CN110794572B

CN110794572B - Method for acquiring feedback signal of MEMS galvanometer, driving method and system

Info

Publication number: CN110794572B
Application number: CN201910979247.5A
Authority: CN
Inventors: 张来风
Original assignee: Goertek Optical Technology Co Ltd
Current assignee: Goertek Optical Technology Co Ltd
Priority date: 2019-10-15
Filing date: 2019-10-15
Publication date: 2022-05-06
Anticipated expiration: 2039-10-15
Also published as: CN110794572A

Abstract

The invention discloses a method for acquiring feedback signals of an MEMS galvanometer, a driving method and a system, wherein the acquisition method comprises the following steps: counting the conversion times of the digital-to-analog conversion device; the digital-to-analog conversion device is used for converting the digital driving signal into an analog driving signal to drive the MEMS galvanometer; when the count value reaches a preset first numerical value, controlling the analog-digital conversion device to start the acquisition work of the period and resetting the count value to restart counting; the analog-to-digital conversion device is used for acquiring a feedback signal output by the MEMS galvanometer; wherein the first value is determined according to a data length of the analog driving signal of one cycle.

Description

Method for acquiring feedback signal of MEMS galvanometer, driving method and system

Technical Field

The invention relates to the technical field of micro-vibration mirrors, in particular to a method for acquiring a feedback signal of an MEMS (micro-electromechanical system) vibration mirror, a method for driving the MEMS vibration mirror and a system for driving the MEMS vibration mirror.

Background

In the field of control of MEMS galvanometers, the operation of the MEMS galvanometers is controlled by driving signals. And a feedback signal of the MEMS galvanometer is acquired in real time in the operation process, and the feedback signal reflects the actual operation condition of the MEMS galvanometer under the current driving signal. Therefore, the feedback signal output by the MEMS galvanometer can be collected, harmonic analysis is carried out on the feedback signal, and the driving signal input into the MEMS galvanometer is adjusted based on the analysis result, so that the aim of accurately controlling the operation of the MEMS galvanometer is fulfilled.

The synchronization of the feedback signals means that the acquisition starting points when the feedback signals are acquired in each period are the same. The synchronization of the feedback signal has a great influence on the amplitude and phase in the harmonic analysis, and in order to obtain an accurate analysis result, it is necessary to provide a scheme for synchronously acquiring the feedback signal of the MEMS galvanometer.

Disclosure of Invention

The invention aims to provide a technical scheme of a novel micro-vibrating mirror.

According to a first aspect of the present invention, there is provided a method for acquiring a feedback signal of a MEMS galvanometer, comprising:

counting the conversion times of the digital-to-analog conversion device; the digital-to-analog conversion device is used for converting a digital driving signal into an analog driving signal to drive the MEMS galvanometer;

when the count value reaches a preset first numerical value, controlling the analog-digital conversion device to start the acquisition work of the period and resetting the count value to restart counting; the analog-to-digital conversion device is used for acquiring a feedback signal output by the MEMS galvanometer;

wherein the first value is determined according to a data length of the analog driving signal for one period.

Optionally or preferably, the method further comprises:

if the acquisition times in the period reach a preset second numerical value, controlling the analog-digital conversion device to stop the acquisition work; wherein the second value is less than the first value.

According to a second aspect of the present invention, there is provided a driving method of a MEMS galvanometer, including the acquisition method as provided in the first aspect of the present invention, further including:

and executing the adjustment work of the driving signal of the period according to the feedback signal acquired in the period.

Optionally or preferably, when the count value reaches a preset first value, controlling the analog-to-digital conversion device to start the acquisition work of the period includes:

and when the count value reaches a preset first numerical value, controlling the digital conversion device to start the acquisition work of the period if the adjustment work of the driving signal of the previous period is finished.

According to a third aspect of the present invention, there is provided a driving system of a MEMS galvanometer, comprising a digital-to-analog conversion device, an analog-to-digital conversion device, and a first timer;

the digital-to-analog conversion device is used for converting a digital driving signal into an analog driving signal to drive the MEMS galvanometer;

the analog-to-digital conversion device is used for acquiring a feedback signal output by the MEMS galvanometer;

the first timer is used for counting the conversion times of the digital-to-analog conversion device, and controlling the analog-to-digital conversion device to start the acquisition work of the period and reset the count value to restart counting when the count value reaches a preset first numerical value;

Optionally or preferably, further comprising a first clock source and a second timer;

the first clock source is used for outputting a first clock signal to the second timer;

the second timer is used for generating a first trigger signal by using a first clock signal and outputting the first trigger signal to the digital-to-analog conversion device and the first timer respectively;

the digital-to-analog conversion device is used for performing digital-to-analog conversion under the trigger of the first trigger signal;

and the first timer is used for counting the conversion times of the digital-to-analog conversion device by counting the first trigger signal.

