CN110767597A - Micro-operation device and method based on capillary force - Google Patents
Micro-operation device and method based on capillary force Download PDFInfo
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- CN110767597A CN110767597A CN201911206478.9A CN201911206478A CN110767597A CN 110767597 A CN110767597 A CN 110767597A CN 201911206478 A CN201911206478 A CN 201911206478A CN 110767597 A CN110767597 A CN 110767597A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68363—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
Abstract
The invention discloses a micro-operation device and a method based on capillary force, belonging to the technical field of micro-operation. The micro propulsion pump, the industrial camera and the three-dimensional electric displacement platform can be integrally controlled through a computer, and the automatic control of the micro device operation process can be realized. The micro-operation device based on the capillary force has the advantages of simple structure, realization of automatic control, convenient operation and easy realization of industrial production.
Description
Technical Field
The invention belongs to the technical field of micro-operation equipment, and particularly relates to a micro-operation device and method based on capillary force.
Background
With the emergence of intelligent devices and wearable devices, the development of electronic products towards microminiaturization, multi-functionalization and flexibility is further promoted, and people also put forward higher and higher requirements on the quality of the electronic products. However, the operation of micro devices becomes very challenging due to the presence of scale effects. The current common micro-manipulation techniques are mainly divided into contact and non-contact: contact micro-manipulation methods are based on piezoelectricity, vacuum, etc. The non-contact micro-manipulation method is based on field forces, such as electric fields, magnetic fields, light, sound waves.
However, in the prior art, the contact-type micro-manipulation method is easy to damage the micro device, while the non-contact-type micro-manipulation device based on the field force is easy to be interfered by external factors, and usually has special requirements on the device material, such as based on the field force, the micro device itself is required to have magnetism or be magnetized; electrostatic damage may occur based on electrostatic force; based on optical tweezers, optical damage may occur.
Disclosure of Invention
In order to overcome the disadvantages of the prior art, the present invention provides a micro-manipulation device and method based on capillary force, which uses conventional materials and components to achieve high-efficiency and high-precision picking up, transferring and releasing of micro-devices in a non-contact manner.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
the invention discloses a micro-operation device based on capillary force, which comprises a vibration reduction table, a liquid drop generating mechanism, a mobile operation mechanism, an oblique view mechanism, a controller and a computer, wherein the vibration reduction table is arranged on the top of the liquid drop generating mechanism;
the liquid drop generating mechanism comprises a micro propulsion pump and an injection needle head, wherein a first injector and a second injector are arranged on the micro propulsion pump, and when the micro propulsion pump is used, the first injector and the second injector can be connected with the injection needle head;
the mobile operation mechanism comprises an electric mobile platform and a manual mobile platform, the electric mobile platform is an XYZ three-dimensional electric displacement platform, the manual mobile platform comprises an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform, and the three mobile platforms are all fixed on the vibration reduction table through respective Y-axis mobile stations;
the injection needle head is detachably fixed on an XYZ three-dimensional electric displacement platform, and an objective table is detachably fixed on the XY two-dimensional manual moving platform;
the XYZ three-dimensional manual moving platform is provided with a first microscope lens, and a first industrial camera is detachably connected to the first microscope lens;
the oblique view mechanism comprises a second micro lens, a second industrial camera detachably connected with the second micro lens, and an adjusting mechanism for adjusting the positions and angles of the second micro lens and the second industrial camera;
the controller is electrically connected with the computer, and the computer can integrally control the operations of the XYZ three-dimensional electric displacement platform, the micro-propulsion pump, the first industrial camera and the second industrial camera.
Preferably, the first microscope lens is detachably fixed on the XYZ three-dimensional manual movement platform by a first lens holder.
Preferably, the adjusting mechanism comprises a connecting block arranged on the vibration reduction table, a supporting rod is arranged on the connecting block, and the second microscope lens is connected to the supporting rod through a second lens holder.
Preferably, the number of the injection needles is several, and the first syringe and the second syringe can be connected with the number of the injection needles in a sealing way through plastic hoses with different diameters.
