CN110779320A - Novel air-dry system and OLED substrate stripping equipment with same - Google Patents
Novel air-dry system and OLED substrate stripping equipment with same Download PDFInfo
- Publication number
- CN110779320A CN110779320A CN201910874683.6A CN201910874683A CN110779320A CN 110779320 A CN110779320 A CN 110779320A CN 201910874683 A CN201910874683 A CN 201910874683A CN 110779320 A CN110779320 A CN 110779320A
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- box body
- air knife
- supporting
- air
- shaped
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention relates to a novel air drying system which comprises a box body, wherein a feeding hole and a discharging hole are oppositely formed in two opposite side plates of the box body, a plurality of conveying rollers are continuously arranged in the box body in parallel with the feeding hole and the discharging hole, an air knife for drying is arranged above the conveying rollers in the box body, the air knife is vertically arranged and arranged along the diagonal direction of the box body, the air knife divides the box body into a dry area and a wet area, the dry area is positioned at one side close to the discharging hole, and the wet area is positioned at one side close to the feeding hole. The invention can push the liquid on the surface of the flat plate along the oblique direction while air-drying, and has simple structure and good air-drying effect.
Description
Technical Field
The invention relates to the technical field of OLED (organic light emitting diode) substrate stripping equipment, in particular to a novel air drying system and OLED substrate stripping equipment with the same.
Background
In dull and stereotyped production line production, need carry out the liquid medicine to the flat board and soak, etching, washing and so on step, need weather the surface after wasing it, processing such as stoving, when air-drying, can effectively air-dry in order to ensure dull and stereotyped surface, adopt various structures to guarantee the effect of weathering, for example, set up multistage air knife, but this design can increase equipment volume, and enlarge manufacturing cost, again through optimizing the air knife amount of wind, improve the effect of blowing and improve the air-dry effect, this structural adjustment is simple, easily realize, but cause local liquid to pile up easily, thereby the influence is air-dried.
Disclosure of Invention
The invention aims to provide a novel air drying system and OLED substrate stripping equipment with the same.
In order to achieve the purpose, the invention adopts the technical scheme that:
the invention provides a novel air drying system which comprises a box body, wherein a feeding hole and a discharging hole are oppositely formed in two opposite side plates of the box body, a plurality of conveying rollers are continuously arranged in the box body in parallel with the feeding hole and the discharging hole, an air knife for drying is arranged above the conveying rollers in the box body, the air knife is vertically arranged and arranged along the diagonal direction of the box body, the air knife divides the box body into a dry area and a wet area, the dry area is positioned on one side close to the discharging hole, and the wet area is positioned on one side close to the feeding hole.
For the above technical solution, the applicant has further optimization measures.
Furthermore, a separation plate is arranged above the air knife, the arrangement direction of the separation plate is the same as that of the air knife and is positioned in the same vertical plane, the top of the separation plate is in contact with the top plate of the box body, and the top of the separation plate is in contact with the air knife.
Furthermore, a positioning block is arranged between the partition plate and the air knife, a positioning column is fixed below the partition plate, a waist-shaped hole is formed in the top of the positioning block, the positioning column is inserted in the waist-shaped hole, a U-shaped clamping groove with a downward opening is formed in the lower portion of the positioning column, two ends of the air knife are fixed to two opposite side plates of the box body, a fixing edge is arranged at the top of the air knife, and the fixing edge is clamped in the U-shaped clamping groove.
Furthermore, the lower part of the positioning block is provided with two parallel U-shaped clamping grooves, correspondingly, the top of the air knife is provided with two fixing edges arranged along the length direction of the air knife, the two fixing edges are oppositely provided with two positioning grooves, the U-shaped clamping grooves are clamped on the fixing edges at the positions of the positioning grooves, and the positioning grooves are used for limiting the positioning block.
Further, be located in the box body both sides are provided with two sets of supporting wheels respectively around the air knife, and every supporting wheel of group includes a plurality of free supporting wheel, a plurality of supporting wheel is fixed in the box body bottom just arranges on a straight line, the straight line of arranging wholly that a plurality of supporting wheel constitutes is on a parallel with the air knife sets up the direction.
Furthermore, every supporting wheel including fix in the pole setting of box body bottom, the bracing piece of fixed connection pole setting and rotate set up in the rotation wheel at bracing piece top seted up spacing spout in the pole setting, the lower part of bracing piece is inserted and is established in the spacing spout, and waist shape fixed orifices has been seted up to the lower part of bracing piece, and the bolt passes waist shape fixed orifices lock is dead bracing piece and pole setting.
