctuation in the speed in the longitudinal direction can be suppressed only by replacing the stirring rod 3 with a stirring rod having another tapered shape in accordance with the change. Further, since the stirring rod is formed in a cylindrical shape having the same diameter except for the tapered portion, it is not necessary to replace the side seal 4 or other members for supporting the stirring rod.
According to the coating tool 10 having the above-described structure, the retention in the manifold 17 can be suppressed as compared with the conventional art, and a coating film having a more uniform thickness can be formed on the object to be coated. The surface roughness of the stirring rod is preferably smooth. If the surface roughness is large, pulsation of the coating liquid is caused, so that a coating film of uniform thickness cannot be applied.
While one embodiment of the present invention has been described above as an example, the present invention is not limited to the above embodiment. That is, various modifications may be made without departing from the basic technical concept of the present invention that a stirring rod having a tapered portion is disposed in a manifold.
For example, in the above embodiment, the manifold 17 is formed to have the same width as the 1 st block 1, but the manifold may be shorter than the 1 st block in the width in the longitudinal direction. The shape of the liquid outflow portion may be appropriately changed depending on the desired thickness of the coating film, the type of the coating liquid used, and the like, and may be other than the slit shape in the above embodiment. Further, a plurality of liquid outflow portions may be formed according to the application. For example, a plurality of slit-like liquid discharge portions may be formed so as to be separated from each other in the longitudinal direction of the main block.
In the region where the liquid discharge portion is formed, the manifold is preferably formed so that the cross-sectional shape of the manifold has the same cross-sectional shape in the longitudinal direction. However, it is not limited thereto. The shape of the manifold in a cross section perpendicular to the longitudinal direction of the body block may also be different depending on the position in the longitudinal direction. For example, in order to suppress variation in the discharge amount in the longitudinal direction, the manifold may be formed such that the cross-sectional area of the manifold is gently varied, for example, gradually decreased while maintaining a similar shape of the cross-sectional shape as it is separated from the supply flow path. Even when such a manifold is used, the discharge amount in the longitudinal direction varies depending on the characteristics of the coating liquid, the discharge amount, and the like. Therefore, by using the stirring rod 3 including one or more tapered portions having a taper angle and a length corresponding to the amount of variation in the discharge amount obtained by an experiment, a simulation experiment, or the like, the variation in the longitudinal direction of the discharge amount or the like can be further suppressed. Note that, depending on the shape of the manifold, when the stirring rod is not mounted, there may be a case where a 1 st region where the discharge amount is increased as the distance from the supply flow path is increased and a 2 nd region where the discharge amount is decreased as the distance from the supply flow path is further increased are formed in the longitudinal direction. In that case, the region 2 may be provided with a tapered portion whose distance from the manifold in the cross section decreases as the distance from the supply channel increases, and the region 1 may be provided with a reverse tapered portion whose distance from the supply channel increases in the cross section.
Further, it is not necessary to rotate the stirring rod. Even if not rotating, the effective flow path cross-sectional area is reduced by inclining in the longitudinal direction, and therefore, convection can be generated by other means such as a pump.
Further, the tapered portion need not be a cylindrical surface. For example, a curved surface may be used: the size of the gap between the tapered portion and the inner wall of the manifold monotonously increases in a broad sense depending on the position in the longitudinal direction of the rod, and a cross section passing through the central axis forms a quadratic curve.
The cross-sectional shape of the manifold can be variously modified. For example, the circular arc portion may also be formed by an ellipse, a quadratic curve, other curves, or a curve and a straight line. For example, a simulation experiment may be performed on a plurality of cross-sectional shapes, and the cross-sectional shape with the smallest pressure fluctuation or the like may be selected. However, the wall surface forming the liquid outflow portion and a part of the wall surface of the manifold connected thereto are formed integrally on the same surface as the contact surface of the 2 nd block 2 of the coating tool 10 according to the present embodiment, and the stirring rod is brought close to the wall surface, whereby the discharge of the coating liquid can be further stabilized. Further, the body block may be integrally formed by wire electric discharge (wire electric discharge) or a die. Further, the stirring rod or the like may be formed to be detachable from the main body block or may be fixed thereto non-detachably.