Preferably, the injection needle is fixed on the XYZ motor displacement platform by a needle holder.
Preferably, the micro-propulsion pump is further provided with a manual operation panel, and the delivery amount and speed of the liquid can be controlled by manual input.
Preferably, the controller is a four-channel servo controller, and three motors of the XYZ three-dimensional electric displacement platform are respectively connected to three channels of the four-channel servo controller; the micro-propelling pump, the first industrial camera and the second industrial camera are all connected with the computer by adopting self-contained cables.
The invention also discloses a micro-device operating method which is carried out by adopting the micro-device operating device based on the capillary force, and the method comprises the following steps:
s1: placing the prepared sample on an objective table, controlling a three-position electric displacement platform through a controller to enable an injection needle to be positioned right above a position where a micro device is to be released, conveying liquid to the injection needle through a first injector by using a micro propulsion pump, injecting a liquid drop at the position where the micro device is to be released, controlling the injection needle to move to enable the injection needle to be positioned right above the micro device to be picked up, conveying the liquid to the injection needle through the first injector by using the micro propulsion pump, and forming the liquid drop;
s2: controlling the injection needle to move downwards so that the liquid drops are contacted with the micro device to form a liquid bridge, and controlling the injection needle to lift upwards to complete the picking up of the micro device;
s3: controlling the injection needle to move, and driving the micro device to be right above the position to be released of the micro device to complete the transfer of the micro device;
s4: controlling the injection needle to move downwards to enable the micro device to be in contact with liquid drops on the release substrate and form a liquid bridge, and controlling the injection needle to move upwards;
s5: and repeating the steps according to the requirement to complete the picking, transferring and releasing of the plurality of micro devices.
Preferably, the droplet morphology is self-adjusting as the shape of the microdevice changes, allowing for multiple shapes of microdevices (plate, sphere, and irregular).
Preferably, the picking, transferring and releasing operations of the micro device can be performed in one stage or widely between a plurality of stages according to actual requirements.
Compared with the prior art, the invention has the following beneficial effects:
the invention discloses a micro-device operating device based on capillary force, wherein a liquid drop generating mechanism, a moving operating mechanism and a top view mechanism are all arranged on a vibration reduction table, and the influence of external vibration on the operation of a micro-device can be reduced by operating on the vibration reduction table, so that the micro-device can be picked up, transferred and released efficiently and accurately under the action of capillary force. The operating device can realize large-scale operation on the micro device by arranging a plurality of object stages, wherein the three-dimensional electric displacement platform is used for controlling the rapid and high-precision three-dimensional movement of the injection needle head so as to realize the rapid and high-precision transfer of the micro device, and the three-dimensional manual displacement platform and the oblique view mechanism are mainly used for adjusting the position or the angle of the camera so that the workbench is in the focal distance range of the industrial camera; the device can monitor the whole operation process of the microdevice in real time and record the operation result by installing an industrial camera and a microscope lens. In addition, an industrial camera, a micro propulsion pump and a three-dimensional electric displacement platform can be integrally controlled through a computer, and automatic control of the micro device operation process can be realized. The device simple structure, convenient operation, and can carry out automated control, easily realize industrial production.
Further, the simultaneous operation of a plurality of micro-devices can be realized by increasing the number of injection needles, thereby significantly improving the micro-device operation efficiency.
The method for operating the micro device by using the device disclosed by the invention takes pure water as an operation medium, fully utilizes the leading advantages of capillary force under a micro scale, and realizes flexible pick-up/release, large-range, high-efficiency and high-precision transfer of the micro device in a non-contact micro operation mode.
Furthermore, in the micro-operation process, the liquid drop form can be self-adjusted according to the change of the shape of the micro-device, and the micro-device with various shapes can be operated; meanwhile, the volume of the liquid drop can be adjusted by using a micro propelling pump according to the size of the micro device.
