CN110806638B - Method and device for determining resonance frequency of micro-vibration mirror and computer storage medium - Google Patents
Method and device for determining resonance frequency of micro-vibration mirror and computer storage medium Download PDFInfo
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- CN110806638B CN110806638B CN201910950473.0A CN201910950473A CN110806638B CN 110806638 B CN110806638 B CN 110806638B CN 201910950473 A CN201910950473 A CN 201910950473A CN 110806638 B CN110806638 B CN 110806638B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/002—Optical devices or arrangements for the control of light using movable or deformable optical elements the movement or the deformation controlling the frequency of light, e.g. by Doppler effect
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
Abstract
The invention discloses a method and a device for determining the resonant frequency of a micro-vibration mirror and a computer storage medium, wherein the method comprises the following steps: inputting a driving signal to the micro-vibration mirror, collecting a feedback signal output by the micro-vibration mirror, and determining a first phase difference; the first phase difference is the phase difference between the driving signal and the feedback signal at the same moment; determining a first difference value, wherein the first difference value is a difference value between a standard phase difference and a first phase difference, and the standard phase difference is a phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency; and gradually adjusting the frequency of the driving signal until the first difference value is within a preset error range, and determining the frequency of the driving signal after the last time as the resonant frequency.
Description
Technical Field
The present invention relates to the field of micro-vibrating mirrors, and more particularly, to a method for determining a resonant frequency of a micro-vibrating mirror, an apparatus for detecting a resonant frequency of a micro-vibrating mirror, and a computer storage medium.
Background
A MEMS (Micro-Electro-Mechanical System) galvanometer is a Micro mirror surface that can reflect various lights and the like by rotating rapidly around an axis.
The MEMS galvanometer is used in the field of micro laser projection, and the scanning of laser beams on a working field of view is realized by controlling the rotation of the MEMS galvanometer and utilizing the rotation motion of the reflection mirrors with X, Y two rotating shafts. Generally, when the MEMS galvanometer operates at a resonant frequency, the energy loss of the MEMS galvanometer is minimum, and the operation is most labor-saving. In order to reduce the operating resistance of the MEMS galvanometer, it is typically operated near the resonant frequency. In the production process of the MEMS galvanometer, the MEMS galvanometers have certain difference due to differences in the assembling and adjusting processes, namely different MEMS galvanometers have different resonance frequencies. Therefore, it is necessary to provide a solution for determining the resonant frequency of the MEMS galvanometer.
Disclosure of Invention
The invention aims to provide a technical scheme of a novel micro-vibrating mirror.
According to a first aspect of the present invention, there is provided a method for determining a resonant frequency of a micro-resonator mirror, comprising:
inputting a driving signal to the micro-vibration mirror, collecting a feedback signal output by the micro-vibration mirror, and determining a first phase difference; the first phase difference is the phase difference between the driving signal and the feedback signal at the same moment;
determining a first difference value, wherein the first difference value is a difference value between a standard phase difference and a first phase difference, and the standard phase difference is a phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency;
gradually adjusting the frequency of the driving signal until the first difference value is within a preset error range, and determining the frequency of the driving signal after the last time as the resonant frequency;
the adjusting the frequency of the driving signal comprises:
determining the frequency adjustment quantity of the current adjustment according to the frequency adjustment quantity of the previous adjustment and the adjustment coefficient of the current adjustment; the adjustment coefficient of the current adjustment is equal to the ratio of a first difference value after the previous adjustment to a second difference value after the previous adjustment, wherein the second difference value after the previous adjustment is the difference value of the first phase difference after the previous adjustment and the first phase difference before the previous adjustment;
and adjusting the frequency of the driving signal according to the frequency adjustment amount of the current adjustment.
Alternatively or preferably, the frequency adjustment amount is a preset initial adjustment amount when the frequency of the driving signal is adjusted for the first time.
Optionally or preferably, the determining the frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment includes:
and determining the frequency adjustment quantity of the current adjustment according to the product of the frequency adjustment quantity of the previous adjustment and the adjustment coefficient of the current adjustment.
Optionally or preferably, the acquiring a feedback signal output by the micro-vibration mirror includes: synchronously acquiring a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror; the first phase difference is the phase difference between the driving signal and the feedback signal acquired at the same moment.
According to a second aspect of the present invention, there is provided an apparatus for detecting a resonance frequency of a micro-galvanometer, comprising:
the phase difference determining module is used for inputting a driving signal to the micro-vibration mirror, acquiring a feedback signal output by the micro-vibration mirror and determining a first phase difference; the first phase difference is the phase difference between the driving signal and the feedback signal at the same moment;
the micro-vibration mirror comprises a first difference value determining module, a second difference value determining module and a third difference value determining module, wherein the first difference value is the difference value between a standard phase difference and a first phase difference, and the standard phase difference is the phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency;
the resonance frequency determining module is used for adjusting the frequency of the driving signal successively until the first difference value is within a preset error range, and determining the frequency of the driving signal after the last time as the resonance frequency;
the resonant frequency determination module comprises:
a frequency adjustment amount determining unit, configured to determine a frequency adjustment amount of the current adjustment according to a frequency adjustment amount of a previous adjustment and an adjustment coefficient of the current adjustment; the adjustment coefficient of the current adjustment is equal to the ratio of a first difference after the previous adjustment to a second difference after the previous adjustment, wherein the second difference after the previous adjustment is the difference between the first phase difference after the previous adjustment and the first phase difference before the previous adjustment;
and the frequency adjusting unit is used for adjusting the frequency of the driving signal according to the frequency adjusting amount adjusted this time.
