CN110793917A - Slit light source and visual inspection device including the same - Google Patents
Slit light source and visual inspection device including the same Download PDFInfo
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- CN110793917A CN110793917A CN201910192980.2A CN201910192980A CN110793917A CN 110793917 A CN110793917 A CN 110793917A CN 201910192980 A CN201910192980 A CN 201910192980A CN 110793917 A CN110793917 A CN 110793917A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/062—LED's
Abstract
The present invention relates to a slit light source and a vision inspection apparatus including the slit light source, and more particularly, to a slit light source that generates slit-shaped light and irradiates an irradiation target with the generated slit-shaped light, and a vision inspection apparatus including the slit light source. The invention discloses a slit light source (20), characterized by comprising: a light source unit (100) that generates light; an optical system (200) that condenses light generated from the light source unit (100) at a magnification set in advance to form slit light; wherein the optical system (200) comprises: a parallel light forming lens part (210) for converting light emitted from the light source part (100) into parallel light; and a condensing lens unit (220) for condensing the light passing through the parallel light forming lens unit (210).
Description
Technical Field
The present invention relates to a slit light source and a vision inspection apparatus including the slit light source, and more particularly, to a slit light source that generates slit-shaped light and irradiates an irradiation target with the generated slit-shaped light, and a vision inspection apparatus including the slit light source.
Background
Semiconductor devices and the like perform various inspections during and after the process to improve process yield and the like.
Then, in the inspection of the inspection object such as the semiconductor device, there is visual inspection of at least one of 2D and 3D inspection, and the inspection object is irradiated with light, an image of the inspection object irradiated with the light is acquired, and the acquired image is analyzed.
Here, a vision inspection apparatus for performing vision inspection generally includes: a light source for generating light with a fixed pattern from the light source and irradiating the object to be inspected; an image acquisition device (camera or scanner) that acquires an image of the inspection object irradiated with light by the light source.
Then, for the light source, a point light source, a slit light source, or the like can be adapted according to the inspection form.
However, in the light source, as shown in korean laid-open patent publication No. 10-2011-17158, a slit light source generally includes a light source unit, a telecentric lens, and a slit member interposed between the light source unit and the telecentric lens.
However, in the conventional slit light source, a slit member is used, and a part of light is blocked by the slit member to cause light loss, and thus, a light source having a large output needs to be used.
Further, when white light is used for a conventional light source, there are problems that a boundary of slit light cannot be clearly formed due to a difference in coloring matter and there is a limitation in narrowing the width of slit light.
Finally, the conventional slit light source has a problem that it is difficult to change the beam width of the slit light according to the use of the slit light.
Disclosure of Invention
(problem to be solved)
An object of the present invention is to provide a slit light source and a vision inspection apparatus including the slit light source, in which the following problems are solved: further, the plurality of cylindrical lenses constitute a magnification optical system, and therefore, even in the case of white light, slit light with a clear irradiation area boundary can be formed without chromatic aberration.
Another object of the present invention is to provide a slit light source and a visual inspection apparatus including the slit light source, the slit light source including: a beam width adjusting lens unit for adjusting the beam width of light emitted from a light source is movably provided on an optical path, and the magnification of a magnification optical system for forming slit light can be more easily adjusted.
(means for solving the problems)
In order to achieve the above object, the present invention discloses a slit light source 20, comprising: a light source unit 100 that generates light; an optical system 200 for condensing light generated from the light source unit 100 at a predetermined magnification to form slit light; wherein the optical system 200 comprises: a parallel light forming lens part 210 for converting light emitted from the light source part 100 into parallel light; and a condensing lens unit 220 for condensing the light passing through the parallel light forming lens unit 210.
The light source part 100 may include a plurality of LED light sources 110, and the plurality of LED light sources 110 are aligned in a line to generate white light at a divergence angle set in advance.