Drawings
FIG. 1 is a schematic diagram of a capillary force-based micro device manipulation apparatus according to the present invention;
FIG. 2 is a schematic diagram of the operation of a micro device in an embodiment of the invention;
FIG. 3 is a schematic diagram of the operation of a micro device in an embodiment of the invention;
FIG. 4 is a schematic diagram of the operation of a micro device in an embodiment of the invention;
wherein: 1-a third Y-axis manual displacement table, 2-a second X-axis manual displacement table, 3-a second L-shaped connecting plate, 4-a first industrial camera, 5-a first lens holder, 6-a first microscope lens, 7-a Z-axis manual displacement table, 8-a second industrial camera, 9-a supporting rod, 10-a second lens holder, 11-a slider, 12-a second microscope lens, 13-an injection needle, 14-an objective table, 15-an injection needle holder, 16-a second connecting plate, 17-a Z-axis electric displacement table, 18-a first L-shaped connecting plate, 19-an X-axis electric displacement table, 20-a second injector, 21-a first injector, 22-a micro-propulsion pump, 23-a vibration reduction table, 24-a plastic hose, 25-first connection plate, 26-Y axis electric displacement table, 27-first X axis manual displacement table, 28-first Y axis manual displacement table, 29-connection block, 30-release substrate, 31-first droplet, 32-second droplet, 33-micro device, 34-first liquid bridge, 35-micro device carrying substrate, 36-second liquid bridge.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the accompanying drawings:
as shown in fig. 1, a capillary force-based micro device manipulator of the present invention comprises a vibration damping table 23, a droplet generating mechanism, a moving operating mechanism, an oblique view mechanism, a controller, and a computer;
the liquid drop generating mechanism comprises a micro propulsion pump 22 and an injection needle 13, wherein the micro propulsion pump 22 is provided with a first injector 21 and a second injector 20, and when the micro propulsion pump is used, the first injector 21 and the second injector 20 can be connected with the injection needle 13; the mobile operation mechanism comprises an electric mobile platform and a manual mobile platform, the electric mobile platform is an XYZ three-dimensional electric displacement platform, the manual mobile platform comprises an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform, and the three mobile platforms are all fixed on the vibration reduction table 23 through respective Y-axis mobile stations; the injection needle 13 is detachably fixed on an XYZ three-dimensional electric displacement platform, and an objective table 14 is detachably fixed on the XY two-dimensional manual movement platform; a first microscope lens 6 is arranged on the XYZ three-dimensional manual moving platform, and a first industrial camera 4 is detachably connected to the first microscope lens 6; the oblique view mechanism comprises a second microscope lens 12, a second industrial camera 8 detachably connected with the second microscope lens, and an adjusting mechanism for adjusting the positions and angles of the second microscope lens 12 and the second industrial camera 8; the controller is electrically connected with a computer, and the computer can integrally control the micro-propulsion pump 22, the XYZ three-dimensional electric displacement platform, the first industrial camera 4 and the second industrial camera 8 to operate.
The first microscope lens 6 is detachably fixed on the XYZ three-dimensional manual moving platform through a first lens holder 5; the adjusting mechanism comprises a connecting block 29 arranged on the vibration reduction table 23, a supporting rod 9 is arranged on the connecting block 29, and the second micro lens 12 is connected to the supporting rod 9 through a second lens holder 10;
the injection needle 13 can be provided in plurality, and the second syringe 20 and the first syringe 21 can be connected with the injection needle 13 in a sealing way through plastic hoses 24 with different diameters; the computer integrally controls the first industrial camera 4, the second industrial camera 8 and the XYZ electric displacement platform to work; the injection needle 13 is fixed on an XYZ electric displacement platform through threads on a needle holder 15;
the micro-propulsion pump 22 is also provided with a manual operation panel, and the amount and speed of liquid delivery in the pump can be controlled by manual input.