Furthermore, be provided with at least one supporting wheel that is used for assisting the dull and stereotyped usefulness of bearing in the box body, the supporting wheel including fix in the pole setting of box body bottom, the bracing piece of fixed connection pole setting and rotate set up in the rotation wheel at bracing piece top spacing spout has been seted up in the pole setting, the lower part of bracing piece is inserted and is established in the spacing spout, and is in the kidney-shaped fixed orifices has been seted up to the lower part of bracing piece, and the bolt passes the lock of kidney-shaped fixed orifices is died bracing piece and pole setting.
Particularly, the invention also provides OLED substrate stripping equipment which comprises air drying equipment for drying the cleaned flat plate, wherein the air drying equipment adopts the novel air drying system.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
the box-shaped air drying system and the OLED substrate stripping equipment with the same are characterized in that the air drying system adopts a box body structure, the air knives are arranged along the oblique direction of the box body, and in the process of advancing the flat plate, the air knives can blow and push the liquid on the surface of the flat plate along the oblique direction to remove the liquid on the surface of the flat plate, so that the air drying effect is better than that of the traditional structure.
Furthermore, the air knife is fixed by the positioning block and the partition plate, has certain mobility, can finely adjust the blowing direction of the air knife, and improves the air drying effect.
Furthermore, the supporting wheels arranged in the box body can assist in supporting the flat plate, so that the problem that the arrangement of the rolling wheels is inconvenient due to the fact that the air knives are obliquely arranged is solved, and the flat plate is prevented from being damaged due to uneven stress in the air drying process.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 is a schematic diagram of the overall construction of a novel seasoning system in accordance with one embodiment of the present invention;
FIG. 2 is a schematic diagram of the internal structure of the novel seasoning system shown in FIG. 1, in which the top plate and the side plate on the side of the material inlet are removed;
FIG. 3 is an enlarged, fragmentary view of the air drying system of FIG. 2 at location A;
fig. 4 is a schematic enlarged view of a portion of the novel seasoning system shown in fig. 2 at point B.
Wherein the reference numerals are as follows:
1. the device comprises a box body, 11, a feeding hole, 12, a discharging hole, 13, an FFU positive pressure device, 14, a maintenance cover plate, 15 and an air draft system;
2. a conveying roller;
3. air knife 31, fixed edge;
4. a partition plate 41 and a positioning column;
5. a positioning block 51, a waist-shaped hole 52 and a U-shaped clamping groove;
6. supporting wheels 61, vertical rods 62, supporting rods 63, rotating wheels 64 and kidney-shaped fixing holes.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance, such as the first, second and third heating tubes, in order to be able to describe the product structure more clearly, without limiting its importance.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
This embodiment has described a novel air-dry system, as shown in fig. 1, fig. 2, including box body 1, feed inlet 11 and discharge gate 12 have been seted up relatively on the relative both sides board of box body 1, are provided with FFU malleation device 13 on the roof of box body 1 for adjust the atmospheric pressure in the box body 1, still be provided with a plurality of maintenance windows on the roof simultaneously, cover respectively on the maintenance window and be equipped with maintenance apron 14, be provided with a plurality of suction openings that link to each other with exhaust system 15 on the bottom plate of box body 1, be used for convulsions to arrange useless.
Be on a parallel with in box body 1 feed inlet 11 is provided with a plurality of conveying roller 2 with discharge gate 12 in succession lie in box body 1 the top of conveying roller 2 is provided with weathers the air knife 3 of usefulness, wherein, the vertical setting of air knife 3, and along the diagonal direction setting of box body 1, air knife 3 will divide into in the box body 1 and do two wet regions, do the district and be located and be close to discharge gate 12 one side, wet district then is located and is close to feed inlet 11 one side
In order to more completely separate the area in the box body 1, a separation plate 4 is arranged above the air knife 3, the arrangement direction of the separation plate 4 is the same as that of the air knife 3 and is positioned in the same vertical plane, the top of the separation plate 4 is in contact with the top plate of the box body 1, and the top of the separation plate is in contact with the air knife 3.
As shown in fig. 3, a positioning block 5 is disposed between the partition plate 4 and the air knife 3, a positioning column 41 is fixed below the partition plate 4, a waist-shaped hole 51 is formed at the top of the positioning block 5, the positioning column 41 is inserted into the waist-shaped hole 51, a U-shaped slot 52 with a downward opening is formed at the lower part of the positioning column 41, two ends of the air knife 3 are fixed on two opposite side plates of the box body 1, a fixing edge 31 is disposed at the top of the air knife 3, and the fixing edge 31 is clamped in the U-shaped slot 52.