Optionally or preferably, the method further comprises a second clock source and a third timer;

the second clock source is used for outputting a second clock signal to the third timer;

the third timer is used for generating a second trigger signal by using a second clock signal and outputting the second trigger signal to the analog-to-digital conversion device;

the analog-to-digital conversion device is used for performing analog-to-digital conversion under the triggering of a second trigger signal;

when the count value reaches a preset first numerical value, the analog-to-digital conversion device is controlled to start the acquisition work of the period, and the method comprises the following steps:

when the counting value reaches a preset first numerical value, generating a first enabling signal; and the number of the first and second groups,

and sending the first enabling signal to an enabling end of the third timer so as to control the third timer to start working.

Optionally or preferably, the analog-to-digital conversion device is connected with an enable end of the third timer;

the analog-to-digital conversion device is also used for generating a second enabling signal if the acquisition times in the period reach a preset second numerical value after the acquisition work in the period is started; sending the second enabling signal to an enabling end of a third timer to control the third timer to stop working; wherein the second value is less than the first value.

Optionally or preferably, further comprising an adjustment device,

and the adjusting device is used for executing the drive signal adjustment work of the period according to the feedback signal acquired by the analog-to-digital conversion device in the period.

when the counting value reaches a preset first numerical value, inquiring whether the adjustment work of the driving signal in the previous period is finished or not from the adjusting device, and if the adjustment work of the driving signal in the previous period is finished, generating a first enabling signal; and the number of the first and second groups,

According to one embodiment of the disclosure, the conversion times of the digital-to-analog conversion device are counted, when the count value reaches a preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the period, and the count value is cleared and restarted to count, so that the next time when the count value reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the next period, the acquisition starting points when the feedback signals are acquired in each period are the same, the synchronous acquisition of the feedback signals can be realized, and the accuracy of an analysis result can be improved when the harmonic analysis is performed on the feedback signals.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.

FIG. 1 is a diagram illustrating a hardware configuration of a MEMS provided by an embodiment of the present invention;

FIG. 2 is a flow chart of a method for acquiring a feedback signal of a MEMS galvanometer according to a first embodiment of the invention;

FIG. 3 is a flow chart illustrating a method for driving a MEMS galvanometer according to a second embodiment of the present invention;

FIG. 4 is a block diagram showing a driving system of a MEMS galvanometer of a third embodiment of the present invention;

fig. 5 shows a schematic diagram of the acquisition of a feedback signal according to a first embodiment of the invention.

Detailed Description

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.

In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

< hardware configuration >

Fig. 1 shows a hardware configuration diagram of a micro electro mechanical system.

The MEMS 1000 of the present embodiment includes a MEMS galvanometer 100 and a driving system 200.

A MEMS (Micro-Electro-Mechanical System) galvanometer 100 is a Micro mirror surface that can reflect various lights and the like by rotating rapidly around an axis.

The driving system 200 may be configured to control a driving signal input to the MEMS galvanometer 100, and may be configured to collect a feedback signal output by the MEMS galvanometer 100, perform harmonic analysis on the feedback signal, and adjust the driving signal input to the MEMS galvanometer 100 based on an analysis result.

In one example, the drive system 200 may be as shown in fig. 1, including a processor 210, a memory 220, an interface device 230, a communication device 240, a display device 250, an input device 260, a speaker 270, a microphone 280, and/or the like.

The processor 210 may be a central processing unit CPU, a microprocessor MCU, or the like. The memory 220 includes, for example, a ROM (read only memory), a RAM (random access memory), a nonvolatile memory such as a hard disk, and the like. The interface device 230 includes, for example, a USB interface, a headphone interface, and the like. The communication device 240 may include a short-range communication device, such as any device that performs short-range wireless communication based on short-range wireless communication protocols, such as the Hilink protocol, WiFi (IEEE 802.11 protocol), Mesh, bluetooth, ZigBee, Thread, Z-Wave, NFC, UWB, LiFi, etc., and the communication device 240 may also include a long-range communication device, such as any device that performs WLAN, GPRS, 2G/3G/4G/5G long-range communication. The display device 250 is, for example, a liquid crystal display panel, a touch panel, or the like. Input device 260 may include, for example, a touch screen, a keyboard, a somatosensory input, and the like. A user can input/output voice information through the speaker 270 and the microphone 280.

Although a number of devices are shown for drive system 200 in fig. 1, the present invention may relate to only some of the devices, for example, drive system 200 may relate to only memory 220 and processor 210.

In the above description, the skilled person can design the instructions according to the solutions provided in the present disclosure. How the instructions control the operation of the processor is well known in the art and will not be described in detail herein.

The MEMS illustrated in FIG. 1 is illustrative only and is not intended to limit the present disclosure, its application, or uses in any way.

< first embodiment >

The embodiment provides a method for acquiring a feedback signal of an MEMS galvanometer.

As shown in fig. 2, the method for acquiring the feedback signal of the MEMS galvanometer may include the following steps S2100 to S2200.

In step S2100, the number of times of conversion by the digital-to-analog conversion device is counted.

In this embodiment, the digital-to-analog conversion device is configured to convert the digital driving signal into an analog driving signal to drive the MEMS galvanometer.

