CN110764375A - Etching device - Google Patents

Etching device Download PDF

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Publication number
CN110764375A
CN110764375A CN201911189943.2A CN201911189943A CN110764375A CN 110764375 A CN110764375 A CN 110764375A CN 201911189943 A CN201911189943 A CN 201911189943A CN 110764375 A CN110764375 A CN 110764375A
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China
Prior art keywords
etched
workpiece
etching
driving
groove
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CN201911189943.2A
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Chinese (zh)
Inventor
周宏建
何相平
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SBT Engineering Systems Co Ltd
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SBT Engineering Systems Co Ltd
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Application filed by SBT Engineering Systems Co Ltd filed Critical SBT Engineering Systems Co Ltd
Priority to CN201911189943.2A priority Critical patent/CN110764375A/en
Publication of CN110764375A publication Critical patent/CN110764375A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The invention belongs to the technical field of anvil block production and processing, and discloses an etching device. The etching device comprises a box body, a driving piece and a plurality of grooves, wherein the box body is used for containing etching liquid, one side of the box body is provided with an opening, and the driving piece is arranged on the box body; one end of the transmission component is connected to the output end of the driving part, the other end of the transmission component is detachably connected to the workpiece to be etched, the driving part is configured to drive the workpiece to be etched to rotate through the transmission component, and etching liquid covers the outer peripheral surface of the workpiece to be etched. Compared with the prior art, the etching device has the advantages that the driving piece and the transmission assembly are matched with each other, so that the etching workpiece to be etched is uniformly and effectively etched in the rotary motion process of the workpiece to be etched, the etching effect is good, and the quality of a finished product is improved. Meanwhile, the time of an etching procedure in the production process of the workpiece to be etched is shortened, and semi-automatic production is realized, so that the working efficiency is improved.

Description

Etching device
Technical Field
The invention relates to the technical field of anvil block production and processing, in particular to an etching device.
Background
The etching is also called photochemical etching, and refers to removing the protective film of the area to be etched after exposure plate making and development, and contacting with chemical solution during etching to achieve the effect of dissolving and corroding and form the effect of concave-convex or hollow forming.
The anvil block is generally used in the process of roll welding in the new energy industry, and when the anvil block is produced and processed, an operator needs to manually place the anvil block in chemical liquid and rotate the anvil block so as to finish the etching process. By adopting the mode, the rotation speed of the anvil block is unstable in the etching process, and the etching time is not easy to control, so that the etching effect is unstable, and the quality of a finished product is influenced. In addition, because the etching solution is a chemical liquid with very strong corrosivity, the both hands of operating personnel often direct contact to the etching solution, can bring uncontrollable potential safety hazard, influence operating personnel's personal health safety.
Disclosure of Invention
The invention aims to provide an etching device which is uniform and stable in etching effect and improves the production quality of finished products.
In order to achieve the purpose, the invention adopts the following technical scheme:
an etching device, includes the box, the box is used for holding etching liquid, and one side of box is the opening, still includes:
the driving piece is arranged on the box body;
and one end of the transmission component is connected to the output end of the driving part, the other end of the transmission component is detachably connected to the workpiece to be etched, and the driving part is configured to drive the workpiece to be etched to rotate through the transmission component, so that the peripheral surface of the workpiece to be etched is covered with the etching liquid.
Preferably, the transmission assembly comprises:
the driving gear is connected to the output end of the driving piece;
the driven gear is positioned below the driving gear and meshed with the driving gear;
and the driven shaft penetrates through the driven gear, and the driven shaft is detachably connected to the workpiece to be etched.
Preferably, the etching device further comprises a first protection member and a second protection member, one end of the workpiece to be etched is detachably connected to the driven shaft through the first protection member, and the other end of the workpiece to be etched is rotatably arranged relative to the box body through the second protection member.
Preferably, a groove is formed in one side, away from the driven gear, of the driven shaft along the radial direction of the driven shaft, one end of the first protection piece is sleeved on the workpiece to be etched, a flat shaft is convexly arranged at the other end of the first protection piece, and the flat shaft is configured to be selectively arranged in the groove.
Preferably, the etching apparatus further includes:
the first supporting seat is arranged at the bottom of the box body, a first groove is formed in the top of the first supporting seat, and the first groove is used for accommodating the first protection piece;
the first bearing is rotatably arranged on the first supporting seat and is in rolling fit with the first protection piece.
Preferably, the etching apparatus further includes:
the second support seat is arranged at the bottom of the box body, a second groove is formed in the top of the second support seat, and the second groove is used for accommodating the second protection piece;
and the second bearing is rotatably arranged on the second support seat and is in rolling fit with the second protection piece.
