CN110790218A - Preparation method of circular micro-nano channel and product thereof - Google Patents
Preparation method of circular micro-nano channel and product thereof Download PDFInfo
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- CN110790218A CN110790218A CN201911054553.4A CN201911054553A CN110790218A CN 110790218 A CN110790218 A CN 110790218A CN 201911054553 A CN201911054553 A CN 201911054553A CN 110790218 A CN110790218 A CN 110790218A
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- flexible substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
- B81B1/002—Holes characterised by their shape, in either longitudinal or sectional plane
- B81B1/004—Through-holes, i.e. extending from one face to the other face of the wafer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/00468—Releasing structures
Abstract
The invention relates to the field of micro-nano channel preparation, in particular to a preparation method of a circular micro-nano channel and a product thereof. The preparation method of the circular micro-nano channel comprises the following steps: (1) carrying out near-field electrostatic spinning on the soluble polymer melt through a spinning nozzle to obtain melt spinning; (2) receiving the melt spun yarn by using a flexible substrate, and smearing the same flexible substrate material when the melt spun yarn is partially immersed into the flexible substrate until the melt spun yarn is completely covered; (3) and cooling and solidifying the flexible substrate, placing the flexible substrate in a solvent capable of dissolving the melt spinning, and obtaining the circular micro-nano channel after the flexible substrate is completely dissolved. According to the method, a semi-solid flexible substrate is adopted, melt spinning sinking is utilized to form a re-stacked flexible substrate material, and melt spinning is dissolved after the flexible substrate is solidified, so that a circular micro-nano channel is obtained. The invention overcomes the defect of flat channels formed by electrostatic spinning near-field direct writing and can form high-resolution circular micro-nano channels.
Description
Technical Field
The invention relates to the field of micro-nano channel preparation, in particular to a preparation method of a circular micro-nano channel and a product thereof.
Background
The micro-nano channel has wide application in the field of biotechnology, and the manufacturing method of the micro-nano channel comprises chemical corrosion, laser etching, electrostatic spinning and the like. The electrostatic spinning technology utilizes a high-voltage electric field to enable polymer melt to form charged jet flow which is sprayed out from a nozzle, the jet flow is dried and solidified in the process of flying to a substrate, and various melt spinning is formed when the jet flow falls to the substrate. The electrostatic spinning near-field direct writing can spin a filament (soluble in a certain solution) to form melt spinning on a substrate, and if another material is continuously coated, the melt material is removed after the other material is solidified, so that the micro-nano channel can be formed. Then, in the prior art, a rigid substrate is mostly adopted, the micro-nano channel is easy to collapse and is adhered to the surface of the rigid substrate, as shown in fig. 1, the cross section of the finally manufactured micro-nano channel is flat, and the resolution is low. Or a semicircular channel is spun on the substrate by other technologies to combine the two substrates to form a complete channel, but the difficulty is high, the patterns may not be completely overlapped, and the two substrates may not be bonded well when combined to form a gap. At present, a circular micro-nano channel is difficult to manufacture, a prolate channel is easy to obtain in electrostatic spinning near-field direct writing, and the resolution ratio is low.
Disclosure of Invention
In order to solve the problems, the invention provides a preparation method of a circular micro-nano channel and a product thereof, the preparation method is simple, the cost is low, the pollution is small, the prepared micro-nano channel is circular, and the resolution ratio is high.
A preparation method of a circular micro-nano channel comprises the following steps: (1) carrying out near-field electrostatic spinning on the soluble polymer melt through a spinning nozzle to obtain melt spinning; (2) receiving the melt spun yarn by using a flexible substrate, and smearing the same flexible substrate material when the melt spun yarn is partially immersed into the flexible substrate until the melt spun yarn is completely covered; (3) and cooling and solidifying the flexible substrate, placing the flexible substrate in a solvent capable of dissolving the melt spinning, and obtaining the circular micro-nano channel after the flexible substrate is completely dissolved.
Further, the soluble polymer solution is maltitol or polycaprolactone.
Further, the soluble polymer solution is in a molten state.
Further, the flexible substrate is dimethyl siloxane or epoxy resin, and the flexible substrate is in a semi-solid state.
Furthermore, the working voltage of the electrostatic spinning machine is 2-4kV, and the spinning distance is 1-4 mm.
The diameter of the circular micro-nano channel prepared by the method is 10-70 mu m.