A MEMS (Micro-Electro-Mechanical System) galvanometer is a Micro mirror surface that can reflect various lights and the like by rotating rapidly around an axis.

The analog driving signal is used for controlling the operation of the MEMS galvanometer, and the control of the MEMS galvanometer is realized by adjusting the frequency and the data length of the analog driving signal.

The frequency of the analog driving signal is set in advance as necessary, and the reciprocal of the frequency of the analog driving signal is the cycle of the analog driving signal.

The data length of the analog driving signal may represent the number of data points included in one cycle of the analog driving signal. The data length of the analog driving signal can be set according to engineering experience or experimental simulation results. For example, if one period of the analog driving signal includes 100 data points, the data length of the analog driving signal is considered to be 100.

The number of times of conversion by the digital-to-analog conversion device may be indicative of the number of data points output by the digital-to-analog conversion device to the MEMS galvanometer. Counting the conversion times of the digital-to-analog conversion device, determining the output condition of the analog driving signal according to the conversion times of the digital-to-analog conversion device, and finishing the output of the analog driving signal of one period by the digital-to-analog conversion device when the number of output data points reaches the data length of the analog driving signal.

In one example, a collection timer may count the number of conversions of the digital-to-analog conversion device.

After counting the number of conversions of the digital-to-analog conversion means, the following is entered:

step S2200 is that, when the count value reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work in the present period and clear the count value to restart the counting.

In this embodiment, the count value refers to the number of conversion times of the digital-to-analog conversion device.

The first value is determined according to a data length of the one period of the analog driving signal. The preset first value may indicate the number of times that the digital-to-analog conversion device outputs the analog driving signal for one cycle. The preset first value corresponds to the number of data points included in the analog driving signal of one cycle.

The analog-to-digital conversion device is used for acquiring feedback signals output by the MEMS galvanometer.

The feedback signal output by the MEMS galvanometer is an analog signal, and the analog-to-digital conversion device can also be used for converting the acquired analog feedback signal.

When the counting value reaches a preset first value, that is, the number of data points output by the digital-to-analog conversion device reaches the data length of the analog driving signal, the digital-to-analog conversion device completes the output of the analog driving signal of one period. At this time, the control module conversion device starts the acquisition work of the present period, and clears the count value to restart the counting.

For example, if the data length of the analog driving signal is 100, the analog driving signal of one cycle includes 100 data points, the number of times of conversion of the analog driving signal of one cycle output by the digital-to-analog conversion device is 100, and the preset first value is 100. Referring to fig. 5, the abscissa represents the acquisition time, the ordinate represents the amplitude, the upper half represents the output analog driving signal, and the lower half represents the acquired feedback signal. It can be seen that when the count value reaches 100, that is, the number of data points output by the digital-to-analog conversion device reaches the data length of the analog driving signal, the digital-to-analog conversion device is controlled to start the acquisition work of the first period and clear the count value to restart counting, and after the acquisition work of the first period is completed and when the count value reaches 100, the digital-to-analog conversion device is controlled to start the acquisition work of the second period and clear the count value to restart counting.

In this embodiment, the conversion times of the digital-to-analog conversion device are counted, when the count value reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the period, and the count value is cleared and counted again, so as to ensure that the next time when the count value reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the next period, so that the acquisition starting points when the feedback signals are acquired in each period are the same, the synchronous acquisition of the feedback signals can be realized, and the influence on the harmonic analysis caused by the poor synchronism of the feedback signals is avoided.

In one example, the method for acquiring the feedback signal of the MEMS galvanometer may further include: step S2300.

Step S2300, controlling the digital conversion device to stop the collecting operation if the collecting frequency in the period reaches a preset second value.

The number of times of acquisition may represent the number of data points acquired by the analog-to-digital conversion means.

The second value may be set based on engineering experience or experimental simulation results. The second value is less than the first value.

The method for acquiring the feedback signal of the MEMS galvanometer provided in this embodiment has been described above with reference to the accompanying drawings, and is configured to count the conversion times of the digital-to-analog conversion device, control the analog-to-digital conversion device to start the acquisition work of the present period when the count value reaches the preset first value, and reset the count value to restart the counting, so as to ensure that the analog-to-digital conversion device starts the acquisition work of the next period when the count value still reaches the preset first value next time, so that the acquisition starting points when the feedback signal is acquired in each period are the same, and the synchronous acquisition of the feedback signal can be realized, so that the accuracy of an analysis result can be improved when the harmonic analysis is performed on the feedback signal.

< second embodiment >

The embodiment provides a driving method of an MEMS galvanometer.

As shown in FIG. 3, the method for driving the MEMS galvanometer may include the following steps S3100-S3300.

In step S3100, the number of conversion times of the digital-to-analog converter is counted.

step S3200, when the count value reaches the preset first value, controlling the analog-to-digital conversion device to start the acquisition work in the present period and clear the count value to restart the counting.

In this embodiment, the count value refers to the recorded conversion times of the digital-to-analog conversion device.