The optical system 200 may further include a beam width adjusting lens part 230, and the beam width adjusting lens part 230 is disposed on an optical path between the parallel light forming lens part 210 and the condensing lens part 220 to adjust a beam width of the parallel light.
The parallel light forming lens part 210 may include one or more cylindrical lenses 212, and the one or more cylindrical lenses 212 have a length perpendicular to an irradiation direction of light passing through an optical axis.
The beam width adjusting lens part 230 may include one or more cylindrical lenses 232, and the one or more cylindrical lenses 232 have a length perpendicular to an irradiation direction of light passing through the optical axis.
The beam width adjusting lens part 230 may include a plurality of cylindrical lenses 232.
At least one of the plurality of cylindrical lenses 232 is movable along the optical axis to adjust the magnification of the optical system 200.
The beam width adjusting lens part 230 may include a plurality of cylindrical lenses 232 arranged in sequence.
At least one of the plurality of cylindrical lenses 232 is replaceable.
The condensing lens part 220 may include one or more cylindrical lenses 222, and the one or more cylindrical lenses 222 have a length perpendicular to an irradiation direction of light passing through an optical axis.
The light source unit 100 generates white light; the condensing lens part 220 may include a plurality of cylindrical lenses 222 sequentially arranged to reduce chromatic aberration of white light passing through the condensing lens part 220.
The invention discloses a vision inspection device, comprising: the slit light source 20 of any one of claims 1 to 9 as a light source that irradiates light to the irradiation object 10; the image acquiring unit 30 acquires an image of the irradiation object 10 irradiated with the slit light by the slit light source 20.
(Effect of the invention)
The slit light source and the visual inspection device comprising the same have the following advantages: further, the plurality of cylindrical lenses constitute a magnification optical system, and therefore, even in the case of white light, slit light with a clear irradiation area boundary can be formed without chromatic aberration.
In addition, the slit light source and the visual inspection device comprising the slit light source have the following advantages: a beam width adjusting lens unit for adjusting the beam width of light emitted from a light source is movably provided on an optical path, and the magnification of a magnification optical system for forming slit light can be more easily adjusted.
Specifically, the following advantages are provided: the structure of the magnification optical system of the present invention is applied to a plurality of cylindrical lenses capable of correcting chromatic aberration, and further, slit light having a very small width can be clearly obtained, and the width of the slit light can be adjusted as needed by adjusting the magnification by the magnification optical system without replacing the constituent elements constituting the magnification optical system.
Drawings
Fig. 1 is a conceptual diagram illustrating a vision inspection apparatus according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view illustrating a slit light source according to an embodiment of the present invention.
Fig. 3 is a perspective view illustrating the slit light source of fig. 2.
FIG. 4 is a photograph showing slit light formed when a plurality of cylindrical lenses capable of correcting chromatic aberration are applied to the slit light source of the present invention.
(description of reference numerals)
10: irradiation target 20: slit light source
100: light source 200: optical system
Detailed Description
Hereinafter, a slit light source and a visual inspection apparatus including the same according to the present invention will be described with reference to the accompanying drawings.
As shown in fig. 1, the vision inspection apparatus of the present invention includes: a slit light source 20 that irradiates the irradiation object 10 with light; the image acquiring unit 30 acquires an image of the irradiation object 10 irradiated with the slit light by the slit light source 20.
The slit light source 20 is configured to irradiate the irradiation target 10 with slit light, and will be described in detail below.
The image acquiring unit 30 is shown as a configuration for acquiring an image of the irradiation object 10 irradiated with the slit light by the slit light source 20, and may be any configuration as long as it can acquire an image, such as a digital camera, a scanner, or the like.
The vision inspection apparatus having the above-described structure performs irradiation of slit light by the slit light source 20 and acquisition of an image by the image acquisition part 30, analyzes the acquired image by a control part (not shown) coupled to or separate from the image acquisition part 30, and may perform 2D inspection such as a planar shape, 3D inspection such as a protrusion height, whether or not a crack is formed, and the like.