Preferably, the transmission assembly further comprises a speed reducer, one end of the speed reducer is connected to the output end of the driving piece, and the other end of the speed reducer is connected to the driving gear.
Preferably, the etching apparatus further comprises a detection assembly, the detection assembly comprising:
the two ends of the detection shaft are respectively connected with the speed reducer and the driving gear;
the detection disc is sleeved on the detection shaft, and a notch is formed in the edge of the detection disc;
a sensor coupled to the case, the sensor configured to detect a position of the notch.
Preferably, the etching device further comprises a taking and placing part, wherein the taking and placing part is configured to abut against two sides of the workpiece to be etched and used for taking and placing the workpiece to be etched.
Preferably, an ingredient block is provided on an inner wall of the case body.
The invention has the beneficial effects that:
according to the etching device provided by the invention, after an operator firstly installs a workpiece to be etched on the transmission assembly, the controller controls the driving piece to move, and the driving piece drives the workpiece to be etched to rotate in the box body through the transmission assembly, so that the peripheral surface of the workpiece to be etched is covered with the etching liquid. Compared with the prior art, the etching device has the advantages that the driving piece and the transmission assembly are matched with each other, so that the workpiece to be etched is uniformly and effectively etched in the rotary motion process of the workpiece to be etched, the etching effect is good, and the quality of a finished product is improved. Meanwhile, the time of an etching procedure in the production process of the workpiece to be etched is shortened, and semi-automatic production is realized, so that the working efficiency is improved.
Drawings
FIG. 1 is a schematic structural view of an etching apparatus according to the present invention;
FIG. 2 is a schematic view of the structure of a detection module in the etching apparatus of the present invention;
FIG. 3 is a top view of an etching apparatus of the present invention;
FIG. 4 is a schematic view of the driven shaft and the first protector of the etching apparatus of the present invention assembled.
In the figure:
100. a workpiece to be etched;
1. a box body; 2. a drive member; 3. a transmission assembly; 4. a first protector; 5. a second protector; 6. a first support base; 7. a second support seat; 8. a detection component; 9. a pick-and-place member;
11. a block of ingredient; 12. a front bottom foot; 13. a rear foot; 14. a drain valve;
31. a driving gear; 32. a driven gear; 33. a driven shaft; 331. a groove; 34. a speed reducer;
41. a flat shaft;
81. detecting a shaft; 82. detecting a disc; 83. a sensor.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
The embodiment provides an etching apparatus, which is used for an etching process of a workpiece 100 to be etched, wherein the workpiece 100 to be etched specifically refers to an anvil. As shown in fig. 1, the etching device comprises a box body 1, a driving piece 2, a transmission assembly 3 and a controller (not shown in the figure), wherein the box body 1 is of a cuboid structure, the box body 1 is made of corrosion-resistant materials, the box body 1 is particularly made of acid and alkali resistant materials, the box body 1 is used for containing etching liquid, and one side of the box body 1 is provided with an opening. Be provided with driving piece 2 and controller on box 1, driving piece 2 specifically is servo motor, and the controller specifically is the PLC controller, and the controller electricity is connected in driving piece 2, and 2 operation rotations of controller control driving piece, driving piece 2 have played the power drive effect. The transmission component 3 is used for transmitting power, one end of the transmission component 3 is connected to the output end of the driving component 2, the other end of the transmission component 3 is detachably connected to the workpiece 100 to be etched, and the driving component 2 is configured to drive the workpiece 100 to be etched to rotate through the transmission component 3, so that the outer peripheral surface of the workpiece 100 to be etched is covered with etching liquid.
According to the etching device provided by the embodiment, after an operator firstly installs the workpiece 100 to be etched on the transmission component 3, the controller controls the driving component 2 to move, and the driving component 2 drives the workpiece 100 to be etched to rotate in the box body 1 through the transmission component 3, so that the outer peripheral surface of the workpiece 100 to be etched is covered with the etching liquid. Compared with the prior art, the driving piece 2 and the transmission component 3 are matched with each other, so that the workpiece 100 to be etched is uniformly and effectively etched in the rotary motion process of the workpiece 100 to be etched, the etching effect is good, and the quality of a finished product is improved. Meanwhile, the time of an etching procedure in the production process of the workpiece 100 to be etched is shortened, and semi-automatic production is realized, so that the working efficiency is improved.