For example, if the data length of the analog driving signal is 100, the analog driving signal of one cycle includes 100 data points, the number of times of conversion of the analog driving signal of one cycle output by the digital-to-analog conversion device is 100, and the preset first value is 100.

In one example, after controlling the number conversion device to start the collecting work of the present period and clear the count value to restart the count, the method further includes:

and if the acquisition times in the period reach a preset second numerical value, controlling the digital conversion device to stop the acquisition work.

And when the acquisition times in the period reach a preset second numerical value, namely the conversion times of the analog-to-digital conversion device reach the preset second numerical value, the acquisition of the feedback signals in the period is completed. At this time, the analog-to-digital conversion device stops the acquisition work.

After the control module conversion device starts the collection work of the period and resets the count value to restart the counting, the following steps are carried out:

and step S3300, adjusting the driving signal according to the feedback signal collected in the period.

In this embodiment, the adjustment operation of the driving signal in this period may be to obtain an actual operation condition of the MEMS galvanometer according to the feedback signal acquired in this period, determine whether the actual operation condition of the MEMS galvanometer meets requirements, and adjust the driving signal in this period based on the feedback signal acquired in this period when the actual operation condition of the MEMS galvanometer does not meet the requirements.

Adjusting the driving signal of the period based on the feedback signal acquired in the period comprises: the acquired feedback signals are subjected to filtering processing or harmonic analysis to obtain an analysis result, and the drive signals input into the MEMS galvanometer are adjusted based on the analysis result, so that the MEMS galvanometer can be accurately controlled.

For example, the phase difference between the feedback signal and the driving signal in the current period is determined according to the feedback signal acquired in the current period, the phase difference is compared with a standard phase difference, if the difference value between the phase difference and the standard phase difference is not within a preset error range, the actual operation condition of the MEMS galvanometer is considered to be not satisfied, and the frequency of the driving signal in the current period is adjusted based on the feedback signal acquired in the current period, so that the phase difference is the standard phase difference. The standard phase difference refers to the phase difference between the feedback signal and the driving signal in the period when the actual operation condition of the MEMS galvanometer meets the requirement.

In one example, before the controlling the digital conversion device 4200 starts the collecting operation of the present period, it needs to determine whether the adjusting operation of the driving signal of the previous period is completed, which specifically includes:

In this embodiment, the driving signal adjustment operation may be to obtain an actual operating condition of the MEMS galvanometer according to the collected feedback signal, determine whether the actual operating condition of the MEMS galvanometer meets the requirement, and adjust the driving signal of the previous period based on the collected feedback signal of the previous period when the actual operating condition of the MEMS galvanometer does not meet the requirement.

Adjusting the drive signal based on the collected feedback signal, comprising: the acquired feedback signals are subjected to filtering processing or harmonic analysis to obtain an analysis result, and the drive signals input into the MEMS galvanometer are adjusted based on the analysis result, so that the MEMS galvanometer can be accurately controlled.

In one example, determining that the adjustment of the driving signal of the previous period is completed may include:

and if the actual operation condition of the MEMS galvanometer does not meet the requirement, adjusting the driving signal of the previous period based on the collected feedback signal of the previous period, and if the adjustment is completed, determining that the adjustment work of the driving signal of the previous period is completed. At this time, the control module conversion device starts the collection work of the period.

In another example, determining that the adjustment of the driving signal of the previous period is completed may further include:

and if the actual operation condition of the MEMS galvanometer meets the requirement and the driving signal in the previous period does not need to be adjusted, the adjustment work of the driving signal in the previous period is considered to be finished. At this time, the analog-to-digital conversion device does not need to be controlled to start the acquisition work of the period.

For example, according to the collected feedback signal of the previous period, the phase difference between the feedback signal of the previous period and the driving signal is determined, and the phase difference is compared with a standard phase difference, wherein the standard phase difference refers to the phase difference between the corresponding feedback signal and the corresponding driving signal when the actual operation condition of the MEMS galvanometer meets the requirement.

And if the difference value of the phase difference and the standard phase difference is not within the preset error range, the actual operation condition of the MEMS galvanometer is considered to be not satisfied with the requirement, the frequency of the driving signal of the previous period is adjusted based on the feedback signal acquired from the previous period, and the phase difference is the standard phase difference, so that the adjustment is finished. At this time, the control module converting device starts the acquisition work of the period when the adjustment work of the driving signal of the previous period is finished.

And if the difference value of the phase difference and the standard phase difference is within a preset error range, the actual operation condition of the MEMS galvanometer meets the requirement, and the driving signal of the previous period does not need to be adjusted, the adjustment work of the driving signal of the previous period is considered to be finished. At this time, the analog-to-digital conversion device does not need to be controlled to start the acquisition work of the period.