Alternatively or preferably, the frequency adjustment amount determining unit is configured to determine the frequency adjustment amount to be a preset initial adjustment amount when the frequency of the driving signal is adjusted for the first time.
Optionally or preferably, the frequency adjustment amount determining unit is configured to determine the frequency adjustment amount of the current adjustment according to a product of the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment.
Optionally or preferably, the method further comprises:
the acquisition unit is used for synchronously acquiring a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror; the first phase difference is the phase difference between the driving signal and the feedback signal acquired at the same time.
According to a third aspect of the present invention, there is provided an apparatus for detecting a resonance frequency of a micro-galvanometer, comprising:
a memory for storing computer instructions;
a processor for retrieving the computer instructions from the memory and executing a method for determining the resonant frequency of the micro-resonator mirror provided by the first aspect of the present invention under the control of the computer instructions.
According to a fourth aspect of the present invention, there is provided a computer storage medium storing executable computer instructions which, when executed by a processor, implement a method of determining a resonant frequency of a vibroscope as provided in the first aspect of the present invention.
According to one embodiment of the disclosure, the frequency of the driving signal is adjusted successively until the first phase difference between the driving signal and the feedback signal is within a preset error range, the frequency of the driving signal after the last time is determined as the resonant frequency, and each adjustment is determined according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment, so that the frequency of the driving signal can be accurately adjusted, and the resonant frequency of the micro-vibrating mirror can be accurately positioned.
Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a schematic diagram illustrating a hardware configuration of a micro laser projection system according to an embodiment of the present invention;
FIG. 2 is a flow chart showing a method for determining the resonant frequency of the micro-resonator mirror according to the first embodiment of the present invention;
fig. 3 is a block diagram showing an apparatus for detecting a resonance frequency of a micro-galvanometer according to a second embodiment of the present invention;
fig. 4 is a block diagram showing an apparatus for detecting a resonance frequency of a micro-galvanometer mirror in a third embodiment of the invention.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.
Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.
In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
< hardware configuration >
Fig. 1 shows a hardware configuration diagram of a micro laser projection system.
The micro laser projection system 1000 of the present embodiment includes a MEMS galvanometer 100 and a resonant frequency detecting device 200.
A MEMS (Micro-Electro-Mechanical System) galvanometer 100 is a Micro mirror that can reflect various lights and the like by rotating rapidly around an axis.
The MEMS galvanometer is used in the field of micro laser projection, and the scanning of laser beams on a working field of view is realized by controlling the rotation of the MEMS galvanometer and utilizing the rotation motion of the reflection mirrors with X, Y two rotating shafts. Generally, when the MEMS galvanometer operates at a resonant frequency, the energy loss of the MEMS galvanometer is minimum, and the operation is most labor-saving. In order to reduce the operating resistance of the MEMS galvanometer, it is typically operated near the resonant frequency.
The resonant frequency detection device 200 can be used to detect the resonant frequency at which the MEMS galvanometer 100 operates.
In one example, the resonant frequency detection device 200 may be as shown in fig. 1, including a processor 210, a memory 220, an interface device 230, a communication device 240, a display device 250, an input device 260, a speaker 270, a microphone 280, and/or the like.
The processor 210 may be a central processing unit CPU, a microprocessor MCU, or the like. The memory 220 includes, for example, a ROM (read only memory), a RAM (random access memory), a nonvolatile memory such as a hard disk, and the like. The interface device 230 includes, for example, a USB interface, a headphone interface, and the like. The communication device 240 may include a short-range communication device, such as any device that performs short-range wireless communication based on short-range wireless communication protocols, such as the Hilink protocol, WiFi (IEEE 802.11 protocol), Mesh, bluetooth, ZigBee, Thread, Z-Wave, NFC, UWB, LiFi, etc., and the communication device 240 may also include a long-range communication device, such as any device that performs WLAN, GPRS, 2G/3G/4G/5G long-range communication. The display device 250 is, for example, a liquid crystal display panel, a touch panel, or the like. Input device 260 may include, for example, a touch screen, a keyboard, a somatosensory input, and the like. A user can input/output voice information through the speaker 270 and the microphone 280.
Although a plurality of devices are shown for the resonant frequency detection device 200 in fig. 1, the present invention may relate to only some of the devices, for example, the resonant frequency detection device 200 only relates to the memory 220 and the processor 210.
In the above description, the skilled person can design the instructions according to the solutions provided in the present disclosure. How the instructions control the operation of the processor is well known in the art and will not be described in detail herein.