For example, the irradiation object 10 may be relatively linearly moved in the horizontal direction with respect to the slit light source 20, and the vision inspection apparatus detects the three-dimensional shape of the irradiation object 10 from the image acquired by the image acquisition unit 30.
On the other hand, the above-described visual inspection apparatus and the like require slit light irradiation on the irradiation target 10, and more specifically, a slit light source 20 that irradiates slit light optimized according to the type of the irradiation target 10, the inspection type, and the like.
Accordingly, as shown in fig. 2 and 3, the slit light source 20 of the present invention includes: a light source unit 100 that generates light; the optical system 200 condenses light emitted from the light source unit 100 at a magnification set in advance to form slit light.
The light source unit 100 may be any structure as long as it can generate light, such as a laser beam generator, an LED lighting device, and the like, as a structure for generating light for forming slit light.
For example, the light source unit 100 may use one or more LED elements, and may include a plurality of LED light sources 110 disposed on a substrate (not shown) along a longitudinal direction of the slit light.
The substrate may be any substrate as long as it is a substrate on which the LED elements constituting the LED light source 110 can be disposed, and a PCB, an FPCB, a metal PCB, or the like may be used.
The plurality of LED light sources 110 are arranged on the substrate along the longitudinal direction of the slit light, generate monochromatic light or white light at a predetermined divergence angle (for example, a divergence angle of 120 °), and form the slit light.
On the other hand, light generated from the light source unit 100 varies in brightness (brightness) along the length direction of the slit light, and in order to improve this phenomenon, a light diffusion member (not shown) for diffusing the light generated by the light source unit 100 may be provided in front of the light source unit 100.
The light diffusion member may be a structure for diffusing transmitted light to form uniform light along the longitudinal direction of the slit light, and may have various structures such as a transparent member coated with a light diffusion film or a light diffusion material.
The optical system 200 may have various structures as a structure for condensing light generated from the light source unit 100 at a magnification set in advance to form slit light.
As shown in fig. 2 and 3, the optical system 200 may include: a parallel light forming lens part 210 for converting light emitted from the light source part 100 into parallel light; and a condensing lens unit 220 for condensing the light passing through the parallel light forming lens unit 210.
The parallel light forming lens part 210 may have various structures as a structure for converting light emitted from the light source part 100 into parallel light.
For example, the parallel light forming lens part 210 may include one or more cylindrical lenses 212 having a length perpendicular to an irradiation direction of light passing through an optical axis.
As shown in fig. 2 and 3, the cylindrical lens 212 may have a length (Y-axis direction) perpendicular to an irradiation direction (X-axis direction) of light passing through an optical axis, and may form a lens surface having an appropriate curvature according to a distance from the light source unit 100 or a magnification.
Preferably, the cylindrical lens 212 is configured to have a plurality of LED light sources 110 arranged in a longitudinal direction to form a uniform slit light source.
The cylindrical lens 212 serves as a collimator lens (collimator lens) for condensing the light generated from the light source unit 100 and converting the light into parallel light or near parallel light in which the divergence angle of the generated light is reduced.
The condensing lens unit 220 may have various configurations as a configuration for condensing the light passing through the beam width adjusting lens unit 300.
For example, the condensing lens part 220 may include one or more cylindrical lenses 222 having a length perpendicular to an irradiation direction of light passing through an optical axis.
As shown in fig. 2 and 3, the cylindrical lens 222 may have a length (Y-axis direction) perpendicular to an irradiation direction (X-axis direction) of light passing through an optical axis, and may form a lens surface having an appropriate curvature according to a distance from the light source unit 100 or a magnification.
Preferably, the arrangement direction of the plurality of LED light sources 110 is set in the longitudinal direction of the cylindrical lens 222 to form uniform slit light.