Examples
Referring to fig. 1, a Y-axis electric displacement table 26 is fixed on a vibration damping table 23, a first connecting plate 25 is fixed on a carrying block of the Y-axis electric displacement table 26, an X-axis electric displacement table 19 is fixed on the first connecting plate 25 through an inner hexagonal bolt, a first L-shaped connecting plate 18 is fixed on a carrying block of the X-axis electric displacement table 19 through an inner hexagonal bolt, a Z-axis electric displacement table 17 is fixed on the first L-shaped connecting plate 18 through an inner hexagonal bolt, a second connecting plate 16 is fixed on a carrying block of the Z-axis electric displacement table 17 through a bolt, an injection needle holder 15 is fixed on the second connecting plate 16 through an inner hexagonal bolt, and an injection needle 13 is arranged on the needle holder 15 and can be provided in plurality;
the carrier block of the X-axis electric displacement table 19 can move in the X-axis direction, the carrier block of the Y-axis electric displacement table 26 can move in the Y-axis direction, and the carrier block of the Z-axis electric displacement table 17 can move in the Z-axis direction; the X-axis electric displacement table 19, the Y-axis electric displacement table 26 and the Z-axis electric displacement table 17 are combined into an XYZ three-dimensional electric displacement platform;
a first Y-axis manual displacement table 28 and a second Y-axis manual displacement table 31 are fixed on the vibration reduction table 23 through hexagon socket head cap screws, a first X-axis manual displacement table 27 and a second X-axis manual displacement table 2 are respectively fixed on the object carrying blocks of the two Y-axis manual displacement tables through hexagon socket head cap screws, an object carrying table 14 is respectively fixed on the first X-axis manual displacement table 27 through hexagon socket head cap screws, a second L-shaped connecting plate 3 is respectively fixed on the second X-axis manual displacement table 2 and the second X-axis manual displacement table 3 through hexagon socket head cap screws, a Z-axis manual displacement table 7 is respectively fixed on the second L-shaped connecting plate 3 through hexagon socket head cap screws, a first lens holder 5 is fixed on the object carrying block of the Z-axis manual displacement table 7 through hexagon socket head cap screws, a first microscope lens 6 is supported on the first lens holder 5, a connecting block 29 is fixed on the vibration reduction table 23 through hexagon socket head cap screws, a supporting rod 9 is fixed on the connecting block 29 through, a slide block 11 is arranged on the support rod 9, a second lens holder 10 is arranged on the slide block 11, a second microscope lens 12 is supported on the second lens holder 10, and the first microscope lens 6 and the second microscope lens 12 are respectively connected with the first industrial camera 4 and the second industrial camera 8 through threads;
the first Y-axis manual displacement table 28 and the third Y-axis manual displacement table 1 can move along the Y axis through manual control, the first X-axis manual displacement table 27 and the second X-axis manual displacement table 2 can move along the X axis through manual control, the Z-axis manual displacement tables 7 can move along the Z axis through manual control, the first Y-axis manual displacement table 28 and the first X-axis manual displacement table 27 form an XY two-dimensional manual displacement platform, and the second Y-axis manual displacement table 1, the second X-axis manual displacement table 2 and the Z-axis manual displacement table 7 form an XYZ three-dimensional manual displacement platform;
a micro propulsion pump 22 is arranged on the vibration reduction table 23, a first injector 21 and a second injector 20 are arranged on the micro propulsion pump 22, and the first injector 21 and the second injector 20 can be hermetically connected with the injection needle 13 through plastic hoses 24 with different diameters;
the X-axis electric displacement table 19, the Y-axis electric displacement table 26 and the Z-axis electric displacement table 17 are all connected with a controller through cables;
the controller is a four-channel servo controller, the controller is connected with a COM port of a computer through an RS232 direct serial port line, and the micro propulsion pump 22, the first industrial camera 4 and the second industrial camera 8 are connected with the computer through self-contained cables.
The X-axis electric displacement table 19, the Y-axis electric displacement table 26 and the Z-axis electric displacement table 17 all drive the carrying block to realize reciprocating linear motion through the ball screw driven by the direct current motor, and the main parameters are as follows: stroke 25mm, maximum speed 20mm/s, minimum displacement 0.2 μm.