Further, as shown in fig. 1, the upper end of the box body 1 is open, and a semi-closed structure is adopted, so that the workpiece 100 to be etched and the etching liquid can be conveniently put into the box body 1 for working. The two sides of the bottom of the box body 1 are respectively provided with a front bottom foot 12 and a rear bottom foot 13, which play a role of integral support. To ensure the ease of handling of the apparatus, it is eventually necessary to place the front feet 12 and the rear feet 13 of the device on a working platform of suitable height. It can be understood that the box body 1 needs to be placed in a cool and ventilated environment, and physical and psychological health of operators is guaranteed. A drain valve 14 is arranged at one side of the box body 1, so that the etching liquid in the box body 1 can be conveniently discharged.
Optionally, a material distribution block 11 is arranged on the inner wall of the box body 1, and the material distribution block 11 is arranged to enable the liquid level of the etching liquid to rise if the amount of the etching liquid is small, so that the etching liquid waste is reduced, and meanwhile, the workpiece 100 to be etched can be ensured to be dipped in the etching liquid all the time.
In order to reduce the contact of the operator on the etching solution, as shown in fig. 1, the etching apparatus further includes a pick-and-place unit 9, the pick-and-place unit 9 is similar to a tweezers structure, and the operator holds the outer side of the pick-and-place unit 9 by hand, so that the inner side of the pick-and-place unit 9 abuts against the two sides of the workpiece 100 to be etched, for picking and placing the workpiece 100 to be etched. Compared with the prior art, the hands of the operator do not need to directly contact with the etching solution, so that potential safety hazards are reduced, and the personal health and safety of the operator are guaranteed.
Further, as shown in fig. 1, the transmission assembly 3 includes a driving gear 31, a driven gear 32 and a driven shaft 33, the driving gear 31 is connected to the output end of the driving member 2, the driven gear 32 is located below the driving gear 31 and engaged with the driving gear, the driven shaft 33 is disposed through the center of the driven gear 32, and the driven shaft 33 is detachably connected to the workpiece 100 to be etched. Through the mutual meshing of the driving gear 31 and the driven gear 32, the circumferential rotary motion of the workpiece 100 to be etched is realized by utilizing the transmission action of the gears. It can be understood that, according to the size of the workpiece 100 to be etched, the heights of the driving gear 31 and the driven gear 32 can be adjusted to adjust the depth of the workpiece 100 to be etched immersed in the etching liquid.
Because the rotating speed of the driving member 2 is too fast, which may affect the etching effect of the workpiece 100 to be etched, the transmission assembly 3 further includes a speed reducer 34, one end of the speed reducer 34 is connected to the output end of the driving member 2, and the other end is connected to the driving gear 31, and the speed reducer 34 plays a role of reducing the rotating speed of the driving member 2, so as to meet the rotating speed required by the workpiece 100 to be etched to complete etching.
In order to further adjust the rotating speed of the workpiece to be etched 100, as shown in fig. 2, the etching apparatus further includes a detection assembly 8, the detection assembly 8 includes a housing, and a detection shaft 81, a detection plate 82 and a sensor 83 all disposed inside the housing, two ends of the detection shaft 81 are respectively connected to the speed reducer 34 and the driving gear 31, the detection plate 82 is sleeved on the detection shaft 81, and a notch is formed in an edge of the detection plate 82. The sensor 83 is provided on an inner wall of the housing, the sensor 83 is electrically connected to the controller, and the sensor 83 is configured to detect a position of the notch and to transmit detected information to the controller.
The controller may determine the rotation speed of the current detection shaft 81 according to the time interval of detecting the notch position every two times, and after the current rotation speed is compared with the preset rotation speed, the controller controls the rotation of the driving member 2 so that the current rotation speed approaches the preset rotation speed, thereby achieving the optimal rotation speed of the workpiece 100 to be etched. The controller controls the driving part 2 to drive the workpiece 100 to be etched to perform uniform rotation motion, so that convenience is provided for controlling and adjusting the rotation speed, rotation time, starting and stopping of the workpiece 100 to be etched.
In order to protect the workpiece 100 to be etched during the mounting and dismounting processes, as shown in fig. 3, the etching apparatus further includes a first protection member 4 and a second protection member 5, wherein the first protection member 4 and the second protection member 5 are specifically protection sleeves, and both the first protection member 4 and the second protection member 5 play a role of protection. Specifically, one end of the workpiece 100 to be etched is detachably attached to the driven shaft 33 via the first protector 4, and the other end of the workpiece 100 to be etched is rotatably disposed with respect to the chamber 1 via the second protector 5.