The resonant frequency detection device shown in fig. 1 is merely illustrative and is in no way intended to limit the present disclosure, its application, or uses.
< first embodiment >
The embodiment provides a method for determining the resonant frequency of a micro-vibration mirror. The method is implemented by the resonance frequency detection device.
As shown in fig. 2, the method for determining the resonant frequency of the micro-resonator may include the following steps S2100 to S2300.
Step S2100 inputs a driving signal to the micro-resonator and collects a feedback signal output by the micro-resonator, and determines a first phase difference.
In this example, the Micro-galvanometer mirror is a MEMS (Micro-Electro-Mechanical System) galvanometer.
The driving signal can be used for controlling the operation of the micro-vibration mirror, and the micro-vibration mirror is controlled to work by adjusting the frequency of the driving signal.
The feedback signal reflects the actual operation condition of the MEMS vibrating mirror under the current driving signal, and the driving signal input into the micro-vibrating mirror can be adjusted based on the feedback signal, so that the purpose of accurately controlling the operation of the micro-vibrating mirror is achieved.
The first phase difference is a phase difference between the drive signal and the feedback signal at the same time.
In this example, a driving signal is input to the micro-oscillating mirror through a digital-to-analog converter (dac), and the driving signal input to the micro-oscillating mirror and a feedback signal output from the micro-oscillating mirror are synchronously acquired through the acquisition unit. Specifically, the acquisition unit includes a first Analog-to-Digital Converter ADC1(Analog-to-Digital Converter) and a second Analog-to-Digital Converter ADC2(Analog-to-Digital Converter), the first Analog-to-Digital Converter ADC1 may be configured to acquire a driving signal input to the micro-oscillator, the second Analog-to-Digital Converter ADC2 may be configured to acquire a feedback signal output by the micro-oscillator, and the first Analog-to-Digital Converter ADC1 and the second Analog-to-Digital Converter ADC2 perform synchronous acquisition.
When the driving signal with a certain frequency is used for controlling the micro-vibration mirror to operate, a certain phase difference exists between the current driving signal and the feedback signal at the same moment, and the first phase difference can reflect the frequency of the driving signal. The first phase difference is determined according to the phase difference between the driving signal and the feedback signal at the same moment, and the degree of closeness between the frequency of the driving signal and the resonance frequency of the micro-vibration mirror can be judged according to the difference value between the first phase difference and the standard phase difference, so that the frequency of the driving signal is further adjusted according to the degree of closeness between the frequency of the driving signal and the resonance frequency of the micro-vibration mirror, and the resonance frequency of the micro-vibration mirror can be rapidly determined.
In one example, the frequency of the driving signal input to the micro-galvanometer is a preset initial frequency, and the preset initial frequency can be selected from a preset frequency range. The preset frequency range can be set according to engineering experience or experimental simulation results. The predetermined frequency range may be a frequency range in which the resonance frequency of the micro-galvanometer is normally located, for example, 26500Hz to 29000 Hz.
After determining the first phase difference, entering:
in step S2200, a first difference is determined, where the first difference is a difference between the standard phase difference and the first phase difference.
The standard phase difference is the phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency, is preset and can be obtained from parameters when the micro-vibration mirror leaves a factory.
Different micro-mirrors have different resonance frequencies. Different resonance frequencies correspond to different standard phase differences. When the micro-vibration mirror operates at the resonance frequency, the energy loss of the micro-vibration mirror is minimum, and the operation is most labor-saving.
After determining the first difference, entering:
step S2300, successively adjusting the frequency of the driving signal until the first difference is within a preset error range, and determining the frequency of the driving signal after the last time as the resonant frequency.
The first difference may represent a difference between a frequency of the driving signal and a resonant frequency of the micro-galvanometer.
The preset error range can reflect whether the working frequency of the micro-vibration mirror reaches the resonance frequency, when the first difference value is within the preset error range, the first phase difference between the current driving signal and the feedback signal is close to the standard phase difference, and at this time, the frequency of the driving signal corresponding to the first phase difference can be considered as the resonance frequency of the micro-vibration mirror. The preset error range can be set according to engineering experience or experimental simulation results.
In a more specific example, the first difference after the m-th adjustment is determined to be within the preset error range by using the following formula.
|d tar -d m |≤E spc Formula (1)
In the above formula (1), d tar -d m Denotes the first difference after the m-th adjustment, E spc And m is a positive integer, and represents a preset error range. And determining the frequency of the driving signal after the last time as the resonant frequency until the adjusted first difference value is within the preset error range.
The method comprises the steps of adjusting the frequency of a driving signal one by one, storing the frequency of the driving signal after each adjustment and a first phase difference, determining a first difference value according to the first phase difference after each adjustment and a standard phase difference, judging whether the first difference value after each adjustment is within a preset error range or not until the first difference value is within the preset error range, and determining the frequency of the driving signal corresponding to the first difference value to be the resonance frequency.
In this example, when the frequency of the driving signal is adjusted for the first time, the frequency adjustment amount is a preset initial adjustment amount. The preset initial adjustment amount may be represented by Δ f 1 And (4) showing.