The driving method of the MEMS galvanometer provided in this embodiment is described above with reference to the accompanying drawings, in which the conversion times of the digital-to-analog conversion device are counted, when the count value reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the present period, and the count value is cleared and counted again, so as to ensure that the next time when the count value still reaches the preset first value, the analog-to-digital conversion device is controlled to start the acquisition work of the next period, so that the acquisition starting points when the feedback signal is acquired in each period are the same, and the synchronous acquisition of the feedback signal can be realized, thereby improving the accuracy of the analysis result when the harmonic analysis is performed on the feedback signal. And moreover, the acquired feedback signals are subjected to filtering processing or harmonic analysis to obtain an analysis result, and the drive signals input into the MEMS galvanometer are adjusted based on the analysis result, so that the MEMS galvanometer can be accurately controlled.

< third embodiment >

In the present embodiment, a driving system 4000 of the MEMS galvanometer is provided, as shown in fig. 4, the driving system 4000 is connected to the MEMS galvanometer.

The driving system 4000 includes a digital-to-analog conversion apparatus 4100, an analog-to-digital conversion apparatus 4200, and a first timer 4300;

the digital-to-analog conversion device 4100 can be used to convert the digital driving signal into an analog driving signal to drive the MEMS galvanometer;

the analog-to-digital conversion device 4200 may be configured to collect a feedback signal output by the MEMS galvanometer;

the first timer 4300 may be configured to count the conversion times of the digital-to-analog conversion device 4100, and when the count value reaches a preset first value, control the analog-to-digital conversion device 4200 to start the collecting operation of the present period and reset the count value to start counting again;

wherein the first value is determined according to a data length of the analog driving signal of one cycle.

The data length of the analog driving signal may represent the number of data points included in one cycle of the analog driving signal. The data length of the analog driving signal can be set according to engineering experience or experimental simulation results. For example, if the data length of the analog driving signal is 100, the analog driving signal of one cycle includes 100 data points, the number of times of conversion of the analog driving signal of one cycle output by the digital-to-analog conversion device is 100, and the preset first value is 100.

The number of times of conversion by the digital-to-analog conversion device 4100 may indicate the number of data points output to the MEMS galvanometer by the digital-to-analog conversion device 4100. The first timer 4300 counts the number of conversion times of the digital-to-analog conversion apparatus 4100, and the output condition of the analog driving signal can be determined according to the number of conversion times of the digital-to-analog conversion apparatus 4100. When the count value reaches a preset first value, that is, the number of data points output by the digital-to-analog conversion apparatus 4100 reaches the data length of the analog driving signal, the digital-to-analog conversion apparatus 4100 completes outputting the analog driving signal for one cycle. At this time, the control module conversion device 4200 starts the collection operation of the present period, and clears the count value to restart the count.

In this embodiment, the first timer 4300 is used to count the conversion times of the digital-to-analog conversion device 4100, and when the count value reaches the preset first value, the analog-to-digital conversion device 4200 is controlled to start the acquisition work of the present period, and the count value is cleared to restart the counting, so as to ensure that the analog-to-digital conversion device 4200 is controlled to start the acquisition work of the next period when the count value still reaches the preset first value next time, so that the acquisition starting points when the feedback signal is acquired in each period are the same, the synchronous acquisition of the feedback signal can be realized, and the harmonic analysis is prevented from being affected by the poor synchronism of the feedback signal.

As shown in fig. 4, in this embodiment, the driving system 4000 may further include a first clock source 4400 and a second timer 4500.

The first clock source 4400 may be configured to output a first clock signal to the second timer 4500.

The frequency of the first clock signal output by the first clock source 4400 is set according to the frequency of the analog driving signal.

The second timer 4500 may be configured to generate a first trigger signal by using the first clock signal, and output the first trigger signal to the digital-to-analog conversion apparatus 4100 and the first timer 4300;

when the count of the second timer 4500 reaches the overload value, the second timer 4500 generates a first trigger signal and outputs the first trigger signal to the digital-to-analog converter 4100 and the first timer 4300, respectively, according to the overload value set by the second timer 4500.

The reload value of the second timer 4500 is set according to the frequency of the first clock signal input to the second timer 4500 and the frequency of the analog driving signal that the second timer 4500 needs to output.

The digital-to-analog conversion apparatus 4100 can be used for performing digital-to-analog conversion triggered by the first trigger signal.

The digital-to-analog conversion device 4100 has two input signals, one is a digital source driving signal, and the other is a first trigger signal output by the first timer 4300. The source driving signal is used for continuously inputting to the digital-to-analog conversion apparatus 4100, so as to provide the analog driving signal outputted by the digital-to-analog conversion apparatus 4100. The first trigger signal may be used to trigger the digital-to-analog conversion apparatus 4100 to perform a conversion on the input source driving signal and output an analog driving signal to the MEMS galvanometer.

The first timer 4300 may be configured to count the number of conversion times of the digital-to-analog conversion apparatus 4100 by counting the first trigger signal.

Referring to fig. 4, the first clock source 4400 outputs a first clock signal to the second timer 4500, the second timer 4500 starts counting from 0, when the second timer 4500 counts to the overload value, the second timer 4500 generates a first trigger signal when the second timer 4500 overflows, the first trigger signal is respectively output to the digital-to-analog conversion device 4100 and the first timer 4300, and the digital-to-analog conversion device 4100 is triggered to perform conversion once and the first timer 4300 is triggered to count once.