In the case where the light source unit 100 generates white light, the condensing lens unit 220 preferably includes a plurality of cylindrical lenses 222 arranged in sequence, instead of a single cylindrical lens 222, in order to reduce chromatic aberration of the white light passing through the condensing lens unit 220.
For example, as shown in fig. 2 and 3, the condensing lens unit 220 may include four cylindrical lenses 222 that make focal distances for four or more wavelengths uniform.
In this case, since chromatic aberration due to a difference in the twist ratio of each wavelength in the white light is reduced, and furthermore, even when the width of the slit light to be condensed is 100 μm or less, the boundary of the slit light passing through the condensing lens unit 220 can be clearly formed, there is an advantage that the visual inspection by the slit light can be more accurately performed.
Fig. 4 is a photograph of slit light formed when the condenser lens portion 220 is formed by a single cylindrical lens 222 and slit light formed when the condenser lens portion 220 is formed by a plurality of cylindrical lenses 222 capable of correcting a focal distance for four or more wavelengths, from which it can be confirmed that chromatic aberration is more improved to form clearer slit light when the condenser lens portion 220 is formed by a plurality of cylindrical lenses 222.
The parallel light forming lens portion 210 corresponds to an eyepiece lens of a magnification optical system, and the condensing lens portion 220 corresponds to an objective lens of the magnification optical system, so that the entire optical system 200 can be configured to correspond to the magnification optical system (imaging optical system).
Therefore, the magnification of the optical system 200 can be defined by the product of the magnifications of the parallel light forming lens portion 210 and the condensing lens portion 220.
On the other hand, when the slit light of the optical system 200 is used to inspect a bump (bump) of a BGA (Ball grid array), the width of the slit light to be used is changed according to the size and height of the bump formed on the BGA device.
However, since the entire magnification of the optical system 200 is fixed in a state where the distance between the light source unit 100 and the parallel light forming lens unit 210 and the distance between the condensing lens unit 220 and the irradiation object 10 are fixed, when the irradiation object 10 changes, there is a problem that the parallel light forming lens unit 210 or the condensing lens unit 220 itself should be replaced,
accordingly, the optical system 200 of the present invention may further include a beam width adjusting lens part 230 that is disposed on the optical path between the parallel light forming lens part 210 and the condensing lens part 220 to adjust the beam width of the parallel light.
The beam width adjusting lens section 230 may have various configurations as a configuration for diverging or converging parallel light or near parallel light emitted from the parallel light forming lens section 210 in the width direction (Z-axis direction).
For example, the beam width adjustment lens part 230 may include one or more cylindrical lenses 232 having a length perpendicular to an irradiation direction of light passing through an optical axis.
As shown in fig. 2 and 3, the cylindrical lens 232 may have a length (Y-axis direction) perpendicular to an irradiation direction (X-axis direction) of light passing through an optical axis, and may form a lens surface having an appropriate curvature according to a distance from the light source unit 100 or a magnification.
The cylindrical lens 232 preferably has a longitudinal direction in which the plurality of LED light sources 110 are arranged to form uniform slit light.
The beam width adjusting lens part 230 preferably includes a plurality of cylindrical lenses 232.
The plurality of cylindrical lenses 232 may be sequentially arranged on the optical path.
In addition, at least one of the plurality of cylindrical lenses 232 is movable along the optical axis (or optical path) to adjust the magnification of the optical system 200
In one embodiment, as shown in fig. 2 and 3, the beam width adjusting lens part 230 includes four cylindrical lenses 232 arranged in sequence, two lenses 232a, 232b at two ends of the four cylindrical lenses 232 are fixed, and at least one of the two inner cylindrical lenses 232b, 232c is movable along the optical axis (or optical path). But is not limited thereto.
The present invention is capable of easily adjusting the overall magnification of an optical system 200 without replacing a condenser lens unit 220 by movably disposing at least one cylindrical lens 232 of a plurality of cylindrical lenses 232 on an optical path.
