CN110781590A - Gray scale map generation method and system for processing three-dimensional microstructure by FIBM - Google Patents
Gray scale map generation method and system for processing three-dimensional microstructure by FIBM Download PDFInfo
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- CN110781590A CN110781590A CN201910993627.4A CN201910993627A CN110781590A CN 110781590 A CN110781590 A CN 110781590A CN 201910993627 A CN201910993627 A CN 201910993627A CN 110781590 A CN110781590 A CN 110781590A
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Abstract
The invention discloses a gray level map generation method for processing a three-dimensional microstructure by using an FIBM, which comprises the steps of firstly generating an original gray level map by using a three-dimensional microstructure design map, establishing a contour simulation model for processing the FIBM gray level map, inputting the original gray level map into the simulation model for simulation processing, comparing a simulation processing contour with a design contour to obtain a contour error, correcting the gray level map for simulation by using the contour error to obtain a new gray level map, and then performing multiple iterative optimization by using the new gray level map as input to obtain a final gray level map for processing the FIBM. The method can obtain the high-efficiency FIBM processing gray-scale map, can finish the FIBM high-precision processing of the three-dimensional microstructure by realizing a single gray-scale map, and has extremely high application and popularization values in the field of micro-nano processing.
Description
Technical Field
The invention relates to the field of micro-nano processing, in particular to a gray scale map generation method and a gray scale map generation system for processing a three-dimensional microstructure by using an FIBM (Fibm film Material Conditioning machine).
Background
In a Focused Ion Beam Milling (FIBM) processing technology, ions emitted by a liquid metal ion source are accelerated and Focused by a lens system and then bombarded on the surface of a material, the ions bombard the surface of the sample and then transfer energy to atoms of the sample material through collision, and when the energy of the atoms of the material reaches a certain threshold value, surface particles are caused to be emitted, so that the material removal process is completed. The lens system can control the beam spot size of the ion beam so as to realize the removal of materials with different scales (from nanometer to micrometer), and the image controller controls the scanning track and the residence time of the ion beam so as to realize the quantitative ion bombardment of the appointed point of the sample scanning area and form a microstructure.
The gray scale map processing is the most common processing mode of the FIBM at present, and the milling processing of the focused ion beam is realized by defining a beam spot scanning area, a scanning track, a beam spot overlapping ratio and the residence time of each point through a gray scale map file. The processing of the FIBM gray scale map comprises the following procedures:
① gray level diagram design, in the step, the three-dimensional microstructure design diagram is converted into a two-dimensional gray level image (bitmap file) through programming software, and the design principle of the gray level diagram is that the depth value of each point of the three-dimensional microstructure outline is expressed through 256 (0-255) numerical values of 8 bits of an RGB coding blue channel (B) of each pixel point in the diagram.
② grayscale image is input into FIB system, setting ion beam working current, leading grayscale image into FIB system, defining grayscale image size and position and defining maximum dwell time and scanning mode, starting processing, then the FIB system scans the pixels of grayscale image one by one, scanning all the pixels of grayscale image one time to process, the grayscale image is processed to multiple times, i.e. scanning grayscale image multiple times, the system will automatically identify the color of grayscale image in the scanning process to determine the dwell time of a certain pixel point, in RGB coding, each pixel point contains red, green and blue color channels, the green channel of grayscale image determines whether the ion beam is on, when the value of green channel coding is greater than 0, the ion beam is on, the blue channel determines the dwell time of the pixel point, if the value of blue channel is 0, it corresponds to a minimum value (100ns), if the value of blue channel is 255, it corresponds to the maximum dwell time set by user, if the value of blue channel is 0-255, it is the linear interpolation between the minimum value and the maximum value.
The three-dimensional microstructure processed by the gray scale image designed by the traditional method has the following phenomena that the surface type precision is obviously reduced:
1. effects of redeposition phenomena: the sputtered atoms are deposited to adjacent visible sample points after a certain flight path.
2. Variation of sputtering yield with incident angle: when the slope of the sample surface changes, the sputtering yield (the number of atoms sputtered by a single ion) changes.
3. Spatial distribution of the beam spot: the spatial distribution of the beam spot density of the ion beam causes the incidence of ions to be surface incidence rather than point incidence, thus affecting the appearance of surrounding points when processing a certain point.
Disclosure of Invention
The invention aims to solve the technical problem of providing a gray scale map generation method and system for processing a three-dimensional microstructure with high precision by using FIBM (Fibm), aiming at the defect that the surface precision is obviously reduced in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the gray scale map generation method for processing the three-dimensional microstructure by the FIBM is provided, and comprises the following steps of:
s1, generating an original gray scale map by using the three-dimensional microstructure design drawing;
s2, establishing a contour simulation model of the FIBM (Fibm) gray scale map processing, and inputting the original gray scale map into the contour simulation model for simulation processing, wherein the contour simulation model is used for realizing contour simulation of different times of the FIBM gray scale map processing;
s3, comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again to perform simulation processing;
and S4, repeating the step S3 to carry out iterative optimization until the contour error meets the precision requirement, and stopping iteration to obtain a final gray scale map for FIBM processing.