[ modified examples ]
Next, a modified example of the stirring rod 3 will be described. Fig. 5(a) is a perspective view of a stirring rod 3' having two tapered portions, and fig. 5(b) is a perspective view of a stirring rod 3 ″ having four tapered portions.
As shown in fig. 5(a), the stirring rod 3 ' includes a tapered portion 31 ' and a 2 nd tapered portion 32 ', the tapered portion 31 ' is formed so that the diameter decreases from the end 34 ' toward the end 35 ', and the 2 nd tapered portion 32 ' is formed so that the diameter increases toward the end 35 ' than the tapered portion 31 '. Further, a connecting portion 33 ' for connecting the tapered portion 31 ' and the 2 nd tapered portion 32 ' is provided. The end portion 34 ', the end portion 35', and the connecting portion 33 'are formed in a cylindrical shape having the same diameter as the tip of the tapered portion 31'.
In the case of using such a stirring rod 3', the supply channel corresponding to the supply channel 18 is preferably formed in the main block so that the coating liquid is supplied into the manifold from the central portion in the longitudinal direction. That is, by forming the supply flow path having one end as the supply port opening to the outside of the main block body and the other end opening to the manifold at the position of the connection portion 33', the effective flow path area at both end portions where the flow velocity is likely to decrease can be reduced. For this reason, it is possible to suppress a decrease in the flow velocity of the coating liquid in both end portions, and suppress fluctuations in the flow velocity in the longitudinal direction. Further, since the coating liquid flows into the manifold from the central portion in the longitudinal direction, the distance can be reduced to the end portion farthest from the manifold. Further, since the stirring rod can be formed symmetrically about the connecting portion 33', the movement of the coating liquid in the longitudinal direction can be suppressed.
It is preferable that the stirring rod 3 ″ shown in fig. 5(b) is mounted on two main body blocks each of which is formed in the supply flow path, the manifold, the liquid outflow portion, and the discharge port. As shown in the figure, the stirring rod 3 "includes a tapered portion 31", a 2 nd tapered portion 32 ", and a connecting portion 33", the tapered portion 31 "is formed so that the diameter decreases as the end portion 34" approaches the end portion 39 ", the 2 nd tapered portion 32" is formed closer to the end portion 39 "than the tapered portion 31", and the connecting portion 33 "connects the tapered portion 31" and the 2 nd tapered portion 32 "so that the diameter increases as the end portion 39" approaches. Further, the present invention includes a 3 rd tapered portion 36 ″, a 4 th tapered portion 37 ″, and a connecting portion 38 ″, where the 3 rd tapered portion 36 ″, which is formed closer to the end 39 'than the 2 nd tapered portion 32 ″, is formed so that the diameter decreases as the end 39' approaches, the 4 th tapered portion 37 ″, which is formed closer to the end 39 'than the 3 rd tapered portion 36 ″, is formed so that the diameter increases as the end 39' approaches, and the connecting portion 38 ″, which connects the 3 rd tapered portion 36 ″, and the 4 th tapered portion 37 ″. Further, a connecting portion 35 "for connecting the 2 nd tapered portion 32" and the 3 rd tapered portion 36 "is provided.
As supply channels corresponding to the supply channel 18, a 1 st supply channel and a 2 nd supply channel are formed, one end of the 1 st supply channel being opened to the outside of the body block as a supply port and the other end being opened to the manifold at the position of the connection portion 33 ″, one end of the 2 nd supply channel being opened to the outside of the body block as a supply port and the other end being opened to the manifold at the position of the connection portion 38 ″. The manifold is divided into two parts by the support wall of the support connection 35 ". Further, slit-shaped liquid outflow portions and discharge ports corresponding to the liquid outflow portions 7 are formed for the respective manifolds.