The preset initial adjustment amount can be set according to engineering experience or experimental simulation results. For example 50 Hz.
In this example, the adjusting the frequency of the driving signal according to the frequency adjustment amount of the current adjustment may further include:
and adjusting the frequency of the driving signal according to a preset initial adjustment amount.
For example, the initial frequency of the driving signal is set to f 1 27000Hz, preset initial adjustment Δ f 1 Is 50Hz, the frequency f of the drive signal after the first adjustment 2 ＝f 1 +Δf 1 ＝27000+50＝27050Hz。
For example, the initial frequency of the driving signal is set to f 1 27000Hz, preset initial adjustment Δ f 1 Is-50 Hz, the frequency f of the drive signal after the first adjustment 2 ＝f 1 +Δf 1 ＝27000-50＝26950Hz。
In this example, each time the frequency of the driving signal is adjusted for the second and subsequent times, the step of adjusting the frequency of the driving signal may further include: steps S2310-S2320.
Step S2310, determining a frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment.
The adjusting coefficient of the current adjustment is equal to the ratio of the first difference after the previous adjustment to the second difference after the previous adjustment. The second difference after the previous adjustment is a difference between the first phase difference after the previous adjustment and the first phase difference before the previous adjustment.
The first difference after the previous adjustment reflects a difference between a first phase difference between the driving signal and the feedback signal after the previous adjustment and the standard phase difference. The second difference after the previous adjustment reflects a change in the first phase difference between the drive signal and the feedback signal before and after the first adjustment. The adjustment coefficient of the current adjustment is determined based on the first difference after the previous adjustment and the second difference after the previous adjustment. According to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment, the frequency of the driving signal can be accurately adjusted, and therefore the resonance frequency of the micro-vibration mirror can be accurately positioned.
Step S2320, the frequency of the driving signal is adjusted according to the frequency adjustment amount of the current adjustment.
In an example, the step S2320 of determining the frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment may further include:
and determining the frequency adjustment quantity of the current adjustment according to the product of the frequency adjustment quantity of the previous adjustment and the adjustment coefficient of the current adjustment.
The method for determining the resonance frequency of the micro-resonator will be described below with reference to a specific example.
In this example, a drive signal is input to the micro-oscillator, and the frequency of the drive signal is an initial frequency f 1 Synchronously collecting the driving signal input to the micro-vibration mirror and the feedback output by the micro-vibration mirrorSignal, determining a first phase difference as d 1 And the first phase difference is the phase difference between the driving signal and the feedback signal acquired at the same moment.
In this example, the frequency of the drive signal is adjusted for the first time. When the frequency of the driving signal is adjusted for the first time, the frequency adjustment amount is a preset initial adjustment amount. The preset initial adjustment amount may be represented by Δ f 1 And (4) showing.
Determining the frequency of the driving signal after the first adjustment according to a preset initial adjustment amount and an initial frequency, and calculating the frequency of the driving signal after the first adjustment by using the following formula:
f 2 ＝f 1 +Δf 1 formula (2)
In the above formula (2), f 2 Representing the frequency of the drive signal after the first adjustment, f 1 Representing the initial frequency, Δ f, of the drive signal 1 Indicating a preset initial adjustment amount.
Synchronously collecting a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror, and determining a first phase difference d between the driving signal and the feedback signal after the first adjustment 2 。
Determining a standard phase difference and a first phase difference d of the first adjusted driving signal and the feedback signal 2 Determining a first difference value. And (2) judging whether a first difference value corresponding to the driving signal after the first adjustment is within a preset error range according to a formula (1).
And if the first difference value corresponding to the driving signal after the first adjustment is within the preset error range, determining the frequency of the driving signal after the first adjustment as the resonance frequency of the micro-vibration mirror.
And if the first difference value corresponding to the driving signal after the first adjustment is not in the preset error range, performing second adjustment on the frequency of the driving signal after the first adjustment.
In this example, the frequency of the drive signal is adjusted a second time. And when the frequency of the driving signal is adjusted for the second time, determining the frequency adjustment amount according to the frequency adjustment amount of the first adjustment and the adjustment coefficient of the second adjustment, wherein the frequency adjustment amount of the first adjustment is the initial adjustment amount.
The adjustment coefficient of the second adjustment is equal to the ratio of the first difference after the first adjustment to the second difference after the first adjustment, and the second difference after the first adjustment is the difference between the first phase difference after the first adjustment and the first phase difference before the first adjustment.
In this example, when the frequency of the driving signal is adjusted for the second time, the adjustment coefficient for the second adjustment may be calculated by using the following formula:
in the above formula (3), k 2 An adjustment coefficient representing a second adjustment, d tar -d 2 Representing a first difference after a first adjustment, d 2 -d 1 Representing the second difference after the first adjustment, d tar Represents the standard phase difference, d 2 Representing a first phase difference after a first adjustment, d 1 Representing a first phase difference when driven with a drive signal of an initial frequency.
