CN110783424A - 一种提升局部背电场(lbsf)工艺稳定性的方法 - Google Patents
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Abstract
本发明公开了一种提升局部背电场(LBSF)工艺稳定性的方法，属于晶硅太阳能电池生产制造技术领域中的一种电池制造工艺，其目的在于提供一种提升局部背电场(LBSF)工艺，其技术方案为(1)PERC电池的半成品加工；(2)采用激光在步骤(1)中PERC电池的半成品的背面氧化铝及氮化硅膜进行激光开槽；(3)使用丝网印刷将硼源印刷至激光开槽区域；(4)采用激光在步骤(3)将硼源上的硼原子掺杂至PERC电池半成品中部的P型硅中；(5)采用HF溶液对磷源进行清洗；(6)采用丝网印刷形成PERC电池成品；本发明提供一种提升局部背电场(LBSF)工艺稳定性的方法，在局部背电场的工艺中额外添加一道激光工艺，就能有效提升效率以及产品的良率,进而提升产品的加工效率和质量。
Description
技术领域
本发明属于晶硅太阳能电池生产制造技术领域，具体涉及一种提升局部背电场(LBSF)工艺稳定性的方法。
背景技术
局部背电场技术(LBSF)是在PERC电池技术的基础上有效提升效率的一种方法,现有的主流技术是在背面钝化层(包含氧化铝及氮化硅膜)后进行硼源的印刷,之后将硼源干燥后进行激光掺杂工艺,在现有的技术上激光同时进行钝化层开槽以及掺杂硼源的工作现有的局部背电场技术(LBSF)技术中，主流的方式是采用一次激光,在背面钝化层后进行硼源的印刷,之后将硼源干燥后进行激光掺杂工艺,在现有的技术上激光同时进行钝化层开槽以及掺杂硼源的工作,此种方式会造成掺杂稳定性差进而影响效率以及良率,对于电池产品的可靠度亦会影响。本专利设计的方法只需在局部背电场的工艺中额外添加一道激光工艺，就能有效提升效率以及产品的良率,进而提升企业获利。同时本专利设计的方法实现途径简单、快捷、有效。对实际生产有很大益处。还有通过本专利提供的方案，可以减少不良产品的产生，提升太阳能电池生产效率，还可以有效提升产品良率。
发明内容
本发明的目的在于：为解决现有技术中，局部背电场技术(LBSF)的稳定性，提供一种提升局部背电场(LBSF)工艺稳定性的方法，在局部背电场的工艺中额外添加一道激光工艺，就能有效提升效率以及产品的良率,进而提升产品的加工效率和质量。
本发明采用的技术方案如下：
一种提升局部背电场(LBSF)工艺稳定性的方法,包括如下步骤：
(1)对PERC电池进行背面氧化铝膜及正面氮化硅膜加工，形成PERC电池的半成品；
(2)采用激光在步骤(1)中PERC电池的半成品的背面氧化铝膜进行激光开槽，所述激光开槽的具体位置为背面氧化铝膜中的AI2O3钝化层和SiNx减反射层中沿对称轴的两侧位置；
(3)使用丝网印刷的方式将硼源印刷至激光开槽区域,所述硼源以胶料的形式印刷至激光开槽区域；
(4)采用激光在步骤(3)硼源上的硼原子掺杂至PERC电池半成品中部的P型硅中，掺杂后的P型硅形成P型硅掺杂区，所述P型硅掺杂区的方块电阻为10～50ohm/sq；
(5)采用HF溶液，对步骤(4)中多余的磷源进行清洗，所述HF溶液的浓度为：5％～15％；
(6)采用丝网印刷将步骤(5)中的PERC电池的半成品进行印刷加工，形成PERC电池成品。
进一步的，所述激光为纳秒激光或皮秒激光，纳秒激光或皮秒激光的波长为532nm。
进一步的，所述步骤(6)形成的PERC电池成品中的背面电极为铝电极，所述铝电极的一端置于激光开槽中。
进一步的，适用于对电池的单面或双面进行加工。
综上所述，由于采用了上述技术方案，本发明的有益效果是：
本发明中，本专利设计的方法在局部背电场的工艺中额外添加一道激光工艺，就能有效提升效率以及产品的良率,进而提升企业的生产效率和质量。同时本专利设计的方法实现途径简单、快捷、有效。对实际生产有很大益处。还有通过本专利提供的方案，可以减少不良产品的产生，提升太阳能电池生产效率，还可以有效提升产品良率。
附图说明
图1为本发明形成P型掺杂区示意图。
图2为本发明双面成品电池示意图。
图3为本发明单面成品电池示意图。
图中标记：1-P型硅层、2-N型掺杂区、3-正面SiNx减反射层、4-N型重掺杂区、5-正面银电极、6-AI2O3钝化层、7-SiNx减反射层、8-P型掺杂区、9-激光开槽、10-背面铝电极。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，并不用于限定本发明。
一种PERC电池成品，包括设置在中部的P型硅层1、从下到上依次设置在P型硅层1上侧的N型掺杂区2、正面SiNx减反射层3，所述N型掺杂区2中设置有N型重掺杂区4，所述正面SiNx减反射层3中设置有正面银电极5；所述P型硅层1下侧面依次设置有AI2O3钝化层6、SiNx减反射层7，所述P型硅层1靠近AI2O3钝化层6的位置设置有P型掺杂区8，所述AI2O3钝化层6和SiNx减反射层7设置有激光开槽9，所述激光开槽9的一端靠近P型掺杂区8，所述激光开槽内部设置有背面铝电极10。