For example, the frequency of the required analog drive signal is 60HZ and the period of the analog drive signal is 1/60 seconds. The data length of the analog driving signal is 100, i.e. within one period of the analog driving signal, 100 data points are contained.

The frequency of the analog driving signal is 60HZ and the data length is 100, and the frequency of the first trigger signal that the second timer 4500 needs to generate is 6000 HZ. The frequency of the first clock signal output from the first clock source 4400 is set to 12000HZ, and the reload value of the second timer 4500 is set to 1.

The first clock source 4400 outputs a first clock signal of 12000HZ to the second timer 4500, the second timer 4500 starts to count from 0, the reload value of the second timer 4500 is 1, when the second timer 4500 counts to 1, the second timer 4500 overflows, namely the second timer 4500 counts according to 01010101, each time the second timer 4500 overflows, the second timer 4500 generates a first trigger signal of 6000HZ, the first trigger signal of 6000HZ is respectively output to the digital-to-analog conversion device 4100 and the first timer 4300, and the digital-to-analog conversion device 4100 is triggered to perform one conversion and the first timer 4300 is triggered to count once.

The digital-to-analog conversion device 4100 and the first timer 4300 are controlled by the first trigger signal sent by the second timer 4500, which can include that the frequency converted by the digital-to-analog conversion device 4100 is synchronized with the frequency counted by the second timer 4300, so that the second timer 4300 counts the conversion times of the digital-to-analog conversion device 4100.

As shown in fig. 4, the drive system 4000 may further include a second clock source 4600 and a third timer 4700.

The second clock source 4600 may be used to output a second clock signal to the third timer 4700.

The second clock signal may be set according to the acquisition frequency of the feedback signal.

The third timer 4700 may be configured to generate a second trigger signal using the second clock signal, and output the second trigger signal to the analog-to-digital conversion device 4200.

When the count of the third timer 4700 reaches the reload value, the third timer 4700 generates a second trigger signal and outputs the second trigger signal to the analog-to-digital conversion device 4200, according to the reload value set by the third timer 4700.

The reload value of the third timer 4700 is set according to the frequency of the second clock signal input to the third timer 4700, i.e., according to the acquisition frequency of the feedback signal.

The analog-to-digital conversion device 4200 can be used for performing analog-to-digital conversion triggered by the second trigger signal.

The conversion frequency of the analog-to-digital conversion device is the acquisition frequency of the feedback signal. The acquisition frequency can be set according to engineering experience or experimental simulation results.

In one example, the conversion frequency of the analog-to-digital conversion means coincides with the conversion frequency of the digital-to-analog conversion means.

In this embodiment, the first timer 4300 may be configured to count the conversion times of the digital-to-analog conversion device 4100, and control the analog-to-digital conversion device 4200 to start the acquisition operation in this period when the count value reaches a preset first value.

When the count value reaches a preset first value, the analog-to-digital conversion device 4200 is controlled to start the acquisition operation of the present period, which includes:

a first enable signal is transmitted to an enable terminal of the third timer 4700 to control the third timer 4700 to start operating.

When the counting value reaches a preset first value, that is, the number of data points output by the digital-to-analog conversion device reaches the data length of the analog driving signal, the digital-to-analog conversion device completes the output of the analog driving signal of one period. At this time, the first timer 4300 generates a first enable signal, and transmits the first enable signal to an enable terminal of the third timer 4700 to control the third timer 4700 to start operating.

The second clock source 4600 outputs a second clock signal to the third timer 4700, the third timer 4700 starts to count from 0, the third timer 4700 overflows when the third timer 4700 counts a heavy load value, the third timer 4700 generates a second trigger signal every time the third timer 4700 overflows, the second trigger signal is output to the analog-to-digital conversion device 4200, and the analog-to-digital conversion device 4200 is triggered to perform conversion once, so as to realize the acquisition of the feedback signal.

For example, if the data length of the analog driving signal is 100, the analog driving signal of one cycle includes 100 data points, the number of times of conversion of the analog driving signal of one cycle output by the digital-to-analog conversion device is 100, and the preset first value is 100. Referring to fig. 5, the abscissa is the acquisition time, the ordinate is the amplitude, the upper half is the output analog driving signal, and the lower half is the acquired feedback signal. It can be seen that, when the count value of the first timer 4300 reaches 100, that is, the number of data points output by the digital-to-analog conversion apparatus reaches the data length of the analog driving signal, the first timer 4300 generates a first enable signal, sends the first enable signal to an enable end of the third timer 4700 to control the third timer 4700 to start to operate, that is, start the first period of acquisition, and clear the count value of the first timer 4300 to restart counting, after the first period of acquisition is completed, and when the count value of the first timer 4300 reaches 100, the first timer 4300 generates a first enable signal, sends the first enable signal to an enable end of the third timer 4700 to control the third timer 4700 to start to operate, start the second period of acquisition, and clear the count value of the first timer 4300 to restart counting.