The lower part of the positioning block 5 is provided with two parallel U-shaped clamping grooves 52, correspondingly, the top of the air knife 3 is provided with two fixing edges 31 arranged along the length direction, the two fixing edges 31 are oppositely provided with two positioning grooves, the U-shaped clamping grooves 52 are clamped on the fixing edges 31 at the positions of the positioning grooves, and the positioning grooves are used for limiting the positioning block 5.
The design of locating piece 5 for have better regulation nature between the fixed limit 31 of division board 4 and air knife 3, the air-out direction of air knife 3 can swing the regulation, thereby can adjust according to the production demand.
In order to be capable of carrying out auxiliary support on a flat plate before entering the air knife 3, two groups of supporting wheels 6 are arranged on the front side and the rear side of the air knife 3 respectively in the box body 1, each group of supporting wheels 6 comprises a plurality of free supporting wheels 6, the supporting wheels 6 are fixed at the bottom of the box body 1 and are arranged on a straight line, and the whole arranged straight line formed by the supporting wheels 6 is parallel to the arrangement direction of the air knife 3.
As shown in fig. 4, each supporting wheel 6 includes a vertical rod 61 fixed at the bottom of the box body 1, a supporting rod 62 fixedly connected with the vertical rod 61, and a rotating wheel 63 rotatably arranged at the top of the supporting rod 62, a limiting sliding groove is formed in the vertical rod 61, the lower part of the supporting rod 62 is inserted into the limiting sliding groove, a waist-shaped fixing hole 64 is formed in the lower part of the supporting rod 62, and a bolt penetrates through the waist-shaped fixing hole 64 to lock the supporting rod 62 and the vertical rod 61. The design is to be able to adapt to the setting height of the air knife 3, the thickness of different flat plates, and the like, and to support the flat plates and prevent the flat plates from being damaged.
Furthermore, a plurality of supporting wheels 6 for assisting the supporting of the flat plate can be arranged in the box body 1, and the supporting wheels 6 can be arranged at any place where the auxiliary supporting is needed, so that the box body 1 can play a better supporting effect for the flat plate everywhere.
In particular, in another embodiment, the OLED substrate stripping device comprises an air drying device for drying the cleaned flat plate, wherein the air drying device adopts the novel air drying system.
In summary, the box-shaped air drying system of the invention adopts the structure of the box body 1, the air knife 3 is arranged along the oblique direction of the box body 1, and in the process of advancing the flat plate, the air knife 3 can blow and push the liquid on the surface of the flat plate along the oblique direction to remove the liquid on the surface of the flat plate, so that the air drying effect is better than that of the traditional structure.
Further, the air knife 3 is fixed with the partition plate 4 through the positioning block 5, has certain mobility, can perform fine adjustment on the air blowing direction of the air knife 3, and improves the air drying effect.
Furthermore, a plurality of supporting wheels 6 arranged in the box body 1 can assist in supporting the flat plate, so that the problem that the arrangement of the rollers is inconvenient due to the fact that the air knives 3 are obliquely arranged is solved, and the flat plate is prevented from being damaged due to uneven stress in the air drying process.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the invention, and not to limit the scope of the invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.
Claims (8)
1. The utility model provides a novel air-dry system, comprises a box bod, feed inlet and discharge gate have been seted up on the relative both sides board of box body relatively, be on a parallel with in the box body feed inlet and discharge gate are provided with a plurality of delivery roller in succession the box body is located delivery roller's top is provided with the air knife of weathering the usefulness, wherein, the vertical setting of air knife, and along the diagonal direction setting of box body, the air knife will separate into in the box body and do wet two regions, do the district and be located and be close to discharge gate one side, wet district then is located and is close to feed inlet one side.
2. The novel air drying system according to claim 1, wherein a separation plate is arranged above the air knife, the separation plate is arranged in the same direction as the air knife and in the same vertical plane, the top of the separation plate is in contact with the top plate of the box body, and the top of the separation plate is in contact with the air knife.
3. The novel air drying system as claimed in claim 2, wherein a positioning block is disposed between the separation plate and the air knife, a positioning column is fixed below the separation plate, a waist-shaped hole is formed at the top of the positioning block, the positioning column is inserted into the waist-shaped hole, a U-shaped slot with a downward opening is formed at the lower part of the positioning column, two ends of the air knife are fixed on two opposite side plates of the box body, a fixing edge is disposed at the top of the air knife, and the fixing edge is clamped in the U-shaped slot.
4. A novel air drying system as claimed in claim 3, wherein the lower part of the positioning block is provided with two parallel U-shaped slots, correspondingly, the top of the air knife is provided with two fixing edges along the length direction thereof, two positioning slots are oppositely formed on the two fixing edges, the U-shaped slots are clamped on the fixing edges at the positions of the positioning slots, and the positioning slots are used for limiting the positioning block.