In the above technical solution, the step of correcting the gray scale map for simulation by using the contour error includes:
s31, dividing the contour error ordinate by the three-dimensional microstructure design height, and converting the contour error ordinate into an integer of 0-255 to obtain a gray scale map correction value;
and S32, subtracting the gray scale map correction value by using the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
In step S4, the iteration stop condition is that the profile error is smaller than the surface shape accuracy set value.
The invention also provides a gray scale map generation system for processing the three-dimensional microstructure by the FIBM, which comprises the following steps:
the original gray level image generation module is used for generating an original gray level image by utilizing the three-dimensional microstructure design drawing;
the outline simulation module is used for establishing an outline simulation model for processing the FIBM gray level map, realizing outline simulation of different rounds of processing the FIBM gray level map and inputting the original gray level map into the outline simulation model for simulation processing;
the correction module is used for comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again for simulation processing;
and the iteration module is used for repeating the correction of the correction module, performing iterative optimization until the contour error meets the precision requirement, and stopping iteration to obtain a final gray-scale image for FIBM processing.
According to the technical scheme, the correction module is specifically used for dividing the vertical coordinate of the profile error by the design height of the three-dimensional microstructure and converting the vertical coordinate of the profile error into an integer of 0-255 to obtain a corrected value of the gray scale map; and subtracting the gray scale map correction value from the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
In the above technical solution, the iteration stop condition of the iteration module is as follows: and the profile error is smaller than the surface shape precision set value.
The present invention also provides a computer-readable storage medium in which a computer program executable by a processor is stored, the computer program executing the above-described grayscale map generating method for FIBM processing of a three-dimensional microstructure.
The invention has the following beneficial effects: the invention provides a gray scale map generation method for processing a three-dimensional microstructure by an FIBM (Fibm management information system), which comprises the steps of establishing a contour simulation model for processing the FIBM gray scale map, inputting an original gray scale map into the simulation model for simulation processing, comparing a simulation processing contour with a design contour to obtain a contour error, correcting the gray scale map for simulation by using the contour error to obtain a new gray scale map, and performing iterative optimization for multiple times to obtain a final gray scale map for processing the FIBM. The method can obtain the high-efficiency FIBM processing gray-scale map, can finish the FIBM high-precision processing of the three-dimensional microstructure by realizing a single gray-scale map, and has extremely high application and popularization values in the field of micro-nano processing.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a flowchart of grayscale map generation of the present invention;
FIG. 2 is a gray scale diagram of a concave spherical microlens according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the present invention showing the creation of an accurate simulation model of the FIBM gray scale map processing profile;
FIG. 4 is a simulated contour error of an original gray scale map of a concave spherical microlens in accordance with an embodiment of the present invention;
FIG. 5 is a new gray scale image after modification of a concave spherical microlens according to an embodiment of the present invention;
FIG. 6 shows a simulated contour error of a gray scale map after correction by a concave spherical microlens, in accordance with an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, a gray scale map generation method for FIBM process of three-dimensional microstructure is provided, which comprises the following steps:
s1, generating an original gray scale map by using the three-dimensional microstructure design drawing;
s2, establishing a contour simulation model of the FIBM (Fibm) gray scale map processing, and inputting the original gray scale map into the contour simulation model for simulation processing, wherein the contour simulation model is used for realizing contour simulation of different times of the FIBM gray scale map processing;
s3, comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again to perform simulation processing;
and S4, repeating S3 to carry out iterative optimization until the contour error meets the precision requirement (the general precision requirement is better than 0.2 micron), and stopping iteration to obtain a final gray scale map for FIBM processing.
Further, the step of correcting the gray scale map for simulation by using the contour error is as follows:
s31, dividing the contour error ordinate by the three-dimensional microstructure design height, and converting the contour error ordinate into an integer of 0-255 to obtain a gray scale map correction value;
and S32, subtracting the gray scale map correction value by using the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
Further, the iteration stop condition in step S4 is that the profile error is smaller than the surface shape accuracy set value.
In order to realize the method, the invention also provides a gray scale map generation system for processing the three-dimensional microstructure by the FIBM, which comprises the following steps:
the original gray level image generation module is used for generating an original gray level image by utilizing the three-dimensional microstructure design drawing;
the outline simulation module is used for establishing an outline simulation model for processing the FIBM gray level map, realizing outline simulation of different rounds of processing the FIBM gray level map and inputting the original gray level map into the outline simulation model for simulation processing;
the correction module is used for comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again for simulation processing;
and the iteration module is used for repeating the correction of the correction module, performing iterative optimization until the contour error meets the precision requirement, and stopping iteration to obtain a final gray-scale image for FIBM processing.