一种提升局部背电场(LBSF)工艺稳定性的方法,包括如下步骤：
(1)对PERC电池进行背面氧化铝膜及正面氮化硅膜加工，形成PERC电池的半成品；
(2)采用激光在步骤(1)中PERC电池的半成品的背面氧化铝膜进行激光开槽，所述激光开槽的具体位置为背面氧化铝膜中的AI2O3钝化层和SiNx减反射层中沿对称轴的两侧位置；
(3)使用丝网印刷的方式将硼源印刷至激光开槽区域,所述硼源以胶料的形式印刷至激光开槽区域；
(4)采用激光在步骤(3)硼源上的硼原子掺杂至PERC电池半成品中部的P型硅中，掺杂后的P型硅形成P型硅掺杂区，所述P型硅掺杂区的方块电阻为10～50ohm/sq；
(5)采用HF溶液，对步骤(4)中多余的磷源进行清洗，所述HF溶液的浓度为：5％～15％；
(6)采用丝网印刷将步骤(5)中的PERC电池的半成品进行印刷加工，形成PERC电池成品。
作为优选，所述激光为纳秒激光或皮秒激光，纳秒激光或皮秒激光的波长为532nm。
作为优选，所述步骤(6)形成的PERC电池成品中的背面电极为铝电极，所述铝电极的一端置于激光开槽中。
作为优选，适用于对电池的单面或双面进行加工；SiNx减反射层的下方设置有铝背场层，所述铝背场层采用铝材料并覆盖在SiNx减反射层的下方。
实施例1
一种PERC电池成品，包括设置在中部的P型硅层1、从下到上依次设置在P型硅层1上侧的N型掺杂区2、正面SiNx减反射层3，所述N型掺杂区2中设置有N型重掺杂区4，所述正面SiNx减反射层3中设置有正面银电极5；所述P型硅层1下侧面依次设置有AI2O3钝化层6、SiNx减反射层7，所述P型硅层1靠近AI2O3钝化层6的位置设置有P型掺杂区8，所述AI2O3钝化层6和SiNx减反射层7设置有激光开槽9，所述激光开槽9的一端靠近P型掺杂区8，所述激光开槽内部设置有背面铝电极10。
实施例2
在实施例1的基础上，一种提升局部背电场(LBSF)工艺稳定性的方法,其特征在于，包括如下步骤：
(1)对PERC电池进行背面氧化铝膜及正面氮化硅膜加工，形成PERC电池的半成品；
(2)采用激光在步骤(1)中PERC电池的半成品的背面氧化铝膜进行激光开槽，所述激光开槽的具体位置为背面氧化铝膜中的AI2O3钝化层和SiNx减反射层中沿对称轴的两侧位置；
(3)使用丝网印刷的方式将硼源印刷至激光开槽区域,所述硼源以胶料的形式印刷至激光开槽区域；
(4)采用激光在步骤(3)硼源上的硼原子掺杂至PERC电池半成品中部的P型硅中，掺杂后的P型硅形成P型硅掺杂区，所述P型硅掺杂区的方块电阻为30ohm/sq。
(5)采用HF溶液，对步骤(4)中多余的磷源进行清洗，所述HF溶液的浓度为8％。
(6)采用丝网印刷将步骤(5)中的PERC电池的半成品进行印刷加工，形成PERC电池成品。
实施例3
在实施例2的基础上，所述激光为纳秒激光或皮秒激光，纳秒激光或皮秒激光的波长为532nm。
实施例4
在实施例3的基础上，所述步骤(6)形成的PERC电池成品中的背面电极为铝电极，所述铝电极的一端置于激光开槽中。
实施例5
在上述实施例的基础上，适用于对电池的单面或双面进行加工；SiNx减反射层的下方设置有铝背场层，所述铝背场层采用铝材料并覆盖在SiNx减反射层的下方。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。
Claims (4)
1.一种提升局部背电场(LBSF)工艺稳定性的方法,其特征在于，包括如下步骤：
(1)对PERC电池进行背面氧化铝膜及正背面氮化硅膜进行镀膜加工，形成PERC电池的半成品；
(2)采用激光在步骤(1)中PERC电池的半成品的背面氧化铝及氮化硅膜膜进行激光开槽，所述激光开槽的具体位置为背面氧化铝膜中的AI2O3钝化层和SiNx减反射层中沿对称轴的两侧位置；
(3)使用丝网印刷的方式将硼源印刷至激光开槽区域,所述硼源以胶料的形式印刷至激光开槽区域；
(4)采用激光在步骤(3)硼源上的硼原子掺杂至PERC电池半成品中部的P型硅中，掺杂后的P型硅形成P型硅掺杂区，所述P型硅掺杂区的方块电阻为10～50ohm/sq；
(5)采用HF溶液，对步骤(4)中多余的磷源进行清洗，所述HF溶液的浓度为：5％～15％；
(6)采用丝网印刷将步骤(5)中的PERC电池的半成品进行印刷加工，形成PERC电池成品。
2.如权利要求1所述的一种提升局部背电场(LBSF)工艺稳定性的方法,其特征在于：所述激光为纳秒激光或皮秒激光，纳秒激光或皮秒激光的波长为532nm。
3.如权利要求1所述的一种提升局部背电场(LBSF)工艺稳定性的方法,其特征在于：所述步骤(6)形成的PERC电池成品中的背面电极为铝电极，所述铝电极的一端置于激光开槽中。
4.如权利要求1所述的一种提升局部背电场(LBSF)工艺稳定性的方法,其特征在于：适用于对电池的单面或双面进行加工。
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