As shown in figure 2, the method adopts a semi-solid flexible substrate, utilizes melt spinning sinking to form a superposed flexible substrate material, and obtains the circular micro-nano channel after the flexible substrate solidifies and dissolves melt spinning. The invention overcomes the defect of flat channels formed by electrostatic spinning near-field direct writing and can form high-resolution circular micro-nano channels. The circular micro-nano channel provided by the invention has the advantages of simple preparation process, low cost and small pollution.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a micro-nano channel prepared by a rigid substrate in the prior art;
FIG. 2 is a schematic diagram of a process for preparing a circular micro-nano channel by using a flexible substrate, wherein A is a schematic diagram of a melt spinning part sinking into the flexible substrate, and B is a schematic diagram of a melt spinning part completely covered by the same flexible substrate material.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to specific embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating maltitol to 160 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain maltitol melt spinning, wherein the working voltage of an electrostatic spinning machine is 3kV, and the spinning distance is 2 mm; (2) receiving maltitol melt spinning by a semi-solid dimethyl siloxane flexible substrate heated to 60 ℃, and smearing the same flexible substrate material when the maltitol melt spinning part sinks into the flexible substrate until the melt spinning is completely covered; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in water, and obtaining the circular micro-nano channel after the maltitol melt spinning is completely dissolved.
Example 2
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating maltitol to 170 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain maltitol melt spinning, wherein the working voltage of an electrostatic spinning machine is 2kV, and the spinning distance is 1 mm; (2) receiving maltitol melt spinning by a semi-solid dimethyl siloxane flexible substrate heated to 60 ℃, and smearing the same flexible substrate material when the maltitol melt spinning part sinks into the flexible substrate until the melt spinning is completely covered; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in water, and obtaining the circular micro-nano channel after the maltitol melt spinning is completely dissolved.
Example 3
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating maltitol to a molten state at 165 ℃, and performing near-field electrostatic spinning through a spinning nozzle to obtain maltitol melt spinning, wherein the working voltage of an electrostatic spinning machine is 4kV, and the spinning distance is 4 mm; (2) receiving maltitol melt spinning by a semi-solid dimethyl siloxane flexible substrate heated to 65 ℃, and smearing the same flexible substrate material when the maltitol melt spinning part sinks into the flexible substrate until the melt spinning is completely covered; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in water, and obtaining the circular micro-nano channel after the maltitol melt spinning is completely dissolved.
Example 4
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating maltitol to 160 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain maltitol melt spinning, wherein the working voltage of an electrostatic spinning machine is 3kV, and the spinning distance is 2 mm; (2) receiving the maltitol melt spinning by using a semi-solid epoxy resin flexible substrate, and smearing the same flexible substrate material when the maltitol melt spinning part sinks into the flexible substrate until the maltitol melt spinning is completely covered; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in water, and obtaining the circular micro-nano channel after the maltitol melt spinning is completely dissolved.
Example 5
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating polycaprolactone to 70 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain polycaprolactone melt spinning, wherein the working voltage of an electrostatic spinning machine is 3kV, and the spinning distance is 2 mm; (2) receiving the melt spinning of polycaprolactone by using a semi-solid dimethyl siloxane flexible substrate heated to 60 ℃, and smearing the same flexible substrate material until the melt spinning is completely covered when the melt spinning part of polycaprolactone sinks into the flexible substrate; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in an acetic acid solution, dissolving melt spinning under ultrasonic waves, and obtaining the circular micro-nano channel after the polycaprolactone melt spinning is completely dissolved.
Example 6
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating polycaprolactone to 80 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain maltitol melt spinning, wherein the working voltage of an electrostatic spinning machine is 2kV, and the spinning distance is 1 mm; (2) receiving the melt spinning of polycaprolactone by using a semi-solid dimethyl siloxane flexible substrate heated to 60 ℃, and smearing the same flexible substrate material until the melt spinning is completely covered when the melt spinning part of polycaprolactone sinks into the flexible substrate; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in an acetic acid solution, dissolving melt spinning under ultrasonic waves, and obtaining the circular micro-nano channel after the polycaprolactone melt spinning is completely dissolved.
Example 7
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating polycaprolactone to a molten state at 90 ℃, and performing near-field electrostatic spinning through a spinning nozzle to obtain polycaprolactone melt spinning, wherein the working voltage of an electrostatic spinning machine is 4kV, and the spinning distance is 4 mm; (2) receiving the melt spinning of polycaprolactone by using a semi-solid dimethyl siloxane flexible substrate heated to 65 ℃, and smearing the same flexible substrate material until the melt spinning is completely covered when the melt spinning part of polycaprolactone sinks into the flexible substrate; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in an acetic acid solution, dissolving melt spinning under ultrasonic waves, and obtaining the circular micro-nano channel after the polycaprolactone melt spinning is completely dissolved.
Example 8
A preparation method of a circular micro-nano channel comprises the following steps: (1) heating polycaprolactone to 80 ℃ to be molten, and performing near-field electrostatic spinning through a spinning nozzle to obtain polycaprolactone melt spinning, wherein the working voltage of an electrostatic spinning machine is 3kV, and the spinning distance is 2 mm; (2) receiving the polycaprolactone melt spinning by using a semi-solid epoxy resin flexible substrate, and smearing the same flexible substrate material until the polycaprolactone melt spinning is completely covered when the polycaprolactone melt spinning part sinks into the flexible substrate; (3) and cooling the flexible substrate to room temperature for solidification, placing the flexible substrate in an acetic acid solution, dissolving melt spinning under ultrasonic waves, and obtaining the circular micro-nano channel after the polycaprolactone melt spinning is completely dissolved.