With such a configuration, stripe coating (stripe coating) can be performed to simultaneously form a plurality of coating films such as a coating film having the widths of the tapered portions 31 ", the 2 nd tapered portions 32", and the connecting portions 33 "in the longitudinal direction and a coating film having the widths of the 3 rd tapered portions 36", the 4 th tapered portions 37 ", and the connecting portions 38" with the interval of the connecting portions 35 ". The supply flow path may be branched at an intermediate point to supply the liquid to each manifold. The number of the tapered portions and the liquid outflow portions, the direction of the taper, and the like can be appropriately changed depending on the application. Even if the stirring rod 3 ″ as described above is used, the same effect as that of the stirring rod 3 of the coating tool 10 can be exhibited.
Description of the symbols
1 st block 1 …
11. 21 … side 1
11a … upper part of side 1
11b … lower part of side 1
11c … curved surface of the 1 st side
12. 22 nd side of 22 …
13. 23 rd side of 23 …
14. 24 th side of 24 …
15. 25 … side 5
16. 26 th side of 26 …
17 … manifold
18 … supply flow path
2 … No. 2 Block
3 … stirring rod
4 … side sealing body
5 … oil seal
6 … oil seal enclosing body
7 … liquid outflow part
Claims (10)
1. A coating tool is provided with:
a body block having a supply port and a discharge port formed on a surface thereof, respectively, and a manifold formed inside the body block and communicating with the supply port and the discharge port; and
a rod supported within the manifold,
the coating tool is used for coating a coating liquid on a substrate, the coating liquid is supplied from the supply port, passes through a gap between the rod and the inner wall of the manifold in the main body block and is discharged from the discharge port,
the discharge port is formed by an opening extending in a length direction of the body block,
the manifold is formed of a space extending in a length direction of the body block,
the rod is supported in the manifold in such a manner that the longitudinal direction thereof is parallel to the longitudinal direction of the body block, and the rod is provided with a tapered portion that decreases the gap between the rod and the inner wall of the manifold as the rod moves away from the opening in the longitudinal direction, starting from the opening through which the coating liquid is supplied into the manifold.
2. The coating tool of claim 1,
the discharge port is formed by a slit having a long side parallel to the longitudinal direction of the rod.
3. The coating tool of claim 2,
the slit is formed in plural in the longitudinal direction.
4. The coating tool of claim 1,
the surface of the tapered portion is formed of a conical surface having the longitudinal direction of the rod as an axis.
5. The coating tool of claim 2,
the surface of the tapered portion is formed of a conical surface having the longitudinal direction of the rod as an axis.
6. The coating tool of claim 3 wherein,
the surface of the tapered portion is formed of a conical surface having the longitudinal direction of the rod as an axis.
7. The coating tool of any one of claims 1 to 6,
the rod includes the tapered portion and a 2 nd tapered portion, the tapered portion is formed so that the diameter decreases as the tapered portion approaches the other end from one end, the 2 nd tapered portion is formed closer to the other end side than the tapered portion and is formed so that the diameter increases as the tapered portion approaches the other end,
a supply passage is formed in the main body block, one end of the supply passage opens to the outside as a supply port, and the other end opens to the manifold at a position in the longitudinal direction connecting the taper portion and the 2 nd taper portion.
8. The coating tool of claim 7,
the rod further includes a 3 rd taper portion and a 4 th taper portion, the 3 rd taper portion being formed closer to the other end side than the 2 nd taper portion and formed so that the diameter is smaller as the rod approaches the other end, the 4 th taper portion being formed closer to the other end side than the 3 rd taper portion and formed so that the diameter is larger as the rod approaches the other end,
a 2 nd supply channel is formed in the main body block, one end of the 2 nd supply channel opens to the outside as a 2 nd supply port, and the other end opens to the manifold at a position in the longitudinal direction connecting the 3 rd taper part and the 4 th taper part.