The operation method of the micro device operation device based on the capillary force is implemented according to the following steps:
step 1, manufacturing a micro device and releasing a substrate sample according to a preparation process;
step 2, the prepared sample is installed on an object stage 14, and the picking, transferring and releasing of the micro device can be carried out in one object stage or among a plurality of object stages and can be determined according to actual requirements;
step 3, controlling the X-axis electric displacement table 19, the Y-axis electric displacement table 26 and the Z-axis electric displacement table 17 through the controller to enable the injection needle 13 to be positioned right above a target position on the release substrate;
step 4, using the micro propulsion pump 22 to deliver the liquid to the injection needle 13 through the first syringe 21, and injecting a droplet at the target position on the release substrate;
step 5, controlling the injection needle 13 to move, enabling the injection needle 13 to be positioned right above the micro device to be picked up, using a micro propulsion pump 22 to convey liquid to the injection needle 13 through a first injector 21, and forming liquid drops;
step 6, controlling the injection needle 13 to move downwards, so that the liquid drops are contacted with the micro device to form a liquid bridge, and controlling the injection needle 13 to lift upwards to complete the picking up of the micro device;
step 7, controlling the movement of the injection needle 13, driving the micro device to be right above the target position on the release substrate, and completing the transfer of the micro device;
step 8, controlling the injection needle 13 to move downwards, so that the micro device is contacted with the liquid drop on the release substrate and a liquid bridge is formed;
step 9, controlling the injection needle 13 to move upwards, wherein the capillary force between the micro device and the substrate is greater than that between the micro device and the injection needle, and when the injection needle rises to a certain position, the upper liquid bridge is broken, so that the micro device is released;
and 10, repeating the steps to complete the picking, transferring and releasing of the plurality of micro devices.
The working principle of the micro device operating device based on the capillary force is as follows:
after the driving programs of the micro-propulsion pump 22, the X-axis electric displacement table 17, the Y-axis electric displacement table 26 and the Z-axis electric displacement table 17 are installed on a computer, the driving programs can be operated under respective control software panels to be independently controlled, and the programs are integrated into a whole through secondary development, so that the unified control of hardware is realized. The controller controls the XYZ three-dimensional electric displacement platform to move, so that the injection needle 13 is driven to move in three dimensions of X, Y and Z, and the micro-propulsion pump 22 conveys the liquid in the first syringe 21 or the second syringe 20 to the injection needle 13 and forms liquid drops. The 5 manual displacement tables are manually controlled, the overall positions of the XY two-dimensional manual displacement table and the XYZ three-dimensional manual displacement table can be adjusted by changing the placing positions of the first Y-axis manual displacement table 28 and the third Y-axis manual displacement table 1 on the vibration reduction table 23, then the positions of the object stage 14 and the first industrial camera 4 are determined by manually adjusting the positions of the X/Y/Z axes, and the object stage 14 and the first industrial camera 4 are ensured to be kept still in the operation process, so that the XYZ three-dimensional electric displacement table can perform corresponding movement to complete the operation of the micro device. The top view mechanism is an adjusting mechanism consisting of a connecting block 29, a supporting rod 9, a sliding block 11 and a second lens holder 10, and can be used for adjusting the positions and angles of the second industrial camera 8 and the second micro-lens 12. The first industrial camera 4, the second industrial camera 8, the first micro-lens 6 and the second micro-lens 12 are mainly responsible for monitoring the operation process in real time, observing and recording the operation result.