In this example, when the frequency of the driving signal is adjusted for the second time, the frequency adjustment amount for the second adjustment is determined based on the frequency adjustment amount for the first adjustment and the adjustment coefficient for the second adjustment, and may be calculated by using the following formula:
in the above formula (4), Δ f 2 Indicates the frequency adjustment amount of the second adjustment, Δ f 1 Indicates the amount of frequency adjustment, k, of the first adjustment 2 An adjustment coefficient representing a second adjustment, d tar -d 2 Representing a first difference after the first adjustment, d 2 -d 1 Representing the second difference after the first adjustment, d tar Denotes the standard phase difference, d 2 Representing a first phase difference after a first adjustment, d 1 Expressed at an initial frequencyA first phase difference when the driving signal is driven.
Wherein, the frequency adjustment amount of the first adjustment is a preset initial adjustment amount.
Determining the frequency of the second adjusted driving signal according to the frequency adjustment amount of the second adjustment and the frequency of the first adjusted driving signal, and calculating the frequency of the second adjusted driving signal by using the following formula:
f 3 ＝f 2 +Δf 2 formula (5)
In the above formula (5), f 3 Representing the frequency of the second adjusted drive signal, f 2 Representing the frequency, Δ f, of the drive signal after the first adjustment 2 Indicating the amount of frequency adjustment for the second adjustment.
Synchronously collecting a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror, and determining a first phase difference d between the driving signal and the feedback signal after the second adjustment 3 。
Determining the standard phase difference and the first phase difference d of the second adjusted driving signal and the feedback signal 3 Determining a first difference value. And (3) judging whether the first difference value corresponding to the driving signal after the second adjustment is within a preset error range according to the formula (1).
And if the first difference value corresponding to the driving signal after the second adjustment is within the preset error range, determining the frequency of the driving signal after the second adjustment as the resonance frequency of the micro-vibration mirror.
And if the first difference value corresponding to the drive signal after the second adjustment is not in the preset error range, performing third adjustment on the frequency of the drive signal after the second adjustment.
In this example, the frequency of the drive signal is adjusted a third time. And when the frequency of the driving signal is adjusted for the third time, determining the frequency adjustment amount according to the frequency adjustment amount of the second adjustment and the adjustment coefficient of the third adjustment.
The adjustment coefficient of the third adjustment is equal to the ratio of the first difference after the second adjustment to the second difference after the second adjustment, and the second difference after the second adjustment is the difference between the first phase difference after the second adjustment and the first phase difference after the first adjustment.
In this example, when the frequency of the driving signal is adjusted for the third time, the adjustment coefficient for the third adjustment may be calculated by using the following formula:
in the above formula (6), k 3 An adjustment coefficient representing a third adjustment, d tar -d 3 Representing the first difference after the second adjustment, d 3 -d 2 Representing a second difference after the second adjustment, d tar Represents the standard phase difference, d 3 Representing the second adjusted first phase difference, d 2 Indicating the first phase difference after the first adjustment.
In this example, when the frequency of the driving signal is adjusted for the third time, the frequency adjustment amount for the third adjustment is determined based on the frequency adjustment amount for the second adjustment and the adjustment coefficient for the third adjustment, and the frequency adjustment amount for the third adjustment may be calculated by using the following formula:
in the above formula (7), Δ f 3 Indicates the frequency adjustment amount of the third adjustment, Δ f 2 Indicating the amount of frequency adjustment, k, for the second adjustment 3 An adjustment coefficient representing a third adjustment, d tar -d 3 Representing the first difference after the second adjustment, d 3 -d 2 Representing a second difference after the second adjustment, d tar Denotes the standard phase difference, d 3 Representing the second adjusted first phase difference, d 2 Indicating the first phase difference after the first adjustment.
Determining the frequency of the third adjusted driving signal according to the frequency adjustment amount of the third adjustment and the frequency of the second adjusted driving signal, and calculating the frequency of the third adjusted driving signal by using the following formula:
f 4 ＝f 3 +Δf 3 formula (8)
In the above formula (8), f 4 Representing the frequency of the third adjusted drive signal, f 3 Representing the frequency, Δ f, of the drive signal after the second adjustment 3 The frequency adjustment amount for the third adjustment is shown.
Synchronously acquiring a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror, and determining a first phase difference d between the driving signal and the feedback signal after the third adjustment 4 。
Determining a standard phase difference and a first phase difference d of the drive signal and the feedback signal after the third adjustment 4 Determining a first difference value. And (3) judging whether a first difference value corresponding to the driving signal after the third adjustment is within a preset error range according to the formula (1).
And if the first difference corresponding to the driving signal after the third adjustment is within the preset error range, determining the frequency of the driving signal after the third adjustment as the resonance frequency of the micro-vibrating mirror.
And if the first difference value corresponding to the driving signal after the third adjustment is not in the preset error range, continuously adjusting the frequency of the driving signal after the third adjustment.
In this example, the frequency of the driving signal is adjusted for the Nth time, where N is a positive integer and N ≧ 2.
