CN110780370A - 多光谱滤波器 - Google Patents
多光谱滤波器 Download PDFInfo
- Publication number
- CN110780370A CN110780370A CN201910689420.8A CN201910689420A CN110780370A CN 110780370 A CN110780370 A CN 110780370A CN 201910689420 A CN201910689420 A CN 201910689420A CN 110780370 A CN110780370 A CN 110780370A
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- Prior art keywords
- layer
- layers
- refractive index
- silicon
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 67
- 230000003595 spectral effect Effects 0.000 claims abstract description 65
- 125000006850 spacer group Chemical group 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 18
- 235000012239 silicon dioxide Nutrition 0.000 claims description 13
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical compound [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 claims description 12
- 229910052986 germanium hydride Inorganic materials 0.000 claims description 12
- 239000000377 silicon dioxide Substances 0.000 claims description 12
- 229910052732 germanium Inorganic materials 0.000 claims description 10
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 10
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 10
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 10
- 239000004408 titanium dioxide Substances 0.000 claims description 10
- 238000002834 transmittance Methods 0.000 claims description 10
- 150000003376 silicon Chemical class 0.000 claims description 9
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
- JIMODRYHNQDMSX-UHFFFAOYSA-N [GeH2].[Si] Chemical compound [GeH2].[Si] JIMODRYHNQDMSX-UHFFFAOYSA-N 0.000 claims description 5
- 239000010955 niobium Substances 0.000 claims description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 5
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- 229910052990 silicon hydride Inorganic materials 0.000 claims description 5
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 230000036541 health Effects 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 164
- 230000005540 biological transmission Effects 0.000 description 22
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 150000002290 germanium Chemical class 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- GEIAQOFPUVMAGM-UHFFFAOYSA-N Oxozirconium Chemical compound [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002207 retinal effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/049,391 | 2018-07-30 | ||
| US16/049,391 US11143803B2 (en) | 2018-07-30 | 2018-07-30 | Multispectral filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110780370A true CN110780370A (zh) | 2020-02-11 |
Family
ID=67438941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910689420.8A Pending CN110780370A (zh) | 2018-07-30 | 2019-07-29 | 多光谱滤波器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11143803B2 (enExample) |
| EP (1) | EP3605166A3 (enExample) |
| JP (1) | JP2020021052A (enExample) |
| KR (1) | KR102453499B1 (enExample) |
| CN (1) | CN110780370A (enExample) |
| TW (1) | TW202008012A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11650361B2 (en) * | 2018-12-27 | 2023-05-16 | Viavi Solutions Inc. | Optical filter |
| JP7028266B2 (ja) * | 2020-02-11 | 2022-03-02 | 株式会社三洋物産 | 遊技機 |
| JP2021079146A (ja) * | 2021-02-22 | 2021-05-27 | 株式会社三洋物産 | 遊技機 |
| JP7315071B2 (ja) * | 2021-03-03 | 2023-07-26 | 株式会社三洋物産 | 遊技機 |
| TWI897790B (zh) * | 2022-12-30 | 2025-09-11 | 新加坡商光寶科技新加坡私人有限公司 | 多光譜透射濾光片陣列 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1164352A (en) * | 1967-06-16 | 1969-09-17 | Standard Telephones Cables Ltd | Optical Filters. |
| US4740442A (en) * | 1985-05-11 | 1988-04-26 | Barr & Stroud Limited | Optical coating |
| KR20120086196A (ko) * | 2011-01-25 | 2012-08-02 | 광주과학기술원 | 실리콘을 이용한 ｄｂｒ 구조물 및 그 제조방법 |
| CN107086222A (zh) * | 2016-02-12 | 2017-08-22 | 唯亚威解决方案股份有限公司 | 滤光器阵列 |