9. The coating tool of claim 7,
the shape of the manifold in a cross section perpendicular to the longitudinal direction of the body block differs depending on the position in the longitudinal direction.
10. The coating tool of claim 8,
the shape of the manifold in a cross section perpendicular to the longitudinal direction of the body block differs depending on the position in the longitudinal direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-148110 | 2018-08-07 | ||
| JP2018148110A JP6579348B1 (en) | 2018-08-07 | 2018-08-07 | Application tool |
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| Publication Number | Publication Date |
|---|---|
| CN110813633A CN110813633A (en) | 2020-02-21 |
| CN110813633B true CN110813633B (en) | 2021-10-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910725185.5A Active CN110813633B (en) | 2018-08-07 | 2019-08-07 | Coating tool |
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| Country | Link |
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| JP (1) | JP6579348B1 (en) |
| CN (1) | CN110813633B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117157153A (en) * | 2021-04-09 | 2023-12-01 | 松下知识产权经营株式会社 | Coating die and coating device |
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|---|---|---|---|---|
| GB1165985A (en) * | 1966-12-08 | 1969-10-01 | Nrm Corp | Two-Stage Extruder |
| US4828779A (en) * | 1985-10-18 | 1989-05-09 | Fuji Photo Film Co., Ltd. | Coating method |
| CN1038616A (en) * | 1989-07-01 | 1990-01-10 | 北京化工学院 | Three-stage type vented extruder screw |
| JPH06262117A (en) * | 1993-03-12 | 1994-09-20 | Sumitomo Metal Ind Ltd | Nozzle coater type coating device |
| JPH10505555A (en) * | 1994-09-06 | 1998-06-02 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | Die for extruding a fluid stream |
| JP2014168735A (en) * | 2013-03-01 | 2014-09-18 | Mitsubishi Materials Corp | Coating tool |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH038387Y2 (en) * | 1985-10-25 | 1991-02-28 | ||
| JP2002370057A (en) * | 2001-06-13 | 2002-12-24 | Matsushita Electric Ind Co Ltd | Extrusion type nozzle and coating device |
| JP2004148184A (en) * | 2002-10-30 | 2004-05-27 | Toray Eng Co Ltd | Coating method and coating apparatus |
| JP2005211871A (en) * | 2004-02-02 | 2005-08-11 | Matsushita Electric Ind Co Ltd | Die nozzle and electrode plate producing method |
| JP5912762B2 (en) * | 2012-03-29 | 2016-04-27 | 日東電工株式会社 | Die coater and coating film manufacturing method |
| JP6618309B2 (en) * | 2015-09-25 | 2019-12-11 | 株式会社Ｓｃｒｅｅｎホールディングス | Coating apparatus and coating method |
-
2018
- 2018-08-07 JP JP2018148110A patent/JP6579348B1/en active Active
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2019
- 2019-08-07 CN CN201910725185.5A patent/CN110813633B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1165985A (en) * | 1966-12-08 | 1969-10-01 | Nrm Corp | Two-Stage Extruder |
| US4828779A (en) * | 1985-10-18 | 1989-05-09 | Fuji Photo Film Co., Ltd. | Coating method |
| CN1038616A (en) * | 1989-07-01 | 1990-01-10 | 北京化工学院 | Three-stage type vented extruder screw |
| JPH06262117A (en) * | 1993-03-12 | 1994-09-20 | Sumitomo Metal Ind Ltd | Nozzle coater type coating device |
| JPH10505555A (en) * | 1994-09-06 | 1998-06-02 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | Die for extruding a fluid stream |
| JP2014168735A (en) * | 2013-03-01 | 2014-09-18 | Mitsubishi Materials Corp | Coating tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110813633A (en) | 2020-02-21 |
| JP6579348B1 (en) | 2019-09-25 |
| JP2020022928A (en) | 2020-02-13 |
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