And when the frequency of the driving signal is adjusted for the Nth time, determining the frequency adjustment amount according to the frequency adjustment amount of the adjustment for the (N-1) th time and the adjustment coefficient of the adjustment for the Nth time.
The adjustment coefficient of the Nth adjustment is equal to the ratio of the first difference after the Nth-1 th adjustment to the second difference after the N-1 th adjustment, and the second difference after the N-1 th adjustment is the difference between the first phase difference after the N-1 th adjustment and the first phase difference before the N-1 th adjustment.
In this example, when the frequency of the driving signal is adjusted for the nth time, the adjustment coefficient for the nth time adjustment may be calculated by using the following formula:
in the above formula (9), k N Adjustment coefficient representing the Nth adjustment, d tar -d N Denotes the first difference after the N-1 th adjustment, d N -d N-1 Represents the second difference after the N-1 th adjustment, d tar Denotes the standard phase difference, d N Representing the first phase difference after the N-1 th adjustment, d N-1 Indicating the first phase difference before the N-1 th adjustment.
In this example, when the frequency of the driving signal is adjusted for the nth time, the frequency adjustment amount for the nth time is determined according to the frequency adjustment amount for the N-1 th time adjustment and the adjustment coefficient for the nth time adjustment, and the frequency adjustment amount for the nth time adjustment may be calculated by using the following formula:
in the above equation (10), Δ f N Indicates the frequency adjustment amount of the Nth adjustment, Δ f N-1 Indicates the frequency adjustment amount, k, of the N-1 th adjustment N Adjustment coefficient representing the Nth adjustment, d tar -d N Represents the first difference after the N-1 th adjustment, d N -d N-1 Represents the second difference after the N-1 th adjustment, d tar Represents the standard phase difference, d N Represents the first phase difference after the N-1 th adjustment, d N-1 Indicating the first phase difference before the N-1 th adjustment.
Determining the frequency of the driving signal after the nth adjustment according to the frequency adjustment amount of the nth adjustment and the frequency of the driving signal after the nth-1 adjustment, and calculating the frequency of the driving signal after the nth adjustment by using the following formula:
f N ＝f N-1 +Δf N formula (11)
In the above formula (1), f N Representing the frequency of the N-th adjusted drive signal, f N-1 Denotes the frequency, Δ f, of the N-1 th adjusted drive signal N Indicates the Nth adjustmentThe amount of frequency adjustment of (1).
Synchronously acquiring a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror, and determining a first phase difference d between the driving signal after the Nth adjustment and the feedback signal N+1 。
Determining a standard phase difference and a first phase difference d of the Nth adjusted driving signal and the feedback signal N+1 Determining a first difference value. And (3) judging whether a first difference value corresponding to the driving signal after the Nth adjustment is within a preset error range according to the formula (1).
And determining the frequency of the driving signal after the Nth time as the resonance frequency of the micro-vibration mirror until the first difference value is within a preset error range.
The method for determining the resonant frequency of the micro-oscillating mirror provided in this embodiment has been described above with reference to the accompanying drawings, and the method determines the frequency of the driving signal after the last time as the resonant frequency of the micro-oscillating mirror by successively adjusting the frequency of the driving signal until the first phase difference between the driving signal and the feedback signal is within the preset error range, and each adjustment is determined according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment, so that the frequency of the driving signal can be accurately adjusted, and the resonant frequency of the micro-oscillating mirror can be accurately located.
< second embodiment >
In the present embodiment, a device 3000 for detecting the resonance frequency of the micro-galvanometer is provided, and as shown in fig. 3, the device 3000 for detecting the resonance frequency of the micro-galvanometer is connected to the MEMS galvanometer.
The apparatus 3000 for detecting a resonance frequency of a micro-galvanometer includes a phase difference determining module 3100, a first difference determining module 3200, and a resonance frequency determining module 3300.
The phase difference determining module 3100 may be configured to input a driving signal to the micro-oscillating mirror and collect a feedback signal output by the micro-oscillating mirror, and determine a first phase difference; the first phase difference is a phase difference between the drive signal and the feedback signal at the same time.
The first difference determining module 3200 may be configured to determine a first difference, where the first difference is a difference between a standard phase difference and a first phase difference, and the standard phase difference is a phase difference between a driving signal and a feedback signal when the micro-mirror operates at a resonant frequency.
The resonant frequency determining module 3300 may be configured to gradually adjust the frequency of the driving signal until the first difference is within a preset error range, and determine the frequency of the driving signal after the last time as the resonant frequency of the micro-vibrating mirror.
In one example, the resonant frequency determination module 3300 may further include: a frequency adjustment amount determining unit 3310 and a frequency adjusting unit 3320.
The frequency adjustment amount determining unit 3310 may be configured to determine the frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment; the adjustment coefficient of the current adjustment is equal to the ratio of a first difference value after the previous adjustment to a second difference value after the previous adjustment, and the second difference value after the previous adjustment is the difference value of the first phase difference after the previous adjustment and the first phase difference before the previous adjustment;
in a more specific example, the frequency adjustment amount determining unit 3310 may be configured to determine the frequency adjustment amount to be a preset initial adjustment amount when the frequency of the driving signal is adjusted for the first time.