Specifically, referring to fig. 2 to 4, the operation method of the capillary force-based micro device manipulation apparatus includes the steps of:
step 1, manufacturing a micro device 33 and a release substrate 30 according to a preparation process, placing the prepared micro device 33 on a micro device bearing substrate 35, mounting the release substrate 30 and the micro device bearing substrate 35 on an object stage 14, wherein the micro device can be picked up, transferred and released in one object stage or among a plurality of object stages, and according to the actual requirement, controlling an X-axis electric displacement stage 19, a Y-axis electric displacement stage 26 and a Z-axis electric displacement stage 17 by a controller to enable an injection needle 13 to be positioned right above a target position on the release substrate 30, using a micro propulsion pump 22 to deliver liquid to the injection needle 13 through a first injector 21, as shown in FIG. 2, injecting a first liquid drop 31 on the target position on the release substrate 30, controlling the injection needle 13 to move to enable the injection needle to be positioned right above the micro device 33 to be picked up, using the micro propulsion pump 22 to deliver liquid to the injection needle 13 through the first injector 21, and a second droplet 32 is formed;
step 2: as shown in fig. 3, the injection needle 13 is controlled to move downwards, so that the second liquid drop 32 contacts with the micro device 33 and forms a first liquid bridge 34, and the injection needle 13 is controlled to lift upwards to complete the picking up of the micro device 33;
and step 3: controlling the injection needle 13 to move, and driving the micro device 33 to be right above the target position on the release substrate 30 to complete the transfer of the micro device 33;
and 4, step 4: as shown in fig. 4, the injection needle 13 is controlled to move downwards, so that the micro device 33 is contacted with the first droplet 31 on the target position and forms a second liquid bridge 36, the injection needle 13 is controlled to move upwards, and as the capillary force generated by the second liquid bridge 36 is larger than that generated by the first liquid bridge 34, when the injection needle 13 is lifted to a certain position, the first liquid bridge 34 is broken, and the release of the micro device 33 is completed;
the steps are repeated according to requirements, and the picking, transferring and releasing of a plurality of micro devices can be completed.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. The micro-operation device based on capillary force is characterized by comprising a vibration reduction table (23), a liquid drop generating mechanism, a moving operation mechanism, an oblique view mechanism, a controller and a computer;
the liquid drop generating mechanism comprises a micro propulsion pump (22) and an injection needle (13), wherein the micro propulsion pump (22) is provided with a first injector (21) and a second injector (20), and the first injector (21) and the second injector (20) can be connected with the injection needle (13) when the liquid drop generating mechanism is used;
the mobile operation mechanism comprises an electric mobile platform and a manual mobile platform, the electric mobile platform is an XYZ three-dimensional electric displacement platform, the manual mobile platform comprises an XY two-dimensional manual mobile platform and an XYZ three-dimensional manual mobile platform, and the three mobile platforms are all fixed on the vibration reduction table (23) through respective Y-axis mobile stations;
the injection needle (13) is detachably fixed on an XYZ three-dimensional electric displacement platform, and an objective table (14) is detachably fixed on the XY two-dimensional manual moving platform;
a first microscope lens (6) is arranged on the XYZ three-dimensional manual moving platform, and a first industrial camera (4) is detachably connected to the first microscope lens (6);
the oblique view mechanism comprises a second microscope lens (12), a second industrial camera (8) detachably connected with the second microscope lens, and an adjusting mechanism for adjusting the positions and angles of the second microscope lens (12) and the second industrial camera (8);
the controller is electrically connected with a computer, and the computer can integrally control the operations of the XYZ three-dimensional electric displacement platform, the micro-propulsion pump (22), the first industrial camera (4) and the second industrial camera (8).
2. A micro-manipulation device based on capillary force according to claim 1, wherein the first microscope lens (6) is detachably fixed on the XYZ three-dimensional manual translation stage by a first lens holder (5).
3. A capillary force based micro-manipulation device according to claim 1 wherein the adjustment mechanism comprises a connection block (29) mounted on the vibration damping stage (23), the connection block (29) having a support rod (9) thereon, the second micro-lens (12) being connected to the support rod (9) through the second lens holder (10).
4. The capillary force-based micro-manipulation device according to claim 1, wherein the injection needles (13) are provided in plurality, and the first syringe (21) and the second syringe (20) can be sealingly connected to the plurality of injection needles (13) through plastic hoses (24) having different diameters.
5. The capillary force based micromanipulation device of claim 1, wherein the injection needle (13) is fixed on the XYZ motor displacement platform by a needle holder (15).
6. The capillary force-based micro-operation device according to claim 1, wherein the micro-propulsion pump (22) is further provided with a manual operation panel capable of controlling the liquid delivery amount and speed by means of manual input.