In this embodiment, the analog-to-digital conversion device 4200 is connected to the enable terminal of the third timer 4700;

the analog-to-digital conversion device 4200 is further configured to generate a second enable signal if the number of acquisition times in the period reaches a preset second value after the acquisition operation in the period is started; and sending a second enable signal to an enable terminal of the third timer 4700 to control the third timer to stop operating.

Wherein the second value is less than the first value. The second value may be set based on engineering experience or experimental simulation results.

When the acquisition frequency in the period reaches the preset second value, that is, the conversion frequency of the analog-to-digital conversion device 4200 reaches the preset second value, the acquisition of the feedback signal in the period is completed. At this time, the analog-to-digital conversion device 4200 generates the second enable signal, and transmits the second enable signal to the enable terminal of the third timer 4700 to control the third timer to stop operating.

Referring to fig. 4, in this embodiment, the driving system 4000 may further include a regulating device 4800.

The adjusting device 4800 can be used to perform the adjustment operation of the driving signal in this period according to the feedback signal collected by the analog-to-digital conversion device 4200 in this period.

In this embodiment, the driving signal adjustment in this period may be to obtain an actual operating condition of the MEMS galvanometer according to a feedback signal acquired by the analog-to-digital conversion device 4200 in this period, and determine whether the actual operating condition of the MEMS galvanometer meets a requirement or not, and adjust the driving signal in this period based on the feedback signal acquired by the analog-to-digital conversion device 4200 in this period when the actual operating condition of the MEMS galvanometer does not meet the requirement.

Adjusting the driving signal of this period based on the feedback signal collected by the analog-to-digital conversion device 4200 in this period includes: the feedback signal acquired by the analog-to-digital conversion device 4200 is subjected to filtering processing or harmonic analysis to obtain an analysis result, and the drive signal input to the MEMS galvanometer is adjusted based on the analysis result, so that the MEMS galvanometer can be accurately controlled.

For example, the phase difference between the feedback signal and the driving signal in the current period is determined according to the feedback signal acquired in the current period, the phase difference is compared with a standard phase difference, if the difference value between the phase difference and the standard phase difference is not within a preset error range, the actual operation condition of the MEMS galvanometer is considered to be not satisfied, and the driving signal in the current period is subjected to delay adjustment based on the feedback signal acquired in the current period, so that the phase difference is the standard phase difference. The standard phase difference refers to the phase difference between the feedback signal and the driving signal in the period when the actual operation condition of the MEMS galvanometer meets the requirement.

In this embodiment, before the controlling the digital conversion device 4200 starts the collecting operation of this period, it is further required to determine whether the adjusting operation of the driving signal of the previous period is completed, which specifically includes:

when the counting value reaches a preset first numerical value, inquiring whether the adjustment work of the driving signal in the previous period is finished or not from the adjusting device, and if so, generating a first enabling signal; and the number of the first and second groups,

In one example, inquiring whether the previous cycle of the driving signal adjusting work has been completed may include:

the driving system 4000 further includes a register, and the adjusting device 4800 can read a value of the register and determine whether the adjustment of the driving signal in the previous period has been completed according to the read value of the register.

For example, when the analog-to-digital conversion device 4200 starts the previous cycle of acquisition, 1 is written in the register to determine whether the actual operating condition of the MEMS galvanometer meets the requirement. And if the actual operation condition of the MEMS galvanometer does not meet the requirement, adjusting the driving signal of the previous period based on the collected feedback signal of the previous period, and clearing the value of the register after the adjustment is finished. And if the actual operation condition of the MEMS galvanometer meets the requirement, the driving signal of the previous period does not need to be adjusted, and the value of the register is directly cleared. When the adjustment device 4800 reads that the value of the register is 0, it is determined that the adjustment of the driving signal for the last cycle has been completed. When the adjusting device 4800 reads that the register value is 1, it is determined that the adjustment of the driving signal for the last cycle has not been completed.

The driving system of the MEMS galvanometer provided in this embodiment is described above with reference to the accompanying drawings, and the driving system counts the conversion times of the digital-to-analog conversion device, controls the analog-to-digital conversion device to start the acquisition work of the present period when the count value reaches the preset first value, and resets and restarts the count value to ensure that the analog-to-digital conversion device starts the acquisition work of the next period when the count value still reaches the preset first value next time, so that the acquisition starting points when the feedback signal is acquired in each period are the same, and the synchronous acquisition of the feedback signal can be realized, thereby improving the accuracy of the analysis result when the harmonic analysis is performed on the feedback signal. And moreover, the acquired feedback signals are subjected to filtering processing or harmonic analysis to obtain an analysis result, and the drive signals input into the MEMS galvanometer are adjusted based on the analysis result, so that the MEMS galvanometer can be accurately controlled.

< fourth embodiment >

In the present embodiment, a computer storage medium is provided, which stores executable computer instructions, and when the executable computer instructions are executed by a processor, the method for acquiring the feedback signal of the MEMS galvanometer or the method for driving the MEMS galvanometer as provided in the first embodiment is implemented.