In another more specific example, the frequency adjustment amount determining unit 3310 may be configured to determine the frequency adjustment amount of the present adjustment according to a product of the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the present adjustment.
In another example, the apparatus further comprises an acquisition unit 3400.
The collecting unit 3400 can be used for synchronously collecting a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror; the first phase difference is a phase difference between the driving signal and the feedback signal acquired at the same time.
In a more specific example, the acquisition unit 3400 includes a first Analog-to-Digital Converter ADC1(Analog-to-Digital Converter) and a second Analog-to-Digital Converter ADC2(Analog-to-Digital Converter), the first Analog-to-Digital Converter ADC1 may be used for acquiring a driving signal input to the micro-oscillator, the second Analog-to-Digital Converter ADC2 may be used for a feedback signal output by the micro-oscillator, and the first Analog-to-Digital Converter ADC1 and the second Analog-to-Digital Converter ADC2 perform synchronous acquisition.
The method for determining the resonant frequency of the micro-oscillating mirror provided in this embodiment has been described above with reference to the accompanying drawings, and the method determines the frequency of the driving signal after the last time as the resonant frequency of the micro-oscillating mirror by successively adjusting the frequency of the driving signal until the first phase difference between the driving signal and the feedback signal is within the preset error range, and each adjustment is determined according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment, so that the frequency of the driving signal can be accurately adjusted, and the resonant frequency of the micro-oscillating mirror can be accurately located.
< third embodiment >
In the present embodiment, there is provided an apparatus 4000 for detecting a resonance frequency of a micro-galvanometer, which may be a resonance frequency detecting apparatus 200 as shown in fig. 1.
As shown in fig. 4, the apparatus 4000 for detecting the resonance frequency of the micro-galvanometer includes a processor 4100 and a memory 4200.
Memory 4200, which may be used to store executable instructions;
the processor 4100 may be configured to execute the determination method of the resonant frequency of the micro-polarizer as provided in the first embodiment, according to the control of the executable instructions.
< fourth embodiment >
In the present embodiment, there is provided a computer storage medium storing executable computer instructions which, when executed by a processor, implement the method for determining the resonance frequency of a micro-resonator as provided in the first embodiment.
The above embodiments mainly focus on differences from other embodiments, but it should be clear to those skilled in the art that the above embodiments can be used alone or in combination with each other as needed.
The embodiments in the present disclosure are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments, but it should be clear to those skilled in the art that the embodiments described above can be used alone or in combination with each other as needed. In addition, for the device embodiment, since it corresponds to the method embodiment, the description is relatively simple, and for relevant points, reference may be made to the description of the corresponding parts of the method embodiment. The system embodiments described above are merely illustrative, in that modules illustrated as separate components may or may not be physically separate.
The present invention may be a system, method and/or computer program product. The computer program product may include a computer-readable storage medium having computer-readable program instructions embodied therewith for causing a processor to implement various aspects of the present invention.
The computer readable storage medium may be a tangible device that can hold and store the instructions for use by the instruction execution device. The computer readable storage medium may be, for example, but not limited to, an electronic memory device, a magnetic memory device, an optical memory device, an electromagnetic memory device, a semiconductor memory device, or any suitable combination of the foregoing. More specific examples (a non-exhaustive list) of the computer readable storage medium would include the following: a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a Static Random Access Memory (SRAM), a portable compact disc read-only memory (CD-ROM), a Digital Versatile Disc (DVD), a memory stick, a floppy disk, a mechanical coding device, such as punch cards or in-groove projection structures having instructions stored thereon, and any suitable combination of the foregoing. Computer-readable storage media as used herein is not to be construed as transitory signals per se, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through a waveguide or other transmission medium (e.g., optical pulses through a fiber optic cable), or electrical signals transmitted through electrical wires.
The computer-readable program instructions described herein may be downloaded from a computer-readable storage medium to a respective computing/processing device, or to an external computer or external storage device via a network, such as the internet, a local area network, a wide area network, and/or a wireless network. The network may include copper transmission cables, fiber optic transmission, wireless transmission, routers, firewalls, switches, gateway computers and/or edge servers. The network adapter card or network interface in each computing/processing device receives the computer-readable program instructions from the network and forwards the computer-readable program instructions for storage in a computer-readable storage medium in the respective computing/processing device.
The computer program instructions for carrying out operations of the present invention may be assembler instructions, Instruction Set Architecture (ISA) instructions, machine-related instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including an object oriented programming language such as Smalltalk, C + + or the like and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The computer readable program instructions may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the latter scenario, the remote computer may be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet service provider). In some embodiments, aspects of the present invention are implemented by personalizing an electronic circuit, such as a programmable logic circuit, a Field Programmable Gate Array (FPGA), or a Programmable Logic Array (PLA), with state information of computer-readable program instructions, which can execute the computer-readable program instructions.
Aspects of the present invention are described herein with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer-readable program instructions.