| CN108121026A (zh) * | 2016-11-30 | 2018-06-05 | 唯亚威解决方案股份有限公司 | 硅锗基光学滤波器 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6301042B1 (en) | 1998-01-15 | 2001-10-09 | Ciena Corporation | Fabry-perot optical filter with chirped dielectric mirrors |
| GB9901858D0 (en) * | 1999-01-29 | 1999-03-17 | Secr Defence | Optical filters |
| WO2000063728A1 (en) | 1999-04-20 | 2000-10-26 | Ciena Corporation | Dual transmission band interference filter |
| EP1415191A1 (en) * | 2001-08-02 | 2004-05-06 | Aegis Semiconductor | Tunable optical instruments |
| US6850366B2 (en) * | 2002-10-09 | 2005-02-01 | Jds Uniphase Corporation | Multi-cavity optical filter |
| TWI298582B (en) | 2002-10-25 | 2008-07-01 | Hon Hai Prec Ind Co Ltd | Thin film filter for dense wavelength division multiplexing |
| CN1306288C (zh) | 2005-04-27 | 2007-03-21 | 中国科学院上海技术物理研究所 | 具有平整谐振腔层的滤光片列阵 |
| US7521658B2 (en) * | 2005-12-01 | 2009-04-21 | Aptina Imaging Corporation | Pixel having photoconductive layers to absorb different ranges of wavelengths |
| WO2010108086A2 (en) * | 2009-03-20 | 2010-09-23 | Nanolambda, Inc. | Nano-optic filter array based sensor |
| IN2014CN02966A (enExample) * | 2011-11-04 | 2015-07-03 | Imec | |
| CN108572409B (zh) * | 2013-01-29 | 2022-03-01 | 唯亚威通讯技术有限公司 | 可变滤光器及基于此的波长选择传感器 |
| GB2543655B (en) * | 2013-08-02 | 2017-11-01 | Verifood Ltd | Compact spectrometer comprising a diffuser, filter matrix, lens array and multiple sensor detector |
| CN106233168B (zh) * | 2014-04-10 | 2019-09-17 | 瑞士Csem电子显微技术研发中心 | 红外透射盖板 |
| EP3839585B1 (en) * | 2015-02-18 | 2022-11-09 | Materion Corporation | Near infrared optical interference filters with improved transmission |
| US9960199B2 (en) * | 2015-12-29 | 2018-05-01 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
| JP2017168822A (ja) | 2016-02-12 | 2017-09-21 | ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． | センサデバイスの製造方法 |
| JP6410203B1 (ja) * | 2017-02-21 | 2018-10-24 | 株式会社ナノルクス | 固体撮像素子及び撮像装置 |
| US10782460B2 (en) * | 2017-05-22 | 2020-09-22 | Viavi Solutions Inc. | Multispectral filter |
| US10677972B2 (en) | 2017-12-08 | 2020-06-09 | Viavi Solutions Inc. | Multispectral sensor response balancing |
| FR3082322B1 (fr) * | 2018-06-08 | 2020-07-31 | Commissariat A L Energie Atomique Et Aux Energies Alternatives | Capteurs d'images comprenant une matrice de filtres interferentiels |
-
2018
- 2018-07-30 US US16/049,391 patent/US11143803B2/en active Active
-
2019
- 2019-07-04 TW TW108123597A patent/TW202008012A/zh unknown
- 2019-07-09 JP JP2019127828A patent/JP2020021052A/ja active Pending
- 2019-07-25 EP EP19188434.5A patent/EP3605166A3/en active Pending
- 2019-07-29 KR KR1020190092060A patent/KR102453499B1/ko active Active
- 2019-07-29 CN CN201910689420.8A patent/CN110780370A/zh active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1164352A (en) * | 1967-06-16 | 1969-09-17 | Standard Telephones Cables Ltd | Optical Filters. |
| US4740442A (en) * | 1985-05-11 | 1988-04-26 | Barr & Stroud Limited | Optical coating |
| KR20120086196A (ko) * | 2011-01-25 | 2012-08-02 | 광주과학기술원 | 실리콘을 이용한 ｄｂｒ 구조물 및 그 제조방법 |
| CN107086222A (zh) * | 2016-02-12 | 2017-08-22 | 唯亚威解决方案股份有限公司 | 滤光器阵列 |
| CN108121026A (zh) * | 2016-11-30 | 2018-06-05 | 唯亚威解决方案股份有限公司 | 硅锗基光学滤波器 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3605166A3 (en) | 2020-04-15 |
| US11143803B2 (en) | 2021-10-12 |
| US20200033520A1 (en) | 2020-01-30 |
| KR20200013617A (ko) | 2020-02-07 |
| TW202008012A (zh) | 2020-02-16 |
| JP2020021052A (ja) | 2020-02-06 |
| EP3605166A2 (en) | 2020-02-05 |
| KR102453499B1 (ko) | 2022-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 40014429 Country of ref document: HK |
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| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: Arizona Applicant after: VIAVI SOLUTIONS Inc. Address before: California, USA Applicant before: VIAVI SOLUTIONS Inc. |
|
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200211 |