Further, the correction module is specifically used for dividing the vertical coordinate of the profile error by the design height of the three-dimensional microstructure and converting the vertical coordinate of the profile error into an integer of 0-255 to obtain a gray scale map correction value; and subtracting the gray scale map correction value from the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
Further, the iteration stop condition of the iteration module is as follows: and the profile error is smaller than the surface shape precision set value.
The present invention also protects a computer-readable storage medium in which a computer program executable by a processor is stored, the computer program executing the above-described embodiment of the gray scale map generation method for FIBM processing of a three-dimensional microstructure.
The method is described by taking the gray scale map generation of the concave spherical microlens as an example, and as shown in fig. 2, the gray scale map is the original gray scale map of the concave spherical microlens designed by the conventional method. As shown in the schematic diagram of fig. 3, a contour simulation model of FIBM gray scale map processing is established, and the original gray scale map is input to the contour simulation model for simulation processing. The contour error between the simulated contour and the design contour is shown in fig. 4, and the PV (peak-to-valley) value is used as the index of the surface shape accuracy, and in this case, the PV value is 0.37 μm and greater than 0.2 μm (stop threshold), and the gray scale map correction is required.
Dividing the vertical coordinate of the profile error by the height of the designed value of the concave spherical surface, converting the height into an integer of 0-255 to obtain a gray scale map correction value, subtracting the gray scale map correction value from the gray scale map matrix of the current simulation, and then scaling the gray scale map matrix to 0-255 (required for encoding the gray scale map) to obtain a new gray scale map, as shown in fig. 5. Inputting the new gray level map into a simulation model, obtaining a contour error curve as shown by a dotted line in fig. 6, wherein the simulated surface shape precision PV value is 0.10 μm, the simulated surface shape precision PV value is reduced by 72% compared with the initial value, the condition of a stop threshold value is reached, the iterative optimization process is stopped, and the corrected gray level map is used as a final gray level map for the FIBM processing.
The gray-scale image generation method for FIBM processing overcomes the defect that a gray-scale image designed by a traditional method has a large surface error when applied to FIBM processing, and can realize that a single gray-scale image can finish the FIBM high-precision processing of a three-dimensional microstructure. The method is suitable for generating gray level maps of different shapes, different scales and different materials in the FIBM processing, and has extremely high application and popularization values in the field of micro-nano processing.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are intended to be included within the scope of the invention as defined in the appended claims.
Claims (7)
1. A gray scale map generation method for processing a three-dimensional microstructure by using an FIBM is characterized by comprising the following steps of:
s1, generating an original gray scale map by using the three-dimensional microstructure design drawing;
s2, establishing a contour simulation model of the FIBM (Fibm) gray scale map processing, and inputting the original gray scale map into the contour simulation model for simulation processing, wherein the contour simulation model is used for realizing contour simulation of different times of the FIBM gray scale map processing;
s3, comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again to perform simulation processing;
and S4, repeating the step S3 to carry out iterative optimization until the contour error meets the precision requirement, and stopping iteration to obtain a final gray scale map for FIBM processing.
2. The method of claim 1, wherein the step of correcting the simulated gray scale map by using the contour error is as follows:
s31, dividing the contour error ordinate by the three-dimensional microstructure design height, and converting the contour error ordinate into an integer of 0-255 to obtain a gray scale map correction value;
and S32, subtracting the gray scale map correction value by using the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
3. The method according to claim 1 or 2, wherein the iteration stop condition in step S4 is: and the profile error is smaller than the surface shape precision set value.
4. A gray scale map generation system for FIBM processing of three-dimensional microstructures comprising:
the original gray level image generation module is used for generating an original gray level image by utilizing the three-dimensional microstructure design drawing;
the outline simulation module is used for establishing an outline simulation model for processing the FIBM gray level map, realizing outline simulation of different rounds of processing the FIBM gray level map and inputting the original gray level map into the outline simulation model for simulation processing;
the correction module is used for comparing the simulated contour with the designed contour to obtain a contour error, correcting the original gray-scale image by using the contour error to obtain a new gray-scale image, and inputting the new gray-scale image into the contour simulation model again for simulation processing;
and the iteration module is used for repeating the correction of the correction module, performing iterative optimization until the contour error meets the precision requirement, and stopping iteration to obtain a final gray-scale image for FIBM processing.
5. The gray scale map generation system for FIBM (Fibm manufacturing three-dimensional microstructure) of claim 4, wherein the correction module is specifically configured to divide the vertical coordinate of the profile error by the design height of the three-dimensional microstructure, and convert the vertical coordinate of the profile error into an integer of 0 to 255 to obtain a gray scale map correction value; and subtracting the gray scale map correction value from the gray scale map matrix for simulation, and scaling the result to 0-255 to obtain a new gray scale map.
6. The grayscale map generation system of claim 4 or 5, wherein the iteration stop conditions of the iteration module are: and the profile error is smaller than the surface shape precision set value.
7. A computer-readable storage medium, in which a computer program executable by a processor is stored, the computer program performing the method of generating a gray scale map for FIBM processing of a three-dimensional microstructure according to any one of claims 1 to 3.
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