5. A novel air drying system as claimed in claim 1, wherein two sets of supporting wheels are respectively arranged in the box body at the front side and the rear side of the air knife, each set of supporting wheels comprises a plurality of free supporting wheels, the supporting wheels are fixed at the bottom of the box body and are arranged on a straight line, and the straight line formed by the supporting wheels and integrally arranged is parallel to the arrangement direction of the air knife.
6. The novel air drying system as claimed in claim 5, wherein each supporting wheel comprises a vertical rod fixed at the bottom of the box body, a supporting rod fixedly connected with the vertical rod, and a rotating wheel rotatably arranged at the top of the supporting rod, a limit sliding groove is formed in the vertical rod, the lower part of the supporting rod is inserted into the limit sliding groove, a waist-shaped fixing hole is formed in the lower part of the supporting rod, and a bolt passes through the waist-shaped fixing hole to lock the supporting rod and the vertical rod.
7. A novel air drying system as claimed in claim 6, wherein at least one supporting wheel for assisting in supporting the flat plate is arranged in the box body, the supporting wheel comprises a vertical rod fixed at the bottom of the box body, a supporting rod fixedly connected with the vertical rod and a rotating wheel rotatably arranged at the top of the supporting rod, a limiting sliding groove is formed in the vertical rod, the lower part of the supporting rod is inserted in the limiting sliding groove, a waist-shaped fixing hole is formed in the lower part of the supporting rod, and a bolt passes through the waist-shaped fixing hole to lock the supporting rod and the vertical rod.
8. An OLED substrate stripping device, comprising an air drying device for drying a cleaned flat plate, wherein the air drying device adopts a novel air drying system as claimed in any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910874683.6A CN110779320A (en) | 2019-09-17 | 2019-09-17 | Novel air-dry system and OLED substrate stripping equipment with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910874683.6A CN110779320A (en) | 2019-09-17 | 2019-09-17 | Novel air-dry system and OLED substrate stripping equipment with same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110779320A true CN110779320A (en) | 2020-02-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910874683.6A Pending CN110779320A (en) | 2019-09-17 | 2019-09-17 | Novel air-dry system and OLED substrate stripping equipment with same |
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| Country | Link |
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| CN (1) | CN110779320A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030005146A (en) * | 2001-07-05 | 2003-01-17 | (주)케이.씨.텍 | Drying Apparatus |
| WO2003050600A1 (en) * | 2001-12-13 | 2003-06-19 | Sumitomo Precision Products Co., Ltd | System for treating substrate and substrate dryer |
| CN1840997A (en) * | 2005-03-30 | 2006-10-04 | 大日本网目版制造株式会社 | Substrate treatment device |
| CN201014910Y (en) * | 2007-03-07 | 2008-01-30 | 亚智科技股份有限公司 | Air knife adjustment mechanism |
| KR20100077359A (en) * | 2008-12-29 | 2010-07-08 | 주식회사 케이씨텍 | Dryer for large area substrate |
| CN101871721A (en) * | 2009-04-21 | 2010-10-27 | 芝浦机械电子株式会社 | The treating apparatus of substrate |
| CN204010222U (en) * | 2014-01-07 | 2014-12-10 | 芜湖东旭光电科技有限公司 | Liquid crystal glass base cleaning machine air knife unit idle pulley warning device |
-
2019
- 2019-09-17 CN CN201910874683.6A patent/CN110779320A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030005146A (en) * | 2001-07-05 | 2003-01-17 | (주)케이.씨.텍 | Drying Apparatus |
| WO2003050600A1 (en) * | 2001-12-13 | 2003-06-19 | Sumitomo Precision Products Co., Ltd | System for treating substrate and substrate dryer |
| CN1840997A (en) * | 2005-03-30 | 2006-10-04 | 大日本网目版制造株式会社 | Substrate treatment device |
| CN201014910Y (en) * | 2007-03-07 | 2008-01-30 | 亚智科技股份有限公司 | Air knife adjustment mechanism |
| KR20100077359A (en) * | 2008-12-29 | 2010-07-08 | 주식회사 케이씨텍 | Dryer for large area substrate |
| CN101871721A (en) * | 2009-04-21 | 2010-10-27 | 芝浦机械电子株式会社 | The treating apparatus of substrate |
| CN204010222U (en) * | 2014-01-07 | 2014-12-10 | 芜湖东旭光电科技有限公司 | Liquid crystal glass base cleaning machine air knife unit idle pulley warning device |
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Application publication date: 20200211 |