The slit light source 20 of the present invention does not use a slit member for blocking a part of light, but forms a slit light source by using a cylindrical lens in a magnification optical system, adjusts the width of slit light to be irradiated without light loss, does not need to replace the lens, and has an advantage that slit light having a very small width of 100 μm or less can be clearly formed by correcting a focal distance for white light.
On the other hand, the slit light source 20 is not limited to the visual inspection apparatus of fig. 1, but may be used as a light source of various illumination systems.
For example, the slit light source 20 of the present invention can be flexibly used as a light source of a line scan camera (line scan camera).
Although a part of preferred embodiments that can be realized by the present invention has been described above, it is to be understood that the scope of the present invention is not limited to the above-described embodiments, and all of the technical ideas of the present invention and ideas essential to the technical ideas described above are to be considered as being within the scope of the present invention.
Claims (10)
1. A slit light source (20), comprising:
a light source unit (100) that generates light;
an optical system (200) that condenses light generated from the light source unit (100) at a magnification set in advance to form slit light;
wherein the optical system (200) comprises: a parallel light forming lens part (210) for converting light emitted from the light source part (100) into parallel light; and a condensing lens unit (220) for condensing the light passing through the parallel light forming lens unit (210).
2. A slit light source (20) according to claim 1,
the light source unit (100) includes:
a plurality of LED light sources (110) are arranged in a line to generate white light at a divergence angle set in advance.
3. A slit light source (20) according to claim 1,
the optical system (200) further comprises:
and a beam width adjusting lens unit (230) that is provided on the optical path between the parallel light forming lens unit (210) and the condensing lens unit (220) and adjusts the beam width of the parallel light.
4. A slit light source (20) according to claim 1,
the parallel light forming lens section (210) includes:
the cylindrical lens (212) has a length perpendicular to the direction of light irradiation passing through the optical axis.
5. A slit light source (20) according to claim 3,
the beam width adjustment lens unit (230) includes:
one or more cylindrical lenses (232) having a length perpendicular to the direction of irradiation of light passing through the optical axis.
6. A slit light source (20) according to claim 5,
the beam width adjusting lens part (230) includes a plurality of cylindrical lenses (232);
at least one of the plurality of cylindrical lenses (232) is movable along the optical axis to adjust a magnification of the optical system (200).
7. A slit light source (20) according to claim 5,
the beam width adjusting lens part (230) comprises a plurality of cylindrical lenses (232) which are sequentially arranged;
at least one of the plurality of cylindrical lenses (232) is replaceable.
8. A slit light source (20) according to claim 1,
the condensing lens unit (220) includes:
one or more cylindrical lenses (222) having a length perpendicular to the direction of irradiation of light passing through the optical axis.
9. A slit light source (20) according to claim 8,
the light source unit (100) generates white light;
the condensing lens unit (220) includes: and a plurality of cylindrical lenses (222) arranged in this order to reduce chromatic aberration of the white light passing through the condensing lens unit (220).
10. A vision inspection apparatus, comprising:
the slit light source (20) of any one of claims 1 to 9 as a light source that irradiates light to an irradiation object (10);
and an image acquisition unit (30) that acquires an image of the irradiation object (10) irradiated with the slit light by the slit light source (20).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180090335A KR20200015049A (en) | 2018-08-02 | 2018-08-02 | Slit light source and vision inspection apparatus having the same |
| KR10-2018-0090335 | 2018-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110793917A true CN110793917A (en) | 2020-02-14 |
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ID=69426859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910192980.2A Pending CN110793917A (en) | 2018-08-02 | 2019-03-14 | Slit light source and visual inspection device including the same |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20200015049A (en) |
| CN (1) | CN110793917A (en) |
| TW (1) | TWI696823B (en) |
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| TWI696823B (en) | 2020-06-21 |
| TW202007952A (en) | 2020-02-16 |
| KR20200015049A (en) | 2020-02-12 |
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