CN110764188B - 一种铌酸锂脊型光波导的制备方法 - Google Patents
一种铌酸锂脊型光波导的制备方法 Download PDFInfo
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- CN110764188B CN110764188B CN201911014320.1A CN201911014320A CN110764188B CN 110764188 B CN110764188 B CN 110764188B CN 201911014320 A CN201911014320 A CN 201911014320A CN 110764188 B CN110764188 B CN 110764188B
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- waveguide
- ridge
- lithium niobate
- proton exchange
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 title claims abstract description 33
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 claims abstract description 25
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005530 etching Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000001039 wet etching Methods 0.000 claims abstract description 14
- 239000005711 Benzoic acid Substances 0.000 claims abstract description 12
- 235000010233 benzoic acid Nutrition 0.000 claims abstract description 12
- 229940031993 lithium benzoate Drugs 0.000 claims abstract description 11
- LDJNSLOKTFFLSL-UHFFFAOYSA-M lithium;benzoate Chemical compound [Li+].[O-]C(=O)C1=CC=CC=C1 LDJNSLOKTFFLSL-UHFFFAOYSA-M 0.000 claims abstract description 11
- 229910004077 HF-HNO3 Inorganic materials 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 7
- 238000000137 annealing Methods 0.000 abstract description 6
- 239000000243 solution Substances 0.000 abstract description 6
- 239000011259 mixed solution Substances 0.000 abstract description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 2
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 29
- 239000000377 silicon dioxide Substances 0.000 description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 12
- 235000012239 silicon dioxide Nutrition 0.000 description 12
- 229910003327 LiNbO3 Inorganic materials 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 11
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 5
- 229910052906 cristobalite Inorganic materials 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910052682 stishovite Inorganic materials 0.000 description 5
- 229910052905 tridymite Inorganic materials 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910010446 TiO2-a Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229960004365 benzoic acid Drugs 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
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CN112130253B (zh) * | 2020-09-08 | 2021-07-23 | 派尼尔科技(天津)有限公司 | 一种在z切铌酸锂薄膜上制作y传脊型光波导的方法 |
CN112965166A (zh) * | 2021-03-08 | 2021-06-15 | 天津大学 | 一种z切铌酸锂锥形波导及其制备方法 |
CN114690316B (zh) * | 2022-04-12 | 2023-08-04 | 山东建筑大学 | 一种用于量子通信中波导的刻蚀工艺方法 |
WO2024092422A1 (zh) * | 2022-10-31 | 2024-05-10 | 清华大学 | 薄膜铌酸锂的湿法刻蚀方法及薄膜铌酸锂器件 |
Citations (5)
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CN102253451A (zh) * | 2011-05-13 | 2011-11-23 | 华中科技大学 | 一种铌酸锂光波导的制备方法 |
CN104536089A (zh) * | 2014-12-09 | 2015-04-22 | 天津大学 | 周期极化钛扩散近化学计量比铌酸锂条形波导及制备方法 |
CN102141650B (zh) * | 2009-12-03 | 2016-06-01 | 三星电子株式会社 | 光学器件及其制造方法 |
CN106094263A (zh) * | 2016-06-21 | 2016-11-09 | 天津大学 | 一种周期极化lnoi脊型波导及其制备方法 |
CN108574194A (zh) * | 2018-07-02 | 2018-09-25 | 南京天正明日自动化有限公司 | 一种微型脊波导激光器、小型激光器及其制备方法 |
Family Cites Families (5)
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CN1218206C (zh) * | 2001-11-11 | 2005-09-07 | 华为技术有限公司 | 用质子交换制造铌酸锂光波导的方法 |
US7781853B2 (en) * | 2007-07-26 | 2010-08-24 | Hewlett-Packard Development Company, L.P. | Plasmon-enhanced electromagnetic-radiation-emitting devices and methods for fabricating the same |
US8189981B2 (en) * | 2009-11-23 | 2012-05-29 | The Aerospace Corporation | Stable lithium niobate waveguides, and methods of making and using same |
KR102604742B1 (ko) * | 2015-12-23 | 2023-11-22 | 삼성전자주식회사 | 광 소자 및 그 제조 방법 |
CN108493746A (zh) * | 2018-05-14 | 2018-09-04 | 南京信息工程大学 | 一种微型脊波导的制作方法及具有该波导的激光器 |
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- 2019-10-23 CN CN201911014320.1A patent/CN110764188B/zh active Active
Patent Citations (5)
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CN102141650B (zh) * | 2009-12-03 | 2016-06-01 | 三星电子株式会社 | 光学器件及其制造方法 |
CN102253451A (zh) * | 2011-05-13 | 2011-11-23 | 华中科技大学 | 一种铌酸锂光波导的制备方法 |
CN104536089A (zh) * | 2014-12-09 | 2015-04-22 | 天津大学 | 周期极化钛扩散近化学计量比铌酸锂条形波导及制备方法 |
CN106094263A (zh) * | 2016-06-21 | 2016-11-09 | 天津大学 | 一种周期极化lnoi脊型波导及其制备方法 |
CN108574194A (zh) * | 2018-07-02 | 2018-09-25 | 南京天正明日自动化有限公司 | 一种微型脊波导激光器、小型激光器及其制备方法 |
Non-Patent Citations (2)
Title |
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Characterization of the phase structure of proton exchanged channel waveguides in Z cut LiNbo3 using wet etching technique;Kichgin V VI, et al..;《Materials Chemistry and Physics》;20131115;第142卷;491-495页 * |
气相输运平衡制备不同组分LiNbO3晶体;华平壤;《中国优秀硕士学位论文全文数据库》;20090430;全文 * |
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Effective date of registration: 20231029 Address after: 230000, 3rd Floor, Building D4, Innovation Industrial Park, No. 800 Wangjiang West Road, High tech Zone, Hefei City, Anhui Province Patentee after: Hefei Photon Computing Intelligent Technology Co.,Ltd. Address before: Room 321-17, building 6-b, international enterprise R & D Park, No. 75, Tiansheng Road, Jiangbei new area, Nanjing, Jiangsu 210043 Patentee before: Nanjing Dingxin Photoelectric Technology Co.,Ltd. |
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