These computer-readable program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks. These computer-readable program instructions may also be stored in a computer-readable storage medium that can direct a computer, programmable data processing apparatus, and/or other devices to function in a particular manner, such that the computer-readable medium storing the instructions comprises an article of manufacture including instructions which implement the function/act specified in the flowchart and/or block diagram block or blocks.
The computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable apparatus or other devices to produce a computer implemented process such that the instructions which execute on the computer, other programmable apparatus or other devices implement the functions/acts specified in the flowchart and/or block diagram block or blocks.
The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of instructions, which comprises one or more executable instructions for implementing the specified logical function(s). In some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems that perform the specified functions or acts, or combinations of special purpose hardware and computer instructions. It is well known to those skilled in the art that implementation by hardware, implementation by software, and implementation by a combination of software and hardware are equivalent.
Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein. The scope of the invention is defined by the appended claims.
Claims (6)
1. A method of determining a resonant frequency of a micro-resonator mirror, comprising:
inputting a driving signal to the micro-vibration mirror and collecting a feedback signal output by the micro-vibration mirror to determine a first phase difference; the first phase difference is the phase difference between the driving signal and the feedback signal at the same moment;
determining a first difference value, wherein the first difference value is a difference value between a standard phase difference and a first phase difference, and the standard phase difference is a phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency;
gradually adjusting the frequency of the driving signal until the first difference value is within a preset error range, and determining the frequency of the driving signal after the last time as a resonant frequency;
the adjusting the frequency of the driving signal comprises:
determining the frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment; the adjustment coefficient of the current adjustment is equal to the ratio of a first difference value after the previous adjustment to a second difference value after the previous adjustment, wherein the second difference value after the previous adjustment is the difference value of the first phase difference after the previous adjustment and the first phase difference before the previous adjustment;
adjusting the frequency of the driving signal according to the frequency adjustment quantity of the current adjustment;
when the frequency of the driving signal is adjusted for the first time, the frequency adjustment amount is a preset initial adjustment amount;
the determining the frequency adjustment amount of the current adjustment according to the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment includes:
and determining the frequency adjustment amount of the current adjustment according to the product of the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment.
2. The method of claim 1, wherein collecting the feedback signal output by the micro-galvanometer comprises: and synchronously acquiring a driving signal input to the micro-vibration mirror and a feedback signal output by the micro-vibration mirror.
3. An apparatus for detecting a resonance frequency of a micro-galvanometer, comprising:
the phase difference determining module is used for inputting a driving signal to the micro-vibration mirror, acquiring a feedback signal output by the micro-vibration mirror and determining a first phase difference; the first phase difference is the phase difference between the driving signal and the feedback signal at the same moment;
the first difference value determining module is used for determining a first difference value, wherein the first difference value is a difference value between a standard phase difference and a first phase difference, and the standard phase difference is a phase difference between a driving signal and a feedback signal when the micro-vibration mirror works at a resonance frequency;
the resonance frequency determining module is used for adjusting the frequency of the driving signal successively until the first difference value is within a preset error range, and determining the frequency of the driving signal after the last time as the resonance frequency;
the resonant frequency determination module comprises:
a frequency adjustment amount determining unit, configured to determine a frequency adjustment amount of the current adjustment according to a frequency adjustment amount of a previous adjustment and an adjustment coefficient of the current adjustment; the adjustment coefficient of the current adjustment is equal to the ratio of a first difference after the previous adjustment to a second difference after the previous adjustment, wherein the second difference after the previous adjustment is the difference between the first phase difference after the previous adjustment and the first phase difference before the previous adjustment;
a frequency adjusting unit for adjusting the frequency of the driving signal according to the frequency adjustment amount adjusted this time;
the frequency adjustment amount determining unit is specifically configured to determine a frequency adjustment amount as a preset initial adjustment amount when the frequency of the driving signal is adjusted for the first time;
the frequency adjustment amount determining unit is specifically further configured to determine the frequency adjustment amount of the current adjustment according to a product of the frequency adjustment amount of the previous adjustment and the adjustment coefficient of the current adjustment.
4. The apparatus of claim 3, further comprising:
and the acquisition unit is used for synchronously acquiring the driving signal input to the micro-vibration mirror and the feedback signal output by the micro-vibration mirror.
5. An apparatus for detecting a resonance frequency of a micro-galvanometer, comprising:
a memory for storing computer instructions;
a processor for retrieving said computer instructions from said memory and executing a method of determining a resonant frequency of a micro-mirror according to any of claims 1-2 under the control of said computer instructions.
6. A computer storage medium storing executable computer instructions which, when executed by a processor, carry out a method of determining a resonant frequency of a vibro-mirror as claimed in any one of claims 1 to 2.
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| CN114967114A (en) * | 2022-06-17 | 2022-08-30 | 青岛海信激光显示股份有限公司 | Projection equipment and driving method of vibrating mirror thereof |
| CN117330191B (en) * | 2023-12-01 | 2024-03-29 | 中国科学院光电技术研究所 | Resonant frequency built-in cyclic search method with adjustable parameters |
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