After an operator respectively sleeves the first protection member 4 and the second protection member 5 at two ends of the workpiece 100 to be etched, an integral structure is formed, the operator needs to install the integral structure on the driven shaft 33 quickly, in order to achieve quick installation, as shown in fig. 3-4, a groove 331 is formed in one side of the driven shaft 33 away from the driven gear 32 along a radial direction of the driven shaft, one end of the first protection member 4 is sleeved on the workpiece 100 to be etched, the other end of the first protection member is convexly provided with a flat shaft 41, and the flat shaft 41 is configured to be selectively arranged in the groove 331. When the installation is needed, the opening of the recess 331 of the driven shaft 33 faces upward, and the flat shaft 41 of the first protector 4 faces in the vertical direction, so that the flat shaft 41 can be conveniently placed in the recess 331. Through the mutual cooperation of the flat shaft 41 and the groove 331, not only is the installation and the disassembly convenient, but also the torque of the driven shaft 33 can be effectively transmitted to the first protection member 4 by using the flat shaft 41.
In order to further facilitate the rotation of the workpiece 100 to be etched, as shown in fig. 3, the etching apparatus further includes a first supporting seat 6 and a first bearing, the first supporting seat 6 is disposed at one side of the bottom of the box 1, and the first supporting seat 6 plays a role of supporting. First recess has been seted up at the top of first support seat 6, and first recess is used for holding first protection piece 4, is convenient for place or take off first protection piece 4. It should be noted that the first groove only functions as a relief, and the inner wall of the first groove does not directly contact with the first protection member 4, so as to reduce the frictional resistance between the first groove and the first protection member. Rotate on first supporting seat 6 and be provided with first bearing, the quantity of first bearing is preferred two, and two first bearings symmetry respectively set up in the both sides of first recess, and first protection piece 4 respectively with two first bearing roll coordination to guarantee first protection piece 4 pivoted smoothness nature.
In order to further facilitate the rotation of the workpiece 100 to be etched, the etching apparatus further includes a second supporting seat 7 and a second bearing, the second supporting seat 7 is disposed at the other side of the bottom of the box 1, and the second supporting seat 7 plays a supporting role. A second groove is formed in the top of the second support seat 7, and the second groove is used for accommodating the second protection member 5, so that the second protection member 5 can be conveniently placed or taken down. It should be noted that the second groove only functions as a relief, and the inner wall of the second groove does not directly contact with the second protection member 5, so as to reduce the frictional resistance therebetween. The second support seat 7 is rotatably provided with two second bearings, the number of the second bearings is preferably two, the two second bearings are symmetrically arranged on two sides of the second groove respectively, and the second protection piece 5 is in rolling fit with the two second bearings respectively so as to ensure the smoothness of the rotation of the second protection piece 5.
Can predict, because the etching solution has certain corrosivity, parts such as first supporting seat 6 and first bearing, second supporting seat 7 and second bearing all adopt acid and alkali-resistant non-metallic material in box 1, can guarantee like this that the structure is not corroded in the time, can also ensure that the etching solution is not polluted.
The working process of the etching device provided by the embodiment is as follows:
1. feeding:
firstly, one end of a workpiece to be etched is sleeved with a first protection piece 4, the other end of the workpiece to be etched is sleeved with a second protection piece 5, an integral structure is formed, then the integral structure is placed in a taking and placing piece 9, the integral structure is placed in a box body 1 through the taking and placing piece 9, in the process, the orientation of a groove 331 on a driven shaft 33 needs to be a vertical direction, the orientation of a flat shaft 41 of the first protection piece 4 is a vertical direction, and the flat shaft 41 is convenient to place in the groove 331. The first protector 4 is then placed in the first recess and in contact with the first bearing and the second protector 5 is placed in the second recess and in contact with the second bearing to complete the loading process.
2. Starting and operating:
the starting button of the device is pressed, the controller controls the driving part 2 to operate, the driving part 2 drives the driving gear 31 to rotate under the speed reducing action of the speed reducer 34, the driven gear 32 meshed with the driving gear is driven to rotate, the uniform-speed rotating motion of the workpiece 100 to be etched in the etching liquid is realized under the transmission action of the first protection part 4, the rotating speed and the rotating time can be controlled by the controller, and in the rotating process, the outer circular surface of the anvil block is uniformly and effectively corroded, and the etching process is finally completed.
3. Blanking:
after the etching is finished, the workpiece 100 to be etched is completely static, the picking and placing part 9 is taken up to carry the etched workpiece, the first protection part 4 and the second protection part 5 are moved to the area outside the box body 1, the workpiece is carefully cleaned by clear water and then placed in the corresponding material placing area, and the blanking process is finished.
In the description herein, it is to be understood that the terms "upper", "lower", "right", and the like are based on the orientations and positional relationships shown in the drawings and are used for convenience in description and simplicity in operation, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be constructed in a particular operation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used merely for descriptive purposes and are not intended to have any special meaning.
In the description herein, references to the description of "an embodiment," "an example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
In addition, the foregoing is only the preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (10)

1. An etching device, includes box (1), box (1) is used for holding etching liquid, its characterized in that, one side of box (1) is the opening, still includes:
a driving member (2) provided on the case (1);
the etching device comprises a transmission component (3), one end of the transmission component (3) is connected with the output end of the driving component (2), the other end of the transmission component is detachably connected with a workpiece (100) to be etched, the driving component (2) is configured to drive the workpiece (100) to be etched to rotate through the transmission component (3), and the outer peripheral surface of the workpiece (100) to be etched is covered with etching liquid.
2. Etching device according to claim 1, characterized in that the transmission assembly (3) comprises:
a driving gear (31) connected to an output end of the driving member (2);
a driven gear (32), wherein the driven gear (32) is positioned below the driving gear (31) and is meshed with the driving gear;
the driven shaft (33) penetrates through the driven gear (32), and the driven shaft (33) is detachably connected to the workpiece (100) to be etched.
3. Etching apparatus according to claim 2, further comprising a first protector (4) and a second protector (5), wherein one end of the workpiece (100) to be etched is detachably connected to the driven shaft (33) through the first protector (4), and the other end of the workpiece (100) to be etched is rotatably disposed relative to the case (1) through the second protector (5).
4. The etching apparatus according to claim 3, wherein a groove (331) is formed in a side of the driven shaft (33) away from the driven gear (32) along a radial direction thereof, one end of the first protector (4) is sleeved on the workpiece (100) to be etched, and the other end is convexly provided with a flat shaft (41), and the flat shaft (41) is configured to be selectively disposed in the groove (331).
5. The etching apparatus of claim 3, further comprising:
the first supporting seat (6) is arranged at the bottom of the box body (1), a first groove is formed in the top of the first supporting seat (6), and the first groove is used for accommodating the first protecting piece (4);
the first bearing is rotatably arranged on the first supporting seat (6) and is in rolling fit with the first protection piece (4).
6. The etching apparatus of claim 3, further comprising:
the second supporting seat (7) is arranged at the bottom of the box body (1), a second groove is formed in the top of the second supporting seat (7), and the second groove is used for accommodating the second protection piece (5);
and the second bearing is rotatably arranged on the second supporting seat (7), and is in rolling fit with the second protection piece (5).
7. Etching device according to claim 2, characterized in that the transmission assembly (3) further comprises a reducer (34), one end of the reducer (34) is connected to the output end of the driving member (2), and the other end is connected to the driving gear (31).
8. Etching device according to claim 7, characterized in that it further comprises a detection assembly (8), said detection assembly (8) comprising:
a detection shaft (81), wherein two ends of the detection shaft (81) are respectively connected to the speed reducer (34) and the driving gear (31);
the detection disc (82) is sleeved on the detection shaft (81), and a notch is formed in the edge of the detection disc (82);
a sensor (83) attached to the case (1), the sensor (83) configured to detect a position of the notch.
9. Etching device according to claim 1, further comprising a pick-and-place member (9), wherein the pick-and-place member (9) is configured to abut against two sides of the workpiece to be etched (100) for picking and placing the workpiece to be etched (100).
10. Etching device according to claim 1, characterized in that an ingredient block (11) is provided on the inner wall of the tank (1).
CN201911189943.2A 2019-11-28 2019-11-28 Etching device Pending CN110764375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911189943.2A CN110764375A (en) 2019-11-28 2019-11-28 Etching device

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Application Number Priority Date Filing Date Title
CN201911189943.2A CN110764375A (en) 2019-11-28 2019-11-28 Etching device

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CN207282457U (en) * 2017-09-01 2018-04-27 武汉新芯集成电路制造有限公司 A kind of wafer device for testing rotating speed and semiconductor equipment
CN207430749U (en) * 2017-10-31 2018-06-01 青岛奥博智能科技有限公司 A kind of chip removing device for roll welding anvil block
CN107717205A (en) * 2017-11-01 2018-02-23 上海骄成机电设备有限公司 A kind of detachable ultrasonic roll welding anvil block
CN208903981U (en) * 2018-11-12 2019-05-24 长鑫存储技术有限公司 Rotate wet-method etching equipment
CN109616433A (en) * 2018-12-03 2019-04-12 上海华力微电子有限公司 A kind of wafer rotational speed measuring device and monitoring method
CN113889429A (en) * 2021-12-06 2022-01-04 杭州众硅电子科技有限公司 Wafer locating device, wafer locating method and wafer speed counting method

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