The above embodiments mainly focus on differences from other embodiments, but it should be clear to those skilled in the art that the above embodiments can be used alone or in combination with each other as needed.

The embodiments in the present disclosure are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments, but it should be clear to those skilled in the art that the embodiments described above can be used alone or in combination with each other as needed. In addition, for the device embodiment, since it corresponds to the method embodiment, the description is relatively simple, and for relevant points, refer to the description of the corresponding parts of the method embodiment. The system embodiments described above are merely illustrative, in that modules illustrated as separate components may or may not be physically separate.

The present invention may be a system, method and/or computer program product. The computer program product may include a computer-readable storage medium having computer-readable program instructions embodied therewith for causing a processor to implement various aspects of the present invention.

The computer readable storage medium may be a tangible device that can hold and store the instructions for use by the instruction execution device. The computer readable storage medium may be, for example, but not limited to, an electronic memory device, a magnetic memory device, an optical memory device, an electromagnetic memory device, a semiconductor memory device, or any suitable combination of the foregoing. More specific examples (a non-exhaustive list) of the computer readable storage medium would include the following: a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a Static Random Access Memory (SRAM), a portable compact disc read-only memory (CD-ROM), a Digital Versatile Disc (DVD), a memory stick, a floppy disk, a mechanical coding device, such as punch cards or in-groove projection structures having instructions stored thereon, and any suitable combination of the foregoing. Computer-readable storage media as used herein is not to be construed as transitory signals per se, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through a waveguide or other transmission medium (e.g., optical pulses through a fiber optic cable), or electrical signals transmitted through electrical wires.

The computer-readable program instructions described herein may be downloaded from a computer-readable storage medium to a respective computing/processing device, or to an external computer or external storage device via a network, such as the internet, a local area network, a wide area network, and/or a wireless network. The network may include copper transmission cables, fiber optic transmission, wireless transmission, routers, firewalls, switches, gateway computers and/or edge servers. The network adapter card or network interface in each computing/processing device receives computer-readable program instructions from the network and forwards the computer-readable program instructions for storage in a computer-readable storage medium in the respective computing/processing device.

The computer program instructions for carrying out operations of the present invention may be assembler instructions, Instruction Set Architecture (ISA) instructions, machine-related instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including an object oriented programming language such as Smalltalk, C + + or the like and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The computer-readable program instructions may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet service provider). In some embodiments, aspects of the present invention are implemented by personalizing an electronic circuit, such as a programmable logic circuit, a Field Programmable Gate Array (FPGA), or a Programmable Logic Array (PLA), with state information of computer-readable program instructions, which can execute the computer-readable program instructions.

Aspects of the present invention are described herein with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer-readable program instructions.

These computer-readable program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks. These computer-readable program instructions may also be stored in a computer-readable storage medium that can direct a computer, programmable data processing apparatus, and/or other devices to function in a particular manner, such that the computer-readable medium storing the instructions comprises an article of manufacture including instructions which implement the function/act specified in the flowchart and/or block diagram block or blocks.

The computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable apparatus or other devices to produce a computer implemented process such that the instructions which execute on the computer, other programmable apparatus or other devices implement the functions/acts specified in the flowchart and/or block diagram block or blocks.

The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of instructions, which comprises one or more executable instructions for implementing the specified logical function(s). In some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions. It is well known to those skilled in the art that implementation by hardware, by software, and by a combination of software and hardware are equivalent.

Having described embodiments of the present invention, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein. The scope of the invention is defined by the appended claims.

Claims

1. A method for acquiring a feedback signal of a MEMS galvanometer is applied to a driving system of the MEMS galvanometer, wherein the driving system of the MEMS galvanometer comprises a first timer, a first clock source and a second timer, and the method comprises the following steps:

wherein the first value is determined according to a data length of the analog driving signal for one period;

the counting of the conversion times of the digital-to-analog conversion device comprises:

controlling the first clock source to output a first clock signal to the second timer;

outputting a first trigger signal generated by the second timer by using the first clock signal to the digital-to-analog conversion device and the first timer respectively;

and controlling the first timer to count the conversion times of the digital-to-analog conversion device by counting the first trigger signal.

2. The acquisition method as set forth in claim 1, further including:

3. A method of driving a MEMS galvanometer, comprising the acquisition method of claim 1 or 2, further comprising:

4. The driving method according to claim 3, wherein when the count value reaches a preset first value, the controlling the analog-to-digital conversion device starts the acquisition operation of the present period, and the controlling includes:

5. A driving system of an MEMS galvanometer comprises a digital-to-analog conversion device, an analog-to-digital conversion device and a first timer;

the driving system of the MEMS galvanometer further comprises: a first clock source and a second timer;

6. The system of claim 5, further comprising a second clock source and a third timer;

7. The system of claim 6, the analog-to-digital conversion device is connected with an enabling end of the third timer;

8. The system of claim 6, further comprising an adjustment device,

9. The system according to claim 8, wherein when the count value reaches a preset first value, the controlling the analog-to-digital conversion device to start the acquisition operation of the present cycle includes: