CN110780370A - 多光谱滤波器 - Google Patents

多光谱滤波器 Download PDF

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Publication number
CN110780370A
CN110780370A CN201910689420.8A CN201910689420A CN110780370A CN 110780370 A CN110780370 A CN 110780370A CN 201910689420 A CN201910689420 A CN 201910689420A CN 110780370 A CN110780370 A CN 110780370A
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CN
China
Prior art keywords
layer
layers
refractive index
silicon
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910689420.8A
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English (en)
Chinese (zh)
Inventor
乔治·J·欧肯法斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Only Yahweh Communication Technology Co Ltd
Viavi Solutions Inc
Original Assignee
Only Yahweh Communication Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Only Yahweh Communication Technology Co Ltd filed Critical Only Yahweh Communication Technology Co Ltd
Publication of CN110780370A publication Critical patent/CN110780370A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Filters (AREA)
CN201910689420.8A 2018-07-30 2019-07-29 多光谱滤波器 Pending CN110780370A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/049,391 2018-07-30
US16/049,391 US11143803B2 (en) 2018-07-30 2018-07-30 Multispectral filter

Publications (1)

Publication Number Publication Date
CN110780370A true CN110780370A (zh) 2020-02-11

Family

ID=67438941

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910689420.8A Pending CN110780370A (zh) 2018-07-30 2019-07-29 多光谱滤波器

Country Status (6)

Country Link
US (1) US11143803B2 (enExample)
EP (1) EP3605166A3 (enExample)
JP (1) JP2020021052A (enExample)
KR (1) KR102453499B1 (enExample)
CN (1) CN110780370A (enExample)
TW (1) TW202008012A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11650361B2 (en) * 2018-12-27 2023-05-16 Viavi Solutions Inc. Optical filter
JP7028266B2 (ja) * 2020-02-11 2022-03-02 株式会社三洋物産 遊技機
JP2021079146A (ja) * 2021-02-22 2021-05-27 株式会社三洋物産 遊技機
JP7315071B2 (ja) * 2021-03-03 2023-07-26 株式会社三洋物産 遊技機
TWI882618B (zh) * 2022-12-30 2025-05-01 新加坡商光寶科技新加坡私人有限公司 製造多個具有法布立-培若腔結構的濾光片的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1164352A (en) * 1967-06-16 1969-09-17 Standard Telephones Cables Ltd Optical Filters.
US4740442A (en) * 1985-05-11 1988-04-26 Barr & Stroud Limited Optical coating
KR20120086196A (ko) * 2011-01-25 2012-08-02 광주과학기술원 실리콘을 이용한 ｄｂｒ 구조물 및 그 제조방법
CN107086222A (zh) * 2016-02-12 2017-08-22 唯亚威解决方案股份有限公司 滤光器阵列
CN108121026A (zh) * 2016-11-30 2018-06-05 唯亚威解决方案股份有限公司 硅锗基光学滤波器

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WO1999036811A1 (en) 1998-01-15 1999-07-22 Ciena Corporation Optical interference filter
GB9901858D0 (en) * 1999-01-29 1999-03-17 Secr Defence Optical filters
WO2000063728A1 (en) 1999-04-20 2000-10-26 Ciena Corporation Dual transmission band interference filter
CN100354699C (zh) * 2001-08-02 2007-12-12 伊吉斯半导体公司 可调谐光学仪器
US6850366B2 (en) * 2002-10-09 2005-02-01 Jds Uniphase Corporation Multi-cavity optical filter
TWI298582B (en) 2002-10-25 2008-07-01 Hon Hai Prec Ind Co Ltd Thin film filter for dense wavelength division multiplexing
CN1306288C (zh) 2005-04-27 2007-03-21 中国科学院上海技术物理研究所 具有平整谐振腔层的滤光片列阵
US7521658B2 (en) * 2005-12-01 2009-04-21 Aptina Imaging Corporation Pixel having photoconductive layers to absorb different ranges of wavelengths
EP2409135A4 (en) * 2009-03-20 2012-11-28 Nanolambda Inc MATRIX SENSOR WITH NANO-OPTIC FILTER
EP2776797B1 (en) * 2011-11-04 2018-12-05 IMEC vzw Spectral camera with overlapping segments of image copies interleaved onto sensor array
JP6272627B2 (ja) * 2013-01-29 2018-01-31 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 可変光学フィルターおよびそれに基づく波長選択型センサー
EP4006542B1 (en) * 2013-08-02 2025-10-01 Verifood Ltd. Spectrometer comprising sample illuminator
CN106233168B (zh) * 2014-04-10 2019-09-17 瑞士Csem电子显微技术研发中心 红外透射盖板
KR102700673B1 (ko) * 2015-02-18 2024-08-30 마테리온 코포레이션 개선된 투과를 갖는 근적외선 광학 간섭 필터
US9960199B2 (en) * 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
JP2017168822A (ja) 2016-02-12 2017-09-21 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． センサデバイスの製造方法
JP6410203B1 (ja) * 2017-02-21 2018-10-24 株式会社ナノルクス 固体撮像素子及び撮像装置
US10782460B2 (en) * 2017-05-22 2020-09-22 Viavi Solutions Inc. Multispectral filter
US10677972B2 (en) 2017-12-08 2020-06-09 Viavi Solutions Inc. Multispectral sensor response balancing
FR3082322B1 (fr) * 2018-06-08 2020-07-31 Commissariat A L Energie Atomique Et Aux Energies Alternatives Capteurs d'images comprenant une matrice de filtres interferentiels

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1164352A (en) * 1967-06-16 1969-09-17 Standard Telephones Cables Ltd Optical Filters.
US4740442A (en) * 1985-05-11 1988-04-26 Barr & Stroud Limited Optical coating
KR20120086196A (ko) * 2011-01-25 2012-08-02 광주과학기술원 실리콘을 이용한 ｄｂｒ 구조물 및 그 제조방법
CN107086222A (zh) * 2016-02-12 2017-08-22 唯亚威解决方案股份有限公司 滤光器阵列
CN108121026A (zh) * 2016-11-30 2018-06-05 唯亚威解决方案股份有限公司 硅锗基光学滤波器

Also Published As

Publication number Publication date
KR20200013617A (ko) 2020-02-07
US20200033520A1 (en) 2020-01-30
EP3605166A3 (en) 2020-04-15
US11143803B2 (en) 2021-10-12
KR102453499B1 (ko) 2022-10-11
TW202008012A (zh) 2020-02-16
JP2020021052A (ja) 2020-02-06
EP3605166A2 (en) 2020-02-05

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Application publication date: 20200211