The preparation method of the circular micro-nano channel adopts a semi-solid flexible substrate, utilizes melt spinning sinking to form a re-overlapped flexible substrate material, and obtains the circular micro-nano channel after the flexible substrate is solidified and dissolved in melt spinning. The invention overcomes the defect of flat channels formed by electrostatic spinning near-field direct writing and can form high-resolution circular micro-nano channels. The circular micro-nano channel provided by the invention has the advantages of simple preparation process, low cost and small pollution.
Claims (6)
1. A preparation method of a circular micro-nano channel is characterized by comprising the following steps: (1) carrying out near-field electrostatic spinning on the soluble polymer melt through a spinning nozzle to obtain melt spinning; (2) receiving the melt spun yarn by using a flexible substrate, and smearing the same flexible substrate material when the melt spun yarn is partially immersed into the flexible substrate until the melt spun yarn is completely covered; (3) and cooling and solidifying the flexible substrate, placing the flexible substrate in a solvent capable of dissolving the melt spinning, and obtaining the circular micro-nano channel after the flexible substrate is completely dissolved.
2. The method according to claim 1, wherein the soluble polymer solution is maltitol or polycaprolactone.
3. The method of claim 2, wherein the soluble polymer solution is in a molten state.
4. The method of claim 1, wherein the flexible substrate is a dimethylsiloxane or an epoxy, and the flexible substrate is in a semi-solid state.
5. The method according to claim 1, wherein the electrostatic spinning machine has an operating voltage of 2-4kV and a spinning distance of 1-4 mm.
6. The circular micro-nano channel prepared by the preparation method according to any one of claims 1 to 5, wherein the diameter of the circular micro-nano channel is 10 to 70 μm.
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| CN201911054553.4A CN110790218A (en) | 2019-10-31 | 2019-10-31 | Preparation method of circular micro-nano channel and product thereof |
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| CN201911054553.4A CN110790218A (en) | 2019-10-31 | 2019-10-31 | Preparation method of circular micro-nano channel and product thereof |
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Citations (8)
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| US20050051518A1 (en) * | 2003-09-08 | 2005-03-10 | Christopher Vitello | Methods for creating channels |
| JP2007291437A (en) * | 2006-04-24 | 2007-11-08 | Hitachi Metals Ltd | Sintered compact for magnetic refrigeration working bed, and its manufacturing method |
| US20120107194A1 (en) * | 2008-05-05 | 2012-05-03 | Cornell University | Channel and method of forming channels |
| CN102745644A (en) * | 2011-04-22 | 2012-10-24 | 国家纳米科学中心 | Method for acquiring micro-nano structure by using high-voltage electrospinning die overturning on material surface |
| CN102874743A (en) * | 2011-07-12 | 2013-01-16 | 中国科学院物理研究所 | Preparation method for embedded micro-nano channel |
| CN104264283A (en) * | 2014-09-29 | 2015-01-07 | 上海交通大学 | Metal micro/nano-tubes and preparation method thereof |
| CN104261343A (en) * | 2014-09-02 | 2015-01-07 | 西安交通大学 | Low-cost micro/nano structure etching method based on electrostatic direct writing |
| CN110152749A (en) * | 2019-06-18 | 2019-08-23 | 广东工业大学 | A kind of preparation method of high polymer micro-flow control chips |
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2019
- 2019-10-31 CN CN201911054553.4A patent/CN110790218A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050051518A1 (en) * | 2003-09-08 | 2005-03-10 | Christopher Vitello | Methods for creating channels |
| JP2007291437A (en) * | 2006-04-24 | 2007-11-08 | Hitachi Metals Ltd | Sintered compact for magnetic refrigeration working bed, and its manufacturing method |
| US20120107194A1 (en) * | 2008-05-05 | 2012-05-03 | Cornell University | Channel and method of forming channels |
| CN102745644A (en) * | 2011-04-22 | 2012-10-24 | 国家纳米科学中心 | Method for acquiring micro-nano structure by using high-voltage electrospinning die overturning on material surface |
| CN102874743A (en) * | 2011-07-12 | 2013-01-16 | 中国科学院物理研究所 | Preparation method for embedded micro-nano channel |
| CN104261343A (en) * | 2014-09-02 | 2015-01-07 | 西安交通大学 | Low-cost micro/nano structure etching method based on electrostatic direct writing |
| CN104264283A (en) * | 2014-09-29 | 2015-01-07 | 上海交通大学 | Metal micro/nano-tubes and preparation method thereof |
| CN110152749A (en) * | 2019-06-18 | 2019-08-23 | 广东工业大学 | A kind of preparation method of high polymer micro-flow control chips |
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