7. The capillary force-based micromanipulation device according to any one of claims 1 to 6, wherein the controller is a four-channel servo controller, and three motors of the XYZ three-dimensional electric displacement platform are respectively connected to three channels of the four-channel servo controller; the micro-propulsion pump (22), the first industrial camera (4) and the second industrial camera (8) are connected with the computer by adopting self-contained cables.
8. A method of operating a microdevice using the capillary force-based micromanipulation apparatus according to any one of claims 1 to 7, comprising the steps of:
s1: placing the prepared sample on an object stage (14), controlling a three-position electric displacement platform through a controller to enable an injection needle (13) to be positioned right above a position where a micro device is to be released, using a micro propulsion pump (22) to convey liquid to the injection needle (13) through a first injector (21), injecting a liquid drop at the position where the micro device is to be released, controlling the injection needle (13) to move to enable the injection needle to be positioned right above the micro device to be picked up, and using the micro propulsion pump (22) to convey the liquid to the injection needle (13) through the first injector (21) to form the liquid drop;
s2: controlling the injection needle (13) to move downwards so that the liquid drops are contacted with the micro device and form a liquid bridge, and controlling the injection needle (13) to lift upwards to complete the picking up of the micro device;
s3: controlling the injection needle (13) to move, and driving the micro device to be right above the position to be released of the micro device to complete the transfer of the micro device;
s4: controlling the injection needle (13) to move downwards to enable the micro device to be in contact with liquid drops on the release substrate and form a liquid bridge, and controlling the injection needle (13) to move upwards, wherein the capillary force between the micro device and the release substrate is greater than the capillary force between the micro device and the injection needle, and when the injection needle rises to a certain position, the upper liquid bridge is broken to complete the release of the micro device;
s5: and repeating the steps according to the requirement to complete the picking, transferring and releasing of the plurality of micro devices.
9. The method of claim 8, wherein the droplet morphology self-adjusts for varying shapes of the microdevice.
10. The method of claim 8, wherein the picking, transferring and releasing operations of the micro device can be performed in one stage or widely between a plurality of stages according to actual requirements.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319056A (en) * | 2020-03-02 | 2020-06-23 | 河北工业大学 | Micro-nano particle nondestructive carrying method and device based on controllable micro-scale bubbles |
| CN112858109A (en) * | 2021-03-17 | 2021-05-28 | 哈尔滨工程大学 | Two-liquid-drop static and dynamic fusion observation system and method |
| CN112986059A (en) * | 2021-03-17 | 2021-06-18 | 哈尔滨工程大学 | Static and dynamic liquid bridge observation system and method between two balls |
| CN113941382A (en) * | 2021-09-13 | 2022-01-18 | 杭州电子科技大学 | Method and device for grabbing and releasing liquid drops by using carbon fiber bundles |
| WO2024050912A1 (en) * | 2022-09-08 | 2024-03-14 | 长鑫存储技术有限公司 | Apparatus and method for extracting electron microscope sample |
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2019
- 2019-11-29 CN CN201911206478.9A patent/CN110767597A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319056A (en) * | 2020-03-02 | 2020-06-23 | 河北工业大学 | Micro-nano particle nondestructive carrying method and device based on controllable micro-scale bubbles |
| CN112858109A (en) * | 2021-03-17 | 2021-05-28 | 哈尔滨工程大学 | Two-liquid-drop static and dynamic fusion observation system and method |
| CN112986059A (en) * | 2021-03-17 | 2021-06-18 | 哈尔滨工程大学 | Static and dynamic liquid bridge observation system and method between two balls |
| CN113941382A (en) * | 2021-09-13 | 2022-01-18 | 杭州电子科技大学 | Method and device for grabbing and releasing liquid drops by using carbon fiber bundles |
| WO2024050912A1 (en) * | 2022-09-08 | 2024-03-14 | 长鑫存储技术有限公司 | Apparatus and method for extracting electron microscope sample |
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